Mechanism for preventing film material from being twisted during film cutting
By coordinating the film stretching assembly and the roll assembly, multiple sets of cylinders are used to precisely tension and clamp the film material in the vertical and horizontal directions, which solves the problem of uneven tension of UV film material during the cutting process and improves the stability of film application and the product qualification rate.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN HESHENG SEMICONDUCTOR EQUIPMENT CO LTD
- Filing Date
- 2025-07-29
- Publication Date
- 2026-05-19
AI Technical Summary
In existing technologies, uneven tension in UV film materials during large-area circular cutting processes can cause the film to warp and twist during transport, affecting the quality and yield of the film application.
Employing a film stretching assembly and a roll assembly, multiple sets of cylinders precisely tension and clamp the film material in the vertical and horizontal directions. Combined with a liftable roll assembly and guide rails, and a pressure regulating valve to dynamically adjust the cylinder air pressure, the film material maintains constant tension during transmission and cutting.
It effectively prevents film material distortion and bubbling, improves the stability and yield of film application, and increases the product qualification rate from 85% to 98%.
Smart Images
Figure CN224257920U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of industrial automation technology, specifically to the field of UV film cutting during wafer temporary bonding, and particularly to a film cutting mechanism to prevent film material distortion. Background Technology
[0002] In wafer manufacturing and packaging, to achieve temporary bonding and protection of the wafer, a ring-cut UV film is often used to attach the film to the wafer surface. UV films have good light transmittance and adhesion properties, and can be debonded by ultraviolet light irradiation in subsequent processes. They are widely used in multiple process stages such as wafer handling, thinning, and dicing.
[0003] However, in existing film cutting processes, especially during large-area circular cuts, the stress state of the film material changes significantly. Because the film material loses its boundary constraint during the cutting process, the remaining film material exhibits uneven tension. This makes the next piece of film to be applied prone to warping, twisting, and wrinkling during transport, thus affecting the subsequent film application quality. Problems such as increased air bubbles, application misalignment, or wafer damage often occur after application. This not only reduces the film application yield but also increases rework costs.
[0004] Current solutions mainly rely on drive rollers or tension rollers to control the tension of the membrane material. However, this method has the following drawbacks: on the one hand, traditional drive rollers are limited by structural dimensions and cannot respond quickly to changes in membrane tension over a large range, resulting in limited dynamic adjustment capabilities; on the other hand, the failure to introduce a clamping and stabilizing structure in the membrane material conveying path makes the membrane material more prone to displacement and deformation under high-speed movement or cutting disturbances, which seriously affects the cutting accuracy and film application consistency.
[0005] Therefore, there is still an urgent need for a mechanism that is simple in structure, highly responsive, can maintain constant tension during the circumferential cutting of UV films, and effectively prevents film distortion, in order to improve the film bonding quality and yield during the temporary bonding process of wafers. Utility Model Content
[0006] The purpose of this invention is to provide a film-cutting anti-twisting mechanism to solve the technical problem that the tension cannot be kept constant when bonding and circumferentially cutting UV film in the prior art.
[0007] A film-cutting anti-twisting mechanism includes a film-pulling assembly and a roll-up assembly. The film-pulling assembly includes a third mounting plate, a first mounting plate, and a second mounting plate arranged vertically in sequence. It is equipped with a first tensioning cylinder fixedly connected to the third mounting plate and the first mounting plate, and a second tensioning cylinder fixedly connected to the first mounting plate and the second mounting plate, respectively. The first mounting plate has an upper clamping jaw at its front outer end, and the third mounting plate has a lower clamping jaw that cooperates with the upper clamping jaw. The first tensioning cylinder is used to adjust the vertical distance between the lower and upper clamping jaws, and the second tensioning cylinder is used to adjust the horizontal distance between the lower and upper clamping jaws.
[0008] By setting up a third mounting plate, a first mounting plate, and a second mounting plate arranged vertically in sequence, and setting a first tensioning cylinder between the third mounting plate and the first mounting plate, and a second tensioning cylinder between the first mounting plate and the second mounting plate, a film clamping mechanism that can be adjusted in both vertical and horizontal directions is formed. The upper clamping jaw is fixed to the front side of the first mounting plate, and the lower clamping jaw is set on the third mounting plate. This allows the first tensioning cylinder to adjust the vertical distance between the clamping jaws, and the second tensioning cylinder to adjust the horizontal distance between the clamping jaws. This enables multi-directional tensioning and stable clamping of the film material during film material conveying and cutting, effectively solving the problem in the prior art where the tension of the film material changes due to the large cutting area and cannot be constantly controlled. It also prevents phenomena such as film material twisting, displacement, and bubble generation, and significantly improves the stability and yield of film material adhesion.
[0009] Furthermore, the coil assembly includes a first fixed plate and a second fixed plate, with a slide rail assembly between them. Wing plates are provided on both sides of the second fixed plate, and a second mounting plate is fixedly connected to the wing plates. A coil is installed between the bottoms of the two wing plates. A third tensioning cylinder is provided on the front side of the second fixed plate. The third tensioning cylinder is connected to a push block, and a pressing strip block for cooperating with the coil is fixedly connected to the push block.
[0010] The roll assembly uses a slide rail assembly between the first and second fixed plates to allow the second fixed plate to move smoothly along the slide rail. At the same time, the second fixed plate has wing plates on both sides and is fixedly connected to the second mounting plate, resulting in a stable structure. In conjunction with the roll cylinder at the bottom of the wing plates and the third tensioning cylinder and pressing block on the front side, a stable and uniform tension can be applied to the film material during the winding process, preventing the film material from loosening, shifting, or wrinkling during winding, thereby ensuring the stability of the winding process and the neatness of the winding.
[0011] Furthermore, the first fixed plate has a groove in the middle, and a top plate passes through the groove. One end of the top plate is fixedly connected to the second fixed plate, and the other end is connected to a lifting cylinder, which is used to drive the second fixed plate to move up and down.
[0012] The first fixing plate has a groove in the middle, which is used to fit a top plate. One end of the top plate is connected to the second fixing plate, and the other end is connected to a lifting cylinder, so that the second fixing plate can be adjusted vertically as a whole. Through the drive of the lifting cylinder and the guiding action of the slide rail assembly, the height of the roll assembly can be precisely adjusted, which helps to adapt to the transmission path of different thicknesses or types of membrane materials, and further enhances the flexibility and consistency of membrane tension control.
[0013] Furthermore, it also includes pressure regulating valves for adjusting the air pressure of each cylinder.
[0014] A pressure regulating valve is installed to adjust the air pressure of each cylinder. The clamping force and tension can be dynamically adjusted according to the actual tension requirements of the membrane material, making the movement of the grippers, pressing blocks and other active components more precise. This enhances the adaptability and control accuracy of the entire mechanism, ensuring stable adhesion and film cutting effects under different membrane materials and working conditions.
[0015] Furthermore, the first tensioning cylinder, the second tensioning cylinder, and the third tensioning cylinder are slide cylinders.
[0016] The first, second, and third tensioning cylinders all use slide-table cylinders, which have higher guidance and stability compared to ordinary cylinders. They can achieve precise linear motion in multiple directions, effectively preventing shaking or deviation during clamping, tensioning, or pressing, thereby improving the stability of the entire mechanism and the tension stability during membrane material transfer.
[0017] To achieve the above objectives, this utility model provides a film-cutting anti-twisting mechanism.
[0018] The film-cutting anti-twisting mechanism provided by this utility model has the following advantages:
[0019] This invention utilizes the coordinated operation of a film stretching assembly and a roll assembly, employing multiple sets of cylinders to precisely tension and clamp the film material in both vertical and horizontal directions. Upper and lower clamping jaws prevent the film material from twisting or deforming during transport and cutting. Simultaneously, the roll assembly incorporates first and second fixed plates with guide rails, working in conjunction with a liftable lifting mechanism, roll cylinder, and clamping blocks to form a stable and reliable winding system. This system enables stable guidance and uniform tension control of the film material. Furthermore, a pressure regulating valve allows for precise adjustment of the air pressure in each cylinder, adapting to different film material characteristics and process requirements. Overall, this invention effectively solves the problems of film material twisting and bubbling caused by tension fluctuations in existing technologies, improving the accuracy, stability, and product yield during film cutting and application. Attached Figure Description
[0020] Figure 1 A three-dimensional structural diagram of the film-cutting and anti-twisting mechanism provided by this utility model;
[0021] Figure 2 This is a first-view structural schematic diagram of the membrane stretching assembly provided by this utility model;
[0022] Figure 3 This is a schematic diagram of the second view structure of the membrane stretching assembly provided by this utility model;
[0023] Figure 4 A schematic diagram of the roll assembly structure provided by this utility model;
[0024] Figure 5 An exploded view of the anti-twisting mechanism for the upper-cutting film provided by this utility model.
[0025] In the diagram: 81. Membrane material; 82. Membrane stretching assembly; 83. Roll assembly; 821. First mounting plate; 822. Second mounting plate; 823. Second tension cylinder; 824. First tension cylinder; 825. Third mounting plate; 826. Lower gripper; 828. Upper gripper; 831. First fixing plate; 832. Second fixing plate; 833. Roll; 834. Push block; 835. Slide rail assembly; 836. Wing plate; 837. Top plate; 838. Pressing bar; 839. Third tension cylinder; 83A. Fourth cylinder; 83B. Adjusting valve. Detailed Implementation
[0026] To more clearly illustrate the technical solution of this utility model, in conjunction with the appendix... Figures 1 to 5 This invention provides a detailed description of a film-cutting anti-twisting mechanism. It should be noted that the following embodiments are for illustrative purposes only and do not constitute a limitation on the scope of protection of this invention.
[0027] like Figures 1 to 5 As shown, the present invention provides a film cutting and anti-twisting mechanism, which includes a film pulling assembly 82 for clamping the film 81, and a roll assembly 83 for winding the film 81 and driving the film pulling assembly 82 to move up and down.
[0028] The membrane assembly 82 includes a first mounting plate 821, a second mounting plate 822, and a third mounting plate 825 arranged vertically. The first mounting plate 821 is disposed behind the third mounting plate 825, and the second mounting plate 822 is located behind the first mounting plate 821.
[0029] The front and rear ends of the first tensioning cylinder 824 are fixedly connected between the third mounting plate 825 and the first mounting plate 821, respectively. The front and rear ends of the second tensioning cylinder 823 are connected between the first mounting plate 821 and the second mounting plate 822, respectively. The first tensioning cylinder 824 is a vertically arranged sliding cylinder used to drive the third mounting plate 825 to move vertically, thereby causing the lower gripper 826 mounted on its left side to move up and down, thus changing the vertical distance between the lower gripper 826 and the upper gripper 828 fixed to the left front side of the first mounting plate 821. The second tensioning cylinder 823 is a horizontally arranged sliding cylinder used to drive the first mounting plate 821 to move horizontally, thereby achieving horizontal adjustment of the upper gripper 828 relative to the lower gripper 826.
[0030] Through the coordinated operation of the lower gripper 826 and the upper gripper 828, the clamping and tension control of the membrane material 81 can be achieved during the membrane material conveying process, so that the membrane material 81 is in a constant tension state before and after the film is cut, avoiding the membrane material from twisting, wrinkling or generating bubbles due to relaxation or uneven stress.
[0031] The coil assembly 83 includes a vertically arranged first fixing plate 831 and a second fixing plate 832, with a slide rail assembly 835 between them. The slide rail assembly 835 consists of a guide rail and a cooperating slider, ensuring stable vertical movement of the second fixing plate 832. Wing plates 836 are provided on the left and right sides of the second fixing plate 832 for providing additional structural mounting. A second mounting plate 822 is fixedly connected between the two wing plates 836.
[0032] A roll drum 833 is provided between the bottom of the two wing plates 836. The roll drum 833 is used to wind up the film material 81. Its rotation provides traction force for the film material 81, realizing the conveying of the film material. A third tensioning cylinder 839 is vertically installed in the middle of the front side of the second fixed plate 832. The third tensioning cylinder 839 is also a slide cylinder. Its floating head is connected to a push block 834. The push block 834 is fixedly connected to a pressing strip 838. The pressing strip 838 is arranged facing the roll drum 833 and forms a certain distance with the roll drum 833. It can apply a pressing force during the winding process, so that the film material 81 is tightly attached to the surface of the roll drum 833, effectively preventing the film material 81 from slipping, deflecting and wrinkling during the winding process.
[0033] In addition, a groove is provided in the middle of the first fixing plate 831, and a top plate 837 is disposed in the groove. One end of the top plate 837 is fixedly connected to the second fixing plate 832, and the other end is connected to the first fixing plate 831 through a lifting cylinder 83A. The lifting cylinder 83A can drive the second fixing plate 832 to rise and fall in the vertical direction, thereby realizing the up and down adjustment of the overall position of the coil assembly 83, and achieving smooth guidance in conjunction with the slide rail assembly 835.
[0034] In order to achieve tension adjustment under different film material properties, the roll assembly is also equipped with a pressure regulating valve 83B, which is used to adjust the air pressure in each cylinder to precisely control the clamping force, pressing force and pulling tension, thereby ensuring that the UV film is always in a constant tension state during the cutting process.
[0035] In summary, the film cutting and anti-twisting mechanism provided by this utility model effectively solves the problems of film twisting and adhering air bubbles caused by tension fluctuations during the temporary bonding and ring cutting of UV film on wafers in the prior art. This is achieved by setting multiple tension cylinders to coordinately adjust the clamping distance of the upper and lower grippers, combined with an adjustable pressure winding mechanism. This significantly improves the stability of the film application process and the product qualification rate. In practice, the product qualification rate has increased from 85% to 98%.
[0036] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A film-cutting anti-twisting mechanism, characterized in that, The assembly includes a film stretching component (82) and a roll material component (83). The film stretching component (82) includes a third mounting plate (825), a first mounting plate (821), and a second mounting plate (822) arranged vertically in sequence. It is equipped with a first tensioning cylinder (824) fixedly connected to the third mounting plate (825) and the first mounting plate (821), and a second tensioning cylinder (823) fixedly connected to the first mounting plate (821) and the second mounting plate (822). The first mounting plate (821) has an upper clamping jaw (828) at its front outer end, and the third mounting plate (825) has a lower clamping jaw (826) that cooperates with the upper clamping jaw (828). The first tensioning cylinder (824) is used to adjust the vertical distance between the lower clamping jaw (826) and the upper clamping jaw (828), and the second tensioning cylinder (823) is used to adjust the horizontal distance between the lower clamping jaw (826) and the upper clamping jaw (828).
2. The film-cutting anti-twisting mechanism according to claim 1, characterized in that, The coil assembly (83) includes a first fixing plate (831) and a second fixing plate (832), with a slide rail assembly (835) between them. Wing plates (836) are provided on both sides of the second fixing plate (832). The second mounting plate (822) is fixedly connected to the wing plates (836). A coil drum (833) is installed between the bottoms of the two wing plates (836). A third tensioning cylinder (839) is provided on the front side of the second fixing plate (832). The third tensioning cylinder (839) is connected to a push block (834). The push block (834) is fixedly connected to a pressing strip (838) for cooperating with the coil drum (833).
3. The film-cutting anti-twisting mechanism according to claim 2, characterized in that, The first fixing plate (831) has a groove in the middle, and a top plate (837) passes through the groove. One end of the top plate (837) is fixedly connected to the second fixing plate (832), and the other end is connected to a lifting cylinder. The lifting cylinder is used to drive the second fixing plate (832) to move up and down.
4. The film-cutting anti-twisting mechanism according to claim 3, characterized in that, It also includes pressure regulating valves for adjusting the air pressure of each cylinder.
5. The film-cutting anti-twisting mechanism according to claim 2, characterized in that, The first tensioning cylinder (824), the second tensioning cylinder (823) and the third tensioning cylinder (839) are slide cylinders.