Sputtering target with adjustable angle

Abstract

The utility model relates to the technical field of sputtering targets, and discloses an angle-adjustable sputtering target, which comprises a mounting seat, and is characterized in that a mounting plate is rotatably mounted at the center of the mounting seat, support rods are symmetrically fixed at the edge of the mounting plate, rotating components are respectively mounted at the top ends of the two support rods, and the rotating components are mounted on the mounting plate. The two rotating assemblies are symmetrically installed on the two sides of the target head. And a driving structure is mounted on the outer side of the supporting rod. The target head is connected with the two supporting rods in a rotating mode, through cooperation of the two driving assemblies, the target head can be driven to conduct angle adjustment on the two supporting rods, and therefore selection can be conducted according to the requirements of a user, and high flexibility is achieved; the mounting base and the mounting disc are connected in a rotating mode, and the mounting disc can drive the target head to rotate through the supporting rod, so that the target head subjected to angle adjustment can be rotationally adjusted according to the requirements of a user, and multi-directional adjustment can be performed according to the requirements of the user.

Description

Technical Field

[0001] This utility model relates to the field of sputtering target technology, specifically to an adjustable-angle sputtering target. Background Technology

[0002] In recent years, with the rise of micro- and small commercial satellites and deep space exploration programs, the application fields of electric propulsion technology have become increasingly wide and the frequency of application has increased. When an electric thruster is working, the high-speed particles it ejects will collide with the surface of an object. When the energy of the incident particles is higher than the sputtering threshold of the impact surface material, the surface particles will detach from the solid wall, resulting in a sputtering effect.

[0003] Chinese utility model patent CN221398012U discloses an angle-adjustable sputtering target, including a mounting flange and a cylinder, with a magnetorheological fluid disposed on the left side of the mounting flange. This utility model incorporates components such as a motor, magnetorheological fluid, coupling, and bevel gears. When the motor rotates, it drives a small gear via the magnetorheological fluid and coupling, which in turn drives a large gear to rotate the target head. The target head's oscillation is achieved through a flexible bellows connection, providing angle oscillation functionality even during vacuum sealing. This solves the problems of tilted sputtering targets where the sputtering angle is fixed and cannot be adjusted; when coating uniformity is poor, it's impossible to correct it through fine-tuning the angle; when the substrate size changes or multiple substrates are installed, the focusing angle cannot be adjusted, resulting in poor process flexibility; and angle adjustment is manual and can only be adjusted when the vacuum chamber is open, leading to low efficiency.

[0004] Although the above-mentioned utility model can adjust the angle of the target head, this adjustment method has limitations. The target head can only be rotated and adjusted in a single direction, and cannot be adjusted in multiple directions according to the user's needs, resulting in poor performance.

[0005] Therefore, we propose an adjustable-angle sputtering target to address the problems mentioned above. Utility Model Content

[0006] The purpose of this utility model is to solve the aforementioned technical problems.

[0007] To achieve the above objectives, the present invention adopts the following technical solution: an adjustable-angle sputtering target, comprising a mounting base, characterized in that: a mounting disk is rotatably mounted at the center of the mounting base, support rods are symmetrically fixed at the edges of the mounting disk, and rotating components are respectively mounted at the top ends of the two support rods, the two rotating components being symmetrically mounted on both sides of the target head; a driving structure is mounted on the outer side of the support rods, and the driving end of the driving structure is connected to the rotating components, the driving structure being used to drive the target head to rotate.

[0008] Furthermore: the mounting base includes a chassis and a rotating disk fixed on the top of the chassis, and the rotating disk and the mounting disk are coaxially arranged, with a bearing fixed between the rotating disk and the mounting disk.

[0009] Furthermore: the rotating assembly includes a rotating shaft fixed to the outer surface of the mounting plate and a rotating sleeve fixed to the top of the support rod, and one end of the rotating shaft passes through the rotating sleeve and is fixed with a drive disk.

[0010] Furthermore, the drive structure includes a "U"-shaped rotating seat rotatably mounted on the outside of the support rod and an electric telescopic rod mounted on the rotating seat. The drive end of the electric telescopic rod is fixed with a drive ring, and a drive shaft is rotatably mounted inside the drive ring and fixed to the outer surface of the drive disc.

[0011] Furthermore: a drive motor is installed at the bottom of the chassis, and a main gear is installed at the output end of the drive motor through the chassis. An annular groove is opened at the bottom of the mounting plate, and an internal gear that meshes with the drive motor is fixed inside the annular groove.

[0012] Furthermore, a plug is provided at the center of the bottom of the chassis, and a power cord is installed at one end of the plug. One end of the power cord passes through the chassis and the rotating disk in sequence and is electrically connected to the target head.

[0013] The beneficial effects of this utility model are:

[0014] The target head of this invention is connected to the two support rods by a rotating mechanism. Through the cooperation of two drive components, the target head can be driven to adjust its angle on the two support rods, thus allowing for selection according to user needs and providing high flexibility. The mounting base and mounting plate are also connected by a rotating mechanism. The mounting plate can drive the target head to rotate through the support rods, allowing for rotational adjustment of the target head after angle adjustment according to user needs. This enables multi-directional adjustment based on user requirements, providing high flexibility and improving the effectiveness of the device. Attached Figure Description

[0015] Figure 1 This is a three-dimensional schematic diagram of the present invention (viewed from top to bottom);

[0016] Figure 2 This is a three-dimensional schematic diagram of the present invention (viewed from bottom to top);

[0017] Figure 3 This is a three-dimensional structural diagram of the mounting base in this utility model;

[0018] Figure 4 This is a bottom view of the mounting plate structure in this utility model;

[0019] Figure 5 This is a partial structural schematic diagram of the present invention;

[0020] Figure 6 This is a schematic diagram of the connection between the support rod and the rotating sleeve in this utility model.

[0021] The names corresponding to each mark in the diagram:

[0022] 1. Mounting base; 101. Chassis; 102. Rotating disc; 2. Mounting disc; 3. Support rod; 4. Rotating assembly; 401. Rotating shaft; 402. Rotating sleeve; 403. Drive disc; 5. Target head; 6. Drive structure; 601. Rotating base; 602. Electric telescopic rod; 603. Drive ring; 604. Drive shaft; 7. Bearing; 8. Drive motor; 9. Main gear; 10. Annular groove; 11. Internal gear; 12. Plug; 13. Power cord. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model are within the protection scope of the present utility model.

[0024] An adjustable-angle sputtering target includes a mounting base 1. Specifically, the mounting base 1 includes a chassis 101, and a rotating disk 102 is fixed at the axis at the top of the chassis 101. It should be noted that a mounting disk 2 is arranged on the top of the chassis 101, coaxially with the rotating disk 102. It should also be noted that a bearing 7 is fixed between the rotating disk 102 and the mounting disk 2. The bearing 7 allows the mounting disk 2 to rotate more smoothly on the mounting base 1, and it is not easy to jam during use.

[0025] A drive motor 8 is installed below the chassis 101. The drive motor 8 is a servo motor, and the output shaft of the drive motor 8 passes through the chassis 101 to install a main gear 9. An annular groove 10 is opened at the bottom of the mounting plate 2, and the main gear 9 is located inside the annular groove 10. An internal gear 11 is fixed inside the annular groove 10. The main gear 9 and the internal gear 11 mesh with each other. When the drive motor 8 drives the main gear 9 to rotate, since the main gear 9 and the internal gear 11 are in a meshing state, the mounting plate 2 can be driven to rotate and adjust on the mounting base 1.

[0026] Two support rods 3 are fixed on the mounting plate 2, and the two support rods 3 are symmetrically arranged about the axis of the mounting base 1. Rotating components 4 are respectively installed on the top of the two support rods 3, and the two rotating components 4 are symmetrically installed on the target head 5. By setting the rotating components 4, the target head 5 can be rotated and adjusted between the two rotating components 4, so that it can be adjusted according to the needs of use and has strong flexibility.

[0027] In detail: The rotating assembly 4 includes a rotating shaft 401 fixed on the outer surface of the target head 5 and a rotating sleeve 402 fixed on one end of the support rod 3. One end of the rotating shaft 401 passes through the rotating sleeve 402 and a drive disk 403 is fixed thereon. Through the cooperation of the rotating shaft 401 and the rotating sleeve 402, the target head 5 can rotate between the two rotating assemblies 4.

[0028] A drive structure 6 is installed on the outside of the support rod 3, and the drive end of the drive structure 6 is connected to the drive disk 403. Through the setting of the drive structure 6, the target head 5 can be driven to adjust the angle in an electric manner, thus providing convenience for the staff.

[0029] In detail: the drive structure 6 includes a U-shaped rotating seat 601 rotatably mounted on the outer wall of the support rod 3, and an electric telescopic rod 602 is mounted on the rotating seat 601. One end of the electric telescopic rod 602 is fixed with a drive ring 603, and the drive ring 603 is rotatably mounted on a drive shaft 604. One end of the drive shaft 604 is fixed to the outer wall of the drive disc 403. It should be noted that the drive shaft 604 and the electric telescopic rod 602 are not coaxial. The target head 5 can be rotated and adjusted by the electric telescopic rod 602.

[0030] It should be noted that: a plug 12 is fixed to the bottom of the chassis 101, and a power cord 13 is installed at one end of the plug 12. One end of the power cord 13 passes through the chassis 101 and the rotating disk 102 in sequence and is electrically connected to the target head 5, thereby providing power to the target head 5.

[0031] During use, when adjusting the angle of the target head 5 according to the user's needs: the electric telescopic rods 602 at both ends are driven simultaneously, and the telescopic ends of the two electric telescopic rods 602 extend at the same time and drive the drive rings 603 to move. The two drive rings 603 can respectively drive the drive shaft 604 to rotate around the axis of the rotating seat 601. The drive shaft 604 can drive the drive disc 403 to rotate, so that the two drive discs 403 respectively drive the target head 5 to adjust the angle through the rotating shaft 401. Thus, it can be selected according to the user's needs and has strong flexibility.

[0032] During use, when the target head 5 is rotated and adjusted according to the user's needs: first, the drive motor 8 is turned on. The drive motor 8 can drive the main gear 9 to rotate. Since the main gear 9 and the internal gear 11 are in a meshing state, the main gear 9 can drive the mounting plate 2 to rotate. The mounting plate 2 can rotate and adjust the target head 5 through the support rods 3 on both sides.

Claims

1. An adjustable-angle sputtering target, comprising a mounting base (1), characterized in that: The mounting base (1) has a mounting plate (2) mounted at its center in a rotatable manner. Support rods (3) are symmetrically fixed at the edge of the mounting plate (2), and rotating components (4) are respectively mounted on the top of the two support rods (3). The two rotating components (4) are symmetrically mounted on both sides of the target head (5). A drive structure (6) is mounted on the outside of the support rods (3), and the drive end of the drive structure (6) is connected to the rotating components (4). The drive structure (6) is used to drive the target head (5) to rotate.

2. The adjustable-angle sputtering target according to claim 1, characterized in that: The mounting base (1) includes a chassis (101) and a rotating disk (102) fixed on the top of the chassis (101). The rotating disk (102) and the mounting disk (2) are coaxially arranged, and a bearing (7) is fixed between the rotating disk (102) and the mounting disk (2).

3. The adjustable-angle sputtering target according to claim 1, characterized in that: The rotating assembly (4) includes a rotating shaft (401) fixed on the outer surface of the mounting plate (2) and a rotating sleeve (402) fixed on the top of the support rod (3), and one end of the rotating shaft (401) passes through the rotating sleeve (402) and is fixed with a drive plate (403).

4. The adjustable-angle sputtering target according to claim 2, characterized in that: The drive structure (6) includes a "U"-shaped rotating seat (601) rotatably mounted on the outside of the support rod (3) and an electric telescopic rod (602) mounted on the rotating seat (601). The drive end of the electric telescopic rod (602) is fixed with a drive ring (603). A drive shaft (604) is rotatably mounted inside the drive ring (603), and the drive shaft (604) is fixed on the outer surface of the drive disc (403).

5. The adjustable-angle sputtering target according to claim 2, characterized in that: A drive motor (8) is installed at the bottom of the chassis (101). The output end of the drive motor (8) passes through the chassis (101) and is equipped with a main gear (9). An annular groove (10) is opened at the bottom of the mounting plate (2), and an internal gear (11) that meshes with the drive motor (8) is fixed inside the annular groove (10).

6. The adjustable-angle sputtering target according to claim 2, characterized in that: A plug (12) is provided at the center of the bottom of the chassis (101). A power cord (13) is installed at one end of the plug (12). One end of the power cord (13) passes through the chassis (101) and the rotating disk (102) in sequence and is electrically connected to the target head (5).

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