Multi-station front open type wafer box loading device

Abstract

The utility model provides a multi-station front open type wafer box loading device. The multi-station front open type wafer box loading device comprises a mounting substrate; the at least one operation table is arranged on one side surface of the mounting substrate and is used for placing a wafer box; and the at least one pressing and fixing mechanism is arranged on one side face of the mounting substrate, the pressing and fixing mechanisms are arranged in one-to-one correspondence with the wafer box placement positions and located above the corresponding wafer box placement positions, and the pressing and fixing mechanisms are used for restraining the wafer boxes or releasing restraining on the wafer boxes. According to the utility model, the pressing and fixing mechanism is arranged for each wafer box, and the wafer boxes are pressed and fixed through the pressing and fixing mechanisms in the unlocking or locking process of the wafer boxes, so that the wafer boxes are limited, and the problem that the positions of the wafer boxes deviate in the unlocking or locking process is solved; when the pressing and fixing mechanism relieves pressing and fixing of the wafer box, the wafer box can still be freely taken and placed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a multi-station front-opening wafer cassette loading device. Background Technology

[0002] In semiconductor manufacturing, wafer cassettes primarily serve to place and transport wafers; they are storage devices that temporarily store wafers and maintain their sealed state during wafer transfer. However, current wafer cassettes are prone to displacement during unlocking or locking, leading to problems such as inability to unlock or lock.

[0003] In view of this, it is necessary to propose a multi-station front-opening wafer cassette loading device to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a multi-station front-opening wafer cassette loading device to improve the problem that the position of the existing wafer cassette is prone to shifting during the unlocking or locking process.

[0005] This utility model provides a multi-station front-opening wafer cassette loading device, comprising:

[0006] Mounting substrate;

[0007] At least one operating table is disposed on one side of the mounting substrate and is used to place a wafer cassette.

[0008] At least one clamping mechanism is disposed on one side of the mounting substrate. The clamping mechanism is disposed in a one-to-one correspondence with the wafer cassette placement position and is located above the corresponding wafer cassette placement position. The clamping mechanism is used to constrain or release the wafer cassette.

[0009] The beneficial effects of the multi-station front-opening wafer cassette loading device provided by this utility model are as follows: a clamping mechanism is set for each wafer cassette. During the unlocking or locking process of the wafer cassette, the clamping mechanism clamps the wafer cassette, thereby limiting the position of the wafer cassette and solving the problem of the wafer cassette shifting during the unlocking or locking process; when the clamping mechanism releases the clamping of the wafer cassette, the wafer cassette can still be freely picked up and put in.

[0010] In one possible embodiment, the top of the wafer cassette is provided with a pressing hole;

[0011] The compression mechanism includes:

[0012] A driving component is disposed on one side of the mounting substrate;

[0013] The pressure head, corresponding to the clamping hole, is located on the driving end of the driving assembly. The driving assembly can drive the pressure head to move towards or away from the clamping hole, so that the pressure head is inserted into the clamping hole to clamp the wafer cassette, or the pressure head is disengaged from the clamping hole to release the clamping of the wafer cassette.

[0014] Its beneficial effects are as follows: when it is necessary to press the wafer cassette, the driving component drives the pressure head to move towards the pressing hole, so that the pressure head is inserted into the pressing hole of the wafer cassette to press the wafer cassette; when it is necessary to release the wafer cassette, the driving component drives the pressure head to move away from the pressing hole, so that the pressure head is disengaged from the pressing hole to release the pressing of the wafer cassette.

[0015] In one possible embodiment, the clamping mechanism further includes:

[0016] A slide rail is provided on one side of the mounting base plate, and the direction of the slide rail is consistent with the direction of movement of the pressure head;

[0017] A sliding member is slidably disposed on the slide rail and connected to the driving end of the driving assembly. The driving assembly drives the sliding member so that the sliding member can move along the extension direction of the slide rail. The pressure head is disposed on the sliding member.

[0018] Its beneficial effects are as follows: the pressure head is disposed on the sliding member, and through the cooperation of the slide rail and the sliding member, it plays a guiding role. Under the drive of the drive assembly, the sliding member and the pressure head on it always move along the extension direction of the slide rail, ensuring the smoothness of the movement of the pressure head and avoiding the displacement between the pressure head and the pressing hole.

[0019] In one possible embodiment, the clamping mechanism further includes:

[0020] The lifting plate has a first end and a second end that are arranged opposite to each other. The first end is disposed on the sliding member, and the second end is disposed corresponding to the pressure hole. The pressure head is disposed on the second end.

[0021] Its beneficial effect is that the lifting plate is provided on the sliding member, and the pressure head is provided on the second end of the lifting plate so that the pressure head can be aligned with the pressure hole.

[0022] In one possible embodiment, the clamping mechanism further includes a connecting plate with one end connected to the drive end of the drive assembly and the other end connected to the lifting plate.

[0023] Its beneficial effect is that the drive component is connected to the lifting plate through the connecting plate so as to smoothly transmit the force of the drive component to the lifting plate, thereby driving the lifting plate to move smoothly.

[0024] In one possible embodiment, the lifting plate is bent, and a reinforcing plate is provided at the bend of the lifting plate; or...

[0025] The lifting plate is curved, and a reinforcing plate is provided at the curved part of the lifting plate.

[0026] Its beneficial effect is that by setting the reinforcing plate on the lifting plate, the stability of the structure is increased.

[0027] In one possible embodiment, the clamping mechanism further includes a limiting block disposed at the end of the slide rail.

[0028] Its beneficial effect is that by setting a limiting block at the end of the slide rail, the sliding member is prevented from slipping off the slide rail.

[0029] In one possible embodiment, the clamping mechanism further includes a base disposed on one side of the mounting substrate, and the drive assembly and the slide rail are disposed on the base.

[0030] Its beneficial effect is that all other components of the clamping mechanism are located on the base, which enhances the integration of the clamping mechanism.

[0031] In one possible embodiment, the clamping mechanism further includes a top seat disposed on the base, and the driving assembly is disposed on the top seat.

[0032] Its beneficial effect is that the top seat serves as the base for installing the drive assembly, enhancing the convenience and stability of installation.

[0033] In one possible embodiment, the indenter is conical in shape and its cross-sectional dimensions gradually decrease from top to bottom, and the pressing hole is conical in shape to match the indenter; or,

[0034] The pressure head is shaped like a frustum and its cross-sectional dimensions gradually decrease from top to bottom. The pressure hole is also shaped like a frustum to match the pressure head.

[0035] Its beneficial effect is that the size of the end of the pressure head near the pressure hole is smaller, while the size of the pressure hole near the pressure head is larger. During the process of inserting the pressure head into the pressure hole, the smaller end of the pressure head can be more easily aligned with the larger end of the pressure hole, ensuring that the pressure head can be smoothly inserted into the pressure hole. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the multi-station front-opening wafer cassette loading device of this utility model.

[0037] Figure 2 This is a schematic diagram of the wafer cassette in the multi-station front-opening wafer cassette loading device of this utility model.

[0038] Figure 3 This is a perspective view of the clamping mechanism in the multi-station front-opening wafer cassette loading device of this utility model.

[0039] Figure 4 This is a front view of the clamping mechanism in the multi-station front-opening wafer cassette loading device of this utility model.

[0040] Figure 5 This is a schematic diagram of the pressure head in the multi-station front-opening wafer cassette loading device of this utility model.

[0041] Explanation of reference numerals in the attached drawings: 100, mounting substrate; 200, operating table; 300, wafer box; 310, clamping hole; 311, second slope; 400, clamping mechanism; 410, drive assembly; 420, pressure head; 421, first slope; 430, slide rail; 431, limit block; 440, sliding member; 450, lifting plate; 451, vertical part; 4511, first end; 452, horizontal part; 4521, second end; 460, connecting plate; 461, horizontal part; 462, vertical part; 470, reinforcing plate; 480, base; 490, top seat; 491, first plate part; 492, second plate part. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0043] To address the problems existing in the prior art, embodiments of this utility model provide a multi-station front-opening wafer cassette loading device, see [link to relevant documentation]. Figure 1The wafer cassette loading device includes: a mounting substrate 100, at least one operating table 200, and at least one clamping mechanism 400. The operating table 200 is disposed on one side of the mounting substrate 100 and is used to place the wafer cassette 300. The clamping mechanism 400 is disposed on one side of the mounting substrate 100, and the clamping mechanism 400 is arranged in a one-to-one correspondence with the placement position of the wafer cassette 300. The clamping mechanism 400 is located above the corresponding placement position of the wafer cassette 300, and is used to constrain or release the constraint on the wafer cassette 300.

[0044] The clamping mechanism 400 is located above the corresponding placement position of the wafer cassette 300. When the wafer cassette 300 is placed on the operating table 200, the clamping mechanism 400 can clamp the wafer cassette 300 to effectively prevent the wafer cassette 300 from shifting position during unlocking or locking. When the wafer cassette 300 is unlocked or locked, the clamping mechanism 400 presses the wafer cassette 300 firmly onto the operating table 200, so that the wafer cassette 300 can be clamped between the clamping mechanism 400 and the operating table 200, which plays a limiting role for the wafer cassette 300. Even under the force generated by the unlocking or locking operation, the wafer cassette 300 is not easy to slide or change position.

[0045] The specific structure of the clamping mechanism 400 will be explained in detail below.

[0046] In one embodiment, see Figure 2 and Figure 3 The wafer cassette 300 has a clamping hole 310 on its top. The clamping mechanism 400 includes a drive assembly 410 and a clamping head 420. The drive assembly 410 is disposed on one side of the mounting substrate 100. The clamping head 420 is disposed on the drive end of the drive assembly 410 corresponding to the clamping hole 310. The drive assembly 410 can drive the clamping head 420 to move towards or away from the clamping hole 310, so that the clamping head 420 is inserted into the clamping hole 310 to clamp the wafer cassette 300, or the clamping head 420 is disengaged from the clamping hole 310 to release the clamping of the wafer cassette 300.

[0047] The pressure head 420 is driven by the drive component 410 to adjust its displacement, so that the pressure head 420 is inserted into the clamping hole 310. Since the pressure head 420 is adapted to the clamping hole 310, the clamping hole 310 limits the pressure head 420 after it is inserted. In addition, under the force of the drive component 410, the pressure head 420 can be pressed into the clamping hole 310. The vertical force can clamp the wafer cassette 300 between the pressure head 420 and the operating table 200, thus clamping and fixing the wafer cassette 300.

[0048] In some specific embodiments, the drive component 410 is a cylinder, a hydraulic cylinder, an electric telescopic rod, etc.

[0049] In one embodiment, see Figure 3 and Figure 4 The pressing mechanism 400 also includes a slide rail 430 and a sliding member 440. The slide rail 430 is disposed on one side of the mounting base plate 100, and the setting direction of the slide rail 430 is consistent with the moving direction of the pressing head 420. The sliding member 440 is slidably disposed on the slide rail 430 and connected to the driving end of the driving assembly 410. The driving assembly 410 drives the sliding member 440 so that the sliding member 440 can move along the extending direction of the slide rail 430. The pressing head 420 is disposed on the sliding member 440.

[0050] The cooperation between the slide rail 430 and the slider 440 ensures that the slider 440 will not wobble or deviate during movement, thereby ensuring that the pressure head 420 on the slider 440 will not wobble or deviate during movement, thus guaranteeing the smooth movement of the pressure head 420. This allows the pressure head 420 to be accurately and smoothly inserted into the fixing hole 310 on the wafer cassette 300, avoiding the problem of the pressure head 420 and the fixing hole 310 not being able to be smoothly mated due to the wobble or deviation of the pressure head 420.

[0051] In one embodiment, see Figure 3 and Figure 4 The clamping mechanism 400 also includes a lifting plate 450, which has a first end 4511 and a second end 4521 disposed opposite to each other. The first end 4511 is disposed on the sliding member 440, and the second end 4521 is disposed corresponding to the clamping hole 310. The clamping head 420 is disposed on the second end 4521. The lifting plate 450 is equivalent to a mounting seat for the clamping head 420, so as to facilitate the mounting of the clamping head 420 on the sliding member 440, while ensuring that the clamping head 420 corresponds to the clamping hole 310 in spatial position.

[0052] In one embodiment, see Figure 4 The clamping mechanism 400 also includes a connecting plate 460, one end of which is connected to the drive end of the drive assembly 410 and the other end of which is connected to the lifting plate 450. The slide rail 430 and the drive assembly 410 are arranged in the vertical direction. The drive end of the drive assembly 410 is connected to the lifting plate 450 through the connecting plate 460. When the drive end of the drive assembly 410 moves, it drives the connecting plate 460 to move. Due to the guiding effect of the sliding member 440 and the slide rail 430, the lifting plate 450 and the pressure head 420 on it can be driven to move along the extension direction of the slide rail 430.

[0053] In one specific embodiment, see Figure 4 The connecting plate 460 is inverted L shape and includes a horizontal part 461 and a vertical part 462 that are vertically connected. The horizontal part 461 is connected to the drive end of the drive assembly 410, and the vertical part 462 is connected to the side of the lifting plate 450.

[0054] In the first embodiment, see Figure 3 The lifting plate 450 is bent, and a reinforcing plate 470 is provided at the bend of the lifting plate 450. By providing a reinforcing plate 470 at the bend of the lifting plate 450, the structural strength of the bend can be significantly enhanced, and the stability of the structure can be improved.

[0055] For details, see Figure 4 The reinforcing plates 470 are a pair and are located on opposite sides of the lifting plate 450.

[0056] In one specific embodiment, see Figure 3 The lifting plate 450 is L-shaped and includes a vertically connected vertical portion 451 and a horizontal portion 452. The end of the vertical portion 451 away from the horizontal portion 452 (i.e., the first end 4511) is provided on the sliding member 440. The end of the horizontal portion 452 away from the vertical portion 451 (i.e., the second end 4521) is provided corresponding to the pressing hole 310. The pressing head 420 is provided on the end of the horizontal portion 452 away from the vertical portion 451.

[0057] In the second embodiment, the lifting plate 450 is curved, and a reinforcing plate 470 is provided at the curved portion of the lifting plate 450. By providing a reinforcing plate 470 at the curved portion of the lifting plate 450, the structural strength of the curved portion can be significantly enhanced, and the stability of the structure can be improved.

[0058] In one embodiment, see Figure 3 The clamping mechanism 400 also includes a limiting block 431 located at the end of the slide rail 430. By providing the limiting block 431 at the end of the slide rail 430, the movement range of the sliding member 440 is limited, preventing the sliding member 440 from slipping off the slide rail 430.

[0059] In one embodiment, see Figure 3 and Figure 4 The clamping mechanism 400 also includes a base 480 disposed on one side of the mounting substrate 100, and a drive assembly 410 and a slide rail 430 disposed on the base 480. The base 480 is equivalent to a mounting platform, and the drive assembly 410, the slide rail 430, and other components of the clamping mechanism 400 are all located on the base 480. This integrated design makes the clamping mechanism 400 an independent functional module, which is convenient for installation and layout in semiconductor manufacturing equipment.

[0060] In one embodiment, see Figure 3 and Figure 4 The clamping mechanism 400 also includes a top seat 490 disposed on the base 480, and a drive assembly 410 disposed on the top seat 490.

[0061] In one specific embodiment, see Figure 3The top seat 490 is L-shaped and includes a first plate portion 491 and a second plate portion 492 that are vertically connected. The first plate portion 491 is vertically arranged and disposed on the base 480, the second plate portion 492 is horizontally arranged, and the drive assembly 410 is vertically suspended on the second plate portion 492.

[0062] In one embodiment, the pressure head 420 is conical in shape and the cross-sectional dimension of the pressure head 420 gradually decreases from top to bottom, and the pressure hole 310 is conical in shape to match the pressure head 420.

[0063] In another embodiment, see Figure 2 and Figure 5 The pressure head 420 is shaped like a frustum and its cross-sectional dimensions gradually decrease from top to bottom. The pressure hole 310 is shaped like a frustum to match the pressure head 420.

[0064] If the pressure head 420 and the pressure hole 310 are designed to be of equal diameter, the pressure head 420 must be accurately aligned with the pressure hole 310, that is, the center line of the pressure head 420 must coincide with the center line of the pressure hole 310 in order for the pressure head 420 to be properly inserted into the pressure hole 310. In other words, if there is a positional deviation between the pressure head 420 and the pressure hole 310, the pressure head 420 will not be able to be smoothly inserted into the pressure hole 310.

[0065] This invention designs the pressure head 420 and the pressing hole 310 into tapered and frustum-shaped variable diameter shapes. The pressing hole 310 has a larger size at the end near the pressure head 420, providing a larger alignment range for the pressure head 420. At the same time, the size of the end of the pressure head 420 near the pressing hole 310 is smaller, which means that the small end of the pressure head 420 is inserted into the large end of the pressing hole 310. Even if there is a certain deviation between the centerline of the pressure head 420 and the centerline of the pressing hole 310, as long as the small end of the pressure head 420 is within the range of the large end of the pressing hole 310, the pressure head 420 can still be properly inserted into the pressing hole 310, thus improving the alignment tolerance.

[0066] Furthermore, since the pressure head 420 and the pressing hole 310 are conical and frustum-shaped, respectively, the pressure head 420 has an inclined first slope 421, and the pressing hole 310 has a second slope 311 that matches the first slope 421. The first slope 421 and the second slope 311 have a guiding function. If there is a certain deviation between the center line of the pressure head 420 and the center line of the pressing hole 310, when the pressure head 420 is inserted into the pressing hole 310, under the guiding effect of the inclination of the first slope 421 and the second slope 311, the pressure head 420 will adjust its position accordingly. That is, the center line of the pressure head 420 will gradually move closer to the center line of the pressing hole 310, so that the pressure head 420 and the pressing hole 310 are fully fitted together.

[0067] The working principle of the multi-station front-opening wafer cassette loading device of this utility model will be explained in detail below.

[0068] See Figure 1 and Figure 3 When the wafer cassette 300 is unlocked or locked, the wafer cassette 300 is first pressed and secured. Under the drive of the drive assembly 410, the drive end of the drive assembly 410 moves downward together with the connecting plate 460, thereby driving the lifting plate 450 to move downward along the slide rail 430, so that the pressure head 420 can move downward and insert into the pressing hole 310 of the wafer cassette 300, thereby realizing the pressing and securing of the wafer cassette 300.

[0069] See Figure 1 and Figure 3 When it is necessary to release the pressure on the wafer cassette 300, under the drive of the drive assembly 410, the drive end of the drive assembly 410 moves upward together with the connecting plate 460, thereby driving the lifting plate 450 to move upward along the slide rail 430, so that the pressure head 420 can move upward and disengage from the pressure hole 310 of the wafer cassette 300, thereby releasing the pressure on the wafer cassette 300.

[0070] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0071] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0072] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0073] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A multi-station front-opening wafer cassette loading device, characterized in that, include: Mounting substrate; At least one operating table is disposed on one side of the mounting substrate and is used to place a wafer cassette. At least one clamping mechanism is disposed on one side of the mounting substrate. The clamping mechanism is disposed in a one-to-one correspondence with the wafer cassette placement position and is located above the corresponding wafer cassette placement position. The clamping mechanism is used to constrain or release the wafer cassette.

2. The multi-station front-opening wafer cassette loading device according to claim 1, characterized in that, The top of the wafer cassette is provided with a pressing hole; The compression mechanism includes: A driving component is disposed on one side of the mounting substrate; The pressure head, corresponding to the clamping hole, is located on the driving end of the driving assembly. The driving assembly can drive the pressure head to move towards or away from the clamping hole, so that the pressure head is inserted into the clamping hole to clamp the wafer cassette, or the pressure head is disengaged from the clamping hole to release the clamping of the wafer cassette.

3. The multi-station front-opening wafer cassette loading device according to claim 2, characterized in that, The compression mechanism further includes: A slide rail is provided on one side of the mounting base plate; A sliding member is slidably disposed on the slide rail and connected to the driving end of the driving assembly. The driving assembly drives the sliding member so that the sliding member can move along the extension direction of the slide rail. The pressure head is disposed on the sliding member.

4. The multi-station front-opening wafer cassette loading device according to claim 3, characterized in that, The compression mechanism further includes: The lifting plate has a first end and a second end that are arranged opposite to each other. The first end is disposed on the sliding member, and the second end is disposed corresponding to the pressure hole. The pressure head is disposed on the second end.

5. The multi-station front-opening wafer cassette loading device according to claim 4, characterized in that, The clamping mechanism also includes a connecting plate, one end of which is connected to the driving end of the driving component and the other end of which is connected to the lifting plate.

6. The multi-station front-opening wafer cassette loading device according to claim 4, characterized in that, The lifting plate is bent, and a reinforcing plate is provided at the bend of the lifting plate; or, The lifting plate is curved, and a reinforcing plate is provided at the curved part of the lifting plate.

7. The multi-station front-opening wafer cassette loading device according to claim 3, characterized in that, The clamping mechanism also includes a limiting block located at the end of the slide rail.

8. The multi-station front-opening wafer cassette loading device according to claim 3, characterized in that, The clamping mechanism further includes a base disposed on one side of the mounting base, and the driving component and the slide rail are disposed on the base.

9. The multi-station front-opening wafer cassette loading device according to claim 8, characterized in that, The clamping mechanism further includes a top seat disposed on the base, and the driving component is disposed on the top seat.

10. The multi-station front-opening wafer cassette loading device according to any one of claims 2-9, characterized in that, The pressure head is conical in shape, and its cross-sectional dimensions gradually decrease from top to bottom; the pressure-fixing hole is conical in shape to match the pressure head; or, The pressure head is shaped like a frustum and its cross-sectional dimensions gradually decrease from top to bottom. The pressure hole is also shaped like a frustum to match the pressure head.

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