Convenient-to-adjust support frame for scanning electron microscope equipment

Abstract

The utility model relates to a convenient-to-adjust support frame for scanning electron microscope equipment, and belongs to the technical field of scanning electron microscope support frames. The convenient-to-adjust supporting frame for the scanning electron microscope equipment comprises an electron microscope equipment body, a supporting base, a first support, a second support, a supporting pipe, a lifting column, a material disc and a limiting assembly, and the limiting assembly is arranged on the outer wall of the supporting pipe and can be used for limiting a gear; through cross movement of the first support and the second support, the horizontal movement distance of the charging tray can be remarkably increased, a shifting plate drives a lifting clamping block to retract into a limiting seat, a rotating shaft and a pointer can be conveniently rotated to point to a caliper, and after the caliper deducts a certain volume height, a lifting column extends outwards by a certain height, and then the caliper is exposed; the exposed distance of the caliper needs to be increased on the basis of the set height, the overall tray height can be calculated, the proper height can be calculated conveniently in cooperation with the sample height, and the adjusting efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of scanning electron microscope support technology, and in particular to a support for a scanning electron microscope device that is easy to adjust. Background Technology

[0002] In today's era of rapid technological advancement, scanning electron microscopes (SEMs) have found widespread application across various fields due to their simplicity, efficiency, and high resolution. SEMs are among the most widely used materials characterization instruments. They possess a large depth of field, a wide magnification range, and nanometer- or even sub-nanometer-level high-resolution imaging capabilities, enabling imaging and dimensional measurement of complex and rough surface morphologies. Combined with a backscattered electron probe, they can analyze the compositional distribution of some materials.

[0003] Most existing scanning equipment, including scanning electron microscopes, uses automatic rapid sample loading, placing the sample to be scanned on the sample stage. However, due to the inconsistent structure and volume of the samples, the distance between the sample and the electron microscope lens varies, resulting in poor lens imaging. In some cases, the sample may even collide with the lens, causing damage to the lens and affecting the scanning effect. Utility Model Content

[0004] Therefore, it is necessary to provide an easily adjustable support frame for scanning electron microscopes to address the problems caused by inconsistent sample structure and volume, varying distances between the sample and the electron microscope lens, resulting in poor lens imaging effects, or even sample collisions with the lens causing lens damage and affecting scanning results.

[0005] An adjustable support frame for a scanning electron microscope includes: an electron microscope body, a bracket movably connected inside the electron microscope body, a support base fixedly connected to one side of the bracket, a first support fixedly connected above the support base, and a second support fixedly connected above the first support.

[0006] A support tube is movably disposed inside the second support. A lifting column is movably inserted inside the support tube. A gear is meshed inside the lifting column. A material tray is fixedly connected above the lifting column.

[0007] A limiting component is provided on the outer wall of the support tube to limit the gear.

[0008] In one embodiment, the first support and the second support move in a 90-degree direction, and the first support and the second support move along the same horizontal line as the support base.

[0009] In one embodiment, the outer wall of the support tube slides against the inner wall of the second support, and the support tube moves with the second support.

[0010] In one embodiment, a rotating shaft is fixedly inserted inside the gear, with both ends of the rotating shaft rotating above the support tube, and a turntable is fixedly connected to one end of the rotating shaft.

[0011] In one embodiment, the limiting component includes a limiting seat fixed to the outer wall of the support tube, a lifting block is movably inserted inside the limiting seat, a chuck is engaged above the lifting block, and the chuck is fixedly sleeved on the surface of the rotating shaft.

[0012] In one embodiment, a lever is fixedly connected to one side of the lifting block, and anti-slip texture is provided on the upper part of the lever.

[0013] In one embodiment, a caliper is provided on one outer wall of the lifting column, and a pointer is fixedly connected to one outer wall of the support tube, with one side of the pointer extending toward the side close to the caliper.

[0014] Beneficial effects

[0015] 1. The support base is fixed on the outer wall of the bracket. The cross movement of the first and second supports can significantly increase the horizontal movement distance of the material tray, making it easier to adjust the position of the material tray. The lever drives the lifting block to retract into the interior of the limit seat, so that the lifting block is disengaged from the chuck, making it easier to rotate the shaft. The pointer points to the caliper. After deducting a certain volume height, the caliper will be exposed after the lifting column extends outward to a certain height. When it is necessary to calculate the height of the material tray, the caliper exposure distance needs to be added to the predetermined height. The overall material tray height can be calculated. Combined with the sample height, it is easy to calculate the appropriate height and increase the adjustment efficiency.

[0016] 2. The gear slides inside the support tube, and the material tray is supported above the gear. The lifting height of the gear is changed by rotating the lifting column. When the sample height is high, the height of the material tray is lowered. When the sample volume is low, the height of the material tray is lowered, so that the sample above the material tray is kept at a certain distance from the lens of the electron microscope equipment, which improves the scanning clarity and increases the safety of the lens of the electron microscope equipment during use. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the combined structure of the first and second supports of this utility model;

[0020] Figure 3 This is a schematic diagram of the disassembled structure of the lifting column of this utility model;

[0021] Figure 4 This is a schematic diagram of the support tube structure of this utility model;

[0022] Figure 5 This utility model Figure 4 Enlarged view of point A in the middle.

[0023] Figure label:

[0024] 100. Electron microscope body; 101. Bracket; 200. Support base; 300. First support; 400. Second support; 500. Support tube; 501. Gear; 5011. Rotating shaft; 5012. Turntable; 502. Lifting column; 5021. Caliper; 503. Pointer; 600. Limiting assembly; 601. Limiting seat; 602. Lifting block; 603. Pulley; 604. Chuck; 700. Material tray. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0026] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this specification are for illustrative purposes only and do not represent the only possible implementation.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0028] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0029] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this specification belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0030] The following is combined Figures 1-5 This invention describes an adjustable support frame for a scanning electron microscope.

[0031] In one embodiment, an adjustable support frame for a scanning electron microscope (SEM) includes: an SEM body 100, a bracket 101, a support tube 500, and a limiting component 600 movably connected inside the SEM body 100; a support base 200 fixedly connected to one side of the bracket 101; a first support 300 fixedly connected above the support base 200; a second support 400 fixedly connected above the first support 300; the support tube 500 movably disposed inside the second support 400; a lifting column 502 movably inserted into the support tube 500; a gear 501 meshingly connected inside the lifting column 502; a material tray 700 fixedly connected above the lifting column 502; and the limiting component 600 disposed on the outer wall of the support tube 500 for limiting the gear 501.

[0032] In this embodiment, the first support 300 and the second support 400 are both fixed on the support base 200. The support base 200 moves with the bracket 101. The bracket 101 is located inside the electron microscope equipment body 100. The electron microscope equipment body 100 is equipped with a lens and a vacuum device. After the bracket 101 is pushed into the electron microscope equipment body 100, the support base 200 will be located directly below the lens of the electron microscope equipment body 100.

[0033] The first support 300 and the second support 400 are both supports that can move the planar position of the material tray 700. Both the first support 300 and the second support 400 are equipped with sliding rods and can slide along the sliding rods. The first support 300 and the second support 400 can be fixed to the sliding rods by bolts. After the first support 300 and the second support 400 are adjusted, the material tray 700 will be positioned below the lens of the electron microscope body 100. The position of the material tray 700 is fixed during the scanning process.

[0034] Gear 501 slides inside support tube 500, and supports material tray 700 above gear 501. The lifting height of gear 501 is changed by rotating lifting column 502. When the sample height is high, the height of material tray 700 is lowered. When the sample volume is low, the height of material tray 700 is lowered, so that the sample above material tray 700 is kept at a certain distance from the lens of electron microscope equipment body 100, thereby improving the scanning clarity and increasing the safety of electron microscope equipment body 100 lens during use.

[0035] like Figure 1 , Figure 2 and Figure 3 As shown, the first support 300 and the second support 400 move in a 90-degree direction. The first support 300 and the second support 400 move on the same horizontal line as the support base 200. The outer wall of the support tube 500 slides against the inner wall of the second support 400. The support tube 500 moves with the second support 400.

[0036] In this embodiment, the cross movement of the first support 300 and the second support 400 can significantly increase the horizontal movement distance of the material tray 700, facilitating the adjustment of the position of the material tray 700. The support tube 500 stands vertically on the second support 400, and the second support 400 has a slot inside, which can increase the contact area between the second support 400 and the support tube 500, improving the stability of the support tube 500 and the second support 400. The detachable connection between the support tube 500 and the second support 400 allows for easy removal of the support tube 500, facilitating the adjustment of the height of the material tray 700.

[0037] like Figure 3 , Figure 4 and Figure 5 As shown, a rotating shaft 5011 is fixedly inserted inside the gear 501. The two ends of the rotating shaft 5011 rotate above the support tube 500. A turntable 5012 is fixedly connected to one end of the rotating shaft 5011. The limiting component 600 includes a limiting seat 601 fixed on the outer wall of the support tube 500. A lifting block 602 is movably inserted inside the limiting seat 601. A chuck 604 is meshed above the lifting block 602. The chuck 604 is fixedly sleeved on the surface of the rotating shaft 5011.

[0038] In this embodiment, a limiting block is installed on the surface of the rotating shaft 5011. The limiting block is fixed above the support tube 500. The rotating shaft 5011 is located above the support tube 500 and drives the gear 501 to rotate. The surface of the turntable 5012 is equipped with anti-slip texture to increase friction. Rotating the turntable 5012 is used to control the rotation of the rotating shaft 5011, which facilitates the adjustment of the height of the lifting column 502. After the lifting column 502 has rotated, a spring is installed inside the limiting seat 601. The spring supports the lifting block 602 upward. The lifting block 602 slides above the limiting seat 601. The upper part of the lifting block 602 engages with the chuck 604. The chuck 604 is used to control the rotation of the rotating shaft 5011. When the lifting block 602 is engaged with the chuck 604, the gear 501 will stop rotating, which facilitates the fixing of the height of the lifting column 502 and improves the stability of the lifting column 502 during use.

[0039] like Figure 2 , Figure 3 and Figure 4 As shown, a lever plate 603 is fixedly connected to one side of the lifting block 602. Anti-slip texture is provided on the upper part of the lever plate 603. A caliper 5021 is provided on one side of the outer wall of the lifting column 502. A pointer 503 is fixedly connected to one side of the outer wall of the support tube 500. One side of the pointer 503 extends towards the side close to the caliper 5021.

[0040] When the height of the lifting column 502 needs to be adjusted, the lever 603 is moved. The lever 603 causes the lifting block 602 to retract into the limit seat 601, disengaging the lifting block 602 from the chuck 604. This facilitates the rotation of the rotating shaft 5011, and the pointer 503 points to the caliper 5021. After deducting a certain volume height, the caliper 5021 will be exposed after the lifting column 502 extends outward to a certain height. When it is necessary to calculate the height of the material tray 700, the exposed distance of the caliper 5021 needs to be added to the predetermined height. The overall height of the material tray 700 can be calculated. Combined with the sample height, it is easy to calculate the appropriate height and increase the adjustment efficiency.

[0041] Working principle:

[0042] The support base 200 is fixed to the outer wall of the bracket 101. The cross movement of the first support 300 and the second support 400 can significantly increase the horizontal movement distance of the material tray 700, making it easier to adjust the position of the material tray 700. The lever 603 drives the lifting block 602 to retract into the interior of the limit seat 601, so that the lifting block 602 is disengaged from the chuck 604, making it easier to rotate the rotating shaft 5011. The pointer 503 points to the caliper 5021. After deducting a certain volume height, the caliper 5021 will be exposed after the lifting column 502 extends outward to a certain height. When it is necessary to calculate the height of the material tray 700, the exposure distance of the caliper 5021 needs to be added to the predetermined height. The overall height of the material tray 700 can be calculated. Combined with the sample height, it is easy to calculate the appropriate height and increase the adjustment efficiency.

[0043] It should be noted that the electron microscope equipment body 100 and other components mentioned above are all devices with relatively mature existing technologies. The specific model can be selected according to actual needs. At the same time, the electron microscope equipment body 100 can be powered by a built-in power supply or by mains power. The specific power supply method should be selected according to the situation, and will not be elaborated here.

[0044] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The above-described embodiments are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the appended claims.

Claims

1. A support frame for an easily adjustable scanning electron microscope, characterized in that, include: The electron microscope equipment body (100) has a bracket (101) movably connected inside the electron microscope equipment body (100). A support base (200) is fixedly connected to one side of the bracket (101). A first support (300) is fixedly connected above the support base (200). A second support (400) is fixedly connected above the first support (300). A support tube (500) is movably disposed inside the second support (400). A lifting column (502) is movably inserted into the support tube (500). A gear (501) is meshed inside the lifting column (502). A material tray (700) is fixedly connected above the lifting column (502). A limiting component (600) is provided on the outer wall of the support tube (500) for limiting the gear (501).

2. The easily adjustable support frame for scanning electron microscope equipment according to claim 1, characterized in that, The first support (300) and the second support (400) move in a 90-degree direction, and the first support (300) and the second support (400) move along the same horizontal line as the support base (200).

3. The easily adjustable support frame for scanning electron microscope equipment according to claim 1, characterized in that, The outer wall of the support tube (500) slides against the inner wall of the second support (400), and the support tube (500) moves with the second support (400).

4. The easily adjustable support frame for scanning electron microscope equipment according to claim 1, characterized in that, A rotating shaft (5011) is fixedly inserted inside the gear (501). The two ends of the rotating shaft (5011) are located above the support tube (500) and rotate. One end of the rotating shaft (5011) is fixedly connected to a turntable (5012).

5. The easily adjustable support frame for scanning electron microscope equipment according to claim 4, characterized in that, The limiting component (600) includes a limiting seat (601) fixed on the outer wall of the support tube (500), a lifting block (602) is movably inserted inside the limiting seat (601), a chuck (604) is engaged above the lifting block (602), and the chuck (604) is fixedly sleeved on the surface of the rotating shaft (5011).

6. The easily adjustable support frame for scanning electron microscope equipment according to claim 5, characterized in that, A lever plate (603) is fixedly connected to one side of the lifting block (602), and anti-slip texture is provided on the upper part of the lever plate (603).

7. The easily adjustable support frame for scanning electron microscope equipment according to claim 5, characterized in that, A caliper (5021) is provided on one side of the outer wall of the lifting column (502), and a pointer (503) is fixedly connected to one side of the outer wall of the support tube (500). One side of the pointer (503) extends towards the side close to the caliper (5021).

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