Multi-light-source lighting device for silicon wafer detection

Abstract

The utility model relates to the technical field of accessories of silicon wafer detection devices, in particular to a multi-light-source lighting device for silicon wafer detection, which comprises a detection operation panel and two visual capture cameras respectively arranged on the upper side and the lower side of the detection operation panel. A light source lighting assembly is arranged on the detection operation panel and comprises a servo motor arranged on the rear side of the detection operation panel, a U-shaped frame is fixedly installed at the tail end of an output shaft of the servo motor, the detection operation panel is located between plate bodies on the left side and the right side of the U-shaped frame, and electric push rods are fixedly installed on the inner side faces of the plate bodies on the left side and the right side of the U-shaped frame. A wiring box is arranged at the tail end of a telescopic shaft of the electric push rod, and a plurality of light source lamps are detachably connected to the front side face of the wiring box. The LED lamp is provided with multiple light sources for illumination, and the angle and the distance of the light source lamp can be adjusted, so that the light reflection condition can be reduced.

Description

Technical Field

[0001] This utility model relates to the technical field of silicon wafer inspection device accessories, specifically to a multi-source lighting device for silicon wafer inspection. Background Technology

[0002] As a core raw material in the semiconductor industry, the surface defects of silicon wafers directly determine the performance and yield of chips. As semiconductor technology continues to develop towards higher precision and performance, increasingly stringent requirements are being placed on the inspection accuracy of silicon wafers. As a key component of the silicon wafer inspection system, the performance of the lighting device has a decisive impact on the inspection results. Illuminating the surface of the silicon wafer with a light helps to expose and observe the defects on the surface of the silicon wafer more clearly.

[0003] Traditional single-source lighting devices, due to their limited light source, cannot comprehensively and clearly present various features on the silicon wafer surface. When inspecting defects such as fine scratches, pits, and impurities on the silicon wafer surface, the single light source will produce shadows and reflections on the silicon wafer surface, causing some defects to be masked and unable to be captured by the inspection equipment. In addition, single-source lighting is difficult to adapt to the inspection needs of different types and specifications of silicon wafers. During the inspection process, uneven light distribution can easily lead to inaccurate inspection results, seriously affecting inspection efficiency and accuracy.

[0004] Secondly, most single light sources are fixedly installed at corresponding positions on the inspection table, and the illumination angle of the light source cannot be adjusted as needed. During illumination from a specific direction, reflections may occur, affecting the defect detection effect on the silicon wafer surface and causing inconvenience to the user. In view of this, we propose a multi-light source illumination device for silicon wafer inspection. Utility Model Content

[0005] The purpose of this invention is to provide a multi-source illumination device for silicon wafer inspection, so as to solve the defects mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A multi-source illumination device for silicon wafer inspection includes an inspection operation panel and two vision capture cameras respectively disposed on the upper and lower sides of the inspection operation panel. A transparent plate is disposed at the center of the inspection operation panel. An illumination component is disposed on the inspection operation panel, and the illumination component includes a servo motor disposed on the rear side of the inspection operation panel. A U-shaped frame is fixedly mounted at the end of the output shaft of the servo motor. The inspection operation panel is located between the left and right side plates of the U-shaped frame. Electric push rods are fixedly mounted on the inner side of the left and right side plates of the U-shaped frame. A wiring box is disposed at the end of the telescopic shaft of the electric push rod. Multiple light sources are detachably connected to the front side of the wiring box.

[0008] Preferably, a support frame is fixedly installed at the bottom of the detection operation panel, and the cross-section of the support frame is U-shaped.

[0009] Preferably, a rear mounting base is fixedly installed on the top surface of the rear end plate of the support frame, and the servo motor is fixedly installed on the rear mounting base.

[0010] Preferably, a rectangular plate is fixedly mounted on the end of the output shaft of the servo motor, and the U-shaped frame is fixedly mounted on the front side of the rectangular plate.

[0011] Preferably, the U-shaped frame has wiring holes inside, and the inner wall of the wiring holes has multiple through holes.

[0012] Preferably, the wiring box is provided with a rectangular hole that is connected to the outside at both ends, and the inner wall of the rectangular hole is provided with multiple through holes.

[0013] Preferably, a lamp holder is fixedly installed on the light source, and the lamp holder is fixedly installed on the front side of the wiring box by a plurality of fastening screws.

[0014] Preferably, two symmetrical guide posts are fixedly installed on the rear side of the wiring box, and two symmetrical guide sleeves are fixedly installed on the inner sides of both sides of the U-shaped frame. The guide sleeves are fitted onto the guide posts and are slidably connected to the guide posts.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. This utility model achieves flexible adjustment of the position and angle of the light source by setting a servo motor, a U-shaped frame and an electric push rod. The servo motor drives the U-shaped frame to rotate, changing the illumination direction of the light source, while the electric push rod adjusts the distance between the light source and the silicon wafer. This allows the device to provide the most suitable lighting conditions according to the silicon wafer inspection requirements. Multiple light sources can provide different lighting conditions, thereby improving the inspection accuracy and clearly presenting the fine defects on the surface of the silicon wafer.

[0017] 2. This utility model achieves orderly management of light source circuits by setting wiring holes, rectangular holes, wire-passing holes, and through holes. The wiring holes and wire-passing holes plan the route of the circuits within the U-shaped frame, while the rectangular holes and through holes organize the circuits within the wiring box, preventing circuit tangling and damage, thereby reducing the probability of failures caused by circuit problems and extending the service life of the device.

[0018] 3. This utility model achieves stable and convenient installation and movement of the wiring box and light source by setting guide posts and guide sleeves, as well as detachable lamp holders. The sliding connection of the guide posts and guide sleeves ensures smooth movement of the wiring box, while the lamp holder is installed with fastening screws, which facilitates the replacement and maintenance of the light source. This makes it easier for staff to inspect and replace parts of the device, thereby improving work efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the exploded structure of this utility model;

[0021] Figure 3 This is an exploded view of the lighting component of the present invention.

[0022] Figure 4 This is a partial structural schematic diagram of the light source illumination component of this utility model;

[0023] The meanings of the labels in the diagram are as follows:

[0024] 1. Inspection operation panel; 10. Visual capture camera; 11. Transparent plate; 12. Support frame; 13. Rear mounting base;

[0025] 2. Light source lighting assembly; 20. Servo motor; 201. Rectangular plate; 21. U-shaped frame; 211. Wiring hole; 212. Wire hole; 22. Electric push rod; 23. Wiring box; 231. Rectangular hole; 232. Through hole; 24. Lamp holder; 241. Light source lamp; 25. Guide post; 251. Guide sleeve. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figures 1-4This utility model provides a technical solution: a multi-source illumination device for silicon wafer inspection, including an inspection operation panel 1 and two visual capture cameras 10 respectively disposed on the upper and lower sides of the inspection operation panel 1. A transparent plate 11 is disposed at the center of the inspection operation panel 1, and a support frame 12 is fixedly installed at the bottom of the inspection operation panel 1. The support frame 12 has a U-shaped cross-section, which allows the silicon wafer inspection process to be carried out in an orderly manner. The inspection operation panel 1 provides an operation platform for silicon wafer placement and inspection. The visual capture cameras 10 on the upper and lower sides capture images of the silicon wafer from different angles. The transparent plate 11 ensures that light can pass through smoothly and assists the cameras in obtaining clear images. At the same time, the support frame 12 provides stable support for the entire device, ensuring that the inspection process is carried out smoothly and reducing inspection errors caused by shaking.

[0028] Specifically, the detection operation panel 1 is equipped with a light source illumination assembly 2, which includes a servo motor 20 located on the rear side of the detection operation panel 1. A U-shaped frame 21 is fixedly installed at the end of the output shaft of the servo motor 20. The detection operation panel 1 is located between the left and right side plates of the U-shaped frame 21. Electric push rods 22 are fixedly installed on the inner sides of the left and right side plates of the U-shaped frame 21. A wiring box 23 is provided at the end of the telescopic shaft of the electric push rod 22. Multiple light sources 241 are detachably connected to the front side of the wiring box 23. The multiple light sources 241 are of various types, including... Multiple light sources 241 with different power and color are provided. Each light source 241 can be controlled by a corresponding switch to meet the multi-light source illumination requirements of silicon wafer inspection. The servo motor 20 and electric push rod 22 allow for flexible adjustment of the illumination angle and distance of the light sources 241. The output shaft of the servo motor 20 drives the rectangular plate 201 and the U-shaped frame 21 to rotate, changing the illumination direction of the light sources 241. The electric push rod 22 pushes the wiring box 23 and the light sources 241 closer to or further away from the silicon wafer, meeting the illumination requirements of different inspection scenarios and improving the accuracy of silicon wafer surface defect detection.

[0029] In this embodiment, a rear mounting base 13 is fixedly installed on the top surface of the rear end plate of the support frame 12, and the servo motor 20 is fixedly installed on the rear mounting base 13 by multiple fastening screws, which facilitates the fixed installation operation.

[0030] Specifically, a rectangular plate 201 is fixedly installed at the end of the output shaft of the servo motor 20, and a U-shaped bracket 21 is fixedly installed on the front side of the rectangular plate 201 by multiple fastening screws, which facilitates the fixing, installation and disassembly operations.

[0031] Furthermore, the U-shaped frame 21 has a wiring hole 211 inside, and multiple wire through holes 212 are provided on the inner wall of the wiring hole 211; the wiring box 23 has a rectangular hole 231 with both ends connected to the outside, and multiple through holes 232 are provided on the inner wall of the rectangular hole 231, so that the wiring of the light source lamp 241 can be reasonably planned, avoiding wire tangling and reducing the risk of failure caused by messy wiring.

[0032] In addition, a lamp holder 24 is fixedly installed on the light source 241. The lamp holder 24 is fixedly installed on the front side of the wiring box 23 by multiple fastening screws, which facilitates the disassembly and replacement of the light source 241, reduces the difficulty of device maintenance, and improves work efficiency.

[0033] It is worth noting that two symmetrical guide posts 25 are fixedly installed on the rear side of the wiring box 23, and two symmetrical guide sleeves 251 are fixedly installed on the inner side of both sides of the U-shaped frame 21. The guide sleeves 251 are fitted on the guide posts 25 and are slidably connected to the guide posts 25, so that the wiring box 23 moves more smoothly and ensures the stability of the position adjustment of the light source lamp 241.

[0034] It is worth noting that before the servo motor 20 starts working and drives the U-shaped frame 21 to rotate, the telescopic shaft of the electric push rod 22 is shortened to its shortest length so that the U-shaped frame 21 will not collide with the detection operation panel 1 during rotation. After the angle adjustment is completed as the U-shaped frame 21 rotates, the telescopic shaft of the electric push rod 22 is extended to perform the distance adjustment operation of the light source lamp 241.

[0035] Finally, it should be noted that the visual capture camera 10, servo motor 20, electric push rod 22, and light source 241 involved in this utility model are all general standard parts or parts known to those skilled in the art. Each light source 241 is controlled by a corresponding switch. Its structure and principle can be known to those skilled in the art through technical manuals or conventional experimental methods. In the idle space of this device, all the above-mentioned electrical components, which refer to power elements, electrical components, and the matching controller and power supply, are connected by wires. The specific connection method should refer to the working principle of this utility model. The electrical connections between each electrical component are completed in the order of operation. The detailed connection methods are all technologies known in the art.

[0036] When using the multi-source illumination device for silicon wafer inspection of this utility model, the silicon wafer is first placed on the transparent plate 11 of the inspection operation panel 1. The inspection operation panel 1 provides an operation platform for inspection. The vision capture camera 10 captures images of the silicon wafer to obtain clear images or the inspection operation is performed manually.

[0037] When the lighting needs to be adjusted, the servo motor 20 is activated. The output shaft of the servo motor 20 drives the rectangular plate 201 and the U-shaped frame 21 to rotate, changing the illumination direction of the light source 241. At the same time, the electric push rods 22 on the inner side of the plates on both sides of the U-shaped frame 21 are activated. Their telescopic shafts push the wiring box 23 and the light source 241 closer to or further away from the silicon wafer, thereby adjusting the illumination distance.

[0038] During this process, the guide post 25 on the rear side of the wiring box 23 slides within the guide sleeve 251 on the side plate of the U-shaped frame 21 to ensure smooth movement. In addition, different light sources 241 can be selected for lighting operation.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A multi-source illumination device for silicon wafer inspection, comprising an inspection operation panel (1) and two visual capture cameras (10) respectively disposed on the upper and lower sides of the inspection operation panel (1), characterized in that: A transparent plate (11) is provided at the center of the detection operation panel (1). A light source illumination assembly (2) is provided on the detection operation panel (1). The light source illumination assembly (2) includes a servo motor (20) located on the rear side of the detection operation panel (1). A U-shaped frame (21) is fixedly installed at the end of the output shaft of the servo motor (20). The detection operation panel (1) is located between the left and right side plates of the U-shaped frame (21). An electric push rod (22) is fixedly installed on the inner side of the left and right side plates of the U-shaped frame (21). A wiring box (23) is provided at the end of the telescopic shaft of the electric push rod (22). Multiple light sources (241) are detachably connected to the front side of the wiring box (23).

2. The multi-source illumination device for silicon wafer inspection according to claim 1, characterized in that: A support frame (12) is fixedly installed at the bottom of the detection operation panel (1), and the cross-section of the support frame (12) is U-shaped.

3. The multi-source illumination device for silicon wafer inspection according to claim 2, characterized in that: A rear mounting base (13) is fixedly installed on the top surface of the rear end plate of the support frame (12), and the servo motor (20) is fixedly installed on the rear mounting base (13).

4. The multi-source illumination device for silicon wafer inspection according to claim 1, characterized in that: A rectangular plate (201) is fixedly installed at the end of the output shaft of the servo motor (20), and the U-shaped frame (21) is fixedly installed on the front side of the rectangular plate (201).

5. The multi-source illumination device for silicon wafer inspection according to claim 1, characterized in that: The U-shaped frame (21) has a wiring hole (211) inside, and a plurality of wire through holes (212) are provided on the inner wall of the wiring hole (211).

6. The multi-source illumination device for silicon wafer inspection according to claim 1, characterized in that: The wiring box (23) is provided with a rectangular hole (231) that is connected to the outside at both ends, and a plurality of through holes (232) are provided on the inner wall of the rectangular hole (231).

7. The multi-source illumination device for silicon wafer inspection according to claim 6, characterized in that: A lamp holder (24) is fixedly installed on the light source lamp (241), and the lamp holder (24) is fixedly installed on the front side of the wiring box (23) by a plurality of fastening screws.

8. The multi-source illumination device for silicon wafer inspection according to claim 7, characterized in that: Two symmetrical guide posts (25) are fixedly installed on the rear side of the wiring box (23). Two symmetrical guide sleeves (251) are fixedly installed on the inner side of both sides of the U-shaped frame (21). The guide sleeves (251) are fitted on the guide posts (25) and are slidably connected to the guide posts (25).

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