Device for measuring center distance of arc raceway of sliding block

Abstract

A sliding block arc raceway center distance measuring device comprises a base, the base fixes a to-be-measured sliding block through a pneumatic attaching module, a pneumatic clamping module and a positioning adjusting module, and the to-be-measured sliding block is measured through a first sensor module and a second sensor module; the device is simple in operation, does not damage the surface of the raceway, is high in detection precision and measurement efficiency, and achieves the rapid and high-precision measurement of the sliding block.

Description

Technical Field

[0001] This utility model relates to the field of precision mechanical measurement technology, and in particular to a device for measuring the center distance of a slider arc raceway. Background Technology

[0002] As a core component of high-precision CNC machine tools and automation devices, the performance of linear guide slider pairs is highly dependent on the machining accuracy of the internal arc raceways of the slider. Traditionally, the measurement of the raceway interior mainly relies on manual operation of ball-end micrometers for batch measurements, and manual image measuring instruments for initial and spot checks. This measurement method has significant drawbacks such as high time cost, low inspection accuracy, and easy scratching of the raceway surface. In addition, due to the small internal space of the slider, traditional measuring tools are difficult to accurately measure the center distance, and there is a lack of high-precision measurement methods for sliders of various sizes, resulting in poor measurement stability and low efficiency. Summary of the Invention

[0003] In order to overcome the shortcomings of the prior art, the purpose of this utility model is to provide a slider arc raceway center distance measuring device, which is simple to operate, does not damage the raceway surface, has high detection accuracy and measurement efficiency, and realizes rapid and high-precision measurement of slider.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] A slider circular arc raceway center distance measuring device includes a base 1. The base 1 fixes the slider 5 to be measured via a pneumatic bonding module I, a pneumatic clamping module II, and a positioning adjustment module IV. The slider 5 to be measured is measured using a first sensor module III-1 and a second sensor module III-2.

[0006] The pneumatic bonding module I includes a first cylinder 10-1, which is fixed to a base 1. The first cylinder 10-1 is connected to a first cylinder holder 11-1, which is in contact with a first slider 13-1 on a first linear guide rail 12. The first linear guide rail 12 is fixed to the base 1. A hinge base plate 14 is fixed above the first slider 13-1. The hinge base plate 14 is connected to a hinge swing plate 15 via a pin, enabling the hinge swing plate 15 to rotate slightly around the pin. The hinge swing plate 15 is connected to a positioning adjustment module IV. The first cylinder 10-1 pulls the hinge swing plate 15, causing the positioning adjustment module IV to move from the internal area of ​​the slider 5 to the inner wall of the slider 5, so that the precision measuring rod installed on the positioning adjustment module IV is tightly fitted to the inner arc raceway surface of the slider 5.

[0007] The pneumatic clamping module II includes a second cylinder 10-2. The second cylinder 10-2 is fixed to the base 1. The second cylinder 10-2 is connected to the second cylinder retainer 11-2. The second cylinder retainer 11-2 contacts the second slider 13-2 on the second linear guide rail 19. The second linear guide rail 19 is fixed to the base 1. A clamping angle iron 18 is fixed above the second slider 13-2. The clamping angle iron 18 is connected to the clamping plate 17 through a pin, so that the clamping plate 17 can rotate slightly around the pin. The clamping plate 17 contacts the side of the slider 5 to be tested, thereby restricting the X-direction movement freedom of the slider 5 to be tested.

[0008] The positioning adjustment module IV includes a vertical mounting base 2, a rotary mounting base 3, and a telescopic mounting base 4. A countersunk hole is machined inside the base 1. A guide shaft 2-4, corresponding to the countersunk hole, is machined on the vertical mounting base 2. The guide shaft 2-4 on the vertical mounting base 2 is installed inside the countersunk hole of the base 1. A spring 16 is installed between the end of the guide shaft and the countersunk hole, allowing the guide shaft to move up and down along the axial direction of the countersunk hole, thus achieving vertical movement of the vertical mounting base 2 relative to the base 1. Similarly, a countersunk hole is machined inside the rotary mounting base 3. A guide shaft, corresponding to the countersunk hole, is machined on the telescopic mounting base 4. The guide shaft is installed inside the countersunk hole. A spring is installed between the end of the guide shaft and the countersunk hole, allowing the guide shaft to move up and down along the axial direction of the countersunk hole, thus achieving vertical movement of the telescopic mounting base 4 relative to the rotary mounting base 3. The rotary mounting base 3 is fixed to the hinge swing plate 15 of the pneumatic bonding module I, enabling the rotary mounting base 3 to rotate around the hinge, which in turn drives the telescopic mounting base 4 to rotate around the hinge.

[0009] The vertical mounting base 2 has a structure for mounting a precision measuring rod. A first hexagonal groove 2-1 and a second hexagonal groove 2-3 are machined in the Y direction of the vertical mounting base 2 for mounting a second precision measuring rod 8. A quarter-circular arc surface 2-2 is machined on the remaining parts of the first hexagonal groove 2-1 and the second hexagonal groove 2-3 in the Y direction for contact with the standard ball on the precision measuring rod. The structures for mounting the precision measuring rods on the base 1, the telescopic mounting base 4, and the rotating mounting base 3 are the same as those on the vertical mounting base 2. A third precision measuring rod 9 is mounted on the base 1, a first precision measuring rod 7 is mounted on the rotating mounting base 3, and a fourth precision measuring rod 26 is mounted on the telescopic mounting base 4. The second precision measuring rod 8 and the fourth precision measuring rod 26 are always in close contact with the upper wall of the inner arc raceway of the slider 5 to be measured, while the first precision measuring rod 7 and the third precision measuring rod 9 are in close contact with the lower wall of the inner arc raceway of the slider 5 to be measured.

[0010] The precision measuring rod has a first frustum 8-2 at its rear end. A first hexagonal boss 8-1 next to the first frustum 8-2 is fixed in place by engaging with a first hexagonal groove 2-1 on the vertical mounting base 2. A second hexagonal boss 8-6 next to the second frustum 8-7 at the front of the precision measuring rod is fixed in place by engaging with a second hexagonal groove 2-3. A measuring surface 8-8 is provided in front of the second hexagonal boss 8-6. Three standard spheres with the same radius are provided between the first hexagonal boss 8-1 and the second hexagonal boss 8-6 of the precision measuring rod: a first standard sphere 8-3, a second standard sphere 8-4, and a third standard sphere 8-5. The measuring surface 8-8 of the precision measuring rod is machined into a cuboid. The shorter cuboid precision measuring rod is placed closer to the sensor, and the longer cuboid precision measuring rod is placed farther from the sensor.

[0011] The first precision measuring rod 7, the second precision measuring rod 8, the third precision measuring rod 9, and the fourth precision measuring rod 26 are identical except for the length of the measuring surface. The end face of the cuboid measuring surface 8-8 is machined with laser-etched lines to facilitate measurement by the photoelectric displacement sensor 23.

[0012] The base 1 has a fixed positioning back plate 6 on its back. The positioning back plate 6 is equipped with a first electromagnet 20 and a second electromagnet 21. The first electromagnet 20 and the second electromagnet 21 are in contact with the back of the slider 5 to be tested. The PLC controls the electromagnets to turn on and off, thereby limiting the displacement of the slider 5 in the Y direction and realizing the rapid adsorption and release of the slider 5 to be tested.

[0013] The first sensor module III-1 and the second sensor module III-2 have the same structure. The second sensor module III-2 includes a displacement platform 25, which is fixed on the corner of the base 1 and the positioning back plate 6. The displacement platform 25 is connected to the first sensor mounting bracket 22, and the first sensor mounting bracket 22 is connected to the second sensor mounting bracket 24. The second sensor mounting bracket 24 and the first sensor mounting bracket 22 clamp the photoelectric displacement sensor 23. The optical axis of the photoelectric displacement sensor 23 can be perpendicular to the end surface of the precision measuring rod. The pitch angle of the optical axis of the photoelectric displacement sensor 23 can be adjusted by adjusting the tightness of the adjusting bolt. The displacement platform 25 is used to adjust the relative position of the photoelectric displacement sensor 23 and the protrusion of the precision measuring rod.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model utilizes the cooperation of pneumatic bonding module I, pneumatic clamping module II, and positioning adjustment module IV to achieve rapid positioning and clamping of the slider to be tested; the base serves as the installation positioning reference for each module, reducing hardware costs and improving installation accuracy; the replaceable precision measuring rod adapts to sliders of various specifications, providing strong versatility; and the displacement platform drives the photoelectric displacement sensor, resulting in high measurement accuracy. Attached Figure Description

[0015] Figure 1This is a schematic diagram of the structure of this utility model.

[0016] Figure 2 This is a schematic diagram of the structure of the pneumatic bonding module of this utility model.

[0017] Figure 3 This is a schematic diagram of the structure of the pneumatic clamping module of this utility model.

[0018] Figure 4 This is a schematic diagram of the positioning adjustment module of this utility model.

[0019] Figure 5 This is a schematic diagram of the vertical mounting base and base of the positioning adjustment module of this utility model.

[0020] Figure 6 This is a schematic diagram of the telescopic mounting base and the rotary mounting base of the positioning adjustment module of this utility model.

[0021] Figure 7 This is a schematic diagram of the structure of the precision measuring rod of this utility model.

[0022] Figure 8 This is a schematic diagram of the positioning backplate and photoelectric displacement sensor of this utility model.

[0023] Wherein: Ⅰ is the pneumatic bonding module, Ⅱ is the pneumatic clamping module, Ⅲ-1 is the first sensor module, Ⅲ-2 is the second sensor module, Ⅳ is the positioning clamping module, 1 is the base, 2 is the vertical mounting base 2, 2-1 is the first hexagonal groove, 2-2 is a 1 / 4 arc surface, 2-3 is the second hexagonal groove, 2-4 is the guide shaft, 3 is the rotary mounting base, 4 is the telescopic mounting base, 5 is the slider to be tested, 6 is the positioning back plate, 7 is the first precision measuring rod, 8 is the second precision measuring rod, 8-1 is the first hexagonal boss, 8-2 is the first frustum, 8-3 is the first standard sphere, 8-4 is the second standard sphere, 8-5 is the third standard sphere, 8-6 is the second hexagonal boss. 8-7 is the second frustum, 8-8 is the measuring surface, 9 is the third precision measuring rod, 10-1 is the first cylinder, 10-2 is the second cylinder, 11-1 is the first cylinder retainer, 11-2 is the second cylinder retainer, 12 is the first linear guide, 13-1 is the first slider, 13-2 is the second slider, 14 is the hinge base plate, 15 is the hinge swing plate, 16 is the spring, 17 is the clamping plate, 18 is the clamping angle iron, 19 is the second linear guide, 20 is the first electromagnet, 21 is the second electromagnet, 22 is the first sensor mounting bracket, 23 is the photoelectric displacement sensor, 24 is the second sensor mounting bracket, 25 is the displacement platform, and 26 is the fourth precision measuring rod. Detailed Implementation

[0024] The present invention will be described in detail with reference to the embodiments and accompanying drawings.

[0025] Reference Figure 1 A slider arc raceway center distance measuring device includes a base 1, on which square grooves and countersunk holes of different sizes are opened as mounting references for various components on the base 1, so that the mounting positions of each component are accurate and reliable; the base 1 fixes the slider 5 to be measured via a pneumatic bonding module I, a pneumatic clamping module II, and a positioning adjustment module IV, and the slider 5 to be measured is measured using a first sensor module III-1 and a second sensor module III-2.

[0026] Reference Figure 1 , Figure 2 , Figure 4 The pneumatic bonding module I includes a first cylinder 10-1, a first cylinder holder 11-1, a first slider 13-1, a first linear guide rail 12, a hinge base plate 14, and a hinge swing plate 15. The first cylinder 10-1 is fixed in the square groove of the base 1 by bolts. The first cylinder 10-1 and the first cylinder holder 11-1 are threaded together. The first cylinder holder 11-1 contacts the first slider 13-1, which moves back and forth in the Y direction on the first linear guide rail 12. The first linear guide rail 12 is fixed on the base 1. The hinge base plate 14 is fixed above the first slider 13-1 by four bolts. The hinge base plate 14 swings with the hinge via a pin. The plates 15 are connected to form a linkage mechanism that can swing around the X-axis, which can realize the slight rotation of the hinge swing plate 15 around the pin. The hinge swing plate 15 is connected to the rotary mounting seat 3 in the positioning adjustment module IV by bolts. When the first cylinder 10-1 is started, the first cylinder 10-1 pulls the hinge swing plate 15 and drives the rotary mounting seat 3 from the internal area of ​​the slider 5 to be tested to the inner wall of the slider 5. Since the hinge swing plate 15 can rotate around the pin, the rotary mounting seat 3 mounted on the hinge swing plate 15 can realize a certain amount of yaw motion, which can make the precision measuring rod mounted on the rotary mounting seat 3 fit tightly with the inner arc raceway surface of the slider 5 to be tested.

[0027] Reference Figure 1 , Figure 3The pneumatic clamping module II includes a second cylinder 10-2, a second cylinder holder 11-2, a second slider 13-2, a second linear guide rail 19, a clamping plate 17, and a clamping angle iron 18. The second cylinder 10-2 is fixed in the square groove of the base 1 by bolts. The second cylinder 10-2 and the second cylinder holder 11-2 are threaded together. The second cylinder holder 11-2 contacts the second slider 13-2, which moves back and forth in the X direction on the second linear guide rail 19. The second linear guide rail 19 is fixed on the base 1. The clamping angle iron 18 is fixed above the second slider 13-2 by four bolts. The clamping angle iron 18 is connected to the clamping plate 17 by a pin, which allows the clamping plate 17 to rotate slightly around the pin. The clamping angle iron 18 has a stepped surface machined on it to limit the rotation angle of the clamping plate 17. The clamping angle iron 18 pushes the clamping plate 17, so that the clamping plate 17 applies pressure to the side of the slider 5 to be tested, thus limiting the movement of the slider 5 in the X direction.

[0028] Reference Figure 4 , Figure 5 , Figure 6 The positioning adjustment module IV includes a vertical mounting base 2, a telescopic mounting base 4, and a rotary mounting base 3. A countersunk hole is machined inside the base 1. A guide shaft 2-4 that mates with the countersunk hole is machined on the vertical mounting base 2. The guide shaft 2-4 on the vertical mounting base 2 is installed in the countersunk hole of the base 1. A spring 16 is provided between the end of the guide shaft and the countersunk hole, so that the guide shaft can move up and down along the axial direction of the countersunk hole, thereby realizing the vertical movement of the vertical mounting base 2 relative to the base 1. Similarly, a countersunk hole is machined inside the rotary mounting base 3, and a corresponding guide shaft is machined on the telescopic mounting base 4 to cooperate with the countersunk hole. The guide shaft is installed in the countersunk hole, and a spring is set between the end of the guide shaft and the countersunk hole, so that the guide shaft can move up and down along the axial direction of the countersunk hole, thereby realizing the vertical movement of the telescopic mounting base 4 relative to the rotary mounting base 3. A hole is machined inside the rotary mounting base 3, which is fixed by bolts and the hinge swing plate 15 of the pneumatic bonding module I, so that the rotary mounting base 3 can rotate around the hinge, thereby driving the telescopic mounting base 4 to also rotate around the hinge.

[0029] Reference Figure 5 , Figure 6 , Figure 7 The vertical mounting base 2 has a structure for mounting a precision measuring rod. A first hexagonal groove 2-1 and a second hexagonal groove 2-3 are machined in the Y direction of the vertical mounting base 2 for mounting a second precision measuring rod 8. A quarter-circular arc surface 2-2 is machined on the remaining parts of the first hexagonal groove 2-1 and the second hexagonal groove 2-3 in the Y direction for fitting with the first standard ball 8-3, the second standard ball 8-4 and the third standard ball 8-5 on the precision measuring rod.

[0030] The structure for mounting the precision measuring rod on the base 1, telescopic mounting base 4, and rotary mounting base 3 is the same as the structure for mounting the precision measuring rod on the vertical mounting base 2.

[0031] A third precision measuring rod 9 is installed on the base 1, a first precision measuring rod 7 is installed on the rotating mounting base 3, and a fourth precision measuring rod 26 is installed on the telescopic mounting base 4; the second precision measuring rod 8 and the fourth precision measuring rod 26 are always in close contact with the upper wall of the inner arc raceway of the slider 5 to be measured, and the first precision measuring rod 7 and the third precision measuring rod 9 are in close contact with the lower wall of the inner arc raceway of the slider 5 to be measured.

[0032] Reference Figure 5 , Figure 6 , Figure 7 The second precision measuring rod 8 has a first frustum 8-2 at its rear end. A first hexagonal boss 8-1 next to the first frustum 8-2 engages with a first hexagonal groove 2-1 on the vertical moving mounting mechanism 2 for fixation. A second hexagonal boss 8-6 next to the upper second frustum 8-7 at the front of the precision measuring rod engages with a second hexagonal groove 2-3 for fixation. A measuring surface 8-8 is provided in front of the second hexagonal boss 8-6. Three standard spheres of equal radius—a first standard sphere 8-3, a second standard sphere 8-4, and a third standard sphere 8-5—are positioned between the first hexagonal boss 8-1 and the second hexagonal boss 8-6. The first hexagonal boss 8-1 and the second hexagonal boss 8-6 restrict the precision measuring rod from rotating around its axis. The first frustum 8-2 and the second frustum 8-7, machined on the side of the -6, restrict the movement of the precision measuring rod along the axial direction during installation. During installation, the first standard ball 8-3, the second standard ball 8-4, and the third standard ball 8-5 are in close contact with the inner raceway of the slider 5 to be measured. The radius of each standard ball is the same as the radius of the arc raceway of the slider 5 to be measured. The measuring surface 8-8 of the precision measuring rod is machined into a cuboid with lengths of 60mm, 45mm, and 30mm respectively. The shorter precision measuring rods are placed closer to the sensor, and the longer precision measuring rods are placed farther from the sensor to avoid mutual occlusion. The end face of the cuboid is machined with laser engraving marks to facilitate measurement by the photoelectric displacement sensor 23.

[0033] The precision measuring rods are made of tungsten steel; the first precision measuring rod 7, the second precision measuring rod 8, the third precision measuring rod 9, and the fourth precision measuring rod 26 are completely identical except for the length of the measuring surface.

[0034] Reference Figure 4 , Figure 8The base 1 is fixed to the positioning back plate 6 by bolts. The first electromagnet 20 and the second electromagnet 21 are installed in the reserved slot inside the positioning back plate 6. The first electromagnet 20 and the second electromagnet 21 are in contact with the back of the slider 5 to be tested. The PLC controls the electromagnets to turn on and off, restricting the displacement of the slider 5 in the Y direction, so as to realize the rapid adsorption and release of the slider 5 to be tested.

[0035] The first sensor module III-1 and the second sensor module III-2 have the same structure and are respectively installed on the corner of the base 1 and the positioning back plate 6. They are driven by a servo motor using a cross roller linear guide to achieve high-precision planar displacement. The second sensor module III-2 includes a displacement platform 25, a photoelectric displacement sensor 23, a first sensor mounting bracket 22, and a second sensor mounting bracket 24. The displacement platform 25 is fixed to the corner of the base 1 and the positioning back plate 6 by bolts. The displacement platform 25 is connected to the first sensor mounting bracket 22 by bolts. The first sensor mounting bracket 22 is connected to the second sensor mounting bracket 24 by bolts. The second sensor mounting bracket 24 and the first sensor mounting bracket 22 clamp the photoelectric displacement sensor 23. The pitch angle of the optical axis of the photoelectric displacement sensor 23 is adjusted by adjusting the tightness of the bolts, thereby achieving the adjustment of the optical axis. The displacement platform 25 is used to adjust the relative position of the photoelectric displacement sensor 23 and the protruding part of the precision measuring rod.

[0036] Before starting the test, the optical axis of the photoelectric displacement sensor 23 must be perpendicular to the end surfaces of the first precision measuring rod 7, the second precision measuring rod 8, the third precision measuring rod 9, and the fourth precision measuring rod 26. Tighten the bolts to prevent the photoelectric displacement sensor 23 from shaking. With the combined action of the first sensor mounting bracket 22, the second sensor mounting bracket 24, and the displacement platform 25, the optical axis of the photoelectric displacement sensor 23 can be perpendicular to the end surfaces of the precision measuring rods, making the final raceway center distance measurement result accurate and reliable.

[0037] The working principle of this utility model is as follows:

[0038] With the entire device assembled, firstly, a standard slider is selected and slowly pushed along the central axis of the first precision measuring rod 7, the second precision measuring rod 8, the third precision measuring rod 9, and the fourth precision measuring rod 26, so that the precision measuring rods are in contact with the inner raceway surface of the standard slider; then the power is turned on, and the first electromagnet 20 and the second electromagnet 21 of the positioning back plate 6 are energized, generating magnetic force to attract the back of the standard slider, thus initially fixing the position of the standard slider.

[0039] Next, the second cylinder 10-2 drives the second slider 13-2 through the second cylinder retainer 11-2. The second slider 13-2 drives the clamping angle iron 18 to move along the second linear guide rail 19 in the positive X direction until the clamping plate 17 installed on the clamping angle iron 18 contacts the side of the standard slider, achieving complete positioning. Then, the first cylinder 10-1 drives the first slider 13-1 through the first cylinder retainer 11-1. The first slider 13-1 drives the hinge base plate 14 to move in the positive X direction. The hinge swing plate 15 on the hinge base plate 14 drives the fourth precision measuring rod 26 on the telescopic mounting seat 4 and the first precision measuring rod 7 on the rotary mounting seat 3 to complete the contact of the inner raceway surface of the standard slider. At this time, the spring 16 between the base 1 and the vertical mounting seat 2, the telescopic mounting seat 4, and the rotary mounting seat 3 provides pressure, pushing the vertical mounting seat 2, the telescopic mounting seat 4, and the rotary mounting seat 3 to move outward, so that the standard ball on the precision measuring rod is tightly fitted with the inner wall of the raceway of the standard slider, eliminating gaps and achieving complete positioning of the standard slider.

[0040] After the measuring device is started, the displacement platform 25 automatically resets to zero, the photoelectric displacement sensor 23 starts, and the displacement platform 25 moves, causing the photoelectric displacement sensor 23 to sequentially scan the measuring surfaces 8-8 of the first precision measuring rod 7, the second precision measuring rod 8, the third precision measuring rod 9, and the fourth precision measuring rod 26, recording the values ​​of the photoelectric displacement sensor 23 at different positions; finally, the standard slider is removed and replaced with the slider to be measured 5, ensuring that the position of the photoelectric displacement sensor 23 remains unchanged, and the same operation is performed to record the changes in the values ​​of the photoelectric displacement sensor 23 under the conditions of the standard slider and the slider to be measured 5; since the center distance of the standard slider is known, the center distance parameter value of the arc groove raceway of the slider to be measured 5 can be easily obtained by observing the changes.

[0041] This invention achieves the positioning and clamping of the slider 5 to be tested through the linkage of the pneumatic bonding module I, the pneumatic clamping module II, and the positioning adjustment module IV; the photoelectric displacement sensor 23, in conjunction with the displacement platform 25, can accurately acquire the spatial position data of the first precision measuring rod 7, the second precision measuring rod 8, the third precision measuring rod 9, and the fourth precision measuring rod 26, thereby obtaining the spatial position data of the raceway inside the slider 5 to be tested, avoiding damage to the raceway caused by traditional contact measurement; in addition, the detachable precision measuring rods support the measurement of sliders 5 of different sizes, improving the detection efficiency.

[0042] Finally, it should be noted that the above content is only used to illustrate the technical solution of this utility model, and is not intended to limit the scope of protection of this utility model. Simple modifications or equivalent substitutions made by those skilled in the art to the technical solution of this utility model do not depart from the essence and scope of the technical solution of this utility model.

Claims

1. A slider arc raceway center distance measuring device, comprising a base (1), characterized in that: The base (1) fixes the slider (5) to be tested via the pneumatic bonding module (Ⅰ), the pneumatic clamping module (Ⅱ), and the positioning adjustment module (Ⅳ). The first sensor module (Ⅲ-1) and the second sensor module (Ⅲ-2) are used to measure the slider (5).

2. The apparatus according to claim 1, characterized in that: The pneumatic bonding module (Ⅰ) includes a first cylinder (10-1), a base (1) fixing the first cylinder (10-1), the first cylinder (10-1) and a first cylinder retainer (11-1) connected, the first cylinder retainer (11-1) and a first slider (13-1) on a first linear guide (12) in contact, the first linear guide (12) fixed on the base (1), and a hinge base plate (14) fixed above the first slider (13-1). 4) The hinge swing plate (15) is connected to the pin shaft to realize the slight rotation of the hinge swing plate (15) around the pin shaft. The hinge swing plate (15) is connected to the positioning adjustment module (Ⅳ). The first cylinder (10-1) pulls the hinge swing plate (15) and drives the positioning adjustment module (Ⅳ) from the internal area of ​​the slider (5) to the inner wall of the slider (5) to be tested, so that the precision measuring rod installed on the positioning adjustment module (Ⅳ) is in close contact with the inner arc raceway surface of the slider (5) to be tested.

3. The apparatus according to claim 1, characterized in that: The pneumatic clamping module (II) includes a second cylinder (10-2), the base (1) fixes the second cylinder (10-2), the second cylinder (10-2) is connected to the second cylinder retainer (11-2), the second cylinder retainer (11-2) contacts the second slider (13-2) on the second linear guide (19), the second linear guide (19) is fixed on the base (1), a clamping angle iron (18) is fixed above the second slider (13-2), the clamping angle iron (18) is connected to the clamping plate (17) through a pin, so that the clamping plate (17) can rotate slightly around the pin, and the clamping plate (17) contacts the side of the slider (5) to be tested, so as to restrict the X-direction movement freedom of the slider (5) to be tested.

4. The apparatus according to claim 1, characterized in that: The positioning adjustment module (Ⅳ) includes a vertical mounting base (2), a rotary mounting base (3), and a telescopic mounting base (4). A countersunk hole is machined inside the base (1), and a guide shaft (2-4) that mates with the countersunk hole is machined on the vertical mounting base (2). The guide shaft (2-4) on the vertical mounting base (2) is installed in the countersunk hole of the base (1). A spring (16) is set between the end of the guide shaft and the countersunk hole, so that the guide shaft moves up and down along the axial direction of the countersunk hole, thereby realizing the vertical movement of the vertical mounting base (2) relative to the base (1). Similarly, in the rotary mounting base (Ⅳ), a countersunk hole (Ⅳ) is installed in the vertical mounting base (1). The rotating mounting base (3) has a countersunk hole inside, and the telescopic mounting base (4) has a corresponding guide shaft that matches the countersunk hole. The guide shaft is installed in the countersunk hole, and a spring is set between the end of the guide shaft and the countersunk hole so that the guide shaft moves up and down along the axial direction of the countersunk hole, thereby realizing the vertical movement of the telescopic mounting base (4) relative to the rotating mounting base (3). The rotating mounting base (3) and the hinge swing plate (15) of the pneumatic bonding module (Ⅰ) are fixed to realize the rotational movement of the rotating mounting base (3) around the hinge, which drives the telescopic mounting base (4) to also realize the rotational movement around the hinge.

5. The apparatus according to claim 4, characterized in that: The vertical mounting base (2) is machined with a structure for mounting a precision measuring rod. A first hexagonal groove (2-1) and a second hexagonal groove (2-3) are machined in the Y direction of the vertical mounting base (2) for mounting a second precision measuring rod (8). A quarter-circular arc surface (2-2) is machined on the remaining parts of the first hexagonal groove (2-1) and the second hexagonal groove (2-3) in the Y direction for fitting with the standard ball on the precision measuring rod. The base (1), telescopic mounting base (4), and rotating mounting base (3) are used to mount the precision measuring rod. The structure is the same as that on the vertical mounting base (2) for mounting precision measuring rods. A third precision measuring rod (9) is mounted on the base (1), a first precision measuring rod (7) is mounted on the rotating mounting base (3), and a fourth precision measuring rod (26) is mounted on the telescopic mounting base (4). The second precision measuring rod (8) and the fourth precision measuring rod (26) are always in close contact with the upper wall of the inner arc raceway of the slider (5) to be measured, and the first precision measuring rod (7) and the third precision measuring rod (9) are in close contact with the lower wall of the inner arc raceway of the slider (5) to be measured.

6. The apparatus according to claim 5, characterized in that: The precision measuring rod has a first frustum (8-2) at its rear end. The first hexagonal boss (8-1) next to the first frustum (8-2) is fixed in place by cooperating with the first hexagonal groove (2-1) on the vertical mounting base (2). The second hexagonal boss (8-6) next to the second frustum (8-7) at the front of the precision measuring rod is fixed in place by cooperating with the second hexagonal groove (2-3). A measuring surface (8-8) is provided in front of the second hexagonal boss (8-6). Three standard spheres with the same radius are provided between the first hexagonal boss (8-1) and the second hexagonal boss (8-6): the first standard sphere (8-3), the second standard sphere (8-4), and the third standard sphere (8-5). The measuring surface (8-8) of the precision measuring rod is machined into a cuboid. The shorter cuboid precision measuring rod is placed closer to the sensor, and the longer cuboid precision measuring rod is placed farther from the sensor.

7. The apparatus according to claim 6, characterized in that: The end face of the cuboid is machined with laser-etched lines.

8. The apparatus according to claim 5, characterized in that: The precision measuring rod is made of tungsten steel.

9. The apparatus according to claim 1, characterized in that: The base 1 has a fixed positioning back plate (6) on its back. The positioning back plate (6) is equipped with a first electromagnet (20) and a second electromagnet (21). The first electromagnet (20) and the second electromagnet (21) are in contact with the back of the slider (5) to be tested. The electromagnets are powered on and off by the PLC to limit the displacement of the slider (5) in the Y direction, thereby realizing the rapid adsorption and release of the slider (5).

10. The apparatus according to claim 1, characterized in that: The first sensor module (Ⅲ-1) and the second sensor module (Ⅲ-2) have the same structure; the second sensor module (Ⅲ-2) includes a displacement platform (25), which is fixed on the corner of the base (1) and the positioning back plate (6). The displacement platform (25) is connected to the first sensor mounting bracket (22), and the first sensor mounting bracket (22) and the second sensor mounting bracket (24) are connected. The second sensor mounting bracket (24) and the first sensor mounting bracket (22) clamp the photoelectric displacement sensor (23). The optical axis of the photoelectric displacement sensor (23) can be perpendicular to the end surface of the precision measuring rod. The pitch angle of the optical axis of the photoelectric displacement sensor (23) can be adjusted by adjusting the tightness of the adjusting bolt. The displacement platform (25) is used to adjust the relative position of the photoelectric displacement sensor (23) and the protrusion of the precision measuring rod.

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