Tooling station apparatus and bonding system

Abstract

The utility model discloses tool station equipment and a bonding system, and belongs to the technical field of semiconductor equipment. The tool station equipment is used for storing a tool pressing head, the tool pressing head is used for selectively keeping a chip and pressing the chip on a receptor substrate, and the tool station equipment comprises a containing platform, a clamping assembly and a driving assembly. The containing platform comprises a containing part, and the containing part is used for containing the tool pressing head. The clamping assembly is arranged on the containing platform, the clamping assembly and the containing part are located on the same side, the clamping assembly comprises a clamping unit, the clamping unit is located on the peripheral side of the containing part, the clamping unit comprises at least two clamping pieces, and the at least two clamping pieces can clamp the tool pressing head on the two sides of the tool pressing head. The driving assembly is used for driving the clamping unit to clamp or release the tool pressing head. According to the utility model, the tool pressure head can be calibrated after being placed on the tool station equipment, so that the subsequent tool pressure head replacement process of the bonding equipment is simplified, and the bonding efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a tooling station equipment and a bonding system. Background Technology

[0002] In semiconductor manufacturing, chip bonding is a core step in achieving three-dimensional chip integration and heterogeneous material packaging. Because chips of different sizes have significant differences in bonding pressure, contact area, and precision requirements, bonding operations require tooling heads adapted to their physical characteristics. In existing technologies, to meet the production needs of chips of various sizes, process switching is typically achieved by changing different types of tooling heads on the bonding equipment. The tooling heads to be replaced must be pre-stored in the storage compartment of the tooling station equipment so that the bonding equipment can retrieve them as needed.

[0003] Currently, the storage stations of tooling stations generally adopt a fixed structure design, providing only basic mechanical positioning functions without active adjustment devices or adaptive positioning mechanisms. When a manual or robotic arm returns the used tooling head to the storage station, even with a small positional offset or angular deviation, the storage station cannot automatically calibrate or compensate for the tooling head's pose. This uncorrected positional deviation directly leads to a difference between the actual installation pose of the tooling head after the bonding equipment picks it up and the standard pose required by the process. This necessitates an additional calibration process each time the tooling head is replaced, becoming a key technical bottleneck restricting the improvement of chip bonding process efficiency.

[0004] This section provides background information related to this application, which is not necessarily prior art. Utility Model Content

[0005] The purpose of this invention is to provide a tooling station and a bonding system that can be calibrated after the tooling head is placed in the tooling station, simplifying the tooling head replacement process in subsequent bonding equipment and improving bonding efficiency.

[0006] To achieve the above objectives, the following technical solution is provided:

[0007] A tooling station device for storing tooling heads, the tooling heads being used to selectively hold chips and press the chips onto a receiver substrate, characterized in that it comprises:

[0008] A receiving platform includes a receiving portion for accommodating the tooling pressure head;

[0009] A clamping assembly is disposed on the receiving platform and located on the same side as the receiving portion. The clamping assembly includes a clamping unit located on the periphery of the receiving portion. The clamping unit includes at least two clamping members, which are capable of clamping the tooling pressure head on both sides.

[0010] A drive component is used to drive the clamping unit to clamp or release the tooling pressure head.

[0011] As an optional solution for the tooling station equipment, the tooling head includes two adjacent edges and a corner formed by the intersection of the two adjacent edges, and at least two clamping members are capable of clamping the two opposite corners of the tooling head.

[0012] As an optional solution for the tooling station equipment, the receiving platform includes multiple receiving parts, and the clamping components are arranged one-to-one with the receiving parts;

[0013] One of the driving components drives at least a portion of the clamping components corresponding to the accommodating portions.

[0014] As an optional solution for the tooling station equipment, the drive assembly includes a drive component and a transmission component. The drive component drives the transmission component to move along a first direction to drive the clamping component to clamp or release the tooling pressure head. The first direction is perpendicular to the receiving platform.

[0015] As an optional solution for the tooling station equipment, the transmission assembly includes a first transmission member connected to the driving member. The driving member drives the first transmission member to move along a first direction. The first transmission member includes a first end portion away from the driving member. The clamping member includes a clamping portion and a moving portion connected to each other. The clamping portion is used to clamp the tooling pressure head. The moving portion is located on the side of the clamping portion facing the receiving platform. The first end portion can extend between the moving portions of at least two clamping members to allow the two clamping members to move in a direction away from the receiving portion.

[0016] As an optional solution for the tooling station equipment, the first end gradually decreases in size along its radial direction, with the drive component pointing towards the first end; and / or...

[0017] From the direction of the driving member pointing to the first end, the distance between the moving parts of the two clamping members opposite each other along the second direction gradually decreases, and the second direction is perpendicular to the first direction.

[0018] As an optional solution for the tooling station equipment, a rolling structure is provided between the first end and the moving part.

[0019] As an optional solution for the tooling station equipment, the transmission assembly further includes an elastic element, the two ends of which are respectively connected to the moving parts of the two clamping members that are opposite each other along the second direction.

[0020] As an optional solution for the tooling station equipment, the transmission assembly further includes a second transmission component, through which the accommodating platform and the clamping component are connected, and the second transmission component extends along the second direction.

[0021] As an optional solution for the tooling station equipment, a detection device is also included. The detection device is set on the receiving platform and is used to detect whether the tooling pressure head exists in the receiving part.

[0022] A bonding system is also provided, comprising a tooling station as described in any of the foregoing embodiments and a bonding device. The bonding device is capable of picking up or placing a tooling pressure head at a receiving portion of the tooling station.

[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0024] The tooling station equipment and bonding system provided by this utility model include a receiving platform, a clamping assembly, and a driving assembly. The receiving portion of the receiving platform is used to accommodate the tooling head. The clamping members in the clamping assembly can clamp both sides of the tooling head, and the driving assembly can drive the clamping members to clamp or release the tooling head. When the tooling head is placed in the receiving portion, the driving assembly can drive the clamping unit to approach and clamp the tooling head to adjust the position of the tooling head in the receiving portion; when it is necessary to remove the tooling head from the receiving portion, the driving assembly can drive the clamping unit to move away from and release the tooling head, so that the bonding equipment can easily pick up the tooling head, eliminating the need for additional calibration after changing the tooling head and improving bonding efficiency. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0026] Figure 1 This is a top view schematic diagram of a tooling station device releasing a tooling pressure head in an embodiment of this utility model;

[0027] Figure 2 This is a top view schematic diagram of a tooling station equipment holding a tooling pressure head in an embodiment of this utility model;

[0028] Figure 3 This is a cross-sectional schematic diagram of a tooling station device releasing a tooling pressure head in an embodiment of this utility model;

[0029] Figure 4 This is a cross-sectional schematic diagram of a tooling station equipment holding a tooling pressure head in an embodiment of this utility model;

[0030] Figure 5 This is a cross-sectional schematic diagram of a tooling station device in an embodiment of this utility model;

[0031] Figure 6 This is a partial enlarged cross-sectional view of a tooling station device in an embodiment of this utility model.

[0032] Figure label:

[0033] 1. Receiving platform; 10. Receiving part; 2. Clamping assembly; 20. Clamping member; 20a. Clamping part; 20b. Moving part; 3. Driving assembly; 30. Driving member; 31. Transmission assembly; 311. First transmission member; 311a. First end; 312. Rolling structure; 313. Elastic member; 314. Second transmission member; 4. Detection device; 100. Tooling pressure head; X, First direction; Y, Second direction. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0035] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0036] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0037] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0038] This utility model provides a bonding system, which includes a tooling station and a bonding device. The bonding device is capable of picking up or placing a tooling pressure head at the receiving part of the tooling station.

[0039] The tooling station can store one or more tooling heads. The bonding equipment can retrieve the corresponding tooling head from the tooling station according to bonding requirements. In bonding processes involving multiple chips, the bonding equipment can place the previously used tooling head in the tooling station and retrieve the tooling head needed for the next bonding operation. The bonding equipment can change tooling heads manually or using a robotic arm.

[0040] Figure 1 This is a top view schematic diagram of a tooling station device releasing the tooling pressure head in an embodiment of this utility model. Figure 2 This is a top view schematic diagram of a tooling station equipment clamping a tooling pressure head in an embodiment of this utility model. Figure 3 This is a cross-sectional schematic diagram of a tooling station device releasing the tooling pressure head in an embodiment of this utility model. Figure 4 This is a cross-sectional schematic diagram of a tooling station equipment clamping a tooling pressure head in an embodiment of this utility model. Figure 5 This is a cross-sectional schematic diagram of a tooling station device in an embodiment of this utility model. Figure 6 This is a partial enlarged cross-sectional view of a tooling station device in an embodiment of this utility model.

[0041] Please see Figures 1 to 6This utility model provides a tooling station device for storing tooling heads 100. The tooling heads 100 are used to selectively hold chips and press them onto a receiving substrate. The tooling station device includes a receiving platform 1, a clamping assembly 2, and a driving assembly 3. The receiving platform 1 includes a receiving portion 10 for accommodating the tooling heads 100. The clamping assembly 2 is disposed on the receiving platform 1 and located on the same side as the receiving portion 10. The clamping assembly 2 includes clamping units located around the receiving portion 10. The clamping unit includes at least two clamping members 20, which are capable of clamping the tooling heads 100 from both sides. The driving assembly 3 is used to drive the clamping unit to clamp or release the tooling heads 100.

[0042] The tooling head 100 is used to selectively hold the chip and press it onto the recipient substrate. Exemplarily, the tooling head 100 may have a fixing structure to allow it to pick up and attach the chip. The bonding equipment drives the tooling head 100 to move, adjusting the relative position of the chip on the tooling head 100 to the recipient substrate at other stations, so that the chip on the tooling head 100 moves to a preset position relative to the recipient substrate. Once the chip and recipient substrate are aligned, the tooling head 100 presses the chip onto the recipient substrate. Optionally, the recipient substrate includes a wafer, a chip, or other semiconductor structure.

[0043] The accommodating platform 1 includes accommodating parts 10, and the number of accommodating parts 10 may include one or more. When the number of accommodating parts 10 includes multiple accommodating parts 10, the specifications of the tooling pressure heads 100 that can be accommodated by the multiple accommodating parts 10 may be the same or different.

[0044] The receiving part 10 is used to receive the tooling head 100. The receiving part 10 may be provided with a placement space. The tooling head 100 is placed in the placement space, and a part of the tooling head 100 may be located outside the placement space for clamping the clamping assembly 2.

[0045] The clamping component 2 is disposed on the receiving platform 1 and is located on the same side as the receiving part 10. For example, the receiving platform 1 includes a first side along its own thickness direction, and both the clamping component 2 and the receiving part 10 are disposed on the first side. Optionally, the receiving part 10 and the receiving platform 1 can be an integral structure or a separate structure.

[0046] The clamping assembly 2 includes clamping units, and the number of clamping units may include one or more. When the number of clamping units includes multiple units, the multiple clamping units can clamp the tooling head 100 from different directions. Further, the clamping units are located on the periphery of the receiving portion 10, and the clamping units and the receiving portion 10 may be spaced apart, so that the clamping units can be moved closer to or further away from the receiving portion 10. Optionally, when the tooling head 100 protrudes from a portion of the receiving portion 10, the clamping unit can clamp only the tooling head 100 without contacting the receiving portion 10.

[0047] The clamping unit includes at least two clamping elements 20, and the number of clamping elements 20 can be two, three, four, or even more. It is understood that the number of clamping elements 20 can be even or odd. When the number of clamping elements 20 is even, the multiple clamping elements 20 are arranged in a one-to-one relative position; when the number of clamping elements 20 is odd, the multiple clamping elements 20 can be adjusted adaptively according to the shape of the tooling pressure head 100.

[0048] Exemplarily, at least two clamping members 20 can clamp the tooling pressure head 100 from opposite sides in a single direction; at least two clamping members 20 can also clamp the tooling pressure head 100 from multiple directions. It is understood that when the tooling pressure head 100 is placed within the receiving portion 10, the clamping members 20 can adjust the position of the tooling pressure head 100 to the clamping position of the clamping members 20, thereby improving the positional accuracy of the tooling pressure head 100 within the receiving portion 10. Optionally, a guide structure may be provided on the side of the clamping member 20 facing the receiving portion 10 to reduce local stress when the clamping member 20 contacts the tooling pressure head 100. The clamping members 20 can clamp from both sides opposite to the tooling pressure head 100, or from adjacent sides of the tooling pressure head 100.

[0049] The drive assembly 3 is used to drive the clamping unit to clamp or release the tooling head 100. For example, when the tooling head 100 is placed in the receiving part 10, the drive assembly 3 can drive the clamping unit to approach and clamp the tooling head 100 to adjust the position of the tooling head 100 in the receiving part 10. When it is necessary to remove the tooling head 100 from the receiving part 10, the drive assembly 30 can drive the clamping unit to move away from and release the tooling head 100 so that the bonding equipment can take the tooling head 100. This way, the bonding equipment does not need to be recalibrated after replacing the tooling head 100, thus improving the bonding efficiency.

[0050] In some alternative embodiments, the tooling head 100 includes two adjacent edges and a corner formed by the intersection of the two adjacent edges, and at least two clamping members 20 are capable of clamping two opposite corners of the tooling head 100.

[0051] For example, the shape of the structure on the tooling pressure head 100 for being clamped by the clamping member 20 may include a triangle, rectangle, pentagon, hexagon, or polygon. The tooling pressure head 100 includes a plurality of oppositely arranged corners, and at least two clamping members 20 are capable of clamping two opposite corners of the tooling pressure head 100. For example, each clamping member 20 can clamp one corner, and the clamping portion 20a of the clamping member 20 matches the shape of the corner; or two corners are clamped by four clamping members 20 together, that is, each clamping member 20 clamps one edge of the tooling pressure head 100, and the clamping portion 20a of the clamping member 20 matches the shape of the edge.

[0052] In these alternative embodiments, the above-mentioned arrangement ensures that the tooling head 100 is symmetrically constrained during clamping, reducing the risk of twisting and breakage caused by concentrated force on one side. Furthermore, since the corners are usually structurally rigid, the clamping corners can transfer the load with the strength of the tooling head 100 itself, reducing direct damage to weak areas by the clamping member 20.

[0053] In some alternative embodiments, the accommodating platform 1 includes a plurality of accommodating portions 10, and clamping components 2 are disposed in a one-to-one correspondence with the accommodating portions 10. A driving component 3 drives at least a portion of the clamping components 2 corresponding to the accommodating portions 10.

[0054] For example, each receiving part 10 corresponds to a set of clamping components 2, and each set of clamping components 2 clamps a tooling pressure head 100. One driving component 3 can drive multiple sets of clamping components 2 to clamp or release the tooling pressure head 100 simultaneously. Optionally, one driving component 3 can drive all clamping components 2 to clamp or release the tooling pressure head 100; of course, one driving component 3 can also drive some clamping components 2 to clamp or release the tooling pressure head 100 simultaneously.

[0055] Optionally, the clamping component 2 driven by a drive component 3 can have the same or different specifications for the clamping tooling head 100.

[0056] In these alternative embodiments, the above-described settings help to improve positioning accuracy, ensure that the displacement and clamping force of each clamping component 2 are completely consistent, reduce the number of driving components, and simplify the mechanical structure design.

[0057] In some alternative embodiments, the drive assembly 3 includes a drive member 30 and a transmission assembly 31. The drive member 30 drives the transmission assembly 31 to move along a first direction X to cause the clamping member 20 to clamp or release the tooling pressure head 100. The first direction X is perpendicular to the receiving platform 1.

[0058] For example, the movement of the transmission assembly 31 along the first direction X can cause the clamping member 20 to move in a direction closer to or away from the receiving portion 10, thereby enabling the transmission assembly 31 to drive the clamping member 20 to clamp or release the tooling pressure head 100.

[0059] Optionally, the drive unit 30 may include a drive motor or a hydraulic device.

[0060] Optionally, the drive unit 30 may be located on the side of the receiving platform 1 facing away from the receiving part 10.

[0061] Optionally, the transmission assembly 31 may be located on the side of the clamping member 20 facing the receiving platform 1. Optionally, the receiving platform 1 may be provided with a clearance structure, through which the transmission assembly 31 may pass to connect to the clamping member 20.

[0062] Optionally, the first direction X is perpendicular to the clamping direction of the clamping member 20.

[0063] In these alternative embodiments, the driving direction of the drive member 30 is perpendicular to the clamping direction of the clamping member 20 by the above-described configuration, which helps to reduce the space occupied in a single direction and reduce the overall volume of the tooling station equipment.

[0064] In some alternative embodiments, the transmission assembly 31 includes a first transmission member 311 connected to the drive member 30. The drive member 30 drives the first transmission member 311 to move along a first direction X. The first transmission member 311 includes a first end portion 311a away from the drive member 30. The clamping member 20 includes a clamping portion 20a and a moving portion 20b connected to each other. The clamping portion 20a is used to clamp the tooling pressure head 100. The moving portion 20b is located on the side of the clamping portion 20a facing the receiving platform 1. The first end portion 311a can extend between the moving portions 20b of at least two clamping members 20 to move the two clamping members 20 in a direction away from the receiving portion 10.

[0065] For example, the drive member 30 drives the first transmission member 311 to move along the first direction X so that the first end 311a of the first transmission member 311 extends between the moving portions 20b of the two clamping members 20, thereby increasing the distance between the moving portions 20b of the two clamping members 20, thereby increasing the distance between the clamping portions 20a of the two clamping members 20, and thus releasing the tooling pressure head 100.

[0066] For example, the drive member 30 is connected to the first transmission member 311, and the drive member 30 and the first transmission member 311 are arranged sequentially along the first direction X. The drive member 30 can drive the first transmission member 311 to move closer to or away from the moving part 20b along the first direction X.

[0067] Optionally, the drive unit 30 can be fixedly connected to the receiving platform 1.

[0068] Optionally, the movable part 20b can be located between the clamping part 20a and the receiving platform 1. The movable part 20b is movably connected to the receiving platform 1. Of course, the movable part 20b and the receiving platform 1 can also be connected via the clamping part 20a, which is movably connected to the receiving platform 1.

[0069] Optionally, the first end 311a of the first transmission member 311 may be located on the side of the receiving portion 10 away from the bearing tooling pressure head 100.

[0070] In some examples, the clamping unit includes two clamping members 20, with a first end 311a extending between the moving portions 20b of the two clamping members 20; in other examples, the clamping member 20 includes two or more clamping members 20, with the first end 311a extending between the moving portions 20b of the two or more clamping members 20; in still other examples, the clamping assembly 2 includes a plurality of clamping members 2, with the first end 311a extending between the moving portions 20b of the plurality of clamping assemblies 2 to enable the clamping members 20 of the plurality of clamping assemblies 2 to move synchronously.

[0071] In other examples, the driving member can also drive a third transmission member to rotate. The third transmission member has a major axis and a minor axis along its radial direction. A second transmission member is disposed between the moving portions of at least two clamping members. As the third transmission member rotates, the distance between the moving portions of the at least two clamping members changes with the major and minor axes, thereby achieving clamping and releasing of the clamping members. For example, when the two moving portions abut against the minor axis of the third transmission member, the distance between the two moving portions is minimal, allowing the clamping members to clamp the tooling pressure head; when the two moving portions abut against the major axis of the third transmission member, the distance between the two moving portions is maximum, allowing the clamping members to release the tooling pressure head.

[0072] In some alternative embodiments, the first end 311a gradually decreases in radial dimension in the direction pointed from the drive member 30 to the first end 311a; and / or, the distance between the moving portions 20b of the two clamping members 20 opposite each other in the second direction Y gradually decreases in the direction pointed from the drive member 30 to the first end 311a, where the second direction Y is perpendicular to the first direction X.

[0073] In some examples, the first end 311a gradually decreases in radial dimension in the direction pointed from the drive member 30 to the first end 311a; and the distance between the moving portions 20b of the two clamping members 20 facing each other in the second direction Y gradually decreases in the direction pointed from the drive member 30 to the first end 311a. In other examples, the first end 311a gradually decreases in radial dimension in the direction pointed from the drive member 30 to the first end 311a. In still other examples, the distance between the moving portions 20b of the two clamping members 20 facing each other in the second direction Y gradually decreases in the direction pointed from the drive member 30 to the first end 311a.

[0074] From the direction of the driving member 30 pointing to the first end 311a, the first end 311a gradually decreases in its radial dimension. This can be understood as the radial dimension of the first end 311a gradually decreasing. When the driving member 30 drives the first transmission member 311 to extend between the two moving parts 20b, the radial dimension of the first end 311a extending between the two moving parts 20b gradually increases, thereby increasing the distance between the two moving parts 20b. This causes both clamping parts 20a to move away from the receiving part 10, thereby releasing the tooling pressure head 100.

[0075] From the direction of the driving member 30 pointing to the first end 311a, the distance between the moving parts 20b of the two clamping members 20 that are opposite each other along the second direction Y gradually decreases. This can be understood as the distance between the opposite surfaces of the two moving parts 20b along the second direction Y gradually decreasing. When the driving member 30 drives the first transmission member 311 to extend between the two moving parts 20b, the axial dimension of the first end 311a extending between the two moving parts 20b gradually increases, so that the distance between the two moving parts 20b gradually increases, thereby causing both clamping parts 20a to move away from the receiving part 10, thereby realizing the release of the tooling pressure head 100.

[0076] In these alternative embodiments, the above-described configuration allows the movement of the first transmission member 311 driven by the drive member 30 along the first direction X to be converted into the movement of the moving part along the second direction Y. This eliminates the need for complex linkages, gears, and other mechanisms to achieve the change in movement direction, saving space. At the same time, it ensures the synchronization of the movement of the two clamping members 20 and reduces the possibility of lag or jamming of a single clamping member 20.

[0077] In some alternative embodiments, a rolling structure 312 is provided between the first end portion 311a and the moving portion 20b.

[0078] For example, the rolling structure 312 can be embedded in the side of the moving part 20b facing the first end 311a; or, the rolling structure 312 is provided on the side of the first end 311a facing the moving part 20b. The rolling structure 312 can reduce the friction between the first transmission member 311 and the moving part 20b, thereby improving the transmission efficiency of the transmission assembly 31.

[0079] In some alternative embodiments, the transmission assembly 31 further includes an elastic element 313, the two ends of which are respectively connected to the moving portions 20b of two clamping members 20 that are opposite each other in the second direction Y.

[0080] For example, the two ends of the elastic member 313 can be respectively connected to opposite sides of the two moving parts 20b along the second direction Y; of course, the two ends of the elastic member 313 can also be connected to the same side of the two moving parts 20b along a third direction, where the third direction, the first direction X, and the second direction Y are mutually perpendicular. Optionally, a connecting structure is provided on one side of the moving part 20b along the third direction, and the two ends of the elastic member 313 are respectively connected to the connecting structure of the two moving parts 20b. Optionally, the connecting structure can protrude from the moving part 20b along the third direction.

[0081] The elastic element 313 can provide a force that brings the two moving parts 20b closer together. For example, when the first end 311a extends between the two moving parts 20b and continues to move away from the drive member 30, the distance between the two moving parts 20b increases, and the elastic element 313 is stretched. At this time, the clamping member 20 releases the tooling head 100, and the tooling head 100 can be taken by the bonding device. When the first end 311a extends between the two moving parts 20b and stops moving, the clamping member 20 stops moving away from the receiving part 10. When the first end 311a moves towards the drive member 30, the axial dimension of the first end 311a extending between the two moving parts 20b decreases, and the two moving parts 20b move closer together under the action of the elastic restoring force of the elastic element 313, so that the clamping part 20a approaches the receiving part 10 and abuts against the clamped area on the tooling head 100 to clamp the tooling head 100.

[0082] Optionally, the elastic modulus of the elastic element 313 used in different clamping units can be different, thereby providing different clamping forces to different clamping areas of the tooling head 100.

[0083] Optionally, the elastic modulus of the elastic element 313 used in different clamping assemblies 2 can be different, thereby providing different clamping forces to the tooling head 100 to adapt to different types of tooling heads 100.

[0084] In other examples, the clamping force of the clamping part 20a clamping the tooling head 100 can be controlled by controlling the axial dimension of the first end 311a extending between the two moving parts 20b, or the distance between the clamping part 20a and the tooling head 100 can be controlled so that the tooling head 100 is adjusted to a preset position.

[0085] In these alternative embodiments, the clamping and releasing functions of the clamping member are achieved through the cooperation of the elastic member 313, the first transmission member 311 and the driving member 30, which helps to simplify the overall structure of the driving component 3 and reduce the manufacturing difficulty.

[0086] In some alternative embodiments, the transmission assembly 31 further includes a second transmission member 314, through which the accommodating platform 1 and the clamping member 20 are connected, and the second transmission member 314 extends along a second direction Y.

[0087] Optionally, the accommodating platform 1 and the clamping part 20a can be connected via the second transmission member 314; or, the accommodating platform 1 and the moving part 20b can be connected via the second transmission member 314; or, both the moving part 20b and the clamping part 20a can be connected to the accommodating platform 1 via the second transmission member 314. Optionally, the moving part 20b and the clamping part 20a can be connected to the accommodating platform 1 via the same second transmission member 314, or the moving part 20b and the clamping part 20a can be connected to the accommodating platform 1 via different second transmission members 314.

[0088] Optionally, the second transmission member 314 includes a track and a slider, one of which is disposed on the receiving platform 1 and the other is disposed on the clamping member 20.

[0089] In these alternative embodiments, providing a second transmission member 314 helps to improve the motion accuracy of the clamping member 20 and reduce the possibility of clamping unit failure.

[0090] In some alternative embodiments, the tooling station equipment further includes a detection device 4, which is disposed on the receiving platform 1 and is used to detect whether a tooling pressure head 100 exists in the receiving part 10.

[0091] Optionally, the detection device 4 may be located inside the receiving part 10 or outside the receiving part 10.

[0092] For example, the detection device 4 can be located at the bottom of the receiving portion 10. Of course, the detection device 4 can be disposed outside the receiving portion 10 at a distance from the clamping member 20.

[0093] Optionally, the detection device 4 may be located on the side of the clamping member 20 facing away from the receiving portion 10.

[0094] Alternatively, the detection device 4 can use the gap between two adjacent clamping components 2 as a detection channel.

[0095] Optionally, the detection device 4 includes a sensor that can detect the presence of a tooling head 100 inside the accommodating part 10 by means of light detection, gravity detection, etc.

[0096] In these alternative embodiments, by setting up a detection device 4, the tooling station equipment can automatically determine the state of the tooling head 100 within the tooling station equipment, thereby further improving the automation of the tooling station equipment and increasing bonding efficiency.

[0097] This embodiment provides a bonding apparatus, including the tooling station apparatus of any of the above embodiments and the bonding apparatus. The bonding apparatus is capable of picking up or placing the tooling pressure head at the receiving portion of the tooling station apparatus. Since the bonding apparatus provided in this application embodiment includes the tooling station apparatus of any of the above embodiments, the bonding apparatus provided in this application embodiment has the beneficial effects of the tooling station apparatus of any of the above embodiments, which will not be repeated here.

[0098] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A tooling station for storing tooling heads (100), said tooling heads (100) for selectively holding a chip and pressing the chip onto a receiver substrate, characterized in that, include: The accommodating platform (1) includes an accommodating part (10) for accommodating the tooling head (100); A clamping assembly (2) is disposed on the receiving platform (1) and located on the same side as the receiving part (10). The clamping assembly (2) includes a clamping unit located on the periphery of the receiving part (10). The clamping unit includes at least two clamping members (20). The at least two clamping members (20) are capable of clamping the tooling pressure head (100) on both sides of the tooling pressure head (100). The drive assembly (3) is used to drive the clamping unit to clamp or release the tooling pressure head (100).

2. The tooling station equipment according to claim 1, characterized in that, The tooling head (100) includes two adjacent edges and a corner formed by the intersection of the two adjacent edges, and at least two clamping members (20) are capable of clamping the two opposite corners of the tooling head (100).

3. The tooling station equipment according to claim 1, characterized in that, The accommodating platform (1) includes a plurality of accommodating parts (10), and the clamping components (2) are arranged one-to-one with the accommodating parts (10); One of the driving components (3) drives at least a portion of the accommodating portions (10) corresponding to the clamping components (2).

4. The tooling station equipment according to claim 1, characterized in that, The drive assembly (3) includes a drive member (30) and a transmission assembly (31). The drive member (30) drives the transmission assembly (31) to move along a first direction (X) to drive the clamping member (20) to clamp or release the tooling pressure head (100). The first direction (X) is perpendicular to the receiving platform (1).

5. The tooling station equipment according to claim 4, characterized in that, The transmission assembly (31) includes a first transmission member (311) connected to the drive member (30). The drive member (30) drives the first transmission member (311) to move along a first direction (X). The first transmission member (311) includes a first end (311a) away from the drive member (30). The clamping member (20) includes a clamping part (20a) and a moving part (20b) connected to each other. The clamping part (20a) is used to clamp the tooling head (100). The moving part (20b) is located on the side of the clamping part (20a) facing the receiving platform (1). The first end (311a) can extend between the moving parts (20b) of at least two clamping members (20) to move the two clamping members (20) in a direction away from the receiving part (10).

6. The tooling station equipment according to claim 5, characterized in that, The first end (311a) gradually decreases in size radially from the direction pointed from the drive member (30) to the first end (311a); and / or, From the direction of the driving member (30) pointing to the first end (311a), the distance between the moving parts (20b) of the two clamping members (20) facing each other along the second direction (Y) gradually decreases, and the second direction (Y) is perpendicular to the first direction (X).

7. The tooling station equipment according to claim 6, characterized in that, A rolling structure (312) is provided between the first end (311a) and the moving part (20b).

8. The tooling station equipment according to claim 6, characterized in that, The transmission assembly (31) further includes an elastic element (313), the two ends of which are respectively connected to the moving parts (20b) of the two clamping members (20) that are opposite each other along the second direction (Y).

9. The tooling station equipment according to claim 6, characterized in that, The transmission assembly (31) further includes a second transmission member (314), the accommodating platform (1) and the clamping member (20) are connected by the second transmission member (314), and the second transmission member (314) extends along the second direction (Y).

10. The tooling station equipment according to claim 1, characterized in that, It also includes a detection device (4), which is disposed on the receiving platform (1) and is used to detect whether the tooling head (100) exists in the receiving part (10).

11. A bonding system, comprising: The tooling station equipment as described in any one of claims 1 to 10; as well as A bonding device capable of picking up or placing a tooling head (100) at the receiving part (10) of the tooling station equipment.

Images