A silicon component fixture for coordinate measuring machine tools
By designing a silicon component fixture for a coordinate inspection machine tool, and utilizing a support slider and a fixing mechanism, the problem of cumbersome parallelism inspection of the upper and lower surfaces of silicon components is solved, achieving both simple inspection and reduced surface damage.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DYNAFINE SEMICON CO LTD
- Filing Date
- 2025-05-23
- Publication Date
- 2026-05-26
AI Technical Summary
Existing coordinate measuring machines require flipping the silicon component to check the parallelism of its upper and lower surfaces, making the inspection process cumbersome.
Design a silicon component fixture for a coordinate measuring machine tool, including a support body and a laterally sliding support slider. The silicon component is fixed by a fixing mechanism to ensure that there is a gap between the lower surface and the support body, allowing the coordinate measuring machine to simultaneously detect the parallelism of the upper and lower surfaces.
It enables simultaneous detection of the parallelism of the upper and lower surfaces of silicon components without the need for flipping, simplifying the detection process, adapting to the clamping of silicon components of different sizes, and reducing the risk of surface damage.
Smart Images
Figure CN224274752U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of fixture technology, specifically to a silicon component fixture for a coordinate measuring machine tool. Background Technology
[0002] A coordinate measuring machine is an instrument used to collect measurement values of three-dimensional objects. It has the ability to measure geometric shapes, lengths, and circumference divisions within a six-sided spatial range. It is often referred to as a coordinate measuring machine, coordinate measuring bed, or coordinate inspection machine tool.
[0003] A coordinate measuring machine (CMM) moves along three mutually perpendicular guide rails using a detector that can move in three directions. This detector transmits signals in a contact or non-contact manner, and the displacement measurement system of the three axes (such as an optical encoder) calculates the coordinates (x, y, z) of each point on the workpiece and the results of various functional measurements via a data processor or computer.
[0004] In order to measure the dimensional tolerances and surface parallelism of silicon components after processing, the silicon components need to be placed on the platform of a coordinate measuring machine for measurement. Traditionally, in order to prevent the platform from scratching the surface of the silicon components and to ensure the flatness of the platform, marble is usually chosen as the platform for support, and then the dimensions are measured by a detector.
[0005] Although the current coordinate measuring machine uses marble to protect and support the silicon component, since the lower end of the silicon component is in contact with the upper surface of the marble, the parallelism of the upper surface can only be tested during the process of testing the parallelism of the surface. When it is necessary to test the parallelism of the lower surface, the silicon component needs to be flipped over. The process of testing the parallelism of the upper and lower surfaces of the silicon component is quite cumbersome. Utility Model Content
[0006] The purpose of this invention is to address the shortcomings and deficiencies of the existing technology by providing a silicon component fixture for coordinate measuring machine tools.
[0007] To achieve the above objectives, the present invention adopts the following technical solution: a silicon component fixture for a coordinate measuring machine tool, characterized in that: it includes a support body for placing on the machine tool, two support sliders that are laterally slidable on the support body and symmetrically arranged, placement grooves respectively opened on the two support sliders, and a fixing mechanism respectively disposed between the two support sliders and the support body for fixing the support sliders to the support body, wherein the support sliders are blocks that can reduce damage to the surface of the silicon component.
[0008] A further improvement is that the placement groove includes a recessed groove and an interface surface, the interface surface being located at the junction of the recessed groove and the step of the support slider.
[0009] A further improvement is that the interface is a conical surface, an arc surface, or a parallel surface.
[0010] A further improvement is that the fixing mechanism consists of threaded holes respectively opened on the support slider and fixing bolts threadedly connected to the support slider and located in the threaded holes.
[0011] A further improvement is that a transverse sliding slot is provided on the support body, and the transverse sliding slot is clearance-fitted with the threaded part of the fixing bolt, and the threaded part of the fixing bolt can be slidably disposed in the transverse sliding slot.
[0012] A further improvement is that the support slider has a countersunk hole, which is connected to the threaded hole, and the diameter of the countersunk hole is larger than the diameter of the threaded hole.
[0013] A further improvement is that a guide groove is laterally opened on the side end face of the support body, and a guide slider is provided on the support slider, which can be slidably disposed in the guide groove.
[0014] A further improvement is that the support body has a connection opening for connecting to an external coordinate detection machine tool.
[0015] After adopting the above technical solution, the beneficial effects of this utility model are as follows: When it is necessary to support the silicon component to measure the surface parallelism of the silicon component, the support slider is first released from the support body by the fixing mechanism. Then, according to the size of the silicon component, the two support sliders are controlled to move closer or further away from each other on the support body, so that the silicon component can be placed on the two support sliders in the placement groove. Then, fine adjustment is made so that the two support sliders abut against the support sliders. The two support sliders are fixed to the support body by the fixing mechanism, thereby realizing the clamping and fixing of the silicon component. Since there is space between the two support sliders, there is also a gap between the lower surface of the silicon component and the support body. This allows the coordinate measuring machine to simultaneously perform parallelism detection on the upper and lower surfaces of the silicon component without having to flip the silicon component. The process of detecting the parallelism of the upper and lower surfaces of the silicon component is relatively simple.
[0016] Further benefits: The two horizontally sliding support sliders and the placement grooves allow for the clamping of silicon components of different sizes, creating a gap between the lower end face of the clamped silicon component and the support body, enabling a coordinate measuring machine to perform parallelism testing on the lower surface of the silicon component. After adjusting the position of the two support sliders to fit the size of the silicon component, subsequent testing only requires placing silicon components of the same specifications directly on the two support sliders, eliminating the need for further adjustment and positioning.
[0017] Further effect: After moving the two support sliders to their positions on the support body, the head of the fixing bolt can be turned with a tool to make the threaded part of the fixing bolt abut against the support body, and the head of the fixing bolt will press the support sliders tightly against the support body, thereby increasing the lateral friction of the support sliders to achieve the effect of fixing the support sliders.
[0018] Further benefits: The transverse slot design can guide the lateral movement of the support slider by cooperating with the threaded part of the fixing bolt when the fixing bolt is not against the support body, thereby reducing the occurrence of tilting and lateral movement of the support slider.
[0019] Further benefits: When the fixing bolt is set on the support slider, the countersunk hole can hide the head of the fixing bolt, thereby preventing the head of the fixing bolt from being exposed to the outside and coming into contact with the silicon component and scratching it. Especially when the fixing bolt is set on the upper end face of the support slider, the countersunk hole can better prevent this phenomenon from occurring.
[0020] Further benefits: The guide groove and guide slider can guide the lateral sliding of the support slider and restrict the longitudinal movement of the support slider, so that the support slider can only move laterally. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is a schematic diagram of the structure of this utility model;
[0023] Figure 2 This is a top view of the present invention;
[0024] Figure 3 This is a front sectional view of the support body and the support slider in this utility model;
[0025] Figure 4 This is a schematic diagram of the supporting slider in this utility model.
[0026] Explanation of reference numerals in the attached drawings: 1. Support body; 2. Support slider; 3. Sinking groove; 4. Intersection surface; 5. Threaded hole; 6. Fixing bolt; 7. Horizontal movement slot; 8. Countersunk hole; 9. Guide groove; 10. Guide slider; 11. Connecting opening. Detailed Implementation
[0027] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments.
[0028] See Figures 1 to 4 As shown, the technical solution adopted in this specific embodiment is: a silicon component fixture for a coordinate detection machine tool, including a support body 1 for placing on the machine tool, two support sliders 2 that can be slidably disposed on the support body 1 and are symmetrically arranged, placement grooves respectively opened on the two support sliders 2, and a fixing mechanism respectively disposed between the two support sliders 2 and the support body 1 for fixing the support sliders 2 to the support body 1, wherein the support sliders 2 are blocks that can reduce damage to the surface of the silicon component.
[0029] The support slider 2 can be made of PTFE, PEEK, polyethylene, polyimide, etc. These materials are generally soft, chemically stable, and cause little mechanical damage to silicon. Alternatively, it can be made of alumina, silicon nitride, silicon carbide, or composite materials (such as carbon fiber reinforced polymers), or soft materials such as silicone or rubber, which can effectively reduce mechanical stress, or resin materials.
[0030] The placement groove includes a recessed groove 3 and an interface 4, with the interface 4 located at the junction of the recessed groove 3 and the step of the supporting slider 2. The depth of the recessed groove 3 is set according to the thickness of the silicon component. The placement position of the recessed groove 3 is as follows: Figure 1 and Figure 2 As shown, the opening is located near the position where the silicon component is placed, and the end away from the interface 4 is parallel to the side end face of the support slider 2.
[0031] The interface 4 can be a conical surface, an arc surface, or a parallel surface. The interface 4 can also be other shapes. In this application, a conical surface is chosen as the interface 4. A conical surface can improve support at two points when in contact with the silicon component of the silicon disk, and further restrict the movement direction of the silicon component after placement. When set as an arc surface, even if the arc angle of the arc surface is different from the arc angle of the side end face of the silicon component, it can still achieve contact support at two points, providing a limiting effect. When set as a parallel surface, it only provides contact at one point, resulting in a poor limiting effect, but it can still achieve a clamping and fixing effect after the clamping force is increased.
[0032] The fixing mechanism consists of threaded holes 5 respectively opened on the support slider 2 and fixing bolts 6 threadedly connected to the support slider 2 and located in the threaded holes 5. The threaded holes 5 can be opened on the side end face or the side end face of the support slider 2.
[0033] The support body 1 has a transverse sliding slot 7, which is clearance-fitted with the screw part of the fixing bolt 6. The screw part of the fixing bolt 6 can be slidably disposed in the transverse sliding slot 7.
[0034] When the threaded hole 5 is opened on the side end face of the support slider 2, at this time the transverse moving slot 7 is also arranged on the side end face. In this application, it is selected to be arranged on the upper end face of the support body 1, and at this time the transverse moving slot 7 is also arranged on the upper end face of the support body 1.
[0035] A countersunk hole 8 is opened on the support slider 2, and the countersunk hole 8 is communicated with the threaded hole 5. The diameter of the countersunk hole 8 is larger than the diameter of the threaded hole 5. The diameter of the countersunk hole 8 is smaller than the head diameter of the fixing bolt 6, so that when the fixing bolt 6 abuts against the support body 1, the support slider 2 can be pressed tightly on the support body 1.
[0036] A guiding chute 9 is transversely opened on the side end face of the support body 1, and a guiding slider 10 is arranged on the support slider 2. The guiding slider 10 is slidably arranged in the guiding chute 9.
[0037] When the guiding chute 9 and the guiding slider 10 are not provided, in order to play the same guiding role, an "open" - shaped opening is opened in the middle of the support slider 2 (the shape of this opening is related to the outer shape of the support body 1. For example, in this application, it is set as the shape of an "open" character). By sleeving the support slider 2 on the outer surface of the support body 1 through this opening, the transverse movement and longitudinal direction of the support slider 2 can also be guided.
[0038] A connecting opening 11 for connecting with an external coordinate detection machine tool is opened on the support body 1. The connecting opening 11 is matched with the installation column of the external coordinate detection machine tool, and then with the setting of fasteners, the support body 1 can be fixed on the machine tool. It can also be installed on the machine tool by other means (such as setting an extension piece on the side and using bolts or screws, etc.).
[0039] The working principle of the present utility model: When it is necessary to support a silicon component to measure the surface parallelism of the silicon component, first release the fixation of the support slider 2 on the support body 1 through the fixing mechanism. Subsequently, according to the size of the silicon component, control the two support sliders 2 to approach or move away from each other on the support body 1 respectively, so that the silicon component can be placed on the two support sliders 2 in the placement groove. Then, make fine adjustments so that the two support sliders 2 abut against each other on the support slider 2, and fix the two support sliders 2 on the support body 1 through the fixing mechanism, thereby realizing the clamping and fixation of the silicon component. Since there is a space between the two support sliders 2, there is also a gap between the lower surface of the silicon component and the support body 1 at this time. Thus, the three - coordinate detector can simultaneously detect the parallelism of the upper and lower surfaces of the silicon component, and there is no need to turn the silicon component over again. The process of detecting the parallelism of the upper and lower surfaces of the silicon component is relatively simple;
[0040] The two horizontally sliding support sliders 2 and the placement groove can clamp silicon components of different sizes and create a gap between the lower end face of the clamped silicon component and the support body 1, so that the coordinate measuring machine can perform parallelism detection on the lower surface of the silicon component. After adjusting the position of the two support sliders 2 to match the size of the silicon component, in subsequent inspections, silicon components of the same specifications can be placed directly on the two support sliders 2 without further adjustment and positioning.
[0041] After moving the two support sliders 2 to their positions on the support body 1, the head of the fixing bolt 6 can be turned with a tool to make the screw part of the fixing bolt 6 abut against the support body 1, and the head of the fixing bolt 6 will press the support slider 2 tightly onto the support body 1, thereby increasing the lateral friction of the support slider 2 and achieving the fixing effect of the support slider 2.
[0042] The transverse slot 7 can guide the transverse movement of the support slider 2 when the fixing bolt 6 is not against the support body 1, by cooperating with the screw part of the fixing bolt 6, thereby reducing the occurrence of the support slider 2 tilting and transverse movement.
[0043] When the fixing bolt 6 is set on the support slider 2, the countersunk hole 8 can hide the head of the fixing bolt 6, thereby preventing the head of the fixing bolt 6 from being exposed to the outside and contacting the silicon component and scratching the silicon component. Especially when the fixing bolt 6 is set on the upper end face of the support slider 2, the countersunk hole 8 can better prevent this phenomenon from occurring.
[0044] The guide groove 9 and guide slider 10 can guide the lateral sliding of the support slider 2 and restrict the longitudinal movement of the support slider 2, so that the support slider 2 can only move laterally.
[0045] This utility model aims to protect the structure of the product. The model numbers of the individual components are not the subject of this utility model's protection and are already known technology. Any component on the market that can achieve the functions described above can be used as a silicon component fixture for coordinate measuring machine tools. Therefore, the model numbers and other parameters of the components are not described in detail in this utility model. The contribution of this utility model lies in the scientific combination of the various components.
[0046] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions provided are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of protection of this utility model as defined by the appended claims and their equivalents. Any aspects of this utility model not detailed herein are well-known to those skilled in the art.
Claims
1. A silicon component clamp for a coordinate measuring machine tool, characterized by: The device includes a support body for placement on a machine tool, two support sliders that can slide laterally on the support body and are symmetrically arranged, placement grooves respectively opened on the two support sliders, and fixing mechanisms respectively disposed between the two support sliders and the support body for fixing the support sliders to the support body. The support sliders are blocks that can reduce damage to the surface of silicon components.
2. The silicon component fixture for a coordinate measuring machine tool according to claim 1, characterized in that: The placement groove includes a recessed groove and an interface, the interface being located at the junction of the recessed groove and the step of the support slider.
3. A silicon component fixture for a coordinate measuring machine tool according to claim 2, characterized in that: The interface is a conical surface, an arc surface, or a parallel surface.
4. A silicon component fixture for a coordinate measuring machine tool according to claim 1, characterized in that: The fixing mechanism consists of threaded holes respectively opened on the support slider and fixing bolts threadedly connected to the support slider and located in the threaded holes.
5. A silicon component fixture for a coordinate measuring machine tool according to claim 4, characterized in that: The support body has a transverse sliding slot, which is clearance-fitted with the threaded part of the fixing bolt, and the threaded part of the fixing bolt can be slidably disposed in the transverse sliding slot.
6. A silicon component fixture for a coordinate measuring machine tool according to claim 4 or 5, characterized in that: The support slider has a countersunk hole, which is connected to a threaded hole, and the diameter of the countersunk hole is larger than the diameter of the threaded hole.
7. A silicon component fixture for a coordinate measuring machine tool according to claim 1, characterized in that: The side end face of the support body has a guide groove opened laterally, and the support slider is provided with a guide slider, which can be slidably disposed in the guide groove.
8. A silicon component fixture for a coordinate measuring machine tool according to claim 1, characterized in that: The support body has a connection opening for connecting to an external coordinate detection machine tool.