Raw material conveying device for silicon carbide semiconductor single crystal furnace

Abstract

The utility model discloses a raw material conveying device for a silicon carbide semiconductor single crystal furnace, which relates to the technical field of conveying devices and comprises a main body, a first motor is fixedly connected to the rear side of the main body, a material conveying pipe is arranged in the main body, and a screw rod is fixedly connected to the output end of the first motor. The upper side of the main body is fixedly connected with a dehumidification box, the upper side of the main body is fixedly connected with a fixed block, the upper side of the main body is fixedly connected with a fan, an input pipe of the fan is fixedly connected with the dehumidification box in a penetrating manner, and the upper side of the main body is fixedly connected with a storage tank. Through mutual cooperation of the connecting pipe, the feeding pipe, the filter plate, the stirring rod, the fixing column, the driving shaft, the rotating shaft, the limiting strip, the rotating disc and the limiting column, raw materials in the material storage tank can be stirred and screened, through mechanical stirring, the granularity, density and chemical components of the raw materials are more uniform, the agglomeration structure is broken through stirring, particles are dispersed, and the screening efficiency is improved. And the flowability of the powder is improved.

Description

Technical Field

[0001] This utility model relates to the field of conveying device technology, specifically to a raw material conveying device for a silicon carbide semiconductor single crystal furnace. Background Technology

[0002] The raw material conveying device for silicon carbide semiconductor single crystal furnace is mainly used to accurately, stably and controllably transport the required raw materials into the reaction chamber of the single crystal furnace during the silicon carbide single crystal growth process, ensuring the continuity and stability of the raw material supply.

[0003] The existing technology has the following problems:

[0004] Existing equipment cannot stir or screen the raw materials inside the storage tank during use. After being stored in the tank for a long time, the raw materials are prone to stratification, agglomeration, or clumping due to gravity settling, electrostatic adsorption, or humidity. This results in uneven distribution of composition and particle size, affecting the electrical properties and structural uniformity of the single crystal and reducing the yield of the device. In addition, existing equipment cannot pre-dry the raw materials inside the storage tank. Silicon carbide raw materials are hygroscopic. If the storage tank is not dried, the moisture in the air will react chemically with the metal impurities in the raw materials to generate hydroxides or other compounds, resulting in a decrease in the purity of the raw materials. Utility Model Content

[0005] This invention provides a raw material conveying device for a silicon carbide semiconductor single crystal furnace to solve the problems existing in the background art.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0007] A raw material conveying device for a silicon carbide semiconductor single crystal furnace includes a main body, a first motor fixedly connected to the rear side of the main body, a conveying pipe disposed inside the main body, a screw rod fixedly connected to the output end of the first motor, a dehumidification box fixedly connected to the upper side of the main body, a fixing block fixedly connected to the upper side of the main body, a fan fixedly connected to the upper side of the main body, the input pipe of the fan being fixedly connected through the dehumidification box, a storage tank fixedly connected to the upper side of the main body, the lower end of the storage tank being fixedly connected through the conveying pipe, and the output pipe of the fan being fixedly connected to the storage tank.

[0008] A further improvement of the present invention is that: a second motor is fixedly connected to the upper side of the storage tank, a drive shaft is fixedly connected to the output end of the second motor, a plurality of limiting strips are fixedly connected to the outer wall of the drive shaft, a rotating shaft is slidably connected to the outer wall of the limiting strips, a connecting pipe is fixedly connected to the outer wall of the storage tank, the other end of the connecting pipe is fixedly connected to the dehumidification box, and a feed pipe is fixedly connected to the outer wall of the storage tank.

[0009] A further improvement of this utility model is that: a fixed column is fixedly connected to the upper side of the inner wall of the storage tank, a filter plate is fixedly connected to the inner surface of the storage tank, and multiple stirring rods are fixedly connected to the outer wall of the rotating shaft.

[0010] A further improvement of the present invention is that: a fixed inclined ring is fixedly connected to the upper side of the inner surface of the fixed column, a limiting groove is opened on the lower side of the fixed inclined ring, a turntable is fixedly connected to the upper end of the outer wall of the rotating shaft, a limiting column is fixedly connected to the upper side of the turntable, and the upper end of the limiting column is slidably connected to the limiting groove.

[0011] A further improvement of this utility model is that: the dehumidification box is provided with a holding box inside, a vent plate is fixedly connected to the lower end of the inner surface of the holding box, and a dehumidification filter element is movably connected to the inner surface of the holding box.

[0012] A further improvement of this utility model is that: a knob is rotatably connected to the rear side of the fixing block, a threaded rod is fixedly connected to the front side of the knob, the outer wall of the threaded rod is rotatably connected to the fixing block, a movable block is threadedly connected to the outer wall of the threaded rod, an inclined groove is opened through the left side of the movable block, a guide post is slidably connected to the inner surface of the inclined groove, a U-shaped clamping plate is fixedly connected to the outer wall of the guide post, the outer wall of the U-shaped clamping plate is slidably connected to the fixing block, and the right side of the U-shaped clamping plate is movably connected to the holding box.

[0013] Due to the adoption of the above technical solution, the technological progress achieved by this utility model compared to the prior art is as follows:

[0014] 1. This utility model provides a raw material conveying device for a silicon carbide semiconductor single crystal furnace. Through the cooperation of connecting pipe, feed pipe, filter plate, stirring rod, fixed column, drive shaft, rotating shaft, limiting strip, turntable and limiting column, the raw material inside the storage tank can be stirred and screened. Through mechanical stirring, the particle size, density and chemical composition of the raw material are made more uniform. Furthermore, stirring breaks the agglomeration structure, disperses the particles and improves the flowability of the powder.

[0015] 2. This utility model provides a raw material conveying device for a silicon carbide semiconductor single crystal furnace. Through the cooperation of a ventilation plate, a dehumidifying filter, a knob, a threaded rod, a movable block, an inclined groove, a U-shaped clamping plate, and a guide column, the raw material inside the storage tank can be pre-dried. Silicon carbide raw materials may undergo slight hydrolysis reaction with moisture in the air due to moisture absorption. Pre-drying can reduce such reactions and prevent the generated by-products from being mixed into the crystal as impurities. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2This is a schematic diagram of the internal structure of the storage tank of this utility model;

[0018] Figure 3 This is a schematic diagram of the internal structure of the fixed column of this utility model;

[0019] Figure 4 This is a partial exploded view of the structure of this utility model;

[0020] Figure 5 This is a schematic diagram of the internal structure of the fixing block of this utility model.

[0021] In the diagram: 1. Main body; 2. First motor; 3. Feeding pipe; 4. Screw rod; 5. Dehumidification box; 6. Container box; 7. Fixing block; 8. Fan; 9. Storage tank; 10. Second motor; 11. Connecting pipe; 12. Feeding pipe; 13. Filter plate; 14. Stirring rod; 15. Fixing column; 16. Drive shaft; 17. Rotating shaft; 18. Limiting strip; 19. Turntable; 20. Limiting column; 21. Fixing inclined ring; 22. Limiting groove; 23. Ventilation plate; 24. Dehumidification filter element; 25. Knob; 26. Threaded rod; 27. Movable block; 28. Inclined groove; 29. ​​U-shaped clamping plate; 30. Guide column. Detailed Implementation

[0022] To make the technical means, creative features, objectives, and effects of this utility model easier to understand, the following describes this utility model in conjunction with specific embodiments:

[0023] like Figure 1 As shown, this utility model provides a raw material conveying device for a silicon carbide semiconductor single crystal furnace, including a main body 1. A first motor 2 is fixedly connected to the rear side of the main body 1. A conveying pipe 3 is provided inside the main body 1. A screw rod 4 is fixedly connected to the output end of the first motor 2. A dehumidification box 5 is fixedly connected to the upper side of the main body 1. A fixing block 7 is fixedly connected to the upper side of the main body 1. A fan 8 is fixedly connected to the upper side of the main body 1. The input pipe of the fan 8 is fixedly connected through the dehumidification box 5. A storage tank 9 is fixedly connected to the upper side of the main body 1. The lower end of the storage tank 9 is connected to... The conveying pipe 3 is fixedly connected through the material, and the output pipe of the fan 8 is fixedly connected to the storage tank 9. When the first motor 2 is started, its output end drives the screw rod 4 to rotate inside the conveying pipe 3, forming a screw conveying power. The raw material enters the conveying pipe 3 from the lower end of the storage tank 9 and is conveyed into the main body 1 along the conveying pipe 3 under the push of the screw rod 4. At the same time, the fan 8 operates to transport the treated air in the dehumidification box 5 to the storage tank 9 to maintain a stable air environment in the storage tank 9. The storage tank 9 and the dehumidification box 5 are connected by the connecting pipe 11 to form air circulation.

[0024] like Figure 2-3As shown, this utility model provides a technical solution: Preferably, a second motor 10 is fixedly connected to the upper side of the storage tank 9, a drive shaft 16 is fixedly connected to the output end of the second motor 10, a plurality of limiting strips 18 are fixedly connected to the outer wall of the drive shaft 16, a rotating shaft 17 is slidably connected to the outer wall of the limiting strips 18, a connecting pipe 11 is fixedly connected to the outer wall of the storage tank 9, the other end of the connecting pipe 11 is fixedly connected to the dehumidification box 5, a feed pipe 12 is fixedly connected to the outer wall of the storage tank 9, a fixing column 15 is fixedly connected to the upper side of the inner wall of the storage tank 9, a filter plate 13 is fixedly connected to the inner surface of the storage tank 9, a plurality of stirring rods 14 are fixedly connected to the outer wall of the rotating shaft 17, a fixing inclined ring 21 is fixedly connected to the upper side of the inner surface of the fixing column 15, a limiting groove 22 is opened on the lower side of the fixing inclined ring 21, a turntable 19 is fixedly connected to the upper end of the outer wall of the rotating shaft 17, and the upper side of the turntable 19... A fixed limiting column 20 is connected, with its upper end slidably connected to the limiting groove 22. When the second motor 10 is turned on, it drives the drive shaft 16 to rotate. The limiting strip 18 on the outer wall of the drive shaft 16 slides in cooperation with the rotating shaft 17, thereby driving the rotating shaft 17 to rotate. The stirring rod 14 on the outer wall of the rotating shaft 17 stirs the raw material in the storage tank 9. The limiting column 20 on the turntable 19 slides in the limiting groove 22 of the fixed inclined ring 21. As the rotating shaft 17 rotates, the limiting column 20 moves along the limiting groove 22, causing the rotating shaft 17 to move up and down while rotating, thus enhancing the stirring effect. During the stirring process, the raw material is screened through the filter plate 13. Raw materials that do not meet the particle size requirements are intercepted, while qualified raw materials continue to be conveyed. Through mechanical stirring, the particle size, density, and chemical composition of the raw material become more uniform, and the agglomerated structure is broken, the particles are dispersed, and the flowability of the powder is improved.

[0025] like Figure 4-5As shown, this utility model provides a technical solution: Preferably, the dehumidifier box 5 is provided with a holding box 6 inside. A vent plate 23 is fixedly connected to the lower end of the inner surface of the holding box 6. A dehumidifier filter element 24 is movably connected to the inner surface of the holding box 6. A knob 25 is rotatably connected to the rear side of the fixing block 7. A threaded rod 26 is fixedly connected to the front side of the knob 25. The outer wall of the threaded rod 26 is rotatably connected to the fixing block 7. A movable block 27 is threadedly connected to the outer wall of the threaded rod 26. A slanted groove 28 is opened through the left side of the movable block 27. A guide post 30 is slidably connected to the inner surface of the slanted groove 28. A U-shaped clamping plate 29 is fixedly connected to the outer wall of the guide post 30. The outer wall of the U-shaped clamping plate 29 is slidably connected to the fixing block 7. The right side of the U-shaped clamping plate 29 is movably connected to the holding box 6. Place the dehumidifying filter element 24 in the holding box 6, turn the knob 25, the knob 25 drives the threaded rod 26 to rotate, the movable block 27 connected to the threaded rod 26 moves along the threaded rod 26 in the fixed block 7, the left inclined groove 28 of the movable block 27 slides with the guide post 30, so that the U-shaped clamping plate 29 slides along the fixed block 7, clamping and fixing the holding box 6 in the dehumidifying box 5. After the outside air enters the dehumidifying box 5, it comes into full contact with the dehumidifying filter element 24. The moisture in the air is absorbed by the dehumidifying filter element 24. The dried air enters the storage tank 9 under the action of the fan 8, and pre-dries the raw materials inside the storage tank 9, reducing the slight hydrolysis reaction of silicon carbide raw materials due to moisture absorption and moisture in the air, and avoiding the generation of by-products as impurities mixed into the crystal.

[0026] The working principle of the raw material conveying device for the silicon carbide semiconductor single crystal furnace will be explained in detail below.

[0027] like Figure 1-5As shown, the second motor 10 is turned on, which drives the drive shaft 16 to rotate. The limiting strip 18 on the outer wall of the drive shaft 16 slides with the rotating shaft 17, thereby driving the rotating shaft 17 to rotate. The stirring rod 14 on the outer wall of the rotating shaft 17 then stirs the raw materials in the storage tank 9. The limiting post 20 on the turntable 19 slides in the limiting groove 22 of the fixed inclined ring 21. As the rotating shaft 17 rotates, the limiting post 20 moves along the limiting groove 22, causing the rotating shaft 17 to move up and down while rotating, enhancing the stirring effect. During the stirring process, the raw materials are screened through the filter plate 13. Raw materials that do not meet the particle size requirements are intercepted, while qualified raw materials continue to be conveyed. Through mechanical stirring, the particle size, density, and chemical composition of the raw materials become more uniform, and the agglomerated structure is broken, the particles are dispersed, and the efficiency is improved. To improve the flowability of the powder, the dehumidifying filter element 24 is placed in the holding box 6. Rotating the knob 25 causes the threaded rod 26 to rotate. The movable block 27, threadedly connected to the threaded rod 26, moves along the threaded rod 26 within the fixed block 7. The inclined groove 28 on the left side of the movable block 27 slides in conjunction with the guide post 30, allowing the U-shaped clamping plate 29 to slide along the fixed block 7, thus clamping and fixing the holding box 6 within the dehumidifying chamber 5. When outside air enters the dehumidifying chamber 5, it comes into full contact with the dehumidifying filter element 24, and the moisture in the air is absorbed by the dehumidifying filter element 24. The dried air then enters the storage tank 9 under the action of the fan 8, pre-drying the raw materials inside the storage tank 9. This reduces the slight hydrolysis reaction between the silicon carbide raw material and moisture in the air due to moisture absorption, preventing the generated byproducts from mixing into the crystals as impurities.

[0028] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the protection scope of the present invention.

Claims

1. A raw material conveying device for a silicon carbide semiconductor single crystal furnace, characterized in that: The system includes a main body (1), a first motor (2) fixedly connected to the rear side of the main body (1), a material conveying pipe (3) provided inside the main body (1), a screw rod (4) fixedly connected to the output end of the first motor (2), a dehumidification box (5) fixedly connected to the upper side of the main body (1), a fixing block (7) fixedly connected to the upper side of the main body (1), a fan (8) fixedly connected to the upper side of the main body (1), the input pipe of the fan (8) being fixedly connected through the dehumidification box (5), a storage tank (9) fixedly connected to the upper side of the main body (1), the lower end of the storage tank (9) being fixedly connected through the material conveying pipe (3), and the output pipe of the fan (8) being fixedly connected to the storage tank (9).

2. The raw material conveying device for a silicon carbide semiconductor single crystal furnace according to claim 1, characterized in that: A second motor (10) is fixedly connected to the upper side of the storage tank (9). A drive shaft (16) is fixedly connected to the output end of the second motor (10). A plurality of limit strips (18) are fixedly connected to the outer wall of the drive shaft (16). A rotating shaft (17) is slidably connected to the outer wall of the limit strips (18). A connecting pipe (11) is fixedly connected to the outer wall of the storage tank (9). The other end of the connecting pipe (11) is fixedly connected to the dehumidification box (5). A feed pipe (12) is fixedly connected to the outer wall of the storage tank (9).

3. The raw material conveying device for a silicon carbide semiconductor single crystal furnace according to claim 2, characterized in that: A fixed column (15) is fixedly connected to the upper side of the inner wall of the storage tank (9), a filter plate (13) is fixedly connected to the inner surface of the storage tank (9), and a plurality of stirring rods (14) are fixedly connected to the outer wall of the rotating shaft (17).

4. The raw material conveying device for a silicon carbide semiconductor single crystal furnace according to claim 3, characterized in that: A fixed inclined ring (21) is fixedly connected to the upper side of the inner surface of the fixed column (15). A limiting groove (22) is opened on the lower side of the fixed inclined ring (21). A turntable (19) is fixedly connected to the upper end of the outer wall of the rotating shaft (17). A limiting column (20) is fixedly connected to the upper side of the turntable (19). The upper end of the limiting column (20) is slidably connected to the limiting groove (22).

5. The raw material conveying device for a silicon carbide semiconductor single crystal furnace according to claim 1, characterized in that: The dehumidification box (5) is equipped with a container (6) inside. A ventilation plate (23) is fixedly connected to the lower end of the inner surface of the container (6), and a dehumidification filter element (24) is movably connected to the inner surface of the container (6).

6. The raw material conveying device for a silicon carbide semiconductor single crystal furnace according to claim 5, characterized in that: A knob (25) is rotatably connected to the rear side of the fixed block (7). A threaded rod (26) is fixedly connected to the front side of the knob (25). The outer wall of the threaded rod (26) is rotatably connected to the fixed block (7). A movable block (27) is threadedly connected to the outer wall of the threaded rod (26). A slanted groove (28) is opened through the left side of the movable block (27). A guide post (30) is slidably connected to the inner surface of the slanted groove (28). A U-shaped clamping plate (29) is fixedly connected to the outer wall of the guide post (30). The outer wall of the U-shaped clamping plate (29) is slidably connected to the fixed block (7). The right side of the U-shaped clamping plate (29) is movably connected to the container (6).

Images