Shaping tool

Abstract

The utility model relates to the technical field of semiconductor equipment processing, and discloses a shaping tool, which comprises a first shaping part and a second shaping part, one end of the first shaping part along a first direction is provided with a first shaping surface, the first shaping part is provided with a first positioning structure, and the first positioning structure is provided with a first positioning surface; one end, in the first direction, of the second shaping part is provided with a second shaping surface, the second shaping part is provided with a second positioning structure, and the second positioning structure is provided with a second positioning surface; after the corresponding positioning surfaces of the first positioning structure and the second positioning structure are matched, the minimum distance between the first shaping surface and the second shaping surface is limited through the first positioning surface and the second positioning surface, and the minimum distance is matched with the required thickness of the shaped workpiece, so that the shaping tool can effectively prevent the workpiece from being excessively extruded in the shaping process; damage to the workpiece in the shaping process is reduced, the stability and safety of the shaping tool are improved, and waste of the workpiece is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment processing technology, specifically to shaping fixtures. Background Technology

[0002] During the processing of thin sheet metal workpieces, deformation can occur due to insufficient precision control in the processing technology or transportation stage. In the field of semiconductor equipment processing, high precision requirements are placed on products, and even minor deformation can cause the product performance to fail to meet standards. To eliminate deformation of thin sheet metal workpieces, it is usually necessary to use straightening fixtures to correct the workpiece.

[0003] Existing correction fixtures typically include a base and a pressure block. When in use, the workpiece is placed on the surface of the base, and the pressure block is used to press the workpiece onto the base. The weight of the pressure block is used to correct the workpiece. However, because this type of fixture is difficult to control the pressure precisely during correction, thin sheet workpieces are easily damaged due to excessive pressure during correction. Utility Model Content

[0004] In view of this, the present invention provides a shaping fixture to solve the problem of poor calibration reliability of existing calibration fixtures.

[0005] In a first aspect, this utility model provides a shaping fixture, comprising: a first shaping part having a first shaping surface at one end along a first direction, the first shaping part being provided with a first positioning structure having a first positioning surface; and a second shaping part having a second shaping surface at one end along the first direction, the second shaping part being provided with a second positioning structure having a second positioning surface; wherein, along the first direction, the second positioning surface is adapted to abut against and cooperate with the first positioning surface to limit the minimum distance between the first shaping surface and the second shaping surface, so that the first shaping surface and the second shaping surface are spaced apart to form a shaping space.

[0006] Beneficial effects: A first positioning structure is set on the first forming part, and a second positioning structure is set on the second forming part. After the positioning surfaces of the first and second positioning structures are engaged, this is the minimum distance between the two forming surfaces. By pre-designing the size of the minimum distance, the thickness of the forming space can be matched with the thickness required after the workpiece is formed. Using this forming fixture can effectively prevent the two forming surfaces from excessively squeezing the workpiece while forming, avoid damage to the workpiece during the forming process, and improve the stability and safety of the forming fixture.

[0007] In one optional embodiment, the first positioning structure is a positioning post, and the end face of the positioning post away from the first shaping surface is the first positioning surface; the second positioning structure is a positioning groove recessed along the first direction, and the bottom surface of the positioning groove is the second positioning surface; wherein, along the first direction, the distance from the first shaping surface to the first positioning surface is greater than the distance from the second shaping surface to the second positioning surface.

[0008] Beneficial effects: The positioning structure is simple and reliable, and easy to manufacture. This type of positioning structure can also achieve the positioning effect of the shaping part along the direction perpendicular to the first direction, avoiding misalignment between the first shaping part and the second shaping part.

[0009] In one optional embodiment, the bottom surface of the positioning groove is provided with a through hole extending in a first direction, and the shaping fixture also includes an adjusting member, which is detachably connected to the through hole, and the end face of the adjusting member near the first shaping surface forms a second positioning surface.

[0010] Beneficial effects: The structure is simple and reliable. By changing the position of the adjusting component in the through hole, the distance between the second positioning surface and the second shaping surface can be quickly changed, thereby realizing the function of adjusting the minimum distance between the second shaping surface and the first shaping surface during the shaping process. This effectively improves the flexibility of the shaping fixture, making one shaping fixture suitable for workpieces with different thickness requirements.

[0011] In one optional embodiment, the first positioning structure includes a first column segment and a second column segment. The first column segment is connected to a first positioning surface through the second column segment. The outer diameter of the first column segment is smaller than the outer diameter of the second column segment. The connecting surfaces of the first column segment and the second column segment form a first mating surface. The second positioning structure includes a first groove segment and a second groove segment. The first groove segment is connected to a second positioning surface through the second groove segment. The inner diameter of the first groove segment is smaller than the inner diameter of the second groove segment. The connecting surfaces of the first groove segment and the second groove segment form a second mating surface. The outer diameter of the second column segment is larger than the inner diameter of the first groove segment. Along a first direction, the depth of the second groove segment is less than the length of the second column segment.

[0012] Beneficial effects: In this type of positioning structure, when the adjusting component fails and it is difficult to support the first positioning structure, the first positioning structure falls to the two mating surfaces and can then form a stable supporting positioning form again, avoiding excessive compression of the workpiece by the two shaping surfaces.

[0013] In one alternative embodiment, the shaping fixture further includes an elastic element, and the first mating surface abuts against the second mating surface through the elastic element.

[0014] Beneficial effects: The elastic element can provide a buffer for the approach process of the first and second shaping parts, avoiding damage to the workpiece due to excessively fast shaping and extrusion speed.

[0015] In one alternative embodiment, the connection position between the second mating surface and the first groove segment is chamfered.

[0016] Beneficial effects: This structural form makes it easier to insert the first positioning structure and the second positioning structure. The chamfer can play a guiding role and avoid the first positioning structure from colliding with the connection position and failing to complete the insertion step.

[0017] In one alternative embodiment, the adjusting member is a stud, and the inner wall of the through hole is threaded, with the adjusting member threadedly connected to the through hole.

[0018] Beneficial effects: The adjusting component is simple and reliable, and the position can be adjusted by rotation.

[0019] In one alternative embodiment, one end face of the second shaping part away from the second shaping surface forms a support surface, and the support surface is provided with a groove around the through hole, the groove being used to accommodate the head of the adjusting member to form a countersunk head structure.

[0020] Beneficial effect: Setting a groove on the support surface can effectively accommodate the head of the adjusting part and prevent the adjusting part from protruding from the support surface.

[0021] In one alternative embodiment, a handle is provided at the end of the first shaping part that is away from the first shaping surface.

[0022] Beneficial effect: Makes it easier for operators to lift the first shaping section.

[0023] In one alternative embodiment, the first positioning structures are evenly spaced around the center of the first shaping part, and at least three first positioning structures are provided.

[0024] Beneficial effects: This type of positioning structure can provide more stable support and avoid excessive local pressure during shaping. Attached Figure Description

[0025] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 This is a cross-sectional view of a shaping fixture according to an embodiment of the present utility model.

[0027] Figure 2 for Figure 1 A schematic diagram showing the first shaping part and the second shaping part of the shaping fixture in action;

[0028] Figure 3 for Figure 1 A partially enlarged schematic diagram of the shaping fixture shown;

[0029] Figure 4 for Figure 1 The top view of the shaping fixture shown.

[0030] Explanation of reference numerals in the attached figures:

[0031] 1. First shaping part; 101. First shaping surface; 102. First positioning structure; 1021. First positioning surface; 1022. First column segment; 1023. Second column segment; 1024. First mating surface; 103. Handle;

[0032] 2. Second shaping section; 201. Second shaping surface; 202. Second positioning structure; 2021. Second positioning surface; 2022. First groove segment; 2023. Second groove segment; 2024. Second mating surface; 203. Through hole; 204. Countersunk groove; 205. Support surface;

[0033] 3. Adjusting components; 4. Elastic components; 5. Workpiece; 6. Shaping space; 7. Fixing bolts;

[0034] X, the first direction. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0036] The following is combined with Figures 1 to 4 The following describes embodiments of the present invention.

[0037] According to an embodiment of the present invention, a shaping fixture is provided, comprising: a first shaping part 1 and a second shaping part 2. The first shaping part 1 has a first shaping surface 101 at one end along a first direction X, and a first positioning structure 102 is provided on the first shaping part 1, the first positioning structure 102 having a first positioning surface 1021. The second shaping part 2 has a second shaping surface 201 at one end along the first direction X, and a second positioning structure 202 is provided on the second shaping part 2, the second positioning structure 202 having a second positioning surface 2021. Along the first direction X, the second positioning surface 2021 is adapted to abut against the first positioning surface 1021 to limit the minimum distance between the first shaping surface 101 and the second shaping surface 201, so that the first shaping surface 101 and the second shaping surface 201 form a shaping space 6 at intervals.

[0038] The shaping fixture of this embodiment has a first positioning structure 102 on the first shaping part 1 and a second positioning structure 202 on the second shaping part 2. After the positioning surfaces of the first positioning structure 102 and the second positioning structure 202 are engaged, this is the minimum distance between the two shaping surfaces. The minimum distance between the shaping surfaces matches the thickness of the workpiece 5 after shaping. This positioning method can effectively prevent the two shaping surfaces from excessively squeezing the workpiece 5, avoid damage to the workpiece 5 during the shaping process, improve the stability and safety of the shaping fixture, reduce the waste of the workpiece 5, and effectively solve the problem of poor calibration reliability of the existing calibration fixture.

[0039] Specifically, the first direction X refers to Figure 1 The direction of "X" indicated by the middle arrow is the direction of gravity.

[0040] It should be noted that the approach and separation of the first shaping part 1 and the second shaping part 2 are not limited. They can approach each other by gravity or by external driving components such as driving cylinders to drive the two shaping parts to approach or separate.

[0041] Or in some alternative embodiments, refer to Figure 4 After the first shaping part 1 and the second shaping part 2 are covered, they are connected by fixing bolts 7, so that the shaping space 6 can be stably maintained, thereby forming a stable clamping and shaping effect on the workpiece 5. At the same time, it is also convenient for the shaping fixture to be placed into auxiliary shaping equipment such as oven to accelerate the shaping process.

[0042] Additionally, in an optional example, such as Figure 1 As shown, D is the target thickness of workpiece 5, that is, the required thickness after shaping. L1 is the distance from the first shaping surface 101 to the first positioning surface 1021, and L2 is the distance from the second shaping surface 201 to the second positioning surface 2021. The three satisfy the relationship L1-L2=D.

[0043] In one possible implementation, the first positioning structure 102 is a positioning post, and the end face of the positioning post away from the first shaping surface 101 is the first positioning surface 1021; the second positioning structure 202 is a positioning groove recessed along the first direction X, and the bottom surface of the positioning groove is the second positioning surface 2021; wherein, along the first direction X, the distance from the first shaping surface 101 to the first positioning surface 1021 is greater than the distance from the second shaping surface 201 to the second positioning surface 2021. The positioning structure is simple and reliable, and easy to manufacture. This type of positioning structure can also achieve a positioning effect for the shaping part along a direction perpendicular to the first direction X, avoiding misalignment of the first shaping part 1 and the second shaping part 2.

[0044] It is understood that, as an alternative implementation, the forms of the first positioning structure 102 and the second positioning structure 202 can also be interchanged, that is, the first positioning structure 102 is a positioning groove, and the second positioning structure 202 is a positioning post.

[0045] The form of the positioning pin and positioning groove is not limited; they can be cylinders, prisms, frustums, etc., and can be flexibly selected according to requirements.

[0046] In one possible implementation, the bottom surface of the positioning groove is provided with a through hole 203 extending along the first direction X. The forming fixture also includes an adjusting member 3, which is detachably connected to the through hole 203. The end face of the adjusting member 3 near the first forming surface 101 forms a second positioning surface 2021. The structure is simple and reliable. By changing the position of the adjusting member 3 in the through hole 203, the depth of the positioning groove can be quickly changed, thereby realizing the function of adjusting the minimum distance between the second forming surface 201 and the first forming surface 101 during the forming process. This effectively improves the flexibility of the forming fixture and makes one forming fixture applicable to workpieces 5 with different thickness requirements.

[0047] For example, in some optional examples, by adjusting the rotation depth of the adjusting member 3 in the through hole 203, the distance L2 between the second shaping surface 201 and the second positioning surface 2021 is changed, thereby changing the value of L1-L2, so as to adapt to the shaping requirements of workpieces 5 with different thicknesses.

[0048] Specifically, there is no limitation on the detachable connection method between the adjusting component 3 and the through hole 203. The adjusting component 3 can be connected to the through hole 203 by threads, or connecting holes extending radially can be provided on the side wall of the through hole 203 and the adjusting component 3 respectively, and the connection can be made by fasteners such as bolts or fixing pins passing through the connecting holes. The specific connection method can be flexibly selected.

[0049] In one possible implementation, the first positioning structure 102 includes a first column segment 1022 and a second column segment 1023. The first column segment 1022 is connected to the first positioning surface 1021 through the second column segment 1023. The outer diameter of the first column segment 1022 is smaller than the outer diameter of the second column segment 1023. The connecting surfaces of the first column segment 1022 and the second column segment 1023 form a first mating surface 1024. The second positioning structure 202 includes a first groove segment 2022 and a second groove segment 2023. The first groove segment 2022 is connected to the second positioning surface 2021 through the second groove segment 2023. The inner diameter of the first groove segment 2022 is smaller than the inner diameter of the second groove segment 2023. The connecting surfaces of the first groove segment 2022 and the second groove segment 2023 form a second mating surface 2024. The outer diameter of the second column segment 1023 is larger than the inner diameter of the first groove segment 2022. Along the first direction X, the depth of the second groove segment 2023 is greater than the length of the second column segment 1023.

[0050] This type of positioning structure has a secondary protection function. Due to the presence of the first mating surface 1024 and the second mating surface 2024, when the adjusting component 3 fails and it is difficult to support the first positioning structure 102, the first positioning structure 102 falls to the two mating surfaces and can then form a stable support and positioning form again, avoiding excessive compression of the workpiece 5 by the two shaping surfaces.

[0051] In one possible implementation, such as Figure 1 As shown, the shaping fixture also includes an elastic element 4. The first mating surface 1024 abuts against the second mating surface 2024 through the elastic element 4. The elastic element 4 can provide a buffer for the approach process of the first shaping part 1 and the second shaping part 2, which can effectively reduce the collision speed of the first positioning structure 102 and the second positioning structure 202 and improve the service life of the first positioning structure 102 and the second positioning structure 202.

[0052] In one possible implementation, the connection position between the second mating surface 2024 and the first groove segment 2022 is chamfered. This structural form makes it easier for the first positioning structure 102 and the second positioning structure 202 to be inserted. The chamfer can play a guiding role and prevent the first positioning structure 102 from colliding with the connection position and failing to complete the insertion step.

[0053] Specifically, there are no restrictions on the form of the chamfer; it can be either a rounded corner or a flat corner.

[0054] In one possible implementation, the adjusting member 3 is a stud, and the inner wall of the through hole 203 is provided with threads. The adjusting member 3 is threadedly connected to the through hole 203. The adjusting member 3 is simple and reliable, and the position can be adjusted by rotation.

[0055] In one possible implementation, the end face of the second shaping part 2 facing away from the second shaping surface 201 forms a support surface 205. The support surface 205 is provided with a groove 204 around the through hole 203. The groove 204 is used to accommodate the head of the adjusting member 3 to form a countersunk head structure. The adjusting member 3 is simple and reliable in form, and its position can be adjusted by rotation. The groove 204 on the support surface 205 can effectively accommodate the head of the adjusting member 3 and prevent the adjusting member 3 from protruding from the support surface 205.

[0056] It is understood that, as an alternative implementation, the adjusting member 3 can be a variety of pins of different lengths. The pins are inserted into the through hole 203. When the second shaping part 2 is placed flat on the bearing surface, the end of the pin abuts against the bearing surface. The depth of the positioning groove can be changed by replacing the pins of different lengths.

[0057] In one possible implementation, a handle 103 is provided at the end of the first shaping part 1 that is away from the first shaping surface 101, so that the operator can lift the first shaping part 1.

[0058] The specific form and number of handles 103 are not limited. They can be a single handle 103 located at the center of the first shaping part 1, or they can be symmetrically arranged on both sides of the first shaping part 1, as long as they are easy for the operator to hold.

[0059] Alternatively, the handle 103 can be replaced with a lifting ring, and the hook or claw of the lifting device can be connected to the lifting ring to lift the first shaping part 1.

[0060] In one possible implementation, the first positioning structures 102 are evenly spaced around the center of the first shaping part 1, and at least three first positioning structures 102 are provided. This type of positioning structure can provide more stable support and avoid excessive local pressure during shaping.

[0061] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A shaping tool, characterized by, include: The first shaping part (1) has a first shaping surface (101) at one end along the first direction (X), and the first shaping part (1) is provided with a first positioning structure (102), the first positioning structure (102) having a first positioning surface (1021); The second shaping part (2) has a second shaping surface (201) at one end along the first direction (X), and the second shaping part (2) is provided with a second positioning structure (202), and the second positioning structure (202) is provided with a second positioning surface (2021); Along the first direction (X), the second positioning surface (2021) is adapted to abut against the first positioning surface (1021) to limit the minimum distance between the first shaping surface (101) and the second shaping surface (201), so that the first shaping surface (101) and the second shaping surface (201) form a shaping space (6) at intervals.

2. The shaping fixture according to claim 1, characterized in that, The first positioning structure (102) is a positioning post, and the end face of the positioning post away from the first shaping surface (101) is the first positioning surface (1021); The second positioning structure (202) is a positioning groove recessed along the first direction (X), and the bottom surface of the positioning groove is the second positioning surface (2021); Wherein, along the first direction (X), the distance from the first shaping surface (101) to the first positioning surface (1021) is greater than the distance from the second shaping surface (201) to the second positioning surface (2021).

3. The shaping fixture according to claim 2, characterized in that, The bottom surface of the positioning groove is provided with a through hole (203) extending along the first direction (X). The shaping fixture also includes an adjusting member (3), which is detachably connected to the through hole (203). The end face of the adjusting member (3) near the first shaping surface (101) forms the second positioning surface (2021).

4. The shaping fixture according to claim 3, characterized in that, The first positioning structure (102) includes a first column segment (1022) and a second column segment (1023). The first column segment (1022) is connected to the first positioning surface (1021) through the second column segment (1023). The outer diameter of the first column segment (1022) is smaller than the outer diameter of the second column segment (1023). The connecting surfaces of the first column segment (1022) and the second column segment (1023) form a first mating surface (1024). The second positioning structure (202) includes a first groove segment (2022) and a second groove segment (2023). The first groove segment (2022) is connected to the second positioning surface (2021) through the second groove segment (2023). The inner diameter of the first groove segment (2022) is smaller than the inner diameter of the second groove segment (2023). The connecting surfaces of the first groove segment (2022) and the second groove segment (2023) form a second mating surface (2024). Wherein, the outer diameter of the second column segment (1023) is greater than the inner diameter of the first groove segment (2022), and along the first direction (X), the depth of the second groove segment (2023) is less than the length of the second column segment (1023).

5. The shaping fixture according to claim 4, characterized in that, The shaping fixture also includes an elastic element (4), and the first mating surface (1024) abuts against the second mating surface (2024) through the elastic element (4).

6. The shaping fixture according to claim 4, characterized in that, The connection position between the second mating surface (2024) and the first groove segment (2022) is chamfered.

7. The shaping fixture according to any one of claims 3 to 6, characterized in that, The adjusting component (3) is a stud, and the inner wall of the through hole (203) is threaded. The adjusting component (3) is threadedly connected to the through hole (203).

8. The shaping fixture according to claim 7, characterized in that, The second shaping part (2) forms a support surface (205) on one end face away from the second shaping surface (201). The support surface (205) is provided with a groove (204) around the through hole (203). The groove (204) is used to accommodate the head of the adjusting member (3) to form a countersunk head structure.

9. The shaping fixture according to any one of claims 1 to 6, characterized in that, The first shaping part (1) has a handle (103) at the end opposite to the first shaping surface (101).

10. The shaping fixture according to any one of claims 1 to 6, characterized in that, The first positioning structure (102) is evenly spaced around the center of the first shaping part (1), and at least three of the first positioning structures (102) are provided.

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