Target cleaning and fixing device
By designing a cleaning and fixing device suitable for multiple targets, the problems of low efficiency and high cost of single target cleaning devices in the existing technology are solved, and the effect of simultaneous cleaning of multiple targets and reduction of pollution risk is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- KONFOONG MATERIALS INTERNATIONAL CO LTD
- Filing Date
- 2025-06-05
- Publication Date
- 2026-05-26
AI Technical Summary
Existing target cleaning devices can only clean one type of target at a time, which requires changing the device when cleaning different targets. This is costly, inefficient, and poses a risk of contamination due to human contact.
A target cleaning and fixing device was designed, including a first fixing component and a second fixing component, which can fix two types of targets at the same time. It can adapt to different sizes through adjustable limiting parts and sliding groove structure, and realize the simultaneous cleaning of multiple targets.
It significantly improves the efficiency of target cleaning, reduces costs, and lowers the risk of contamination by reducing manual operation, while also improving cleaning quality and space utilization.
Smart Images
Figure CN224272626U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of target cleaning technology, and in particular to a target cleaning and fixing device. Background Technology
[0002] With the rapid development of the semiconductor industry, the demand for coating materials, as crucial materials in the manufacture of semiconductor electronic devices, is increasing daily. Sputtering targets, as an important coating material, have wide applications in integrated circuits, flat panel displays, solar energy, and optical devices, with sputtering being the most common method. During sputtering, the target directly participates in the sputtering process. If the target surface is contaminated with oil, dust, particulate impurities, or other foreign matter, an electric arc discharge will occur, causing a portion of the target to melt and generate sputtering droplets that splash in various directions. These droplets adhere to the substrate or the already formed coating, degrading the coating quality, resulting in a lower product yield and increased production costs.
[0003] Therefore, the cleanliness of the sputtering target during the sputtering coating process has a significant impact on the quality of the sputtered coating, the product yield, and the production cost. To ensure sufficient cleanliness of the target during production, thorough cleaning is necessary. Existing target cleaning equipment can only clean one type of target at a time, requiring the replacement of different cleaning equipment for different targets, resulting in high costs or low efficiency. How to ensure low costs while preventing contamination from personnel contact during the cleaning process and improving cleaning efficiency has become an urgent problem to be solved. Utility Model Content
[0004] The purpose of this utility model is to provide a target cleaning and fixing device to solve the technical problems of existing target cleaning devices that can only clean one type of target at a time, and that different cleaning devices must be replaced when cleaning different targets. This invention overcomes the technical defects of high target cleaning cost and low cleaning efficiency, and achieves the technical effect of improving cleaning efficiency.
[0005] Based on the above concept, the technical solution adopted by this utility model is as follows:
[0006] A target cleaning and fixing device for fixing a first target and a second target, comprising:
[0007] The first fixing component includes two first rods, at least one first limiting member, and at least one second limiting member; the two first rods are parallel and spaced apart along a first direction, the gap between the two first rods is used to accommodate the first target and the second target, and the first limiting member and the second limiting member are both adjustablely connected between the two first rods along a second direction, and the first limiting member and the second limiting member are used to support the first target.
[0008] The second fixing component is arranged vertically at intervals below the first fixing component. The second fixing component includes two second rods and at least two third limiting members. The two second rods are parallel and spaced apart along a first direction. The third limiting members are adjustablely connected between the two second rods along a second direction. The third limiting members are used to support the second target material.
[0009] The first direction, the second direction, and the vertical direction are perpendicular to each other.
[0010] Optionally, the two first rods are provided with first sliding grooves extending along the second direction, and both ends of the first limiting member and the second limiting member are connected to first adjusting members. The first adjusting members are inserted into the corresponding first sliding grooves and their positions within the first sliding grooves are adjustable.
[0011] Optionally, the first adjusting member includes a first moving part and a first locking part connected together. The moving part passes through the first sliding groove and is connected to the first limiting member or the second limiting member. The locking part stops the first rod on the side facing away from the first target material.
[0012] The movable part is threadedly connected to the first limiting member or the second limiting member; and / or, the locking part is threadedly connected to the movable part.
[0013] Optionally, two second rods are provided with second sliding grooves extending along the second direction, and both ends of the third limiting member are connected to second adjusting members. The second adjusting members pass through the corresponding second sliding grooves and are adjustable in position within the second sliding grooves.
[0014] Optionally, the second adjusting member includes a second moving part and a second locking part connected together. The moving part passes through the second sliding groove and is connected to the third limiting member. The locking part stops on the side of the second rod facing away from the second target material.
[0015] The moving part is threadedly connected to the third limiting member; and / or, the locking part is threadedly connected to the moving part.
[0016] Optionally, the second limiting member includes a first limiting post, and the first limiting post has limiting flanges circumferentially provided at both ends along the first direction. The first limiting post is used to support the first target material, and the limiting flanges at both ends limit the first target material on both sides of the first target material.
[0017] Optionally, the first limiting member is located between the second limiting member and the second target material, and the first limiting member is provided with an avoidance groove, which is used to avoid the second target material.
[0018] Optionally, the third limiting member is provided with a groove, which engages with the second target material.
[0019] Optionally, the target cleaning and fixing device further includes a hanging rod, two first vertical rods, and two second vertical rods;
[0020] The hanging rod is configured to be hung on the cleaning equipment, with the first ends of the two first vertical rods respectively connected to the two ends of the hanging rod, and the two second vertical rods respectively connected to the second ends of the two first vertical rods;
[0021] Both ends of the first rod and the second rod are respectively connected to the two second vertical rods;
[0022] And / or,
[0023] The first rod has the same structure as the second rod, and the third limiting member has the same structure as the second limiting member.
[0024] Optionally, each of the second vertical bars includes a main board and two side plates, the two side plates being respectively connected to both ends of the main board along the first direction and forming a U-shaped structure with the main board, the main board being connected to the first vertical bar;
[0025] Both ends of the first rod and both ends of the second rod are connected to the corresponding side plates.
[0026] The beneficial effects of this utility model are:
[0027] The target cleaning and fixing device proposed in this utility model comprises a first fixing component and a second component. The first fixing component includes two first rods, at least one first limiting member, and at least one second limiting member. The two first rods are parallel and spaced apart along a first direction, with the space between them accommodating a first target and a second target. The first and second limiting members are adjustablely connected between the two first rods along a second direction, supporting the first target. The second fixing component is vertically spaced below the first fixing component and includes two second rods and at least two third limiting members. The two second rods are parallel and spaced apart along the first direction, and the third limiting members are adjustablely connected between the two second rods along a second direction, supporting the second target. This device enables the simultaneous fixing of two types of targets, increasing both the quantity and variety of targets that can be cleaned, significantly improving the efficiency of target cleaning. Attached Figure Description
[0028] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.
[0029] Figure 1 This is a front view of the target cleaning and fixing device provided by this utility model;
[0030] Figure 2 yes Figure 1 A magnified view of a section at point A in the middle;
[0031] Figure 3 yes Figure 1 A magnified view of a section at point B in the middle;
[0032] Figure 4 This is a bottom view of the target cleaning and fixing device provided by this utility model;
[0033] Figure 5 This is a left view of the target cleaning and fixing device provided by this utility model;
[0034] Figure 6 This is a top view of the first limiting member provided by this utility model;
[0035] Figure 7 This is a top view of the second limiting member provided by this utility model;
[0036] Figure 8 This is a top view of the third limiting member provided by this utility model.
[0037] In the picture:
[0038] 1. First fixing component; 11. First rod; 111. First slide groove; 12. First limiting component; 121. Clearance groove; 13. Second limiting component; 131. First limiting post; 132. Limiting flange;
[0039] 2. Second fixing component; 21. Second rod; 211. Second slide groove; 22. Third limiting component; 221. Groove;
[0040] 3. First target material; 4. Second target material;
[0041] 51. Hanging pole; 52. First vertical pole; 53. Second vertical pole. Detailed Implementation
[0042] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the accompanying drawings, not all of them.
[0043] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Specifically, the terms "first position" and "second position" refer to two different positions.
[0044] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0045] This utility model discloses a target material cleaning and fixing device for fixing a first target material 3 and a second target material 4, such as... Figures 1 to 5 As shown, the target cleaning and fixing device includes a first fixing component 1 and a second fixing component 2. The first fixing component 1 includes two first rods 11, at least one first limiting member 12, and at least one second limiting member 13. The two first rods 11 are parallel and spaced apart along a first direction, and the gap between the two first rods 11 is used to accommodate the first target 3 and the second target 4. The first limiting member 12 and the second limiting member 13 are both adjustablely connected between the two first rods 11 along a second direction, and the first limiting member 12 and the second limiting member 13 are used to support the first target 3.
[0046] The second fixing component 2 is arranged vertically at intervals below the first fixing component 1. The second fixing component 2 includes two second rods 21 and at least two third limiting members 22. The two second rods 21 are parallel and spaced apart along the first direction. The third limiting members 22 are adjustablely connected between the two second rods 21 along the second direction. The third limiting members 22 are used to support the second target material 4.
[0047] Among them, the first direction, the second direction, and the vertical direction are perpendicular to each other.
[0048] In some specific embodiments, such as Figures 2 to 5 As shown, the first fixing component 1 includes two first rods 11, two first limiting members 12, and two second limiting members 13. A combination of one first limiting member 12 and one second limiting member 13 supports one first target 3, and can simultaneously support two first target 3s. The second fixing component 2 is vertically spaced below the first fixing component 1. The second fixing component 2 includes two second rods 21 and two third limiting members 22. The two third limiting members 22 support one second target 4. It can be understood that the bottom of the second target 4 is supported by the two third limiting members 22, and the upper part of the second target 4 is located between the two first rods 11.
[0049] The target cleaning and fixing device provided by this utility model can fix two different targets at the same time by setting a first fixing component 1 and a second fixing component 2, so that the two different targets can be cleaned at the same time during subsequent cleaning, which significantly improves the efficiency of target cleaning.
[0050] Further, see Figure 1 and Figure 2 Two first rods 11 are provided with first sliding grooves 111 extending in the second direction. Both ends of the first limiting member 12 and the second limiting member 13 are connected to first adjusting members. The first adjusting members are inserted into the corresponding first sliding grooves 111 and their positions within the first sliding grooves 111 are adjustable.
[0051] In some specific embodiments, such as Figure 1 , Figure 2 and Figure 5 As shown, each of the two first rods 11 is provided with two first grooves 111 extending along a second direction. The two first grooves 111 are spaced apart on the first rods 11 along the second direction. Between the first grooves 111 directly opposite each other on the two first rods 11, there is a first limiting member 12 and a second limiting member 13. Both ends of the first limiting member 12 and the second limiting member 13 are provided with first adjusting members, and the first adjusting members can move the first limiting member 12 and the second limiting member 13 within the first groove 111 respectively, thereby adjusting the distance between the first limiting member 12 and the second limiting member 13, so as to place first target materials 3 of different sizes, thereby improving the applicability and versatility of the target material cleaning and fixing device.
[0052] Furthermore, the first adjusting member includes a first moving part and a first locking part connected together. The first moving part passes through the first sliding groove 111 and is connected to the first limiting member 12 or the second limiting member 13. The first locking part stops on the side of the first rod 11 facing away from the first target material 3. The first moving part is threadedly connected to the first limiting member 12 or the second limiting member 13; and / or, the first locking part is threadedly connected to the first moving part.
[0053] In some embodiments, the ends of the first limiting member 12 and the second limiting member 13 are provided with threaded holes. The first adjusting member is a bolt, with the bolt shank serving as the first moving part and the bolt head serving as the first locking part. When the bolt is locked with the threaded hole, the bolt head stops on the side of the first rod 11 facing away from the first target material 3, thus fixing the first limiting member 12 or the second limiting member 13. The portion of the bolt near the bolt head is a threadless section, which facilitates the movement of the first limiting member 12 or the second limiting member 13 within the first sliding groove 111 when the bolt is rotated and loosened.
[0054] In some other embodiments, the first limiting member 12 and the second limiting member 13 have through holes. The first moving part of the first adjusting member is the end of a screw. The screw passes through the through hole, and both ends of the screw pass through the first sliding grooves 111 on the two first rods 11. The first locking part is a nut, which is threadedly connected to the end of the screw and locked to the side of the first rod 11 facing away from the first target material 3. The part of the screw corresponding to the first rod 11 is a toothless section, which facilitates the movement of the first limiting member 12 or the second limiting member 13 within the first sliding groove 111 when the nut and the screw are rotated and loosened.
[0055] Optionally, two second rods 21 are provided with second sliding grooves 211 extending in the second direction, and both ends of the third limiting member 22 are connected to second adjusting members. The second adjusting members are inserted into the corresponding second sliding grooves 211 and their positions within the second sliding grooves 211 are adjustable.
[0056] In some specific embodiments, such as Figure 1 and Figure 3 As shown, each of the two second rods 21 is provided with two second sliding grooves 211 extending along a second direction. The two second sliding grooves 211 are spaced apart on the second rods 21 along the second direction. A third limiting member 22 is provided between the two second rods 21 and the second sliding grooves 211 directly opposite each other. The second adjusting member is provided at both ends of the third limiting member 22, and the second adjusting member can move within the third limiting member 22 in the second sliding groove 211, thereby adjusting the distance between the two third limiting members 22, thereby placing second targets 4 of different sizes, thereby improving the applicability and versatility of the target cleaning and fixing device.
[0057] Furthermore, the second adjusting member includes a second moving part and a second locking part connected together. The second moving part passes through the second slide groove 211 and is connected to the third limiting member 22. The second locking part stops on the side of the second rod 21 facing away from the second target material 4.
[0058] The second moving part is threadedly connected to the third limiting member 22; and / or, the second locking part is threadedly connected to the second moving part.
[0059] In some embodiments, the end of the third limiting member 22 is provided with a threaded hole, and the second adjusting member is a bolt. The bolt shank serves as the second moving part, and the bolt head serves as the second locking part. When the bolt is locked with the threaded hole, the bolt head stops on the side of the second rod 21 facing away from the second target material 4 to fix the third limiting member 22. The part of the bolt near the bolt head is a threadless section, which facilitates the movement of the third limiting member 22 within the second sliding groove 211 when the bolt is rotated to loosen.
[0060] In some other embodiments, the third limiting member 22 has a through hole, the second moving part of the second adjusting member is the end of the screw, the screw passes through the through hole and both ends of the screw pass through the second sliding grooves 211 on the second rod 21 respectively, and the second locking part is a nut, which is threadedly connected to the end of the screw and locked and stopped on the side of the second rod 21 facing away from the second target material 4. The part of the screw corresponding to the second rod 21 is a toothless section, which facilitates the movement of the third limiting member 22 in the second sliding groove 211 when the nut and the screw are rotated and loosened.
[0061] Further, see Figure 7 The second limiting member 13 includes a first limiting post 131. Both ends of the first limiting post 131 along the first direction are provided with limiting flanges 132. The first limiting post 131 is used to support the first target material 3, and the limiting flanges 132 at both ends limit the first target material 3 on both sides.
[0062] In some specific embodiments, the second limiting member 13 includes a first limiting post 131 with a diameter of 25 mm and a length of 80 mm. The two ends of the first limiting post 131 are provided with limiting flanges 132 with a diameter of 33 mm and a thickness of 5 mm. This configuration prevents the sidewall of the target material from contacting the first rod 11 through the limiting flanges 132, thereby ensuring the cleaning quality of the target material in the future.
[0063] Furthermore, the first limiting member 12 is located between the second limiting member 13 and the second target material 4, and the first limiting member 12 is provided with an avoidance groove 121, which is used to avoid the second target material 4.
[0064] In some specific embodiments, such as Figures 1 to 3 as well as Figure 6As shown, the first target 3 is fan-shaped, and the second target 4 is circular. A third limiting member 22 is located at the end of the second slide groove 211 furthest from the end of the second rod 21. The second target 4 is placed on the two third limiting members 22. A second limiting member 13 is located at the end of the first slide groove 111 near the end of the first rod 11, meaning the second target 4 is located between the two second limiting members 13. Two first limiting members 12 are located at both ends of the second target 4, between the second limiting members 13 and the second target 4, and the diameter of the first limiting member 12 is larger than the diameter of the second limiting member 13. For example, if the diameter of the first limiting member 12 is 60mm and its length is 80mm, this arrangement can lift the end of the first target 3 near the second target 4, fully utilizing the vertical space of the circular second target 4 and improving space utilization. Moreover, the first target 3 is provided with an avoidance groove 121, the diameter of the narrowest part of the avoidance groove 121 is 26mm, so that the second target 4 can be inserted into the avoidance groove 121 of the first limiting member 12, the first target 3 and the second target 4 can be as close as possible, improve space utilization, and thus expand the target size range applicable to the target cleaning and fixing device.
[0065] Further, see Figure 8 The third limiting member 22 is provided with a groove 221, which engages with the second target material 4. In some specific embodiments, the third limiting member 22, by providing the groove 221, can improve the fixing effect of the second target material 4, thereby ensuring the subsequent cleaning quality.
[0066] Optionally, the target cleaning and fixing device further includes a hanging rod 51, two first vertical rods 52, and two second vertical rods 53. The hanging rod 51 is configured to be hung on the cleaning equipment. The first ends of the two first vertical rods 52 are respectively connected to the two ends of the hanging rod 51, and the two second vertical rods 53 are respectively connected to the second ends of the two first vertical rods 52. The two ends of the first rod 11 and the second rod 21 are respectively set on the two second vertical rods 53. This arrangement can fix the target cleaning and fixing device on the cleaning equipment, and place the target inside the cleaning equipment through the target cleaning and fixing device, avoiding fingerprints and dirt residue caused by personnel touching it during the cleaning process, improving the cleaning effect, making the cleaning more thorough, while saving manpower and improving cleaning efficiency.
[0067] In some embodiments, the first rod 11 and the second rod 21 have the same structure, and the third limiting member 22 and the second limiting member 13 have the same structure. For example... Figure 7 and Figure 8 As shown, the first rod 11 and the second rod 21 have the same structure, and the third limiting member 22 and the second limiting member 13 have the same structure and size. This reduces the number of parts that need to be produced and makes them easy to replace, thereby improving the versatility of the parts and further reducing costs.
[0068] Furthermore, each second vertical rod 53 includes a main board and two side plates. The two side plates are respectively connected to both ends of the main board along the first direction and form a U-shaped structure with the main board. The main board is connected to the first vertical rod 52. Both ends of the first rod 11 and both ends of the second rod 21 are connected to the corresponding side plates. This arrangement can improve the firmness of the connection between the first rod 11 and the second rod 21 and the second vertical rod 53, further ensuring the firmness of the target material when it is fixed in the target material cleaning and fixing device.
[0069] In some specific embodiments, the main board and the two side plates are integrally formed, which can ensure the structural strength of the second vertical rod 53, thereby ensuring the firmness of the target material when it is fixed to the target material cleaning fixing device.
[0070] In some specific embodiments, the hanging rod 51, the first vertical rod 52, and the second vertical rod 53 are made of 304 stainless steel, which can improve the service life of the target cleaning and fixing device. The parts of the first limiting member 12, the second limiting member 13, and the third limiting member 22 that contact the target are made of PPS plastic, which can prevent the target from being damaged during placement.
[0071] The above embodiments merely illustrate the basic principles and characteristics of this utility model. This utility model is not limited to the above embodiments. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.
Claims
1. A target cleaning and fixing device for fixing a first target (3) and a second target (4), characterized in that, include: The first fixing component (1) includes two first rods (11), at least one first limiting member (12), and at least one second limiting member (13); the two first rods (11) are parallel and spaced apart along a first direction, and the space between the two first rods (11) is used to accommodate the first target material (3) and the second target material (4); the first limiting member (12) and the second limiting member (13) are both adjustablely connected between the two first rods (11) along a second direction, and the first limiting member (12) and the second limiting member (13) are used to support the first target material (3); The second fixing component (2) is arranged vertically at intervals below the first fixing component (1). The second fixing component (2) includes two second rods (21) and at least two third limiting members (22). The two second rods (21) are parallel and spaced apart along the first direction. The third limiting members (22) are tunably connected between the two second rods (21) along the second direction. The third limiting members (22) are used to support the second target material (4). The first direction, the second direction, and the vertical direction are perpendicular to each other.
2. The target cleaning and fixing device according to claim 1, characterized in that, Two first rods (11) are provided with first grooves (111) extending along the second direction. Both ends of the first limiting member (12) and the second limiting member (13) are connected to first adjusting members. The first adjusting members are inserted into the corresponding first grooves (111) and their positions within the first grooves (111) are adjustable.
3. The target cleaning and fixing device according to claim 2, characterized in that, The first adjusting member includes a first moving part and a first locking part connected together. The moving part passes through the first sliding groove (111) and is connected to the first limiting member (12) or the second limiting member (13). The locking part stops on the side of the first rod (11) facing away from the first target material (3). The movable part is threadedly connected to the first limiting member (12) or the second limiting member (13); and / or, the locking part is threadedly connected to the movable part.
4. The target cleaning and fixing device according to claim 1, characterized in that, The two second rods (21) are provided with second sliding grooves (211) extending along the second direction. The two ends of the third limiting member (22) are connected to second adjusting members. The second adjusting members are inserted into the corresponding second sliding grooves (211) and their positions within the second sliding grooves (211) are adjustable.
5. The target cleaning and fixing device according to claim 4, characterized in that, The second adjusting member includes a second moving part and a second locking part connected together. The moving part passes through the second slide groove (211) and is connected to the third limiting member (22). The locking part stops on the side of the second rod (21) facing away from the second target material (4). The moving part is threadedly connected to the third limiting member (22); and / or, the locking part is threadedly connected to the moving part.
6. The target cleaning and fixing device according to claim 1, characterized in that, The second limiting member (13) includes a first limiting post (131), and the first limiting post (131) has limiting flanges (132) circumferentially provided at both ends along the first direction. The first limiting post (131) is used to support the first target material (3), and the limiting flanges (132) at both ends limit the first target material (3) on both sides of the first target material (3).
7. The target cleaning and fixing device according to claim 1, characterized in that, The first limiting member (12) is located between the second limiting member (13) and the second target material (4). The first limiting member (12) is provided with an avoidance groove (121) around its circumference, and the avoidance groove (121) is used to avoid the second target material (4).
8. The target cleaning and fixing device according to claim 1, characterized in that, The third limiting member (22) is provided with a groove (221), which engages with the second target material (4).
9. The target cleaning and fixing device according to any one of claims 1-8, characterized in that, The target cleaning and fixing device also includes a hanging rod (51), two first vertical rods (52) and two second vertical rods (53); The hanging rod (51) is configured to be hung on the cleaning equipment, the first ends of the two first vertical rods (52) are respectively connected to the two ends of the hanging rod (51), and the two second vertical rods (53) are respectively connected to the second ends of the two first vertical rods (52); Both ends of the first rod (11) and the second rod (21) are respectively connected to the two second vertical rods (53); And / or, The first rod (11) has the same structure as the second rod (21), and the third limiting member (22) has the same structure as the second limiting member (13).
10. The target cleaning and fixing device according to claim 9, characterized in that, Each of the second vertical bars (53) includes a main board and two side plates. The two side plates are respectively connected to the two ends of the main board along the first direction and are arranged in a U-shape with the main board. The main board is connected to the first vertical bar (52). Both ends of the first rod (11) and both ends of the second rod (21) are connected to the corresponding side plates.