Online self-balancing device and wafer spin dryer

Abstract

The utility model discloses an on-line self-balancing device and a wafer drying machine, the on-line self-balancing device comprises a rack, a bearing assembly, a rotating shaft, a mounting plate, a driving assembly and a self-balancing assembly, the rotating shaft is mounted on the rack, the fixed end of the driving assembly is mounted on the rack, the driving assembly is connected with the rotating shaft, and the driving assembly is configured to drive the rotating shaft to rotate along the axis of the rotating shaft; the bearing component is horizontally mounted at the top of the rotating shaft; the mounting plate is mounted at the bottom of the rotating shaft, the self-balancing assembly comprises a balancing part, a control part and a detection part, the balancing part is mounted on the bottom surface of the mounting plate, and the detection part is configured to detect balance information of the rotating shaft in the rotating process and send the detected balance information to the control part; the control portion is configured to control the balance portion to perform balance compensation on the rotating shaft according to the received balance information. According to the on-line self-balancing device, through cooperation of the rack, the bearing assembly, the rotating shaft, the mounting plate, the driving assembly and the self-balancing assembly, automatic balancing during on-line rotation of the rotating shaft is achieved, and the working efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer spin-drying equipment technology, and in particular to an online self-balancing device and a wafer spin-dryer. Background Technology

[0002] In integrated circuit manufacturing, wafer cleaning is a crucial step. This is because residual chemical reagents and dust particles can adhere to the silicon wafer surface during wafer manufacturing. If these chemical reagent and dust particle defects (P / D) are not removed in time, they can severely affect the yield.

[0003] Wet cleaning and spin-drying is a commonly used cleaning and spin-drying process for wafers. After this cleaning process, the wafer needs to be dried with nitrogen. Wafer spin dryers are used to dry and clean the surface of the damp silicon wafers through high-speed rotation and drying. Wafer spin dryers can be divided into vertical spin dryers and horizontal spin dryers. Horizontal spin dryers include a frame, motor, rotating shaft, and load-bearing assembly. The rotating shaft is vertically and rotatably mounted on the frame. The motor drives the rotating shaft to rotate through a transmission assembly. The load-bearing assembly is horizontally mounted on the top of the rotating shaft, and the rotating shaft drives the load-bearing assembly to rotate horizontally at high speed.

[0004] To ensure the balance of the horizontal rotation of the carrier component, an even number of symmetrically arranged spin-drying stations are usually set on the same circumference of the carrier surface. Each spin-drying station holds a cassette containing wafers. However, in the actual wafer manufacturing process, the number or size of wafers in the two symmetrically arranged cassettes may be different. This results in different loads on the two symmetrically arranged spin-drying stations, affecting the balance of the carrier component's high-speed rotation. The existing solution is to manually intervene to make the weight of the two symmetrically arranged cassettes roughly the same before performing the spin-drying process, which has relatively low work efficiency. Summary of the Invention

[0005] To address the related technical problems, the purpose of this utility model is to provide an online self-balancing device to solve the above-mentioned problems; in addition, this utility model also provides a wafer spin dryer including the above-mentioned online self-balancing device.

[0006] To achieve the above objectives, the embodiments of this utility model adopt the following technical solutions:

[0007] An online self-balancing device includes a frame, a load-bearing component, a rotating shaft, a mounting plate, a drive component, and a self-balancing component, wherein:

[0008] The rotating shaft is vertically mounted on the frame and can rotate along its own axis. The fixed end of the drive assembly is mounted on the frame, and the drive end of the drive assembly is connected to the rotating shaft. The drive assembly is configured to drive the rotating shaft to rotate along its own axis.

[0009] The carrier component is horizontally mounted on the top of the rotating shaft. An even number of symmetrically arranged spin-drying stations are provided on the carrier surface of the carrier component. Each spin-drying station is provided with a material rack for placing wafer boxes.

[0010] The mounting plate is concentrically fixed to the bottom of the rotating shaft. The self-balancing assembly includes a balancing unit, a control unit, and a detection unit. The balancing unit is mounted on the bottom surface of the mounting plate and is concentrically arranged with the rotating shaft. The detection unit is mounted on the rotating shaft and is configured to detect the balance information of the rotating shaft during rotation and send the detected balance information to the control unit. The control unit is configured to control the balancing unit to perform balance compensation on the rotating shaft according to the received balance information.

[0011] Optionally, the drive assembly includes a drive motor, a driving pulley, a driven pulley, and a transmission belt, wherein:

[0012] The drive motor's shaft is connected to the drive pulley, and the drive motor is configured to drive the drive pulley to rotate;

[0013] The driven pulley is concentrically mounted on the rotating shaft to prevent rotation. The driven pulley and the driving pulley are spaced apart and at the same height. The transmission belt is sleeved on the driving pulley and the driven pulley.

[0014] The mounting plate is concentrically fixed on the bottom surface of the driven pulley. The drive motor drives the driving pulley to rotate, which in turn drives the driven pulley to rotate through the transmission belt, thereby driving the rotating shaft and the mounting plate to rotate.

[0015] Optionally, a first limiting groove is formed on the top surface of the mounting plate. The first limiting groove is concentric with the mounting plate. A first boss is provided at the bottom of the driven pulley. The first boss is adapted to the first limiting groove and is inserted into the first limiting groove. The first boss and the first limiting groove are concentric.

[0016] Optionally, the balancing unit includes a housing, a first driving member, a first balancing block, a second driving member, and a second balancing block, wherein:

[0017] The top surface of the housing is mounted on the bottom surface of the mounting plate and is concentrically positioned with the mounting plate;

[0018] The first drive unit is installed inside the housing, and the first balance block is installed inside the housing in a horizontally rotatable manner. The drive end of the first drive unit is connected to the first balance block, and the first drive unit is configured to drive the first balance block to rotate horizontally.

[0019] The second drive unit is installed inside the housing. The second balance block is concentric with the first balance block. The second balance block is installed in the housing and can rotate horizontally. The drive end of the second drive unit is connected to the second balance block. The second drive unit is configured to drive the second balance block to rotate horizontally.

[0020] The first driving member and / or the second driving member drive the first balance block and / or the second balance block to rotate horizontally, thereby performing balance compensation on the rotating shaft.

[0021] Optionally, a second limiting groove is formed on the bottom surface of the mounting plate. The second limiting groove is concentric with the mounting plate. The top of the housing is detachably fixed to the bottom surface of the mounting plate. A second boss is provided on the top surface of the housing. The second boss is adapted to the second limiting groove. The second boss fits into the second limiting groove. The second boss is concentric with the second limiting groove.

[0022] Optionally, the top of the housing is provided with a connecting part around the second boss, and the connecting part is provided with several connecting holes. The bottom surface of the mounting plate is provided with several threaded holes, each connecting hole corresponding to one threaded hole. The fixing screw passes through the connecting hole and is locked in the corresponding threaded hole to fix the housing on the bottom surface of the mounting plate.

[0023] Optionally, both the first and second balance blocks are arc-shaped structures, with the second balance block located inside the first balance block.

[0024] Optionally, the outer edge of the mounting plate is provided with multiple positioning slots at equal intervals, and the positioning part of the external positioning component is inserted into one of the positioning slots to position the mounting plate.

[0025] Optionally, the online self-balancing device also includes a fixed frame, a counting wheel, a first sensor, and a second sensor. The fixed frame is located at the bottom of the rotating shaft, and the counting wheel is fixedly mounted on the rotating shaft. The rotating shaft, the counting wheel, and the mounting plate rotate synchronously. The first sensor is located on the fixed frame and on the side of the counting wheel. The second sensor is located on the opposite side of the first sensor and is configured to calibrate the origin before the first sensor counts.

[0026] A wafer spin dryer includes the aforementioned online self-balancing device.

[0027] The beneficial effects of this utility model are as follows: Compared with the prior art, the online self-balancing device provided by this utility model has the following beneficial effects:

[0028] 1. By installing a self-balancing component on the rotating shaft, online detection of vibrations generated during shaft rotation is achieved, and the shaft is adjusted online based on the obtained balance information, thereby ensuring the stability of the load-bearing component during high-speed rotation without manual intervention, thus improving work efficiency; moreover, applying a wafer spin dryer equipped with an online self-balancing device to a wafer fabrication line can meet the needs of continuous wafer fabrication processes.

[0029] 2. By fixing the mounting plate concentrically with the driven pulley and setting the housing of the self-balancing component concentrically with the mounting plate, the rotating shaft and the self-balancing component are set concentrically, which improves the effect of the self-balancing component in balancing the rotating shaft.

[0030] 3. By opening a positioning groove on the mounting plate and cooperating with the external positioning components and the positioning groove, the rotating shaft is precisely positioned during the stop process, so as to facilitate the picking and placing of wafer cassettes. Attached Figure Description

[0031] To more clearly illustrate and understand the technical solutions in the embodiments of this utility model, the accompanying drawings used in the background technology and embodiment description of this utility model will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of the structure of an online self-balancing device provided in an embodiment of this utility model;

[0033] Figure 2 This is a front view of an online self-balancing device provided in an embodiment of this utility model;

[0034] Figure 3 This is a schematic diagram of the driven pulley, mounting plate, and balancing part in an online self-balancing device provided by an embodiment of this utility model;

[0035] Figure 4 This is a schematic diagram of the structure of the mounting plate in an online self-balancing device provided in an embodiment of the present invention;

[0036] Figure 5 This is a schematic diagram of the structure of the balancing part in an online self-balancing device provided in an embodiment of this utility model;

[0037] Figure 6 This is a cross-sectional view of the balancing section in an online self-balancing device provided in an embodiment of this utility model. Detailed Implementation

[0038] The present invention will be further described in detail below with reference to the accompanying drawings.

[0039] To facilitate understanding of this utility model, a more complete description of it will be given below with reference to the accompanying drawings. Preferred embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or there may be an intermediate component. When a component is referred to as being "connected to" another component, it can be directly connected to the other component or there may be an intermediate component. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementations. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of this utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0040] Please see Figures 1 to 6 As shown, this embodiment provides an online self-balancing device, which includes a frame (not shown), a support assembly 10, a rotating shaft 20, a mounting plate 30, a drive assembly 40, and a self-balancing assembly 50. The rotating shaft 20 is vertically mounted on the frame and can rotate along its own axis. The fixed end of the drive assembly 40 is mounted on the frame, and the drive end of the drive assembly 40 is connected to the rotating shaft 20. The drive assembly 40 is configured to drive the rotating shaft 20 to rotate along its own axis. The support assembly 10 is horizontally mounted on the top of the rotating shaft 20, and an even number of symmetrically arranged spin-drying stations 11 are provided on the support surface of the support assembly 10. Each spin-drying station 11 is provided with a rack 12 for placing wafer cassettes; the mounting plate 30 is concentrically fixedly installed on the bottom of the rotating shaft 20; the self-balancing assembly 50 includes a balancing unit 51, a control unit 52, and a detection unit 53; the balancing unit 51 is installed on the bottom surface of the mounting plate 30 and is concentrically arranged with the rotating shaft 20; the detection unit 53 is installed on the rotating shaft 20; the detection unit 53 is configured to detect the balance information of the rotating shaft 20 during rotation and send the detected balance information to the control unit 52; the control unit 52 is configured to control the balancing unit 51 to perform balance compensation on the rotating shaft 20 according to the received balance information.

[0041] Specifically, four symmetrically arranged spin-drying stations 11 are provided on the bearing surface of the bearing component 10.

[0042] Specifically, the balance information is the amount of vibration of the rotating shaft 20 during rotation, detected by the detection unit 53.

[0043] It is evident that by installing a self-balancing component 50 on the rotating shaft 20, online detection of vibrations generated during the rotation of the rotating shaft 20 is achieved, and the rotating shaft 20 is adjusted and balanced online based on the obtained balance information, thereby ensuring the stability of the bearing component 50 during high-speed rotation without manual intervention, thus improving work efficiency. Moreover, applying a wafer spin dryer equipped with an online self-balancing device to a wafer fabrication line can meet the needs of continuous wafer fabrication processes.

[0044] In one embodiment, the drive assembly 40 includes a drive motor 41, a drive pulley 42, a driven pulley 43, and a transmission belt 44. The shaft of the drive motor 41 is connected to the drive pulley 42, and the drive motor 41 is configured to drive the drive pulley 42 to rotate. The driven pulley 43 is concentrically mounted on the rotating shaft 20, and the driven pulley 43 and the drive pulley 42 are spaced apart and at the same height. The transmission belt 44 is sleeved on the drive pulley 42 and the driven pulley 43. The mounting plate 30 is concentrically fixed on the bottom surface of the driven pulley 43. The drive motor 41 drives the drive pulley 42 to rotate, so as to drive the driven pulley 43 to rotate through the cooperation of the transmission belt 44, thereby driving the rotating shaft 20 and the mounting plate 30 to rotate.

[0045] As can be seen, the drive motor 41 drives the driving pulley 42 and the driven pulley 43 through the transmission belt 44, so as to realize the smooth rotation of the rotating shaft 20, reduce mechanical impact, and has a simple structure and low maintenance cost.

[0046] In one implementation, by fixing the mounting plate 30 concentrically to the driven pulley 43 and setting the housing 510 of the self-balancing assembly 50 concentrically to the mounting plate 30, the rotating shaft 20 and the self-balancing assembly 50 are set concentrically, thereby improving the effect of the self-balancing assembly 50 in balancing the rotating shaft 20.

[0047] As can be seen, by the first limiting groove 31 of the mounting plate 30 cooperating with the first boss 45 of the driven pulley 43, the driven pulley 43 is ensured to be concentric with the rotating shaft 20, reducing transmission eccentricity and lowering the vibration source.

[0048] In one embodiment, the balancing unit 51 includes a housing 510, a first driving member (not shown in the figure), a first balancing block 511, a second driving member (not shown in the figure), and a second balancing block 512. The top surface of the housing 510 is mounted on the bottom surface of the mounting plate 30 and is concentrically disposed with the mounting plate 30. The first driving member is installed inside the housing 510, and the first balancing block 511 is rotatably mounted inside the housing 510. The driving end of the first driving member is connected to the first balancing block 511, and the first driving member is configured to drive the first balancing block 511 to rotate horizontally. The second driving member is installed inside the housing 510, and the second balancing block 512 is concentric with the first balancing block 511. The second balancing block 512 is rotatably mounted inside the housing 510, and the driving end of the second driving member is connected to the second balancing block 512. The second driving member is configured to drive the second balancing block 512 to rotate horizontally. The first driving member and / or the second driving member drive the first balancing block 511 and / or the second balancing block 512 to rotate horizontally, thereby performing balance compensation on the rotating shaft 20.

[0049] Specifically, both the first and second driving components are motors.

[0050] As can be seen, the first balance block 511 and the second balance block 512 can be rotated independently by the first driving component and the second driving component, which can dynamically adjust the mass distribution, adapt to imbalances in different directions, and achieve higher compensation accuracy.

[0051] In one embodiment, a second limiting groove 32 is formed on the bottom surface of the mounting plate 30. The second limiting groove 32 is concentric with the mounting plate 30. The top of the housing 510 is detachably fixed to the bottom surface of the mounting plate 30. A second protrusion 46 is provided on the top surface of the housing 510. The second protrusion 46 is adapted to the second limiting groove 32. The second protrusion 46 is inserted into the second limiting groove 32. The second protrusion 46 and the second limiting groove 32 are concentric.

[0052] As can be seen, by the cooperation between the second limiting groove 32 of the mounting plate 30 and the second boss 46 of the housing 510, the balance part 51 and the rotating shaft 20 are installed concentrically, avoiding compensation errors caused by the offset of the housing 510.

[0053] In one embodiment, the top of the housing 510 is provided with a connecting portion around the second protrusion 46. The connecting portion has several connecting holes, and the bottom surface of the mounting plate 30 has several threaded holes. Each connecting hole corresponds to one threaded hole. The fixing screw passes through the connecting hole and is locked in the corresponding threaded hole to fix the housing 510 on the bottom surface of the mounting plate 30.

[0054] As can be seen, the housing 510 is fixed to the mounting plate 30 through the connecting holes and threaded holes, which facilitates quick disassembly and maintenance of the balance part 51, while ensuring a stable connection and preventing loosening from affecting the balance compensation effect.

[0055] In one implementation, both the first balance block 511 and the second balance block 512 are arc-shaped structures, with the second balance block 512 located inside the first balance block 511.

[0056] As can be seen, the arc-shaped balance block has a compact structure, and its center of gravity can be adjusted by rotation to cover a wider range of imbalances while saving space.

[0057] In one embodiment, the outer edge of the mounting plate 30 is provided with a plurality of positioning grooves 33 at equal intervals, and the positioning part of the external positioning component is inserted into one of the positioning grooves 33 to position the mounting plate 30.

[0058] As can be seen, by opening a positioning groove 33 in the mounting plate 30, and through the cooperation of the external positioning components and the positioning groove, the rotating shaft 20 is precisely positioned during the stop process, so as to facilitate the picking and placing of wafer cassettes.

[0059] In one embodiment, the online self-balancing device further includes a fixed frame 60, a counting wheel 61, a first sensor 62, and a second sensor 63. The fixed frame 60 is disposed at the bottom of the rotating shaft 20, and the counting wheel 61 is fixedly mounted on the rotating shaft 20. The rotating shaft 20, the counting wheel 61, and the mounting plate 30 rotate synchronously. The first sensor 62 is disposed on the fixed frame 60 and located on the side of the counting wheel 61. The second sensor 63 is disposed on the opposite side of the first sensor 62 and is configured to calibrate the origin before the first sensor 62 counts.

[0060] As can be seen, the counting wheel 61, the first sensor 62 and the second sensor 63 work together to monitor the angle of the rotating shaft 20 in real time and calibrate the origin, providing accurate position data for balance compensation and ensuring accurate compensation direction.

[0061] A wafer spin dryer includes the aforementioned online self-balancing device.

[0062] In the embodiments disclosed in this utility model, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; "linking" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments disclosed in this utility model according to the specific circumstances.

[0063] The above embodiments merely illustrate the basic principles and characteristics of this utility model. This utility model is not limited to the above examples. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An online self-balancing device, characterized in that, The online self-balancing device includes a frame, a load-bearing component, a rotating shaft, a mounting plate, a drive component, and a self-balancing component, wherein: The rotating shaft is vertically mounted on the frame and can rotate along its own axis. The fixed end of the drive assembly is mounted on the frame, and the drive end of the drive assembly is connected to the rotating shaft. The drive assembly is configured to drive the rotating shaft to rotate along its own axis. The bearing assembly is horizontally mounted on the top of the rotating shaft. An even number of symmetrically arranged spin-drying stations are provided on the bearing surface of the bearing assembly. Each spin-drying station is provided with a material rack for placing wafer cassettes. The mounting plate is concentrically fixedly installed at the bottom of the rotating shaft. The self-balancing assembly includes a balancing part, a control part, and a detection part. The balancing part is installed on the bottom surface of the mounting plate and is concentrically arranged with the rotating shaft. The detection part is installed on the rotating shaft. The detection part is configured to detect the balance information of the rotating shaft during rotation and send the detected balance information to the control part. The control part is configured to control the balancing part to perform balance compensation on the rotating shaft according to the received balance information.

2. The online self-balancing device according to claim 1, characterized in that, The drive assembly includes a drive motor, a driving pulley, a driven pulley, and a transmission belt, wherein: The drive motor's shaft is connected to the drive pulley, and the drive motor is configured to drive the drive pulley to rotate. The driven pulley is concentrically anti-rotated and mounted on the rotating shaft. The driven pulley and the driving pulley are spaced apart and at the same height. The transmission belt is sleeved on the driving pulley and the driven pulley. The mounting plate is concentrically fixed on the bottom surface of the driven pulley. The drive motor drives the driving pulley to rotate, so as to drive the driven pulley to rotate through the cooperation of the transmission belt, thereby driving the rotating shaft and the mounting plate to rotate.

3. The online self-balancing device according to claim 2, characterized in that, The top surface of the mounting plate has a first limiting groove, which is concentric with the mounting plate. The bottom of the driven pulley has a first boss, which is adapted to the first limiting groove. The first boss fits into the first limiting groove and is concentric with the first limiting groove.

4. The online self-balancing device according to claim 2, characterized in that, The balancing unit includes a housing, a first driving component, a first balancing block, a second driving component, and a second balancing block, wherein: The top surface of the housing is mounted on the bottom surface of the mounting plate and is concentrically arranged with the mounting plate; The first drive unit is installed inside the housing, the first balance block is rotatably installed inside the housing, the drive end of the first drive unit is connected to the first balance block, and the first drive unit is configured to drive the first balance block to rotate horizontally. The second drive member is installed inside the housing, the second balance block is concentric with the first balance block, the second balance block is rotatably installed inside the housing, the drive end of the second drive member is connected to the second balance block, and the second drive member is configured to drive the second balance block to rotate horizontally. The first driving member and / or the second driving member drive the first balance block and / or the second balance block to rotate horizontally, thereby performing balance compensation on the rotating shaft.

5. The online self-balancing device according to claim 4, characterized in that, A second limiting groove is formed on the bottom surface of the mounting plate. The second limiting groove is concentric with the mounting plate. The top of the housing is detachably fixed to the bottom surface of the mounting plate. A second protrusion is provided on the top surface of the housing. The second protrusion is adapted to the second limiting groove. The second protrusion is inserted into the second limiting groove. The second protrusion is concentric with the second limiting groove.

6. The online self-balancing device according to claim 5, characterized in that, The top of the housing has a connecting portion around the second boss, and the connecting portion has several connecting holes. The bottom surface of the mounting plate has several threaded holes, each connecting hole corresponding to one threaded hole. The fixing screw passes through the connecting hole and is locked in the corresponding threaded hole to fix the housing to the bottom surface of the mounting plate.

7. The online self-balancing device according to claim 4, characterized in that, Both the first and second balance blocks are arc-shaped structures, with the second balance block located inside the first balance block.

8. The online self-balancing device according to claim 1, characterized in that, The mounting plate has multiple positioning slots spaced at equal intervals on its outer edge. The positioning part of the external positioning component is inserted into one of the positioning slots to position the mounting plate.

9. The online self-balancing device according to claim 1, characterized in that, The online self-balancing device further includes a fixed frame, a counting wheel, a first sensor, and a second sensor. The fixed frame is disposed at the bottom of the rotating shaft, and the counting wheel is fixedly mounted on the rotating shaft. The rotating shaft, the counting wheel, and the mounting plate rotate synchronously. The first sensor is disposed on the fixed frame and located on the side of the counting wheel. The second sensor is disposed on the opposite side of the first sensor. The second sensor is configured to calibrate the origin before the first sensor counts.

10. A wafer spin dryer, characterized in that, The wafer spin dryer includes an online self-balancing device as described in any one of claims 1-9.

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