A target material transport device

Abstract

This utility model belongs to the field of target material transportation technology and discloses a target material transportation device. The target material transportation device includes a frame, a moving mechanism, and an overlapping mechanism. The moving mechanism is disposed on the frame. The overlapping mechanism includes a driving component, a mounting component, and at least two overlapping components. The driving component is fixed to the output end of the moving mechanism, and the moving mechanism drives the driving component to move. The mounting component is fixed to the output end of the driving component, and the driving component drives the mounting component to move vertically. At least two overlapping components are spaced apart on the mounting component along its length, and the position of each overlapping component is adjustable along its length. Each overlapping component has a horizontal surface and a concave arc surface, both of which are used to overlap the target material. The target material transportation device of this utility model has a relatively simple structure, good compatibility, and can transport both planar and rotating targets, reducing manual operation time, improving work efficiency, and reducing safety hazards.

Description

Technical Field

[0001] This utility model relates to the field of target material transportation technology, and in particular to a target material transportation device. Background Technology

[0002] Sputtering technology is a fundamental coating technique. It refers to the process of bombarding a solid surface with particles (ions, neutral atoms, or molecules) of a certain energy, causing atoms or molecules near the solid surface to gain sufficient energy to escape from the solid surface and reach the substrate. The sputtering target is the sputtering source used by magnetron sputtering, multi-arc ion plating, or other types of coating systems under appropriate process conditions to form various functional thin films on the substrate. By changing different target materials (such as aluminum, copper, stainless steel, titanium, and nickel targets), different film systems (such as ultra-hard, wear-resistant, and corrosion-resistant alloy films) can be obtained.

[0003] Existing target transport devices generally only transport planar targets, have poor compatibility, and cannot transport rotating targets. Rotating targets require manual handling or the assistance of three to four people using mobile machinery. Due to the weight of the targets, this poses safety hazards during transport, increases manual labor time, and reduces work efficiency. Therefore, there is an urgent need for a target transport device to solve these technical problems. Utility Model Content

[0004] The purpose of this invention is to provide a target material transport device with a relatively simple structure and good compatibility. It can transport both planar and rotating targets, reducing manual operation time, improving work efficiency, and reducing safety hazards.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A target material transport device, comprising:

[0007] frame;

[0008] The moving mechanism is mounted on the frame;

[0009] The overlapping mechanism includes a driving component, a mounting component, and at least two overlapping components. The driving component is fixed to the output end of the moving mechanism, which drives the driving component to move. The mounting component is fixed to the output end of the driving component, which drives the mounting component to move vertically. At least two overlapping components are spaced apart on the mounting component along its length, and each overlapping component is adjustable in position along its length. Each overlapping component has a horizontal surface and a concave arc surface, both of which are used to overlap the target material.

[0010] In some possible implementations, the horizontal plane includes a first surface and a second surface, wherein the first surface, the concave arc surface, and the second surface are arranged sequentially along the width direction of the mounting component.

[0011] In some possible implementations, the overlapping mechanism further includes a fastener, the overlapping member having a insertion hole, the insertion hole being inserted into the mounting member along the length direction of the mounting member and being slidably connected to the mounting member, the wall of the insertion hole having an internal thread hole, the fastener being threadedly connected to the internal thread hole, extending into the insertion hole and abutting against the surface of the mounting member.

[0012] In some possible implementations, the insertion hole is a rectangular hole, the mounting member is a rectangular structure, the rectangular hole is inserted into the rectangular structure along the length direction of the rectangular structure, and is slidably connected to the rectangular structure.

[0013] In some possible implementations, the overlapping mechanism further includes a fastener, the overlapping member has a through hole, the mounting member has a plurality of mounting holes, the through hole selectively corresponds to one of the mounting holes, and the fastener passes through the through hole and is threadedly connected to the corresponding mounting hole.

[0014] In some possible implementations, the overlap member includes an overlap body and an anti-slip pad, the anti-slip pad being fixed to the overlap body, and the anti-slip pad having the horizontal surface and the concave arc surface.

[0015] In some possible implementations, the connector is an L-shaped structure.

[0016] In some possible implementations, there are two overlapping members, which are symmetrically distributed relative to the mounting member.

[0017] In some possible implementations, the moving mechanism includes a first moving member and a second moving member, the first moving member being movable on the frame along a first direction, the second moving member being movable on the first moving member along a second direction perpendicular to the first direction, and the driving member being disposed on the second moving member.

[0018] In some possible implementations, the drive member is rotatably disposed on the second moving member along its own axis.

[0019] The beneficial effects of this utility model are:

[0020] The target material transport device provided by this utility model includes a frame, a moving mechanism, and an overlapping mechanism. The target material is overlapped on the placement frame. During target material transport, the moving mechanism moves the overlapping mechanism to extend all overlapping parts into the placement frame. A driving component drives the mounting component to move vertically upwards, causing the target material to detach from the placement frame and overlap with all overlapping parts. Transporting the target material via this overlapping method results in a relatively simple structure. Each overlapping part has a horizontal surface and a concave arc surface. The horizontal surface is used for overlapping planar targets, and the concave arc surface is used for overlapping rotating targets, improving the compatibility of the target material transport device. It can transport both planar and rotating targets, reducing manual operation time, improving work efficiency, and lowering safety hazards. At least two overlapping parts are spaced apart along the length of the mounting component to avoid interference between the overlapping parts and the placement frame, ensuring the stability of the overlapping parts for target material movement. Furthermore, the position of each overlapping part along the length of the mounting component is adjustable, enabling the transport of targets of different lengths and further improving compatibility. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the target material transport device provided by this utility model;

[0022] Figure 2 This is a structural schematic diagram of the mounting components, connecting components, and fasteners involved in this utility model.

[0023] In the picture:

[0024] 1. Frame; 2. Drive unit; 3. Mounting unit; 4. Connecting unit; 41. Horizontal plane; 411. First surface; 412. Second surface; 42. Concave arc surface; 43. Insertion hole; 44. Connecting body; 45. Anti-slip pad; 5. Fastener; 6. First moving part; 7. Second moving part. Detailed Implementation

[0025] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0026] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0028] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0029] like Figure 1 and Figure 2 As shown, this utility model provides a target material transport device for transporting LCD targets. The target material transport device includes a frame 1, a moving mechanism, and an overlapping mechanism. The moving mechanism is disposed on the frame 1. The overlapping mechanism includes a driving component 2, a mounting component 3, and at least two overlapping components 4. The driving component 2 is fixed to the output end of the moving mechanism, and the moving mechanism is used to drive the driving component 2 to move. The mounting component 3 is fixed to the output end of the driving component 2, and the driving component 2 is used to drive the mounting component 3 to move in the vertical direction. At least two overlapping components 4 are spaced apart on the mounting component 3 along the length direction of the mounting component 3. Figure 2 The front and rear directions are arranged in the mounting part 3, and each overlapping part 4 is adjustable in position along the length direction of the mounting part 3. Each overlapping part 4 is provided with a horizontal surface 41 and a concave arc surface 42, and both the horizontal surface 41 and the concave arc surface 42 are used to overlap the target material.

[0030] The target material is overlapped on the placement frame. During target material transportation, the overlapping mechanism is moved by the moving mechanism to extend all overlapping parts 4 into the placement frame. The driving component 2 drives the mounting component 3 to move vertically upward. All overlapping parts 4 cooperate to lift the same target material. During this process, the target material overlaps with all overlapping parts 4 and detaches from the placement frame. The target material is transported by overlapping, which is a relatively simple structure. Each overlapping part 4 is provided with a horizontal surface 41 and a concave arc surface 42. The horizontal surface 41 is used to overlap flat targets, and the concave arc surface 42 is used to overlap rotating targets. This makes the target material transportation device more compatible, enabling the transportation of both flat and rotating targets. This reduces manual operation time, improves work efficiency, and reduces safety hazards. At least two overlapping pieces 4 are spaced apart on the mounting piece 3 along the length direction of the mounting piece 3 to avoid interference between the overlapping pieces 4 and the placement frame, and to ensure the stability of the overlapping pieces 4 for the movement of the target material. In addition, the position of each overlapping piece 4 is adjustable on the mounting piece 3 along the length direction of the mounting piece 3, which can transport targets of different lengths and further improve compatibility.

[0031] Optionally, in this embodiment, the horizontal surface 41 includes a first surface 411 and a second surface 412. The first surface 411, the concave arc surface 42, and the second surface 412 are arranged sequentially along the width direction of the mounting member 3. The width direction of the mounting member 3 is... Figure 2 The horizontal direction is as follows: With this configuration, when transporting a planar target, both ends of the planar target overlap the first surface 411 and the second surface 412 along the width direction, respectively. The middle position of the planar target does not contact the concave arc surface 42, ensuring the stability of the planar target's movement. When transporting a rotating target, the rotating target overlaps on the concave arc surface 42, which is located between the first surface 411 and the second surface 412, also ensuring the stability of the rotating target's movement. In other embodiments, the horizontal surface 41 includes the first surface 411, and the first surface 411 and the concave arc surface 42 are spaced apart to achieve overlap between the planar target and the rotating target; this is not limited to this embodiment.

[0032] Optionally, in this embodiment, the overlapping mechanism further includes a fastener 5. The overlapping member 4 is provided with an insertion hole 43, which is inserted into the mounting member 3 along the length direction of the mounting member 3 and is slidably connected to the mounting member 3. The wall of the insertion hole 43 is provided with an internal thread hole. The fastener 5 is threadedly connected to the internal thread hole and extends into the insertion hole 43 and abuts against the surface of the mounting member 3. Optionally, the fastener 5 is a screw. When adjusting the position of the overlapping member 4, the fastener 5 is first loosened, but the fastener 5 will not disengage from the internal thread hole. Then, the position of the overlapping member 4 on the mounting member 3 is adjusted by sliding the overlapping member 4. After adjustment, the fastener 5 is tightened so that the fastener 5 abuts against the surface of the mounting member 3, thereby fixing the overlapping member 4. With the above settings, the position adjustment operation of the overlapping member 4 is more convenient and reliable fixing of the overlapping member 4 can be achieved.

[0033] Furthermore, the insertion hole 43 is a rectangular hole, and the mounting part 3 is a rectangular structure. The rectangular hole and the rectangular structure are inserted along the length of the rectangular structure and are slidably connected. This arrangement can prevent the overlapping parts 4 from rotating relative to the mounting part 3 when adjusting their position, thus ensuring that the horizontal surfaces 41 of all overlapping parts 4 are aligned and the concave arc surfaces 42 are aligned, which would affect the transportation of the target material.

[0034] In other embodiments, the overlapping mechanism further includes a fastener 5. The overlapping member 4 has a through hole, and the mounting member 3 has multiple mounting holes. The through hole selectively corresponds to one of the mounting holes. The fastener 5 passes through the through hole and is threadedly connected to the corresponding mounting hole. When adjusting the position of the overlapping member 4, the fastener 5 is first loosened to disengage it from the internal threaded hole. Then, the position of the overlapping member 4 on the mounting member 3 is adjusted. After adjustment, the fastener 5 passes through the through hole and is threadedly connected to the corresponding mounting hole, thereby fixing the overlapping member 4.

[0035] To further ensure the stability of the target material during movement and to prevent damage to the target material from the overlapping member 4, optionally in this embodiment, the overlapping member 4 includes an overlapping body 44 and an anti-slip pad 45. The anti-slip pad 45 is fixed to the overlapping body 44 and has a horizontal surface 41 and a concave arc surface 42. Specifically, the anti-slip pad 45 is made of rubber. In other embodiments, both the horizontal surface 41 and the concave arc surface 42 have uneven structures to provide anti-slip properties.

[0036] Optionally, in this embodiment, the overlapping member 4 has an L-shaped structure. This design simplifies the structure of the overlapping member 4 and facilitates its fabrication.

[0037] To save costs and ensure stable overlap of the target material, optionally, in this embodiment, two overlap members 4 are provided, and the two overlap members 4 are symmetrically distributed relative to the mounting member 3.

[0038] Optionally, in this embodiment, the moving mechanism includes a first moving member 6 and a second moving member 7. The first moving member 6 can move along a first direction on the frame 1. The first direction is... Figure 1 In the forward and backward direction, the second moving member 7 can move along the second direction on the first moving member 6, and the second direction is perpendicular to the first direction. Figure 1 In the left-right direction, the drive component 2 is disposed on the second moving component 7. This arrangement increases the range of motion of the target material, enabling transport of the target material within a larger space. Furthermore, in this embodiment, the drive component 2 is rotatably disposed on the second moving component 7 along its own axis. This arrangement increases the flexibility of the moving mechanism, enabling the transport of targets placed at different angles. In addition, the drive component 2 is a power-assisted manipulator, which improves work efficiency and makes positioning more accurate. The specific structure of the power-assisted manipulator is a mature technology in related fields, and will not be described in detail in this embodiment.

[0039] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A target material transport device, characterized in that, include: Rack (1); A moving mechanism is provided on the frame (1); The overlapping mechanism includes a driving component (2), a mounting component (3), and at least two overlapping components (4). The driving component (2) is fixed to the output end of the moving mechanism, which is used to drive the driving component (2) to move. The mounting component (3) is fixed to the output end of the driving component (2), which is used to drive the mounting component (3) to move in the vertical direction. At least two overlapping components (4) are spaced apart on the mounting component (3) along the length direction of the mounting component (3), and the position of each overlapping component (4) is adjustable on the mounting component (3) along the length direction of the mounting component (3). Each overlapping component (4) is provided with a horizontal surface (41) and a concave arc surface (42), and both the horizontal surface (41) and the concave arc surface (42) are used to overlap the target material.

2. The target material transport device according to claim 1, characterized in that, The horizontal surface (41) includes a first surface (411) and a second surface (412), and the first surface (411), the concave arc surface (42) and the second surface (412) are arranged sequentially along the width direction of the mounting component (3).

3. The target material transport device according to claim 1, characterized in that, The overlapping mechanism also includes a fastener (5). The overlapping member (4) is provided with a plug hole (43). The plug hole (43) is inserted into the mounting member (3) along the length direction of the mounting member (3) and is slidably connected to the mounting member (3). The wall of the plug hole (43) is provided with an internal thread hole. The fastener (5) is threadedly connected to the internal thread hole and extends into the plug hole (43) and abuts against the surface of the mounting member (3).

4. The target material transport device according to claim 3, characterized in that, The insertion hole (43) is a rectangular hole, and the mounting part (3) is a rectangular structure. The rectangular hole is inserted into the rectangular structure along the length direction of the rectangular structure and is slidably connected to the rectangular structure.

5. The target material transport device according to claim 1, characterized in that, The overlapping mechanism also includes a fastener (5), the overlapping member (4) is provided with a through hole, the mounting member (3) is provided with a plurality of mounting holes, the through hole selectively corresponds to one of the mounting holes, the fastener (5) passes through the through hole and is threadedly connected to the corresponding mounting hole.

6. The target material transport device according to claim 1, characterized in that, The overlapping component (4) includes an overlapping body (44) and an anti-slip pad (45). The anti-slip pad (45) is fixed to the overlapping body (44) and has a horizontal surface (41) and a concave arc surface (42).

7. The target transport device according to any one of claims 1-6, characterized in that, The overlapping component (4) has an L-shaped structure.

8. The target transport device according to any one of claims 1-6, characterized in that, There are two overlapping members (4), and the two overlapping members (4) are symmetrically distributed relative to the mounting member (3).

9. The target transport device according to any one of claims 1-6, characterized in that, The moving mechanism includes a first moving member (6) and a second moving member (7). The first moving member (6) can move along a first direction on the frame (1), and the second moving member (7) can move along a second direction on the first moving member (6). The second direction is perpendicular to the first direction. The driving member (2) is disposed on the second moving member (7).

10. The target material transport device according to claim 9, characterized in that, The driving member (2) is rotatably mounted on the second moving member (7) along its own axis.

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