Cavity structure of photovoltaic equipment reaction chamber and photovoltaic equipment

Abstract

The utility model discloses a cavity structure of a photovoltaic equipment reaction chamber, which comprises an outer cavity and an inner cavity arranged in the outer cavity, the outer cavity is a sealed cavity, the inner cavity comprises a plurality of sub-cavities, each sub-cavity is of a hollow tubular structure with two open ends, and the outer cavity and the inner cavity are sealed. The plurality of sub-cavities are mutually connected into a whole and form a communicated inner cavity, and every two adjacent sub-cavities are spliced and connected. According to the utility model, the inner cavity comprises the plurality of sub-cavities which are mutually connected into a whole, each sub-cavity can be set to be shorter and is convenient to manufacture, and in addition, the plurality of sub-cavities can be spliced to form a longer inner cavity, so that the slide capacity of the inner cavity can be effectively improved, and the productivity is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell manufacturing equipment technology, and in particular to a cavity structure of a photovoltaic equipment reaction chamber and a photovoltaic equipment. Background Technology

[0002] Solar energy has become the cleanest, most economical, and safest energy source, with the advantage of being inexhaustible, and has therefore received widespread attention from countries around the world.

[0003] Among various photovoltaic cell manufacturing equipment, tubular equipment accounts for a large proportion and is extremely critical, including equipment for diffusion, PECVD, ALD, oxidation, annealing, and LPCVD. The inner cavity of the reaction chamber, as the reaction area for process gases, plays an extremely important role in improving quality and production efficiency, and reducing manufacturing costs.

[0004] Currently, the reaction chambers of tubular equipment generally use cylindrical quartz tubes, typically around 4 meters long, with an outer diameter of 400-600 mm and a thickness of about 6 mm. The advantages of this current structure are its simplicity and low cost. However, with the industry's continuous efforts to increase production capacity and improve quality, many inherent defects of this structure are becoming increasingly apparent, severely limiting the industry's development. Specifically:

[0005] 1. Quality: The circular cross-section cavity is paired with a rectangular silicon wafer, resulting in uneven spacing. At the same time, the quartz tube is limited by its high temperature resistance and insufficient vacuum capability, which restricts the process and makes it difficult to improve the uniformity of sheet resistance.

[0006] 2. Production capacity: Due to the insufficient high temperature resistance and vacuum capability of quartz tubes, high temperature equipment faces the problem of long process time. At the same time, it is difficult to make quartz tubes larger, resulting in the limit of the number of substrates and making it difficult to increase production capacity.

[0007] 3. Maintenance costs: When used in boron diffusion processes, the process temperature is as high as 1050℃, which results in a short lifespan for the quartz tube, usually 3 to 6 months. After the quartz tube is damaged, the entire machine needs to be shut down and cooled before the quartz tube can be replaced. This can also easily cause damage to the furnace body and other materials, resulting in significant economic losses.

[0008] 4. Production cost: Due to the limitations of the insulation structure, the insulation layer is usually thin, resulting in a large waste of electrical energy. At the same time, due to various factors such as mismatch of cross sections, there is also a large waste of process gas. Summary of the Invention

[0009] The purpose of this invention is to provide a cavity structure for a photovoltaic device reaction chamber and a photovoltaic device, so as to solve the problem that the reaction chamber of the cylindrical quartz tube structure in the prior art has a limited number of wafers and the production capacity is difficult to increase.

[0010] To achieve the above objectives, this utility model provides a cavity structure for a photovoltaic equipment reaction chamber, including an outer cavity and an inner cavity disposed inside the outer cavity. The outer cavity is a sealed cavity, and the inner cavity includes a plurality of sub-cavities. Each sub-cavity is a hollow tubular structure with openings at both ends. The plurality of sub-cavities are interconnected to form a connected inner cavity, and adjacent sub-cavities are joined together.

[0011] Preferably, adjacent sub-cavities are sealed together by adhesive bonding, or by sealing with raw materials, or by sealing with a sealing ring, or by welding.

[0012] Preferably, the material of the inner cavity is selected from silicon carbide, graphite, stainless steel, thermally conductive ceramics, and quartz.

[0013] Preferably, at least one of the two adjacent sub-cavities is provided with a process groove at the splicing position, and the process groove contains the adhesive, the raw material, or the welding solder.

[0014] Preferably, the sealing ring is sandwiched between two adjacent sub-cavities, and the cavity structure further includes a pressing mechanism, which presses against the sub-cavity located at the front end and / or the pressing mechanism presses against the sub-cavity located at the rear end.

[0015] Preferably, the cross-section of the sub-cavity is rectangular, or the cross-section of the sub-cavity is elliptical, or the cross-section of the sub-cavity is drum-shaped.

[0016] Preferably, an installation guide structure is provided at the splicing position of two adjacent sub-cavities.

[0017] Preferably, a furnace tail sealing plate is provided on the tail end face of the sub-cavity located at the tail end, and an air inlet pipe and an exhaust pipe are arranged on the furnace tail sealing plate.

[0018] Preferably, the front part of the sub-cavity located at the front end is the furnace opening part of the inner cavity, and the tail part of the sub-cavity located at the rear end is the furnace tail part of the inner cavity. A boss is provided on the furnace opening part or the furnace tail part, and a clamping mechanism is provided on the outside of the boss to clamp and fix the inner cavity.

[0019] This utility model also provides a photovoltaic device, including the cavity structure of the photovoltaic device reaction chamber described above.

[0020] Compared with the prior art, the present invention sets the inner cavity as including several sub-cavities and the several sub-cavities are connected to each other as one body. The length of each sub-cavity can be set to be relatively short, which is convenient for manufacturing. In addition, multiple sub-cavities can be spliced ​​together to form a longer inner cavity, which can effectively increase the wafer carrying capacity of the inner cavity and greatly improve the production capacity. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of an angle structure of an inner cavity formed by splicing together several sub-cavities in an embodiment of this utility model.

[0022] Figure 2 This is a structural diagram of another angle showing how several sub-cavities are spliced ​​together to form an inner cavity in an embodiment of this utility model.

[0023] Figure 3 This is a schematic diagram of the internal cavity structure in an embodiment of the present invention.

[0024] Figure 4 This is a cross-sectional schematic diagram of one structure of the sub-cavity in an embodiment of this utility model.

[0025] Figure 5 This is a cross-sectional schematic diagram of another structure of the sub-cavity in an embodiment of this utility model.

[0026] Figure 6 This is a cross-sectional schematic diagram of another structure of the sub-cavity in an embodiment of this utility model.

[0027] Figure 7 This is a cross-sectional schematic diagram of the first structure of the process tank in this embodiment of the present invention.

[0028] Figure 8 This is a cross-sectional schematic diagram of the second structure of the process tank in this embodiment of the present invention.

[0029] Figure 9 This is a cross-sectional schematic diagram of the third structure of the process tank in this embodiment of the present invention.

[0030] Figure 10 This is a cross-sectional schematic diagram of the fourth structure of the process tank in this embodiment of the present invention.

[0031] Figure 11 This is a cross-sectional schematic diagram of the fifth structure of the process tank in this embodiment of the present invention.

[0032] Figure 12 This is a cross-sectional schematic diagram of the sixth structure of the process tank in this embodiment of the present invention.

[0033] Figure 13 This is a schematic diagram of the structure in an embodiment of the present invention, in which a sealing ring is sandwiched between two adjacent sub-cavities and pressed against them by a clamping mechanism.

[0034] Figure 14 This is a structural diagram showing the installation guide structure at the splicing position of two adjacent sub-cavities in an embodiment of this utility model. Detailed Implementation

[0035] To explain in detail the technical content, structural features, and effects of this utility model, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0036] like Figures 1 to 14 As shown, this utility model embodiment provides a cavity structure for a photovoltaic equipment reaction chamber, including an outer cavity and an inner cavity 10 disposed inside the outer cavity. The outer cavity is a sealed cavity, and the inner cavity 10 includes several sub-cavities 1. Each sub-cavity 1 is a hollow tubular structure with open ends. The several sub-cavities 1 are interconnected to form a connected inner cavity, and adjacent sub-cavities 1 are spliced ​​together. Specifically, the existing integrally manufactured inner cavity 10 becomes increasingly difficult to process as its size increases. This is because the inner cavity 10 used in photovoltaics is typically a long cylindrical shape. When the length reaches a certain point, the manufacturing cost increases significantly, and in severe cases, the quality cannot meet the standards for use. Dividing the inner cavity 10 into multiple sub-cavities 1 can significantly reduce manufacturing difficulty, reduce production costs, and reduce the deformation of the inner cavity 10. By splicing several sub-cavities 1 together to form a long cylindrical inner cavity 10, the size of the inner cavity 10 can be significantly increased, thereby significantly increasing production capacity, which may even double.

[0037] This invention defines the inner cavity 10 as including several sub-cavities 1 and the several sub-cavities 1 are connected to each other as a whole. The length of each sub-cavity 1 can be set to be relatively short, which is convenient for manufacturing. In addition, multiple sub-cavities 1 can be spliced ​​together to form a longer inner cavity 10, which can effectively increase the wafer carrying capacity of the inner cavity 10 and greatly improve the production capacity.

[0038] In this embodiment of the invention, adjacent sub-cavities 1 are bonded and sealed together using an adhesive. Specifically, for photovoltaic tube-type equipment, there are usually strict requirements for the sealing performance of the reaction chamber. Therefore, it is necessary to seal between adjacent sub-cavities 1 as much as possible. In this embodiment of the invention, adjacent sub-cavities 1 can be bonded and sealed together using an adhesive. Of course, in some other specific embodiments, adjacent sub-cavities 1 can also be sealed together using a material that is the same as the material of the sub-cavities 1. Adjacent sub-cavities 1 can also be sealed together using a sealing ring 6, or by welding, etc. It should be noted that the specific sealing connection method between adjacent sub-cavities 1 is not limited and can be selected according to actual needs. In addition, in order to further improve sealing safety and product quality, an outer cavity is provided outside the inner cavity 10. The outer cavity is a sealed cavity, thereby ensuring the same or even higher sealing performance as current equipment.

[0039] In this embodiment of the utility model, such as Figure 4 As shown, the cross-section 11 of the sub-cavity 1 is rectangular. Specifically, all silicon wafers used in the photovoltaic industry are rectangular. When using a circular cross-section inner cavity, the cross-section 11 of the heater outside the circular cross-section inner cavity is also circular. The uneven gaps around the circular heater and the rectangular silicon wafer lead to uneven heating temperature, affecting product quality, such as uneven coating thickness and uneven sheet resistance. At the same time, the uneven gaps around the circular cross-section inner cavity and the rectangular silicon wafer also lead to wasted space, with some process gases flowing out of these useless spaces, resulting in wasted process gases. Therefore, the structure of several sub-cavities 1 in a spliced ​​form is relatively simple to manufacture. The cross-section 11 of the sub-cavity 1 can be set to be rectangular, and the corresponding cross-section 11 of the heater is also rectangular, thus perfectly matching the structure of the rectangular silicon wafer, resulting in uniform heating, good product quality, and low cost. In some other specific embodiments of this utility model, such as Figure 5 As shown, the cross-section 11 of the sub-cavity 1 can also be elliptical, such as... Figure 6 As shown, the cross section 11 of the sub-cavity 1 can also be drum-shaped, which, compared to a cavity with a circular cross section, can also improve the uniformity of silicon wafer heating and the quality of the product.

[0040] In this embodiment of the invention, the material of the inner cavity 10 is selected from silicon carbide, graphite, stainless steel, thermally conductive ceramics, and quartz. Specifically, the mainstream material for inner cavities in the industry is currently quartz. Quartz can be manufactured with circular cross-sections less than 500 mm in diameter, but it becomes difficult to manufacture larger sizes and ensure quality. Furthermore, quartz cannot be used to manufacture rectangular cross-sections 11. This embodiment of the invention uses a scheme of splicing several sub-cavities 1, which significantly reduces the manufacturing difficulty and provides more material options. By changing the material, larger sizes and rectangular cross-sections 11 can be manufactured for the inner cavity 10. The materials that can be selected for the inner cavity 10 include silicon carbide, graphite, stainless steel, thermally conductive ceramics, and quartz, with silicon carbide being the most suitable. For example, silicon carbide has excellent properties such as high temperature resistance, oxidation resistance, wear resistance, corrosion resistance, high specific modulus and specific strength. After manufacturing the sub-cavities 1 of silicon carbide material in sections, they can be bonded with adhesive at the joints, or the joints can be filled with silicon carbide slurry again. Then, they are placed in a high-temperature furnace for secondary sintering. The refilling of silicon carbide slurry can be done by 3D printing or mold forming. The sintering temperature is generally between 2000 and 2500 degrees Celsius and is carried out in an inert atmosphere. During the sintering process, silicon carbide slurry generates silicon carbide, which greatly improves the sealing performance.

[0041] In this embodiment of the invention, at least one of the two adjacent sub-cavities 1 has a process groove 12 at the splicing position, and the process groove 12 contains an adhesive. Specifically, to improve the sealing performance of the splicing joint after assembly, a process groove 12 is provided at the splicing position, such as... Figure 7 andFigure 10 As shown, the process groove 12 can be set in a V-shape, such as... Figure 8 and Figure 11 As shown, the process tank 12 can be set as a rectangle, such as... Figure 8 , Figure 9 and Figures 11 to 12 As shown, the process tank 12 can be configured as a U-shape, etc., where, for example Figure 9 and Figure 12 As shown, the U-shape includes a semi-circle. Furthermore, a process groove 12 can be provided at the joint position of any one of the adjacent sub-cavities 1, or process grooves 12 can be provided at the joint positions of both sub-cavities 1, i.e., as shown... Figures 7 to 9 As shown, the process tank 12 can be a double-sided type, such as... Figures 10 to 12 As shown, the process tank 12 can be single-sided, but double-sided is preferred. Adjacent sub-cavities 1 are bonded and sealed together by an adhesive. Correspondingly, the process tank 12 contains an adhesive. In some other specific embodiments, adjacent sub-cavities 1 are sealed together by adding raw materials, or adjacent sub-cavities 1 are sealed together by welding. Correspondingly, the process tank 12 contains raw materials or welding solder.

[0042] In some specific embodiments of this utility model, a sealing ring 6 is sandwiched between two adjacent sub-cavities 1. The cavity structure also includes a pressing mechanism 7, which presses against the sub-cavity 1 at the front end and / or the sub-cavity 1 at the rear end. Specifically, the sealing ring 6 can be made of rubber, graphite, polytetrafluoroethylene, or metal, etc. Because the reaction chambers of tubular equipment are mostly high-temperature and corrosive environments, graphite sealing rings are preferred. Graphite sealing rings have excellent heat resistance, corrosion resistance, and self-lubricating properties, making them more suitable for high-temperature, high-pressure, and corrosive environments, and their sealing performance is more reliable. Additionally, as... Figure 13 As shown, the sealing ring 6 is arranged between two adjacent sub-cavities 1. At the same time, in order to improve the sealing performance, the clamping mechanism 7 preferably adopts an elastic force method. For example, a spring is set in the clamping mechanism 7. When the clamping force is too large, the spring contracts, so as not to damage the cavity and the sealing ring 6. The design is ingenious.

[0043] In this embodiment of the invention, an installation guide structure is provided at the splicing position of two adjacent sub-cavities 1. Specifically, as shown... Figure 14As shown, to facilitate the installation of each sub-cavity 1, an installation guide structure is provided at the splicing position of the sub-cavities 1. The installation guide structure includes an outer inclined surface 13 on one of the sub-cavities 1 and an inner inclined surface 14 on the other sub-cavity 1. The outer inclined surface 13 is located at the lower part of the splicing position of the sub-cavities 1 and faces downward. The inner inclined surface 14 is provided corresponding to the outer inclined surface 13 and faces upward. The outer inclined surface 13 and the inner inclined surface 14 play a guiding role when the two sub-cavities 1 are connected.

[0044] In this embodiment of the invention, a furnace tail sealing plate 2 is provided on the tail end face of the sub-cavity 1 located at the tail end. An air inlet pipe 3 and an exhaust pipe 4 are arranged on the furnace tail sealing plate 2. Specifically, the reaction chamber of photovoltaic equipment is usually a long cylindrical cavity shape, and only one end face needs to be frequently opened and closed to allow for the insertion and removal of materials to be processed. The other end face is usually closed and is only opened when maintenance is required. The side that is frequently opened and closed is called the furnace opening 101, and the other side is called the furnace tail 102. The furnace opening side of the reaction chamber needs to be open because materials need to enter and exit. The furnace door is closed to achieve sealing during the process. The furnace tail 102 does not need to be disassembled except for maintenance. Therefore, the furnace tail sealing plate 2 can be directly placed on the tail end face of the sub-cavity 1 at the tail end of the inner cavity 10, which simplifies the structure. This is also due to the fact that the inner cavity 10 can be manufactured in sections. Otherwise, the cavity would be too long, and the manufacturing cost would be very high.

[0045] In this embodiment of the present invention, the front part of the sub-cavity 1 located at the front end is the furnace opening of the inner cavity 10, and the rear part of the sub-cavity 1 located at the rear end is the furnace tail of the inner cavity 10. A boss 5 is provided on the furnace opening or furnace tail, and a clamping mechanism is provided on the outside of the boss 5 to clamp and fix the inner cavity 10. Specifically, as shown... Figures 1 to 3 As shown, the boss 5 is arranged on the outer surface of the furnace opening. The boss 5 facilitates the clamping and fixing of the inner cavity 10 with the clamping mechanism. The clamping mechanism is, for example, a bolt, which fixes the inner cavity 10 and the outer cavity.

[0046] This utility model embodiment also provides a photovoltaic device, including the cavity structure of the photovoltaic device reaction chamber described above. Multiple sub-cavities 1 can be assembled to form a longer inner cavity 10, which can effectively increase the number of wafers carried in the inner cavity 10, significantly increasing production capacity and effectively reducing the production cost of the inner cavity 10.

[0047] The above-disclosed examples are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent changes made in accordance with the scope of the present utility model application shall still fall within the scope of the present utility model.

Claims

1. A cavity structure for a photovoltaic device reaction chamber, characterized in that, It includes an outer cavity and an inner cavity disposed inside the outer cavity. The outer cavity is a sealed cavity, and the inner cavity includes several sub-cavities. Each sub-cavity is a hollow tubular structure with open ends. The several sub-cavities are connected to each other to form a connected inner cavity, and adjacent sub-cavities are spliced ​​and connected.

2. The cavity structure of the photovoltaic equipment reaction chamber as described in claim 1, characterized in that, The adjacent sub-cavities are sealed together by adhesive bonding, or by sealing with raw materials, or by sealing with a sealing ring, or by welding.

3. The cavity structure of the photovoltaic equipment reaction chamber as described in claim 1, characterized in that, The material of the inner cavity is selected from silicon carbide, graphite, stainless steel, thermally conductive ceramics, and quartz.

4. The cavity structure of the photovoltaic equipment reaction chamber as described in claim 2, characterized in that, At least one of the two adjacent sub-cavities is provided with a process groove at the splicing position, and the process groove contains the adhesive, the raw material, or the welding solder.

5. The cavity structure of the photovoltaic equipment reaction chamber as described in claim 2, characterized in that, The sealing ring is sandwiched between two adjacent sub-cavities. The cavity structure also includes a pressing mechanism, which presses against the sub-cavity located at the front end and / or the pressing mechanism presses against the sub-cavity located at the rear end.

6. The cavity structure of the photovoltaic equipment reaction chamber as described in claim 1, characterized in that, The cross-section of the sub-cavity is rectangular, or the cross-section of the sub-cavity is elliptical, or the cross-section of the sub-cavity is drum-shaped.

7. The cavity structure of the photovoltaic equipment reaction chamber as described in claim 1, characterized in that, An installation guide structure is provided at the splicing position of the two adjacent sub-cavities.

8. The cavity structure of the photovoltaic equipment reaction chamber as described in claim 1, characterized in that, A furnace tail sealing plate is provided on the tail end face of the sub-cavity located at the tail end, and an air inlet pipe and an exhaust pipe are arranged on the furnace tail sealing plate.

9. The cavity structure of the photovoltaic equipment reaction chamber as described in claim 1, characterized in that, The front part of the sub-cavity located at the front end is the furnace opening part of the inner cavity, and the tail part of the sub-cavity located at the rear end is the furnace tail part of the inner cavity. A boss is provided on the furnace opening part or the furnace tail part, and a clamping mechanism is provided on the outside of the boss to clamp and fix the inner cavity.

10. A photovoltaic device, characterized in that: The cavity structure of the photovoltaic device reaction chamber as described in any one of claims 1 to 9.

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