An MMF filtration device for semiconductor water treatment

Abstract

This utility model discloses an MMF filtration device for semiconductor water treatment, relating to the field of waste liquid treatment technology. Its key technical features include: a multi-media filter with an inlet pipe and an outlet pipe installed at its inlet and outlet, respectively. Both the inlet and outlet pipes are equipped with liquid pumps capable of forward and reverse flow. The inlet pipe is connected to a connecting pipe and a waste discharge pipe via a first three-way valve, and the outlet pipe is connected to a drain pipe and a cleaning pipe via a second three-way valve. The connecting pipe is connected to a container holding semiconductor waste liquid, and the cleaning pipe is connected to a tank containing cleaning fluid. This utility model, combined with MMF filtration technology, further enhances filtration capacity.

Description

Technical Field

[0001] This utility model relates to the field of waste liquid treatment technology, and in particular to an MMF filtration device for semiconductor water treatment. Background Technology

[0002] As a key driver of technological development, the semiconductor industry generates large quantities of complex wastewater during chip manufacturing and other processes. This wastewater contains pollutants such as heavy metals (e.g., copper, nickel, lead), acids and alkalis, organic solvents, and tiny particulate impurities. Direct discharge without effective treatment can cause serious harm to soil, liquid sources, and the ecological environment. Currently, semiconductor wastewater treatment processes typically involve multiple steps. First, a pretreatment stage removes larger suspended particles using physical methods such as screens and sedimentation. Next, chemical treatment utilizes reactions like neutralization and redox reactions to convert harmful substances in the wastewater into easily separable or harmless substances. Following this is biological treatment, where microorganisms decompose organic pollutants through metabolism. Finally, advanced treatment stages, such as reverse osmosis and ion exchange, are often required to ensure the wastewater meets stringent discharge standards or enables liquid resource reuse. However, with the continuous upgrading of semiconductor processes and increasingly stringent environmental requirements, existing wastewater treatment technologies still face numerous challenges in terms of treatment efficiency, cost, and handling the complex composition of wastewater.

[0003] In the field of semiconductor waste liquid treatment, waste liquid filtration devices are a crucial component, directly impacting the quality of the final treated liquid. CN202321889162.6 discloses a waste liquid filtration device for a semiconductor seed crystal ultrasonic cleaning machine, designed to filter waste liquid generated during the ultrasonic cleaning process of semiconductor seed crystals. While this device can filter impurities in the waste liquid to some extent, practical application and research have revealed room for improvement in its filtration efficiency. Specifically, when faced with tiny particles, specific chemical substances, and complex pollutant mixtures in the waste liquid, the filtration efficiency may be insufficient, and some impurities may not be effectively retained, making it difficult for the treated liquid to fully meet stringent emission standards or the influent requirements of subsequent processes.

[0004] Multimedia filters (MMFs), widely used in liquid treatment, also play a crucial role in semiconductor wastewater treatment. MMFs typically consist of various filter media of different particle sizes and materials, such as quartz sand, anthracite, and activated carbon. These filter media are filled into the filter in a specific order and proportion, forming a bed with excellent filtration performance. Therefore, how to further improve the filtration capacity of semiconductor wastewater using MMF filtration technology is a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] In order to solve the above-mentioned technical problems, the purpose of this utility model is to provide an MMF filtration device for semiconductor water treatment, which combines MMF filtration technology to further improve filtration capacity.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A multi-media filter (MMF) for semiconductor water treatment includes a multi-media filter with an inlet pipe and an outlet pipe installed at its inlet and outlet, respectively. A liquid pump is installed on both the inlet and outlet pipes, and the pump can deliver liquid in both forward and reverse directions. The inlet pipe is connected to a connecting pipe and a waste discharge pipe via a first three-way valve, and the outlet pipe is connected to a drain pipe and a cleaning pipe via a second three-way valve. The connecting pipe is connected to a container holding semiconductor waste liquid, and the cleaning pipe is connected to a tank containing cleaning liquid.

[0008] When both pumps are pumping in the forward direction, the first three-way valve controls the inlet pipe to connect with the connecting pipe, and the second three-way valve controls the outlet pipe to connect with the drain pipe; when both pumps are pumping in the reverse direction, the second three-way valve controls the outlet pipe to connect with the cleaning pipe, and the first three-way valve controls the inlet pipe to connect with the waste discharge pipe.

[0009] By adopting the above scheme, in the forward filtration mode, both liquid pumps deliver liquid in the forward direction. At this time, the first three-way valve connects the inlet pipe to the connecting pipe, allowing the waste liquid in the container containing semiconductor waste liquid to enter the inlet pipe through the connecting pipe. Driven forward by the liquid pumps, the waste liquid enters the multi-media filter. The multi-media filter contains at least two layers of filter media with different particle sizes to perform graded filtration of impurities in the waste liquid. Large particles are first intercepted by the upper, coarser-sized filter media layer, while smaller particles are removed by penetrating the lower, finer-sized filter media layer. The filtered clean liquid flows out from the outlet of the multi-media filter to the outlet pipe. Simultaneously, the second three-way valve connects the outlet pipe to the drain pipe, allowing the clean liquid to be discharged through the drain pipe, completing the filtration process for the semiconductor waste liquid. In the reverse cleaning mode, both liquid pumps deliver liquid in the reverse direction. At this point, the second three-way valve connects the outlet pipe to the cleaning pipe. The cleaning solution in the tank enters the outlet pipe through the cleaning pipe. Driven in the reverse direction by the pump, the cleaning solution flows back into the multi-media filter, backwashing the filter media layer and removing impurities adhering to it. Simultaneously, the first three-way valve connects the inlet pipe to the waste outlet pipe. The washed-off impurities, along with the cleaning solution, are discharged through the waste outlet pipe, thus completing the cleaning of the multi-media filter and restoring its filtration performance for subsequent forward filtration. This alternating operation of forward filtration and reverse cleaning maintains the device's high filtration capacity stably over a long period.

[0010] Preferably, both the first three-way valve and the second three-way valve are electromagnetic three-way valves, and the liquid pump is linked to the electromagnetic three-way valve through the control unit.

[0011] Preferably, the control unit is a microprocessor or a single-chip microcomputer.

[0012] Preferably, the multi-media filter has at least two layers of filter media with different particle sizes inside, and the filter media layers are separated by a support mesh plate.

[0013] Preferably, a liquid level sensor is installed inside the liquid tank, and an alarm is installed outside the liquid tank. The liquid level sensor and the alarm are electrically connected. When the liquid level sensor detects that the liquid level in the liquid tank is lower than a preset liquid level, the liquid level sensor controls the alarm to sound an alarm.

[0014] Preferably, the alarm is configured as both an audible and visual alarm and a wireless alarm.

[0015] Preferably, the inlet pipe, outlet pipe, connecting pipe, waste discharge pipe, drain pipe, and cleaning pipe are all equipped with flow regulating valves.

[0016] This utility model has the following beneficial effects:

[0017] I. This MMF (Multi-Media Filtration) filter for semiconductor water treatment, through its unique design and operation, combines MMF technology to significantly improve filtration capacity. The multi-media filter internally comprises at least two layers of filter media with different particle sizes, separated by a supporting mesh. This layered design allows impurities of different particle sizes to be effectively retained in different filter media layers, achieving graded filtration of impurities in semiconductor wastewater. Large particles are first retained by the upper, coarser-sized filter media layer, while small particles can penetrate further into the lower, finer-sized filter media layer for removal. This greatly improves filtration precision and efficiency. Compared to filters using single-size filter media, it can more thoroughly remove impurities from wastewater, ensuring higher quality filtered liquid and meeting the high water quality requirements of the semiconductor industry for treated wastewater.

[0018] Second, the liquid pump can simultaneously deliver liquid in both forward and reverse directions. Combined with the switching control of the first and second three-way valves, automated operation of forward filtration and reverse cleaning is achieved. During forward filtration, semiconductor waste liquid enters the inlet pipe through the connecting pipe and, under the forward delivery of the liquid pump, enters the multi-media filter for filtration. The filtered clean liquid is discharged from the outlet pipe through the drain pipe. During reverse cleaning, the liquid pump delivers liquid in the reverse direction, and the clean liquid enters the outlet pipe from the liquid tank through the cleaning pipe, backwashing the multi-media filter and discharging impurities adhering to the filter media layer through the waste discharge pipe. This reverse cleaning function can promptly and effectively remove impurities accumulated on the filter media layer, preventing clogging and maintaining the permeability and filtration performance of the filter media layer. This ensures a long-term, stable maintenance of high filtration capacity, guaranteeing that the device can efficiently complete the filtration of semiconductor waste liquid throughout its entire service life. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional structural diagram of the first embodiment of the present utility model.

[0021] Figure 2 This is a cross-sectional view of a multi-media filter according to the first embodiment of the present invention.

[0022] Figure 3 This is a cross-sectional view of the liquid tank according to the second embodiment of this utility model.

[0023] In the diagram: 1. Multi-media filter; 101. Filter media layer; 102. Support mesh plate; 2. Inlet pipe; 201. First three-way valve; 202. Connecting pipe; 203. Waste discharge pipe; 3. Outlet pipe; 301. Second three-way valve; 302. Drain pipe; 303. Cleaning pipe; 4. Liquid pump; 5. Liquid tank; 501. Liquid level sensor; 502. Alarm; 6. Flow regulating valve. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0025] First embodiment

[0026] like Figure 1 As shown, an MMF filtration device for semiconductor water treatment includes a multi-media filter 1. The inlet and outlet of the multi-media filter 1 are respectively equipped with an inlet pipe 2 and an outlet pipe 3. A liquid pump 4 is installed on both the inlet pipe 2 and the outlet pipe 3, and the liquid pump 4 can deliver liquid in both forward and reverse directions. The inlet pipe 2 is connected to a connecting pipe 202 and a waste discharge pipe 203 via a first three-way valve 201. The outlet pipe 3 is connected to a drain pipe 302 and a cleaning pipe 303 via a second three-way valve 301. The connecting pipe 202... 2 is connected to a container containing semiconductor waste liquid, and the cleaning pipe 303 is connected to a liquid tank 5 containing cleaning liquid; when both liquid pumps 4 are pumping in the forward direction, the first three-way valve 201 controls the inlet pipe 2 to be connected to the connecting pipe 202, and the second three-way valve 301 controls the outlet pipe 3 to be connected to the drain pipe 302; when both liquid pumps 4 are pumping in the reverse direction, the second three-way valve 301 controls the outlet pipe 3 to be connected to the cleaning pipe 303, and the first three-way valve 201 controls the inlet pipe 2 to be connected to the waste discharge pipe 203.

[0027] like Figure 1 As shown, in the forward filtration mode, both liquid pumps 4 deliver liquid in the forward direction. At this time, the first three-way valve 201 connects the inlet pipe 2 to the connecting pipe 202. The waste liquid in the container containing semiconductor waste liquid enters the inlet pipe 2 through the connecting pipe 202. Driven by the liquid pumps 4 in the forward direction, the waste liquid enters the multi-media filter 1. The multi-media filter 1 contains at least two layers of filter media 101 with different particle sizes to perform graded filtration of impurities in the waste liquid. Large particles are first intercepted by the upper, coarser-sized filter media layer 101, while small particles are removed by penetrating the lower, finer-sized filter media layer 101. The filtered clean liquid flows from the outlet of the multi-media filter 1 to the outlet pipe 3. Simultaneously, the second three-way valve 301 connects the outlet pipe 3 to the drain pipe 302, allowing the clean liquid to be discharged through the drain pipe 302, completing the filtration process for the semiconductor waste liquid. In the reverse cleaning mode, both liquid pumps 4 deliver liquid in the reverse direction. At this time, the second three-way valve 301 connects the outlet pipe 3 to the cleaning pipe 303. The cleaning liquid in the tank 5 containing the cleaning liquid enters the outlet pipe 3 through the cleaning pipe 303. Under the reverse push of the pump 4, the cleaning liquid enters the multi-media filter 1 in reverse, backwashing the filter media layer 101 and washing off the impurities attached to the filter media layer 101. At the same time, the first three-way valve 201 connects the inlet pipe 2 to the waste discharge pipe 203. The washed-off impurities, along with the cleaning liquid, are discharged through the waste discharge pipe 203, thus completing the cleaning of the multi-media filter 1 and restoring its filtration performance for subsequent forward filtration. Through this alternating operation of forward filtration and reverse cleaning, the device can maintain a high filtration capacity stably for a long period of time.

[0028] like Figure 1 As shown, both the first three-way valve 201 and the second three-way valve 301 are electromagnetic three-way valves, and the liquid pump 4 is linked to the electromagnetic three-way valves through the control unit. The control unit (microprocessor or single-chip microcomputer), as the core control component, is pre-programmed with control logic for both forward filtration and reverse cleaning modes. Based on the preset program, it precisely controls the delivery direction of the liquid pump 4 and the connection status of the electromagnetic three-way valves (first three-way valve 201 and second three-way valve 301). When forward filtration is required, the control unit issues a command to cause the two liquid pumps 4 to deliver in the forward direction. Simultaneously, it controls the first three-way valve 201 to connect the inlet pipe 2 to the connecting pipe 202, and the second three-way valve 301 to connect the outlet pipe 3 to the drain pipe 302. Thus, semiconductor waste liquid enters the multi-media filter 1 from the container containing the waste liquid through the connecting pipe 202 and the inlet pipe 2 for filtration, and the filtered clean liquid is discharged through the outlet pipe 3 and the drain pipe 302. When reverse cleaning of the multi-media filter 1 is required, the control unit changes the command to cause the two liquid pumps 4 to deliver in the reverse direction. At this time, the second three-way valve 301 connects the outlet pipe 3 to the cleaning pipe 303, and the first three-way valve 201 connects the inlet pipe 2 to the waste discharge pipe 203. The cleaning solution flows from the tank 5 through the cleaning pipe 303 and the outlet pipe 3 into the multi-media filter 1 for cleaning. The waste liquid after cleaning is discharged through the inlet pipe 2 and the waste discharge pipe 203. This control method, based on the linkage between the control unit and the solenoid three-way valve, achieves automatic switching between filtration and cleaning modes.

[0029] like Figure 2 As shown, the multi-media filter 1 contains at least two layers of filter media 101 with different particle sizes, separated by a support mesh 102. When semiconductor waste liquid enters the multi-media filter 1, impurities of different particle sizes are trapped by the filter media layers 101 according to their size. Larger particles are first blocked by the upper, coarser-sized filter media layer 101, while smaller particles can pass through to the lower, finer-sized filter media layer 101, thus achieving graded filtration of impurities and improving filtration efficiency and precision.

[0030] like Figure 1As shown, flow regulating valves 6 are installed on the inlet pipe 2, outlet pipe 3, connecting pipe 202, waste discharge pipe 203, drain pipe 302, and cleaning pipe 303. These flow regulating valves 6 can adjust the flow rate of the liquid in each pipe manually or automatically (if connected to the control unit) according to actual operating needs. For example, during forward filtration, the flow rates of the inlet pipe 2 and outlet pipe 3 can be adjusted according to the concentration of the waste liquid and the treatment requirements to ensure stable filtration. During reverse cleaning, the flow rates of the cleaning pipe 303 and waste discharge pipe 203 are adjusted to ensure that the cleaning liquid can fully rinse the filter media layer 101, while reasonably controlling the discharge rate of the waste liquid. By setting the flow regulating valves 6, the entire filtration device can adapt to different operating conditions, improving operational flexibility and stability.

[0031] Second embodiment

[0032] like Figure 3 As shown, a liquid level sensor 501 is installed inside the liquid tank 5, and an alarm 502 is installed outside the liquid tank 5. The liquid level sensor 501 and the alarm 502 are electrically connected. When the liquid level sensor 501 detects that the liquid level in the liquid tank 5 is lower than the preset liquid level, the liquid level sensor 501 controls the alarm 502 to sound an alarm.

[0033] like Figure 3 As shown, the liquid level sensor 501 installed inside the liquid tank 5 is a device capable of sensing the liquid level height inside the tank 5. It continuously monitors the liquid level inside the tank 5 using specific physical principles (such as pressure type, float type, ultrasonic type, etc., the specific principle depending on the sensor type) and converts the monitored liquid level information into an electrical signal. The liquid level sensor 501 and the alarm 502 are electrically connected to form a complete monitoring and alarm loop. When the liquid level sensor 501 detects that the liquid level in the tank 5 is lower than a preset level, it indicates that the amount of cleaning liquid in the tank 5 is insufficient and may not meet the requirements for subsequent backwashing of the multi-media filter 1. At this time, the liquid level sensor 501 will generate a trigger signal according to its internal logic and transmit this signal to the alarm 502.

[0034] Alarm 502 is configured as both an audible and visual alarm and a wireless alarm. Upon receiving a trigger signal from the liquid level sensor 501, the audible and visual alarm 502 will simultaneously emit both sound and light alarm signals. The sound alarm can promptly attract the attention of on-site operators, while the light alarm (such as flashing lights) can serve as an auxiliary reminder in low light or noisy environments. The wireless alarm 502 will transmit the alarm information wirelessly to a designated remote monitoring terminal (such as the operator's mobile phone, the control center's computer, etc.), allowing relevant personnel to be promptly informed of the low liquid level in tank 5 even when not on-site, and thus quickly take appropriate measures such as replenishing cleaning fluid to ensure the normal operation of the filtration device's reverse cleaning process, avoiding the impact on filtration efficiency and device performance due to insufficient cleaning fluid.

[0035] The above are merely specific embodiments of this utility model, but the technical features of this utility model are not limited thereto. Any simple changes, equivalent substitutions, or modifications made based on this utility model to solve essentially the same technical problems and achieve essentially the same technical effects are all covered within the protection scope of this utility model.

Claims

1. An MMF filtration device for semiconductor water treatment, characterized in that: The system includes a multi-media filter (1), with an inlet pipe (2) and an outlet pipe (3) installed at the inlet and outlet of the multi-media filter (1), respectively. A liquid pump (4) is installed on both the inlet pipe (2) and the outlet pipe (3), and the liquid pump (4) can deliver in both forward and reverse directions. The inlet pipe (2) is connected to a connecting pipe (202) and a waste discharge pipe (203) through a first three-way valve (201), and the outlet pipe (3) is connected to a drain pipe (302) and a cleaning pipe (303) through a second three-way valve (301). The connecting pipe (202) is connected to a container containing semiconductor waste liquid, and the cleaning pipe (303) is connected to a liquid tank (5) containing cleaning liquid. When both liquid pumps (4) are pumping in the forward direction, the first three-way valve (201) controls the inlet pipe (2) to be connected to the connecting pipe (202), and the second three-way valve (301) controls the outlet pipe (3) to be connected to the drain pipe (302); when both liquid pumps (4) are pumping in the reverse direction, the second three-way valve (301) controls the outlet pipe (3) to be connected to the cleaning pipe (303), and the first three-way valve (201) controls the inlet pipe (2) to be connected to the waste discharge pipe (203).

2. The MMF filtration device for semiconductor water treatment according to claim 1, characterized in that: Both the first three-way valve (201) and the second three-way valve (301) are electromagnetic three-way valves, and the liquid pump (4) is linked to the electromagnetic three-way valve through the control unit.

3. The MMF filtration device for semiconductor water treatment according to claim 2, characterized in that: The control unit is configured as a microprocessor or a single-chip microcomputer.

4. The MMF filtration device for semiconductor water treatment according to claim 1, characterized in that: The multi-media filter (1) has at least two layers of filter media (101) with different particle sizes inside, and each filter media layer (101) is separated from the other by a support mesh plate (102).

5. The MMF filtration device for semiconductor water treatment according to claim 1, characterized in that: A liquid level sensor (501) is installed inside the liquid tank (5), and an alarm (502) is installed outside the liquid tank (5). The liquid level sensor (501) and the alarm (502) are electrically connected. When the liquid level sensor (501) detects that the liquid level in the liquid tank (5) is lower than the preset liquid level, the liquid level sensor (501) controls the alarm (502) to sound an alarm.

6. The MMF filtration device for semiconductor water treatment according to claim 5, characterized in that: The alarm (502) is configured as an audible and visual alarm (502) and a wireless alarm (502).

7. The MMF filtration device for semiconductor water treatment according to claim 1, characterized in that: The inlet pipe (2), outlet pipe (3), connecting pipe (202), waste discharge pipe (203), drain pipe (302) and cleaning pipe (303) are all equipped with flow regulating valves (6).

Images