Hot pressing equipment for semiconductor processing

Abstract

The utility model discloses hot-pressing equipment for semiconductor processing, which relates to the technical field of semiconductor processing and comprises a workbench, a lifting protection mechanism is arranged on one side of the workbench and comprises a supporting plate, the supporting plate is fixedly connected to one side of the workbench, and motor supports are fixedly connected to one side of the supporting plate and the top of the workbench. A motor is fixedly connected to the inner side of the motor support. Through the arrangement of the lifting protection mechanism, the effect of protecting an operator during hot pressing can be achieved, in the using process, the motor is started to drive the protection plate to ascend, so that the protection plate protects the operator, and the situation that the operator cannot be protected during hot pressing can be avoided; the problems that an operator mistakenly touches a hot-pressing part during operation of the equipment and is easily scalded, or hands of the operator are crushed during hot pressing, and potential safety hazards exist to a certain extent are solved, and the safety of the equipment during use is ensured.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically a hot pressing device for semiconductor processing. Background Technology

[0002] Semiconductors are widely used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, and other fields, forming the cornerstone of modern electronic technology. With continuous technological advancements, higher demands are placed on the performance, size, and integration of semiconductor devices, driving the continuous development of semiconductor processing technology. Hot pressing equipment, as one of the key pieces of equipment in semiconductor processing, plays a crucial role in processes such as chip packaging and wafer bonding.

[0003] Most currently used hot pressing equipment cannot protect operators during hot pressing. Without this protection, operators may accidentally touch the hot pressing components while the equipment is running, easily resulting in burns or hand injuries, posing a significant safety hazard. This makes the equipment unsafe. Furthermore, the equipment cannot temporarily store processed and unprocessed semiconductors. This inability to do so leads to delays in subsequent processes after a batch of semiconductors is processed, causing the semiconductors to pile up on the equipment, potentially leading to confusion and damage. It also prevents the equipment from processing the next batch in a timely manner, causing production interruptions and resulting in poor efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a hot pressing device for semiconductor processing to solve the problems mentioned in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a hot pressing device for semiconductor processing, comprising a worktable, a lifting and protective mechanism provided on one side of the worktable, the lifting and protective mechanism comprising a support plate, the support plate being fixedly connected to one side of the worktable, a motor bracket being fixedly connected to one side of the support plate and the top of the worktable, a motor being fixedly connected to the inner side of the motor bracket, a motor shaft being fixedly connected to the output shaft of the motor via a coupling, the outer wall of the motor shaft being through-connected to the top of the support plate, a ball screw being fixedly connected to the bottom end of the motor shaft, a ball nut being movably connected to the outer wall of the ball screw, a connecting rod being fixedly connected to the outer wall of the ball nut, and a protective plate being fixedly connected to one side of the connecting rod.

[0006] As a preferred technical solution, the bottom end of the support plate is fixedly connected to a first slide rail, and the outer wall of the first slide rail is slidably connected to the inner wall of the connecting rod.

[0007] As a preferred technical solution, a fixing plate is fixedly connected to one side of the workbench, and a second slide rail is fixedly connected to the bottom end of the fixing plate.

[0008] As a preferred technical solution, a slider is slidably connected to the outer wall of the second slide rail, and one side of the slider is fixedly connected to one side of the protective plate.

[0009] As a preferred technical solution, a support frame is fixedly connected to the other side of the workbench, and an electric push rod is fixedly connected to the bottom of the support frame.

[0010] As a preferred technical solution, a pressure plate is fixedly connected to the bottom end of the electric push rod, and a heating element is fixedly connected to the top of the pressure plate.

[0011] As a preferred technical solution, a storage mechanism is provided at one end of the workbench, the storage mechanism includes a connecting block, and the connecting block is fixedly connected to one end of the workbench.

[0012] As a preferred technical solution, a storage cabinet is fixedly connected to the top of the connecting block, and a partition is fixedly connected inside the storage cabinet.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This utility model, through the setting of the lifting and protective mechanism, can achieve the function of protecting the operator during hot pressing. During use, the protective plate is raised by starting the motor, so that the protective plate can protect the operator. This can avoid the situation where the operator accidentally touches the hot pressing parts during the operation of the equipment due to the inability to protect the operator during hot pressing, which could easily cause burns or crush injuries to the hands during hot pressing, thus ensuring the safety of the equipment during use.

[0015] 2. This utility model, through the setting of the storage mechanism, can achieve the function of storing semiconductors. During use, by placing unprocessed semiconductors and processed semiconductors in the storage cabinet, it can avoid the situation where the subsequent processes cannot be connected in time after the hot pressing equipment completes the processing of a batch of semiconductors due to the inability to temporarily store processed and unprocessed semiconductors. This would cause processed semiconductors to be piled up on the equipment, which would easily cause chaos and damage, and would also prevent the hot pressing equipment from carrying out the next batch of processing work in time, causing the production process to be interrupted, thus ensuring the working efficiency of the equipment. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present utility model;

[0017] Figure 2This is a schematic diagram of the lifting and protective mechanism of this utility model;

[0018] Figure 3 This is a schematic diagram of the connection structure between the second slide rail and the slider of this utility model;

[0019] Figure 4 This is a schematic diagram of the storage mechanism structure of this utility model.

[0020] The components include: 1. Workbench; 2. Lifting and protective mechanism; 201. Support plate; 202. Motor bracket; 203. Motor; 204. Motor shaft; 205. Ball screw; 206. Ball nut; 207. Connecting rod; 208. First slide rail; 209. Protective plate; 210. Fixing plate; 211. Second slide rail; 212. Sliding block; 3. Storage mechanism; 301. Connecting block; 302. Storage cabinet; 303. Partition; 4. Support frame; 5. Electric push rod; 6. Pressure plate; 7. Heating element. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Example: Figure 1 As shown, the present invention provides the following technical solution, including a workbench 1, a lifting and protective mechanism 2 on one side of the workbench 1, a support frame 4 fixedly connected to the other side of the workbench 1, an electric push rod 5 fixedly connected to the bottom of the support frame 4, a pressure plate 6 fixedly connected to the bottom end of the electric push rod 5, a heating element 7 fixedly connected to the top of the pressure plate 6, and a storage mechanism 3 at one end of the workbench 1.

[0023] When the hot pressing equipment is needed to process semiconductors, the semiconductor to be processed is first stored next to the equipment using the storage mechanism 3. This facilitates the storage and retrieval of the semiconductor for hot pressing. The semiconductor is then removed from the storage cabinet 302 and placed on the worktable 1. The heating element 7 is then activated to heat the pressure plate 6 to a suitable temperature. The electric push rod 5 is then activated, causing it to extend and lower the pressure plate 6, allowing the heated plate 6 to perform the hot pressing process. During hot pressing, operator protection is required, and a lifting and protection mechanism 2 is used for this purpose. After the semiconductor is processed, it is temporarily stored in the storage cabinet 302, thus completing the work.

[0024] like Figure 1 , Figure 2 and Figure 3 As shown, a lifting and protective mechanism 2 is provided on one side of the workbench 1. The lifting and protective mechanism 2 includes a support plate 201. The support plate 201 is fixedly connected to one side of the workbench 1. A motor bracket 202 is fixedly connected to both one side of the support plate 201 and the top of the workbench 1. A motor 203 is fixedly connected to the inner side of the motor bracket 202. The output shaft of the motor 203 is fixedly connected to a motor shaft 204 via a coupling. The outer wall of the motor shaft 204 is connected through the top of the support plate 201. A ball screw 205 is fixedly connected to the bottom end of the motor shaft 204. A ball nut 206 is movably connected to the wall. A connecting rod 207 is fixedly connected to the outer wall of the ball nut 206. A protective plate 209 is fixedly connected to one side of the connecting rod 207. A first slide rail 208 is fixedly connected to the bottom end of the support plate 201. The outer wall of the first slide rail 208 is slidably connected to the inner wall of the connecting rod 207. A fixed plate 210 is fixedly connected to one side of the worktable 1. A second slide rail 211 is fixedly connected to the bottom end of the fixed plate 210. A slider 212 is slidably connected to the outer wall of the second slide rail 211. One side of the slider 212 is fixedly connected to one side of the protective plate 209.

[0025] During hot pressing, operator protection is required. When the heating element 7 heats the pressure plate 6, the motor 203 is started, causing the motor shaft 204 to rotate. The motor shaft 204 then rotates the ball screw 205, which in turn causes the ball nut 206 to rise and fall on its outer wall. The ball nut 206 then causes the connecting rod 207 to rise, which in turn causes the protective plate 209 to rise. During the rising and falling of the protective plate 209, the sliding of the connecting rod 207 on the outer wall of the first slide rail 208 and the sliding of the slider 212 on the outer wall of the second slide rail 211 make the rising and falling of the protective plate 209 more stable and smooth, thus completing the protective work.

[0026] like Figure 1 and Figure 4 As shown, a storage mechanism 3 is provided at one end of the workbench 1. The storage mechanism 3 includes a connecting block 301. The connecting block 301 is fixedly connected to one end of the workbench 1. A storage cabinet 302 is fixedly connected to the top of the connecting block 301. A partition 303 is fixedly connected inside the storage cabinet 302.

[0027] Specifically: When the hot pressing equipment is needed to process semiconductors, the semiconductors to be processed must first be stored next to the equipment. At this time, the semiconductors to be processed are placed in the storage cabinet 302. The partition 303 can separate the semiconductors in the storage cabinet 302, so that the unprocessed semiconductors are distinguished from the processed semiconductors. After the semiconductors are processed, they can be temporarily stored in the storage cabinet 302, thus completing the storage work.

[0028] The working principle of this utility model is as follows: When the hot pressing equipment is needed to process semiconductors, the semiconductor to be processed is first stored next to the equipment. The semiconductor is placed in the storage cabinet 302, and the partition 303 separates the semiconductors in the cabinet, distinguishing unprocessed semiconductors from processed semiconductors, thus completing the storage process. Then, the semiconductor can be hot-pressed. The semiconductor is taken out of the storage cabinet 302 and placed on the worktable 1. The heating element 7 is then activated to heat the pressure plate 6 to a suitable temperature. The electric push rod 5 is then activated, causing it to extend and lower the pressure plate 6, allowing the heated plate 6 to perform the hot pressing process on the semiconductor, thus completing the hot pressing. During hot pressing, operator protection is required. When heating element 7 heats pressure plate 6, motor 203 is started, causing motor 203 to drive motor shaft 204 to rotate. Motor shaft 204 drives ball screw 205 to rotate, and ball screw 205 drives ball nut 206 to rise and fall on the outer wall of ball screw 205. Ball nut 206 drives connecting rod 207 to rise, and connecting rod 207 drives protective plate 209 to rise. During the rising and falling of protective plate 209, the sliding of connecting rod 207 on the outer wall of first slide rail 208 and sliding of slider 212 on the outer wall of second slide rail 211 make the rising and falling of protective plate 209 more stable and smooth, thus completing the protection work. After the semiconductor is processed, it can be temporarily stored in storage cabinet 302, thus completing the work.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A hot pressing device for semiconductor processing, comprising a worktable (1), characterized in that: A lifting and protective mechanism (2) is provided on one side of the workbench (1). The lifting and protective mechanism (2) includes a support plate (201). The support plate (201) is fixedly connected to one side of the workbench (1). A motor bracket (202) is fixedly connected to one side of the support plate (201) and the top of the workbench (1). A motor (203) is fixedly connected to the inner side of the motor bracket (202). The output shaft of the motor (203) is fixedly connected to a motor shaft (204) through a coupling. The outer wall of the motor shaft (204) is connected through the top of the support plate (201). A ball screw (205) is fixedly connected to the bottom end of the motor shaft (204). A ball nut (206) is movably connected to the outer wall of the ball screw (205). A connecting rod (207) is fixedly connected to the outer wall of the ball nut (206). A protective plate (209) is fixedly connected to one side of the connecting rod (207).

2. The hot pressing equipment for semiconductor processing according to claim 1, characterized in that: The bottom end of the support plate (201) is fixedly connected to a first slide rail (208), and the outer wall of the first slide rail (208) is slidably connected to the inner wall of the connecting rod (207).

3. The hot pressing equipment for semiconductor processing according to claim 1, characterized in that: A fixing plate (210) is fixedly connected to one side of the workbench (1), and a second slide rail (211) is fixedly connected to the bottom end of the fixing plate (210).

4. The hot pressing equipment for semiconductor processing according to claim 3, characterized in that: The outer wall of the second slide rail (211) is slidably connected to a slider (212), and one side of the slider (212) is fixedly connected to one side of the protective plate (209).

5. A hot pressing device for semiconductor processing according to claim 1, characterized in that: A support frame (4) is fixedly connected to the other side of the workbench (1), and an electric push rod (5) is fixedly connected to the bottom of the support frame (4).

6. The hot pressing equipment for semiconductor processing according to claim 5, characterized in that: The bottom end of the electric push rod (5) is fixedly connected to a pressure plate (6), and the top of the pressure plate (6) is fixedly connected to a heating element (7).

7. A hot pressing apparatus for semiconductor processing according to claim 6, characterized in that: A storage mechanism (3) is provided at one end of the workbench (1). The storage mechanism (3) includes a connecting block (301). The connecting block (301) is fixedly connected to one end of the workbench (1).

8. A hot pressing apparatus for semiconductor processing according to claim 7, characterized in that: The top of the connecting block (301) is fixedly connected to a storage cabinet (302), and the interior of the storage cabinet (302) is fixedly connected to a partition (303).

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