Manual quick-change positioning clamp for semiconductor equipment parts

Abstract

The utility model discloses a manual quick-change positioning clamp for semiconductor equipment parts, which is characterized by comprising a base plate, a positioning seat arranged on the base plate, at least one bottom clamping assembly arranged on the base plate and used for pressing the positioning seat, and an upper clamping assembly arranged on the positioning seat and used for the parts, a positioning groove used for containing the part is formed in the upper side of the positioning base. According to the clamp, the part positioning time is shortened, the machining efficiency and precision are improved, and meanwhile the reject ratio is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a manual quick-change positioning fixture for semiconductor equipment components. Background Technology

[0002] In semiconductor equipment, there is a type of circular connecting plate. During precision machining, accurate positioning and secure clamping of this component are crucial for ensuring machining accuracy. Traditional fixtures use screws and jaws to hold the component, requiring repeated screw tightening for clamping. This adjustment is time-consuming and prone to errors, leading to low production efficiency and high defect rates. Therefore, a new technical solution is urgently needed to address at least one of these technical problems. Summary of the Invention

[0003] The purpose of this invention is to provide a manual quick-change positioning fixture for semiconductor equipment components. The positioning groove matches the shape of the component to be processed, ensuring that the component can be quickly aligned after being placed in. The base plate ensures the stability and reliability of the fixture, and the upper clamping assembly clamps the component, reducing the positioning time of the component, improving processing efficiency and accuracy, and reducing the defect rate.

[0004] To achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by this utility model is: a manual quick-change positioning fixture for semiconductor equipment components, characterized in that it includes a substrate, a positioning seat disposed on the substrate, at least one bottom clamping assembly disposed on the substrate for pressing the positioning seat, and an upper clamping assembly disposed on the positioning seat for the component, wherein the upper side of the positioning seat is provided with a positioning groove for accommodating the component.

[0005] As a preferred technical solution, the positioning base includes a positioning base plate, a positioning block disposed on the upper side of the positioning base plate, a positioning groove disposed on the upper side of the positioning block, and the positioning base plate is detachably connected to the base plate.

[0006] As a preferred technical solution, the positioning groove is arc-shaped, and a first ear groove and a second ear groove are respectively provided on the outer side of the positioning groove. The shapes of the positioning groove, the first ear groove and the second ear groove match the shape of the component.

[0007] As a preferred technical solution, the bottom clamping assembly includes two symmetrically arranged bottom support plates, a bottom rotating plate rotatably disposed between the two bottom support plates, a bottom pressure rod rotatably disposed between the two bottom support plates, a bottom clamping rod vertically and detachably inserted into the bottom pressure rod, and a bottom operating lever rotatably disposed on the bottom pressure rod. The bottom operating lever is rotatably connected to the bottom rotating plate, and the bottom support plate is detachably connected to the base plate.

[0008] As a preferred technical solution, the upper clamping assembly includes symmetrically arranged upper support plates, an upper operating lever rotatably disposed on the upper support plates, an upper pressure rod rotatably disposed between the two upper support plates, a rotating hook rotatably disposed on the upper pressure rod, and at least one upper clamping rod detachably inserted into the upper pressure rod, wherein the rotating hook is rotatably connected to the upper operating lever.

[0009] As a preferred technical solution, a pressure block is detachably provided on the lower side of the upper clamping rod.

[0010] As a preferred technical solution, two bottom-raising columns are detachably installed on the lower side of the bottom support plate.

[0011] As a preferred technical solution, two lifting columns are detachably provided on the lower side of the upper support plate.

[0012] As a preferred technical solution, a first positioning pin and a second positioning pin are detachably provided on the upper side of the substrate. The first positioning pin and the second positioning pin are perpendicular to the substrate. The positioning base plate is provided with a first positioning hole and a second positioning hole that pass through it vertically. The first positioning pin and the second positioning pin are respectively inserted into the first positioning hole and the second positioning hole.

[0013] As a preferred technical solution, the positioning block is provided with a first clearance notch and a second clearance notch on its opposite sides, and the first clearance notch and the second clearance notch penetrate the groove wall of the positioning groove.

[0014] The beneficial effects of this utility model are:

[0015] 1) The positioning slot matches the shape of the part to be processed, ensuring that the part can be quickly aligned after being placed in. The base plate ensures the stability and reliability of the fixture. The upper clamping assembly clamps the part, reducing the positioning time of the part, improving processing efficiency and accuracy, and reducing the defect rate.

[0016] 2) The positioning base plate and the positioning block form a stepped structure, which has good stability and the positioning base plate is easy for the bottom clamping assembly to clamp.

[0017] 3) Rotate the bottom control lever to control the bottom clamping rod to press down and lift up, thereby clamping and releasing the positioning base plate. The operation is simple and quick, and the clamping action can be completed in a short time.

[0018] 4) Rotate the upper control lever to control the upper clamping lever to press down and lift up, thereby clamping and releasing parts. The operation is simple and quick, and the clamping action can be completed in a short time.

[0019] 5) The clamping block makes good contact with the parts, resulting in a good clamping effect;

[0020] 6) Raise the bottom support plate of the bottom lifting column to a suitable height, and raise the upper support plate of the top lifting column to a suitable height.

[0021] 7) Enables rapid positioning of the positioning plate and facilitates installation and disassembly;

[0022] 8) The first and second clearance openings facilitate the removal of parts by staff. Attached Figure Description

[0023] Figure 1 This is a structural diagram of a clamp provided in one embodiment of the present invention;

[0024] Figure 2 This is a working drawing of a fixture provided in one embodiment of the present invention;

[0025] Figure 3 This is a structural diagram of a bottom clamping assembly provided in one embodiment of the present invention;

[0026] Figure 4 This is a partial structural diagram of a clamp provided in one embodiment of the present invention;

[0027] Figure 5 This is another structural diagram of the clamp provided in one embodiment of the present utility model;

[0028] Figure 6 This is a structural diagram of a positioning block provided in one embodiment of the present invention.

[0029] exist Figures 1-6 In the middle, 1. Base plate; 2. Positioning seat; 201. Positioning groove; 2011. First ear groove; 2012. Second ear groove; 202. Positioning base plate; 2021. First positioning hole; 2022. Second positioning hole; 203. Positioning block; 2031. First clearance notch; 2032. Second clearance notch; 2033. Third positioning hole; 2034. Fourth positioning hole; 3. Bottom clamping assembly; 301. Bottom support plate; 302. Bottom rotating plate; 303. 304. Bottom pressure rod; 305. Bottom clamping rod; 4. Upper clamping assembly; 401. Upper support plate; 402. Upper operating rod; 403. Upper pressure rod; 404. Rotary hook; 405. Upper clamping rod; 406. Pressure block; 5. Bottom lifting column; 6. Upper lifting column; 7. First positioning pin; 8. Second positioning pin; 9. Third positioning pin; 10. Fourth positioning pin; 11. Connecting plate; 1101. First ear plate; 1102. Second ear plate. Detailed Implementation

[0030] The present invention will now be further described with reference to the accompanying drawings.

[0031] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "head," "tail," "top," "bottom," "left," "right," "front," "rear," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0032] Please see Figures 1-6 This utility model provides a manual quick-change positioning fixture for semiconductor equipment components, including a substrate 1, a positioning seat 2 disposed on the substrate 1, at least one bottom clamping assembly 3 disposed on the substrate 1 for pressing the positioning seat 2, and an upper clamping assembly 4 disposed on the positioning seat 2 for the component. The positioning seat 2 has a positioning groove 201 on its upper side for accommodating the component. The positioning groove 201 matches the shape of the component to be processed, ensuring that the component can be quickly aligned after being placed. The substrate 1 ensures the stability and reliability of the fixture, and the upper clamping assembly 4 clamps the component, reducing the component positioning time, improving processing efficiency and accuracy, and reducing the defect rate.

[0033] like Figures 1-6 As shown, the positioning base 2 includes a positioning base plate 202 and a positioning block 203 disposed on the upper side of the positioning base plate 202. The positioning groove 201 is disposed on the upper side of the positioning block 203. The positioning base plate 202 is detachably connected to the base plate 1. The positioning base plate 202 and the positioning block 203 form a stepped structure with good structural stability. The bottom clamping assembly 3 clamps the positioning base plate 202 to prevent the positioning base plate 202 from loosening.

[0034] like Figures 1-6 As shown, the positioning groove 201 is arc-shaped, and a first ear groove 2011 and a second ear groove 2012 are respectively provided on the outer side of the positioning groove 201. The shapes of the positioning groove 201, the first ear groove 2011 and the second ear groove 2012 match the shape of the component. The connecting plate 11 is circular, and a first ear plate 1101 and a second ear plate 1102 are provided radially on the outer periphery of the connecting plate 11. The first ear plate 1101 matches the first ear groove 2011, and the second ear plate 1102 matches the second ear groove 2012, with a high degree of matching.

[0035] like Figures 1-6As shown, specifically, there are two bottom clamping components 3, which are symmetrically arranged. Each bottom clamping component 3 includes two symmetrically arranged bottom support plates 301, a bottom rotating plate 302 rotatably arranged between the two bottom support plates 301, a bottom pressure rod 303 rotatably arranged between the two bottom support plates 301, a bottom clamping rod 304 vertically and detachably inserted into the bottom pressure rod 303, and a bottom operating lever 305 rotatably arranged on the bottom pressure rod 303. The bottom operating lever 305 is rotatably connected to the bottom rotating plate 302, and the bottom support plate 301 is detachably connected to the base plate 1. The bottom clamping rod 304 is located above the positioning base plate 202. When the operator rotates the bottom operating lever 305, the bottom rotating plate 302 causes the bottom pressure rod 303 to rotate, thereby controlling the bottom clamping rod 304 to lift and press down, thus clamping and releasing the positioning base plate 202. The clamping action can be completed in a short time.

[0036] like Figures 1-6 As shown, the upper clamping assembly 4 includes symmetrically arranged upper support plates 401, an upper operating lever 402 rotatably disposed on the upper support plates 401, an upper pressure rod 403 rotatably disposed between the two upper support plates 401, a rotating hook 404 rotatably disposed on the upper pressure rod 403, and at least one upper clamping rod 405 detachably inserted into the upper pressure rod 403. Specifically, the number of upper clamping rods 405 is one or two. The rotating hook 404 is rotatably connected to the upper operating lever 402. When the operator rotates the upper operating lever 402, the upper pressure rod 403 rotates due to the action of the rotating hook 404, thereby controlling the bottom clamping rod 304 to lift and press down, thereby clamping and releasing the parts, and the clamping action can be completed in a short time.

[0037] like Figures 1-6 As shown, a pressure block 406 is detachably provided on the lower side of the upper clamping rod 405. The pressure block 406 is long and narrow, and has a good clamping effect.

[0038] like Figures 1-6 As shown, two bottom lifting columns 5 are detachably installed on the lower side of the bottom support plate 301. The bottom lifting columns 5 raise the bottom support plate 301 to a suitable height.

[0039] like Figures 1-6 As shown, two upper lifting columns 6 and a bottom lifting column 5 are detachably installed on the lower side of the upper support plate 401 to raise the bottom support plate 301 to a suitable height.

[0040] like Figures 1-6As shown, a first positioning pin 7 and a second positioning pin 8 are detachably provided on the upper side of the substrate 1. The first positioning pin 7 and the second positioning pin 8 are perpendicular to the substrate 1. The positioning base plate 202 is provided with a first positioning hole 2021 and a second positioning hole 2022 that pass through it vertically. The first positioning pin 7 and the second positioning pin 8 are respectively inserted into the first positioning hole 2021 and the second positioning hole 2022, so as to achieve quick positioning of the positioning plate and facilitate installation and disassembly. When there are multiple sizes of connecting plates 11, different sizes of positioning slots 201 can be selected according to the size of the connecting plate 11. In this way, when different sizes of connecting plates 11 need to be processed, different positioning seats 2 can be quickly replaced.

[0041] like Figures 1-6 As shown, a third positioning pin 9 and a fourth positioning pin 10 are inserted on the positioning base plate 202, and a third positioning hole 2033 and a fourth positioning hole 2034 are correspondingly provided on the positioning block 203. The third positioning pin 9 is inserted into the third positioning hole 2033, and the fourth positioning pin 10 is inserted into the fourth positioning hole 2034, so that the positioning base plate 202 and the positioning block 203 can be quickly positioned. At the same time, an internal hex bolt is inserted on the positioning block 203, and the positioning base plate 202 and the positioning block 203 are connected together by the internal hex bolt.

[0042] like Figures 1-6 As shown, the positioning block 203 has a first clearance notch 2031 and a second clearance notch 2032 on its opposite sides. The first clearance notch 2031 and the second clearance notch 2032 penetrate the groove wall of the positioning groove 201. The first clearance notch 2031 and the second clearance notch 2032 facilitate the removal of parts by the staff.

[0043] The above embodiments are merely descriptions for clearly illustrating the present utility model, and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all implementations here, and the obvious variations or modifications derived therefrom are still within the protection scope of the present utility model.

Claims

1. A manual quick-change positioning fixture for semiconductor equipment components, characterized in that, The device includes a substrate, a positioning seat disposed on the substrate, at least one bottom clamping assembly disposed on the substrate for pressing the positioning seat, and an upper clamping assembly disposed on the positioning seat for a component. The upper side of the positioning seat is provided with a positioning groove for accommodating the component.

2. The hand-operated quick change positioning fixture for semiconductor device parts according to claim 1, wherein, The positioning base includes a positioning base plate and a positioning block disposed on the upper side of the positioning base plate. The positioning groove is disposed on the upper side of the positioning block. The positioning base plate is detachably connected to the base plate.

3. A manual quick-change positioning fixture for semiconductor equipment components according to claim 1, characterized in that, The positioning groove is arc-shaped, and a first ear groove and a second ear groove are respectively provided on the outer side of the positioning groove. The shapes of the positioning groove, the first ear groove and the second ear groove match the shape of the component.

4. A manual quick-change positioning fixture for semiconductor equipment components according to claim 1, characterized in that, The bottom clamping assembly includes two symmetrically arranged bottom support plates, a bottom rotating plate rotatably disposed between the two bottom support plates, a bottom pressure rod rotatably disposed between the two bottom support plates, a bottom clamping rod vertically and detachably inserted into the bottom pressure rod, and a bottom operating lever rotatably disposed on the bottom pressure rod. The bottom operating lever is rotatably connected to the bottom rotating plate, and the bottom support plates are detachably connected to the base plate.

5. A manual quick-change positioning fixture for semiconductor equipment components according to claim 1, characterized in that, The upper clamping assembly includes symmetrically arranged upper support plates, an upper operating lever rotatably disposed on the upper support plates, an upper pressure rod rotatably disposed between the two upper support plates, a rotating hook rotatably disposed on the upper pressure rod, and at least one upper clamping rod detachably inserted into the upper pressure rod, wherein the rotating hook is rotatably connected to the upper operating lever.

6. A manual quick-change positioning fixture for semiconductor equipment components according to claim 5, characterized in that, A pressure block is detachably provided on the lower side of the upper clamping rod.

7. A manual quick-change positioning fixture for semiconductor equipment components according to claim 4, characterized in that, Two bottom-raising columns are detachably installed on the underside of the bottom support plate.

8. A manual quick-change positioning fixture for semiconductor equipment components according to claim 5, characterized in that, Two lifting columns are detachably installed on the lower side of the upper support plate.

9. A manual quick-change positioning fixture for semiconductor equipment components according to claim 2, characterized in that, The upper side of the substrate is detachably provided with a first positioning pin and a second positioning pin, which are perpendicular to the substrate. The positioning base plate is provided with a first positioning hole and a second positioning hole that pass through it vertically. The first positioning pin and the second positioning pin are respectively inserted into the first positioning hole and the second positioning hole.

10. A manual quick-change positioning fixture for semiconductor equipment components according to claim 2, characterized in that, The positioning block has a first clearance notch and a second clearance notch on its opposite sides, and the first clearance notch and the second clearance notch penetrate the groove wall of the positioning groove.

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