An automatic doping device for single crystal silicon

Abstract

This utility model discloses an automatic doping device for monocrystalline silicon, belonging to the field of doping technology. It includes a rodless cylinder, which comprises a support base and a frame. The frame is horizontally movable and mounted on the support base. It also includes an extension tube, a doping spoon, a sliding sleeve, and a linkage component. The sliding sleeve is slidably connected to the periphery of the extension tube, and its periphery is rotatably connected to one side of the frame. The bottom of the support base is fixedly connected to the periphery of the extension tube. The doping spoon is rotatably mounted on the extension tube. The linkage component is mounted on the extension tube and is used to make the doping spoon and the sliding sleeve rotate synchronously. This automatic doping device for monocrystalline silicon drives the sliding sleeve to move through the rodless cylinder, and drives the doping spoon and the sliding sleeve to move synchronously through the linkage component, causing them to rotate at a uniform speed while moving horizontally, thus performing automatic doping. This not only reduces labor intensity but also makes the doping effect more uniform, solving the problems of high manual labor intensity and low doping quality in existing monocrystalline silicon doping devices.

Description

Technical Field

[0001] This utility model relates to the field of doping technology, specifically to an automatic doping device for single crystal silicon. Background Technology

[0002] Monocrystalline silicon, as a core material of modern technology industries, plays an irreplaceable role in global economic, energy, and technological development. Monocrystalline silicon wafers are the carriers of integrated circuits, supporting core components such as CPUs, GPUs, and memory chips, directly affecting chip performance. Monocrystalline silicon is not only an "invisible pillar" of the information age and energy revolution, but also a strategic resource in the technological competition among major powers. Its technological upgrades and industrial ecosystem will profoundly impact the global carbon neutrality process, the semiconductor industry landscape, and geoeconomic balance.

[0003] To adjust the different conductivity types, electrical properties, carrier concentrations, and distributions of monocrystalline silicon, and to endow the material with diverse electrical characteristics to support the realization of functions such as semiconductor devices and photovoltaic cells, precise doping control directly determines the efficiency, speed, and reliability of semiconductor devices. This precise doping depends on appropriate time, temperature, and the appropriate doping dosage.

[0004] Currently, most doping methods for single-crystal silicon doping devices are manual. In general, during the melting process, the worker puts the dopant into a spoon and then pours it into the crucible of the single crystal furnace to mix with the molten silicon. This method has the following problems: 1. The worker comes into contact with the dopant multiple times, which reduces the purity of the dopant and may affect the quality of the single crystal rod.

[0005] 2. It is difficult to determine the appropriate time to add dopant, and the whole process requires staff to monitor it. There are cases of missed doping and untimely doping, resulting in low work quality and efficiency, which seriously affects product quality.

[0006] 3. When adding dopants, staff need to use ladders and go up and down the ladders multiple times, which poses a safety risk. They also need to come into contact with the high-temperature doping window multiple times, which may cause burns and reduce the purity of the silicon liquid in the furnace. Utility Model Content

[0007] The purpose of this invention is to provide an automatic doping device for monocrystalline silicon that eliminates the need for manual doping by workers, improves doping quality, and protects the dopants.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] An automatic doping device for monocrystalline silicon is provided, including a rodless cylinder. The rodless cylinder includes a support base and a frame. The frame is horizontally movable and mounted on the support base. It also includes an extension tube, a doping spoon, a sliding sleeve, and a linkage component. The sliding sleeve is slidably connected to the periphery of the extension tube, and the periphery of the sliding sleeve is rotatably connected to one side of the frame. The bottom of the support base is fixedly connected to the periphery of the extension tube. The doping spoon is rotatably mounted on the extension tube. The linkage component is mounted on the extension tube and is used to make the doping spoon and the sliding sleeve rotate synchronously.

[0010] Furthermore, it also includes a limiting rod, which passes through the side wall of the sliding sleeve and is fixedly connected to it. A guide groove is provided on the outer periphery of the extended tube, and the bottom of the limiting rod is slidably connected to the guide groove.

[0011] Furthermore, the guide groove includes an arc-shaped groove and a straight groove. The arc-shaped groove is threaded and communicates with the straight groove. The arc-shaped groove is located at the end of the extended tube closer to the mixing spoon, and the straight groove is located at the end of the extended tube away from the mixing spoon. When the limiting rod is located at the end of the straight groove closer to the arc-shaped groove, the mixing spoon is located at one end of the extended tube with its opening facing upward. When the limiting rod is located at the end of the straight groove away from the arc-shaped groove, the mixing spoon is located inside the extended tube. When the limiting rod is located at the end of the arc-shaped groove away from the straight groove, the mixing spoon is located at one end of the extended tube with its opening facing downward.

[0012] Furthermore, the linkage assembly includes a piston rod and a pair of strong magnets. The piston rod is slidably connected to the inner wall of the extension tube, one end of the piston rod is fixedly connected to the mixing spoon, the top of the other end of the piston rod is fixedly connected to one of the strong magnets, the other strong magnet is fixedly connected to the top of the limiting rod, and the two strong magnets are magnetically coupled together.

[0013] Furthermore, the rodless cylinder also includes a slider, a guide rod, and a handle. The slider is fixedly connected to the top of the frame, the guide rod is fixedly connected to the inner wall of the support base, the slider is slidably connected to the outer periphery of the guide rod, and the handle is installed on one side of the frame. The handle is used to control the opening and closing of the pressure relief valve of the rodless cylinder.

[0014] Furthermore, a groove is provided on one side of the mixing spoon, and the bottom wall of the groove has a sloping structure.

[0015] The beneficial effects of this utility model are as follows: By using an extended tube, a sliding sleeve, and a mixing spoon, this utility model enables automatic mixing during the addition of additives. A rodless cylinder drives the sliding sleeve to slide along the extended tube while simultaneously rotating it 180 degrees. A linkage component then drives the mixing spoon to move and rotate synchronously with the sliding sleeve, allowing the spoon to extend from the extended tube and rotate at a uniform speed while moving horizontally. This ensures that the additive inside the spoon is evenly distributed into the crucible. This not only enables automatic mixing without manual operation, avoiding the contamination risks and safety risks associated with manual mixing, but also improves the uniformity and quality of the mixing process. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments of this utility model will be briefly described below. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention. Figure 1 ;

[0018] Figure 2 This is a schematic diagram of the overall structure of the present invention. Figure 2 ;

[0019] Figure 3 This is a schematic diagram of the overall structure of the present invention. Figure 3 ;

[0020] Figure 4 This is an exploded view of the rodless cylinder structure of this utility model;

[0021] Figure 5 This is an exploded view of the linkage component structure of this utility model;

[0022] Figure 6 This is a schematic diagram of the extended tube structure of this utility model.

[0023] In the picture:

[0024] 1. Rodless cylinder; 10. Support base; 11. Frame; 12. Slider; 13. Guide rod; 14. Handle;

[0025] 2. Extended tube; 20. Guide groove; 200. Arc groove; 201. Straight groove; 21. Adding spoon; 210. Groove; 22. Sliding sleeve; 23. Limiting rod;

[0026] 3. Linkage assembly; 30. Piston rod; 31. Strong magnet. Detailed Implementation

[0027] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0028] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of this utility model, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0029] Reference Figures 1 to 6The device shown is an automatic doping device for monocrystalline silicon, including a rodless cylinder 1. The rodless cylinder 1 includes a support base 10 and a frame 11. The frame 11 is horizontally movable and mounted on the support base 10. It also includes an extension tube 2, a doping spoon 21, a sliding sleeve 22, and a linkage component 3. The sliding sleeve 22 is slidably connected to the periphery of the extension tube 2, and the periphery of the sliding sleeve 22 is rotatably connected to one side of the frame 11. The bottom of the support base 10 is fixedly connected to the periphery of the extension tube 2. The doping spoon 21 is rotatably mounted on the extension tube 2. The linkage component 3 is mounted on the extension tube 2 and is used to make the doping spoon 21 and the sliding sleeve 22 rotate synchronously.

[0030] During the addition process, the rodless cylinder 1 drives the sliding sleeve 22 to slide along the extension tube 2, while simultaneously rotating the sliding sleeve 22 180 degrees. The linkage component 3 then drives the addition spoon 21 to move and rotate synchronously with the sliding sleeve 22, causing the addition spoon 21 to extend from the extension tube 2 and rotate at a uniform speed while moving horizontally. This evenly distributes the additive inside the addition spoon 21 into the crucible. This not only enables automatic addition without manual operation, avoiding the contamination risks and safety risks associated with manual addition, but also improves the uniformity and quality of the addition.

[0031] like Figures 1 to 6 As shown, it also includes a limiting rod 23, which passes through the side wall of the sliding sleeve 22 and is fixedly connected to it. A guide groove 20 is provided on the periphery of the extended tube 2, and the bottom of the limiting rod 23 is slidably connected to the guide groove 20.

[0032] The guide groove 20 includes an arc-shaped groove 200 and a straight groove 201. The arc-shaped groove 200 is threaded and communicates with the straight groove 201. The arc-shaped groove 200 is located at the end of the extension tube 2 near the mixing spoon 21, and the straight groove 201 is located at the end of the extension tube 2 away from the mixing spoon 21. When the limiting rod 23 is located at the end of the straight groove 201 near the arc-shaped groove 200, the mixing spoon 21 is located at one end of the extension tube 2 with its opening facing upward. When the limiting rod 23 is located at the end of the straight groove 201 away from the arc-shaped groove 200, the mixing spoon 21 is located inside the extension tube 2. When the limiting rod 23 is located at the end of the arc-shaped groove 200 away from the straight groove 201, the mixing spoon 21 is located at one end of the extension tube 2 with its opening facing downward.

[0033] A groove 210 is provided on one side of the mixing spoon 21, and the bottom wall of the groove 210 has a sloping structure.

[0034] When the sliding sleeve 22 slides horizontally along the extension tube 2, the limiting rod 23 slides along the guide groove 20. Before sealing the single crystal furnace, the limiting rod 23 slides to one end of the straight groove 201. At this time, the doping spoon 21 is located outside the extension tube 2 with its opening facing upward, which facilitates the addition of dopants into the doping spoon 21. Then the limiting rod 23 moves to the other end of the straight groove 201. At this time, the doping spoon 21 is located inside the extension tube 2, which can protect the doping spoon 21 and the dopants inside it, preventing contamination and high temperature damage. Then the extension tube 2 is fixed in the auxiliary chamber of the single crystal furnace by bolts.

[0035] When addition is needed, the limiting rod 23 slides along the arc-shaped groove 200. At this time, the limiting rod 23 drives the sliding sleeve 22 to move horizontally at a uniform speed and rotate 180 degrees. The addition spoon 21 slides horizontally out of the extension tube 2 and comes to the top of the crucible. As it moves horizontally, the addition spoon 21 rotates at a uniform speed, and the additive inside falls into the crucible at a uniform speed, thereby achieving the effect of uniform addition. Furthermore, since the addition spoon 21 has a groove 210 with a sloping bottom wall on one side, it can prevent the additive from falling completely and quickly during its rotation, further improving the uniformity of addition.

[0036] like Figure 5 As shown, the linkage component 3 includes a piston rod 30 and a pair of strong magnets 31. The piston rod 30 is slidably connected to the inner wall of the extension tube 2. One end of the piston rod 30 is fixedly connected to the mixing spoon 21. The top of the other end of the piston rod 30 is fixedly connected to one of the strong magnets 31. The other strong magnet 31 is fixedly connected to the top of the limiting rod 23. The two strong magnets 31 are magnetically coupled together.

[0037] Through the magnetic coupling transmission between the two strong magnets 31, the piston rod 30 moves synchronously with the limiting block and rotates synchronously around the extension tube 2, thereby achieving the effect of synchronous horizontal sliding and uniform rotation of the mixing spoon 21 and the sliding sleeve 22.

[0038] like Figure 4 As shown, the rodless cylinder 1 also includes a slider 12, a guide rod 13 and a handle 14. The slider 12 is fixedly connected to the top of the frame 11, the guide rod 13 is fixedly connected to the inner wall of the support base 10, the slider 12 is slidably connected to the outer periphery of the guide rod 13, and the handle 14 is installed on one side of the frame 11. The handle 14 is used to control the opening and closing of the pressure relief valve of the rodless cylinder 1.

[0039] Turning handle 14 opens the pressure relief valve, at which point rodless cylinder 1 is in a free state, pushing sliding sleeve 22, allowing it to slide freely around the extension rod, thus pushing the mixing spoon 21 out of the extension tube 2 for feeding. After feeding, the mixing spoon 21 is pushed into the extension tube 2, and then handle 14 is turned to reset, at which point it is in the state of waiting to be mixed. When mixing is needed, rodless cylinder 1 is activated, driving slider 12 to slide horizontally along guide rod 13, while simultaneously driving frame 11 to move horizontally. Frame 11 pushes sliding sleeve 22 to slide around the extension tube 2, and under the action of guide rod, sliding sleeve 22 rotates within frame 11, thus providing drive for the movement and flipping of mixing spoon 21.

[0040] It should be stated that the above-described specific embodiments are merely preferred embodiments of this utility model and the technical principles employed. Those skilled in the art should understand that various modifications, equivalent substitutions, and variations can be made to this utility model. However, such variations, as long as they do not depart from the spirit of this utility model, should be within the protection scope of this utility model. Furthermore, some terminology used in this application specification and claims is not limiting, but merely for ease of description.

Claims

1. An automatic doping device for single-crystal silicon, comprising a rodless cylinder (1), the rodless cylinder (1) comprising a support base (10) and a frame (11), the frame (11) being horizontally movable and mounted on the support base (10), characterized in that, It also includes an extension tube (2), a mixing spoon (21), a sliding sleeve (22) and a linkage assembly (3). The sliding sleeve (22) is slidably connected to the outer periphery of the extension tube (2). The outer periphery of the sliding sleeve (22) is rotatably connected to one side of the frame (11). The bottom of the support base (10) is fixedly connected to the outer periphery of the extension tube (2). The mixing spoon (21) is rotatably mounted on the extension tube (2). The linkage assembly (3) is mounted on the extension tube (2). The linkage assembly (3) is used to make the mixing spoon (21) and the sliding sleeve (22) rotate synchronously.

2. The automatic doping device for single crystal silicon according to claim 1, characterized in that, It also includes a limiting rod (23), which passes through the side wall of the sliding sleeve (22) and is fixedly connected to it. The extended tube (2) has a guide groove (20) on its periphery, and the bottom of the limiting rod (23) is slidably connected to the guide groove (20).

3. The automatic doping device for single-crystal silicon according to claim 2, characterized in that, The guide groove (20) includes an arc groove (200) and a straight groove (201). The arc groove (200) is threaded and communicates with the straight groove (201). The arc groove (200) is located at the end of the extension tube (2) near the mixing spoon (21), and the straight groove (201) is located at the end of the extension tube (2) away from the mixing spoon (21). When the limiting rod (23) is located at one end of the straight groove (201) near the inter-arc groove (200), the mixing spoon (21) is located at one end of the extension tube (2) and the opening is facing upward; When the limiting rod (23) is located at the end of the straight groove (201) away from the inter-arc groove (200), the mixing spoon (21) is located inside the extension tube (2); When the limiting rod (23) is located at one end of the arc groove (200) away from the straight groove (201), the mixing spoon (21) is located at one end of the extension tube (2) with its opening facing downward.

4. The automatic doping device for single crystal silicon according to claim 2, characterized in that, The linkage component (3) includes a piston rod (30) and a pair of strong magnets (31). The piston rod (30) is slidably connected to the inner wall of the extension tube (2). One end of the piston rod (30) is fixedly connected to the mixing spoon (21). The top of the other end of the piston rod (30) is fixedly connected to one of the strong magnets (31). The other strong magnet (31) is fixedly connected to the top of the limiting rod (23). The two strong magnets (31) are magnetically coupled together.

5. The automatic doping device for single-crystal silicon according to claim 1, characterized in that, The rodless cylinder (1) also includes a slider (12), a guide rod (13) and a handle (14). The slider (12) is fixedly connected to the top of the frame (11), the guide rod (13) is fixedly connected to the inner wall of the support base (10), the slider (12) is slidably connected to the outer periphery of the guide rod (13), and the handle (14) is installed on one side of the frame (11). The handle (14) is used to control the opening and closing of the pressure relief valve of the rodless cylinder (1).

6. The automatic doping device for single-crystal silicon according to claim 1, characterized in that, A groove (210) is provided on one side of the mixing spoon (21), and the bottom wall of the groove (210) is a sloping structure.

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