A concentricity detection device for semiconductor gas valve assembly

Abstract

This utility model discloses a concentricity detection device for a semiconductor gas valve assembly, including a detection platform and a clamping plate. The clamping plate is located at one end of the top of the detection platform, and an annular detection ring is located near the center of the other end of the top of the detection platform. Annular teeth are evenly distributed at the center of the outer side of the annular detection ring, and a second detection block is located at the center of the top of the inner side of the annular detection ring. Hydraulic cylinders are located at the center of each of the four outer perimeters of the clamping plate, and the output ends of the hydraulic cylinders extend into the clamping plate to form connecting blocks. A clamping block is located on one side of each connecting block via a moving groove. An insertion block is located at the center of the side of each clamping block near the moving groove, and the insertion blocks are inserted into the connecting blocks via slots. This utility model improves the detection effect by rotating the detection blocks and allows for convenient replacement of the clamping blocks.

Description

Technical Field

[0001] This utility model relates to the field of gas valve concentricity detection technology, specifically a semiconductor gas valve assembly concentricity detection device. Background Technology

[0002] In the semiconductor manufacturing process, the concentricity of gas valve components is crucial. The accuracy of concentricity directly affects the stability and accuracy of gas delivery, which in turn has a significant impact on the quality of semiconductor products. Therefore, when repairing gas valve components, it is necessary to use a concentricity testing device for inspection.

[0003] In existing technologies, conventional concentricity testing devices typically clamp and rotate the valve body during use, which causes wear and vibration, thus affecting the testing results. Furthermore, the clamping blocks cannot be easily assembled or disassembled during clamping, making replacement inconvenient. Utility Model Content

[0004] The purpose of this invention is to provide a concentricity detection device for semiconductor gas valve assemblies, so as to solve the problem mentioned in the background art that it is inconvenient to detect gas valve assemblies and replace clamping blocks.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a concentricity detection device for a semiconductor gas valve assembly, comprising a detection platform and a clamping plate. The clamping plate is located at one end of the top of the detection platform, and an annular detection ring is located near the center of the other end of the top of the detection platform. Annular teeth are evenly distributed at the center of the outer side of the annular detection ring. A tooth groove is provided on the top of the detection platform corresponding to the outer teeth of the annular detection ring. Annular limiting plates are provided on the tops of the detection platforms on both sides of the annular detection ring. A second detection block is located at the center of the top inner side of the annular detection ring. A second moving groove is provided at the center of the four sides of the clamping plate near the annular detection ring. The outer sides of the clamping plate are also provided with... Hydraulic cylinders are installed in the middle of each component. The output ends of the hydraulic cylinders extend into the clamping plate and are equipped with connecting blocks. Each connecting block has a clamping block on one side via a second moving groove. Each clamping block has an insertion block in the middle of the side near the second moving groove. Each insertion block has a slot in the corresponding connecting block. The insertion blocks are inserted into the connecting blocks through the slots. This allows the annular detection ring to drive the detection block and the LVDT displacement sensor to rotate and detect the outer surface of the valve body. At the same time, the detection block detects the corresponding parts of the valve body. This prevents vibration interference caused by the rotation of the valve body during detection, resulting in better detection performance. In use, the clamping blocks and connecting blocks can be easily assembled and disassembled for easy replacement and maintenance.

[0006] As a further technical solution of this utility model, a support plate is provided at the other end of the top of the detection platform, and a detection block 1 is provided at the middle position of the inner side of the support plate. LVDT displacement sensors are embedded at the middle positions of the other ends of both detection block 1 and detection block 2, so that the support plate supports detection block 1, and detection block 1 can drive the LVDT displacement sensor to detect the corresponding part of the valve body.

[0007] As a further technical solution of this utility model, an L-shaped locking post is provided at the middle position of the outer perimeter of the other end of the insert block, and a second locking groove is provided in the connecting block corresponding to the L-shaped locking post. The L-shaped locking post is engaged with the connecting block through the second locking groove, so that the L-shaped locking post is engaged with the corresponding second locking groove, and the insert block can be positioned and inserted.

[0008] As a further technical solution of this utility model, each of the connecting blocks in the clockwise direction of the L-shaped card post is provided with an arc-shaped groove, and each of the other sides of the arc-shaped groove is provided with a magnetic block. The arc-shaped groove is magnetically attracted to the L-shaped card post through the magnetic block, so that the L-shaped card post rotates clockwise and is inserted into the arc-shaped groove and attracted to the magnetic block.

[0009] As a further technical solution of this utility model, each of the connecting blocks at the end of the L-shaped locking post away from the insert block is provided with an arc-shaped locking groove, and each of the L-shaped locking posts is engaged with the locking groove, so that when the L-shaped locking post rotates clockwise, the other end can be engaged in the locking groove.

[0010] As a further technical solution of this utility model, the top of the testing platform is provided with a moving groove corresponding to the position of the hydraulic cylinder at the bottom of the clamping plate, and a fixed plate is provided on the edge of the top of the testing platform near one end of the clamping plate. A telescopic cylinder is provided on the outer side of the fixed plate corresponding to the middle position of the clamping plate, and the output end of the telescopic cylinder extends to the inner side of the fixed plate and connects with the clamping plate, so that the telescopic cylinder drives the clamping plate to move. When the clamping plate moves, it drives the hydraulic cylinder at the bottom to move in the moving groove.

[0011] As a further technical solution of this utility model, the inner side of the annular limiting plate is uniformly provided with sliding balls, and the sliding balls on the inner side of the annular limiting plate are all in contact with the annular detection ring, so that the annular limiting plate limits the annular detection ring and the sliding balls are in contact with its surface, which can make its rotation more stable.

[0012] As a further technical solution of this utility model, the top center of the detection platform is provided with support plates on both sides corresponding to the annular detection ring, and a motor is provided at the middle position of the outer side of one side support plate of the detection platform. The output end of the motor extends to the inner side of the support plate through a bearing and is provided with a gear. The top of the detection platform corresponding to the gear is provided with a gear groove, and the gear meshes with the tooth marks on the outer side of the annular detection ring through the gear groove, so that the support plate supports the motor, which can drive the gear on its shaft to rotate, and the gear can drive the annular detection ring meshed with it to rotate.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] By clamping and moving the valve body to the inside of the annular detection ring, the motor can be started to drive the gear on its shaft to rotate, which in turn drives the annular detection ring meshed with it to rotate. This allows the annular detection ring to drive the second detection block and the LVDT displacement sensor to rotate and detect the outer surface of the valve body. At the same time, the LVDT displacement sensor on the first detection block will also detect the corresponding part of the valve body. This prevents vibration interference caused by the rotation of the valve body during detection, resulting in better detection effect.

[0015] By positioning and inserting the insert block and the connecting block, the clamping block can be rotated clockwise to drive the L-shaped locking post to slide into the arc groove and magnetically attract the magnetic block. This allows the L-shaped locking post to be stably engaged in the slot, thus achieving a secure connection between the clamping block and the connecting block. This allows for easy assembly and disassembly, and facilitates the replacement of the clamping block. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the front sectional view of the present invention;

[0017] Figure 2 This is a side view of the clamping plate and clamping block of this utility model.

[0018] Figure 3 This is a top sectional view of the clamping block and connecting block of this utility model;

[0019] Figure 4 This is a side sectional view of the connecting block and insert block of this utility model;

[0020] Figure 5 This is a side sectional view of the connecting block and arc-shaped groove of this utility model;

[0021] In the diagram: 1. Testing platform; 2. Clamping plate; 3. Telescopic cylinder; 4. Fixing plate; 5. Hydraulic cylinder; 6. Support plate; 7. Testing block one; 8. Annular testing ring; 9. Annular limiting plate; 10. Testing block two; 11. Clamping block; 12. Connecting block; 13. Motor; 14. Support plate; 15. Gear; 16. Moving slot one; 17. Moving slot two; 18. Insertion block; 19. L-shaped locking post; 20. Locking slot one; 21. Locking slot two; 22. Arc-shaped groove; 23. Magnetic block. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-5 This utility model provides an embodiment of a semiconductor gas valve assembly concentricity detection device, comprising a detection platform 1 and a clamping plate 2. The clamping plate 2 is located at one end of the top of the detection platform 1, and an annular detection ring 8 is located near the center of the other end of the top of the detection platform 1. Annular teeth are evenly distributed at the center of the outer side of the annular detection ring 8. A tooth groove is provided on the top of the detection platform 1 corresponding to the outer teeth of the annular detection ring 8. Annular limiting plates 9 are provided on the top of the detection platform 1 on both sides of the annular detection ring 8. A detection block 10 is located at the center of the top of the inner side of the annular detection ring 8. The top of the detection platform 1... The other end is provided with a support plate 6, and a detection block 7 is provided in the middle of the inner side of the support plate 6. LVDT displacement sensors are embedded in the middle of the other ends of both the detection block 7 and the detection block 10. Support plates 14 are provided on both sides of the annular detection ring 8 in the middle of the top of the detection platform 1. A motor 13 is provided in the middle of the outer side of the support plate 14 on one side of the detection platform 1. The output end of the motor 13 extends through a bearing to the inner side of the support plate 14 where a gear 15 is provided. A gear groove is provided on the top of the detection platform 1 corresponding to the gear 15. The gear 15 meshes with the tooth marks on the outer side of the annular detection ring 8 through the gear groove.

[0024] Specifically, such as Figure 1As shown, when the valve body is clamped and moved to the inside of the annular detection ring 8, the motor 13 can be started to drive the gear 15 on its shaft to rotate, which in turn drives the annular detection ring 8 to rotate. This causes the annular detection ring 8 to drive the second detection block 10 to rotate, which in turn drives the LVDT displacement sensor to rotate and detect the outer surface of the valve body. At the same time, the LVDT displacement sensor on the first detection block 7 will also detect the corresponding part of the valve body. This prevents vibration interference caused by the rotation of the valve body during detection, resulting in better detection effect. During the rotation of the annular detection ring 8, the annular limit plate 9 can ensure that the annular detection ring 8 rotates stably and prevents it from shifting or shaking during rotation.

[0025] The clamping plate 2 is provided with a moving groove 17 in the middle of the four sides near the annular detection ring 8, and a hydraulic cylinder 5 is provided in the middle of the four sides of the outer side of the clamping plate 2. The output end of the hydraulic cylinder 5 extends into the clamping plate 2 and is provided with a connecting block 12. A clamping block 11 is provided on one side of the connecting block 12 through the moving groove 17.

[0026] Specifically, such as Figure 1 and Figure 2 As shown, the hydraulic cylinder 5 drives the connecting block 12 to move, which in turn drives the clamping block 11 to move, thus clamping and fixing the valve body around its perimeter.

[0027] Each clamping block 11 has an insertion block 18 at the middle position on the side near the second moving slot 17, and each corresponding connecting block 12 has a slot. The insertion blocks 18 are inserted into the connecting blocks 12 through the slots. Each insertion block 18 has an L-shaped locking post 19 at the middle position on the outer side of the other end of the insertion block 18, and each corresponding connecting block 12 has a second locking groove 21. The L-shaped locking posts 19 are locked into the connecting blocks 12 through the second locking groove 21. Each connecting block 12 with the L-shaped locking posts 19 in the clockwise direction has an arc-shaped groove 22, and each arc-shaped groove 22 has a magnetic block 23 on the other side. The arc-shaped groove 22 is magnetically attracted to the L-shaped locking posts 19 through the magnetic block 23. Each connecting block 12 with the L-shaped locking posts 19 away from the insertion block 18 has an arc-shaped locking groove 20, and each L-shaped locking post 19 is locked into the locking groove 20.

[0028] Specifically, such as Figure 3 , Figure 4 and Figure 5As shown, align the L-shaped locking post 19 on the outside of the insert block 18 with the slot 21, then position and insert the insert block 18 of the clamping block 11 with the connecting block 12, and then rotate the clamping block 11 clockwise to make the L-shaped locking post 19 slide in the arc groove 22. When the L-shaped locking post 19 slides to the side of the arc groove 22 where the magnetic block 23 is located, the magnetic block 23 will tightly attract the L-shaped locking post 19, so that the L-shaped locking post 19 is stably locked in the slot 20, so that the clamping block 11 and the connecting block 12 are firmly connected, so that they can be easily assembled and disassembled, and the clamping block 11 can be easily replaced.

[0029] The top of the testing table 1 is provided with a moving groove 16 corresponding to the position of the bottom hydraulic cylinder 5 of the clamping plate 2, and a fixing plate 4 is provided on the edge of the top of the testing table 1 near the clamping plate 2. A telescopic cylinder 3 is provided on the outer side of the fixing plate 4 corresponding to the middle position of the clamping plate 2, and the output end of the telescopic cylinder 3 extends to the inner side of the fixing plate 4 and is connected to the clamping plate 2.

[0030] Specifically, such as Figure 1 As shown, the telescopic cylinder 3 drives the clamping plate 2 to move on the testing table 1, which in turn drives the valve body to move towards the inside of the annular testing ring 8 until the valve body enters the annular testing ring 8 for concentricity testing. The hydraulic cylinder 5 at the bottom of the clamping plate 2 moves in the moving groove 16, which makes its movement smoother.

[0031] The inner side of the annular limiting plate 9 is uniformly provided with sliding balls, and the sliding balls on the inner side of the annular limiting plate 9 are all in contact with the annular detection ring 8;

[0032] Specifically, such as Figure 2 As shown, the annular limiting plate 9 is made to fit with the annular detection ring 8 through the inner sliding ball. This not only reduces the friction between the two, making the annular detection ring 8 rotate more smoothly, but also buffers the impact of external vibrations on the annular detection ring 8 to a certain extent, thus improving its rotation effect.

[0033] Working principle: In use, align the L-shaped locking post 19 on the outer side of the insert block 18 with the slot 21. Then, position and insert the insert block 18 of the clamping block 11 with the connecting block 12. Rotate the clamping block 11 clockwise to allow the L-shaped locking post 19 to slide within the arc-shaped groove 22. When the L-shaped locking post 19 slides to the side of the arc-shaped groove 22 where the magnetic block 23 is located, the magnetic block 23 will tightly attract the L-shaped locking post 19, thereby stably locking the L-shaped locking post 19 within the slot 20, and achieving a stable connection between the clamping block 11 and the connecting block 12. This allows for convenient assembly and disassembly, facilitating the replacement of the clamping block 11. After the clamping block 11 is replaced, the hydraulic cylinder 5 can move the connecting block 12, which in turn moves the clamping block 11, thus clamping and fixing the valve body around its perimeter. Once fixed, the telescopic cylinder 3 can be activated to move the clamping plate 2 on the testing platform 1, causing the clamping plate 2 to move the valve body towards the inner side of the annular testing ring 8 until the valve body enters the annular testing ring 8 for concentricity testing. The hydraulic cylinder 5 at the bottom of the clamping plate 2 then moves the valve body towards the inner side of the annular testing ring 8. The cylinder 5 moves within the moving groove 16, allowing for smoother movement. When the valve body is clamped and moved to the inner side of the annular detection ring 8, the motor 13 can be started to drive the gear 15 on its shaft to rotate. The gear 15 then drives the annular detection ring 8, which in turn drives the detection block 10 to rotate. The detection block 10 then drives the LVDT displacement sensor to rotate and detect the outer surface of the valve body. Simultaneously, the LVDT displacement sensor on the detection block 7 also detects the corresponding parts of the valve body. This prevents vibration interference during valve body rotation detection, resulting in better detection performance. During the rotation of the annular detection ring 8, the annular limiting plate 9 ensures stable rotation of the annular detection ring 8, preventing it from shifting or wobbling during rotation. It also ensures that the annular detection ring 8 is in contact with the sliding ball on its inner side. This not only reduces friction between the two, making the rotation of the annular detection ring 8 smoother, but also buffers the impact of external vibrations on the annular detection ring 8 to a certain extent, resulting in better rotation performance.

[0034] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A concentricity detection device for a semiconductor gas valve assembly, comprising a detection stage (1) and a clamping plate (2), characterized in that: One end of the top of the testing platform (1) is provided with a clamping plate (2), and the other end of the top of the testing platform (1) is provided with an annular testing ring (8) near the middle. The outer middle of the annular testing ring (8) is provided with annular tooth marks. The top of the testing platform (1) corresponding to the tooth marks on the outer side of the annular testing ring (8) is provided with a tooth mark groove. The tops of the testing platforms (1) on both sides of the annular testing ring (8) are provided with annular limiting plates (9). The middle of the top of the inner side of the annular testing ring (8) is provided with a second testing block (10). The clamping plate (2) is located around the annular testing ring (8) on one side. The middle position of each is provided with a moving groove 2 (17), and the middle position of each of the four sides of the clamping plate (2) is provided with a hydraulic cylinder (5). The output end of each hydraulic cylinder (5) extends into the clamping plate (2) and is provided with a connecting block (12). Each side of the connecting block (12) is provided with a clamping block (11) through the moving groove 2 (17). Each clamping block (11) is provided with an insert (18) in the middle position of the side of the moving groove 2 (17). Each insert (18) is provided with a slot in the connecting block (12) corresponding to the insert (18). Each insert (18) is inserted into the connecting block (12) through the slot.

2. The concentricity detection device for a semiconductor gas valve assembly according to claim 1, characterized in that: The other end of the top of the detection platform (1) is provided with a support plate (6), and a detection block (7) is provided in the middle of the inner side of the support plate (6). LVDT displacement sensors are embedded in the middle of the other end of the detection block (7) and the detection block (10).

3. The concentricity detection device for a semiconductor gas valve assembly according to claim 1, characterized in that: The other end of the insert (18) is provided with an L-shaped locking post (19) in the middle of the outer perimeter, and the connecting block (12) corresponding to the L-shaped locking post (19) is provided with a second locking groove (21), and the L-shaped locking post (19) is engaged with the connecting block (12) through the second locking groove (21).

4. The concentricity detection device for a semiconductor gas valve assembly according to claim 3, characterized in that: The L-shaped locking post (19) is provided with an arc-shaped groove (22) in the clockwise direction of the connecting block (12), and a magnetic block (23) is provided on the other side of the arc-shaped groove (22), and the arc-shaped groove (22) is magnetically attracted to the L-shaped locking post (19) through the magnetic block (23).

5. The concentricity detection device for a semiconductor gas valve assembly according to claim 3, characterized in that: Each of the L-shaped locking posts (19) has an arc-shaped locking groove (20) in the connecting block (12) at the end away from the insert block (18), and each L-shaped locking post (19) is engaged with the locking groove (20).

6. The concentricity detection device for a semiconductor gas valve assembly according to claim 1, characterized in that: The top of the testing platform (1) is provided with a moving groove (16) corresponding to the position of the bottom hydraulic cylinder (5) of the clamping plate (2), and a fixing plate (4) is provided on the edge of the top of the testing platform (1) near the clamping plate (2). A telescopic cylinder (3) is provided on the outer side of the fixing plate (4) corresponding to the middle position of the clamping plate (2), and the output end of the telescopic cylinder (3) extends to the inner side of the fixing plate (4) and is connected to the clamping plate (2).

7. The concentricity detection device for a semiconductor gas valve assembly according to claim 1, characterized in that: The inner side of the annular limiting plate (9) is uniformly provided with sliding balls, and the sliding balls on the inner side of the annular limiting plate (9) are all in contact with the annular detection ring (8).

8. The concentricity detection device for a semiconductor gas valve assembly according to claim 1, characterized in that: The top center of the testing platform (1) is provided with support plates (14) on both sides corresponding to the annular testing ring (8). A motor (13) is provided at the middle position of the outer side of the support plate (14) on one side of the testing platform (1). The output end of the motor (13) extends to the inner side of the support plate (14) through a bearing and is provided with a gear (15). The top of the testing platform (1) corresponding to the gear (15) is provided with a gear groove. The gear (15) meshes with the tooth marks on the outer side of the annular testing ring (8) through the gear groove.

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