Temperature measuring device and reaction furnace

Abstract

This application provides a temperature measuring device and a reactor, relating to the field of semiconductor or photovoltaic material processing, and solves the technical problem of poor anti-interference capability of S-type thermocouples at high temperatures. The temperature measuring device includes: a first thermocouple wire; a second thermocouple wire, with a first end electrically connected to the first end of the first thermocouple wire; a temperature measuring component, electrically connected to the second ends of the first and second thermocouple wires; a first insulating layer sleeved on the outside of the first thermocouple wire; a second insulating layer sleeved on the outside of the second thermocouple wire; and a conductor disposed adjacent to the first and second insulating layers, with its first end electrically connected to the temperature measuring point. Through this structure, the conductor can be connected in parallel with multiple parts of the first and second thermocouple wires. The total resistance of the conductor connected in parallel with each part is much smaller than the internal resistance of each part, enabling the temperature measuring component to determine the temperature based on the electromotive force at the temperature measuring point, thus improving the anti-interference capability of the temperature measuring device.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a temperature measuring device and a reaction furnace. Background Technology

[0002] Thermocouples are commonly used temperature sensors in the photovoltaic manufacturing industry, enabling rapid and accurate measurement of temperature changes during production. Precise temperature control is crucial in key stages such as silicon wafer pulling, slicing, cell manufacturing, and module packaging to ensure product quality. Thermocouples provide real-time temperature data to production personnel by measuring the temperature at different locations, thereby ensuring the stability of the production process and the consistency of the products. In the manufacture of silicon wafers using diffusion furnaces, S-type thermocouples are widely used in high-performance thermal processing equipment (such as boron diffusion equipment, phosphorus diffusion equipment, oxidation and annealing equipment) required for photovoltaic cell manufacturing due to their ability to operate continuously at temperatures ranging from 800℃ to 1300℃, high measurement accuracy, and long lifespan.

[0003] The disadvantages of S-type thermocouples include lower thermoelectric potential and thermoelectric potential rate, lower sensitivity, decreased mechanical strength at high temperatures, high sensitivity to contamination, high cost of precious metal materials, and high manufacturing costs. In industrial applications, to meet higher production demands, the size of high-temperature heating furnaces is gradually increasing, correspondingly increasing the length of the thermocouple wire inside the furnace tube to 3-4 meters. The increased length of the precious metal thermocouple wire leads to increased costs. To reduce costs, thermocouple manufacturers often make the expensive platinum-rhodium wire (i.e., thermocouple wire) thinner, with a minimum wire diameter of about 0.3 mm.

[0004] The increased length and thickness of the high-temperature thermal field leads to increased thermal radiation. As the thermocouple material becomes longer and thinner, according to Ohm's law, the longer and thinner the thermocouple wire, the greater its resistance. This ultimately results in lower thermocouple sensitivity and a further decrease in its anti-interference capability. When the thermal process reaches temperatures above 960 degrees Celsius, the thermocouple readings exhibit free fluctuations, causing the entire temperature control system to malfunction.

[0005] To improve the interference immunity of S-type thermocouples at high temperatures, manufacturers often add a double-insulated shielding layer to the thermocouple wire (due to the high cost of precious metal materials, thickening the thermocouple wire diameter is usually not used). By selecting an appropriate protective metal or ceramic sheath, the impact of high-temperature thermal radiation is reduced. However, the current process of adding a double-insulated shielding layer is complex and immature, resulting in low thermocouple production yield, increased manufacturing costs, and hindering large-scale production. Utility Model Content

[0006] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a temperature measuring device and a reaction furnace.

[0007] In a first aspect, one embodiment of this application provides a temperature measuring device, comprising: a first thermocouple wire extending along a first direction, the first thermocouple wire having a first end and a second end; a second thermocouple wire extending along the first direction, the second thermocouple wire having a first end and a second end, the first end of the second thermocouple wire being electrically connected to the first end of the first thermocouple wire, such that the connection between the first end of the second thermocouple wire and the first end of the first thermocouple wire forms a temperature measuring point; a temperature measuring component electrically connected to the second end of the first thermocouple wire and the second thermocouple wire, configured to measure the thermoelectric potential between the first thermocouple wire and the second thermocouple wire, and determine the temperature around the temperature measuring point based on the thermoelectric potential; a first insulating layer sleeved on the outside of the first thermocouple wire; a second insulating layer sleeved on the outside of the second thermocouple wire; and a conductor extending along the first direction, disposed adjacent to the first insulating layer and the second insulating layer, the conductor having a first end and a second end, the first end of the conductor being electrically connected to the temperature measuring point.

[0008] In some embodiments, the length of the conductor is greater than the length of the first thermocouple wire. Alternatively, the length of the conductor is greater than the length of the second thermocouple wire.

[0009] In some embodiments, the length of the conductor is the same as the length of the first thermocouple wire, or the length of the conductor is the same as the length of the second thermocouple wire.

[0010] In some embodiments, the conductor is made of a metallic material.

[0011] In some embodiments, the conductor is made of stainless steel, nickel-chromium, tantalum, niobium, or titanium.

[0012] In some embodiments, the diameter of the conductor's cross-section is 2 to 3 times the diameter of the first thermocouple wire's cross-section, and / or the diameter of the conductor's cross-section is 2 to 3 times the diameter of the second thermocouple wire's cross-section.

[0013] In some embodiments, it also includes:

[0014] The protective tube, sleeved outside the first and second insulation layers and adjacent to the conductor, is configured to insulate against heat.

[0015] In some embodiments, the protective tube is made of ceramic.

[0016] In some embodiments, the temperature measuring device further includes a quartz tube, which is fitted over the protective tube and the conductor and configured to insulate against heat and prevent the escape of oxides generated by the conductor.

[0017] Secondly, one embodiment of this application provides a reaction furnace, including: a furnace tube having a reaction chamber configured to contain a product; and a temperature measuring device of any of the first aspects, at least partially extending into the reaction chamber and configured to detect the temperature of the reaction chamber.

[0018] The temperature measuring device and reactor proposed in this application embodiment have a first end of the conductor electrically connected to the temperature measuring point. The other parts of the conductor, excluding the first end, can conduct through the first and second insulating layers to the first and second thermocouple wires, forming multiple second virtual connection points. This allows the conductor to be connected in parallel with multiple parts of the first and second thermocouple wires. For each part of the first and second thermocouple wires, the total resistance of the conductor connected in parallel with each part is much smaller than the internal resistance of each part. Furthermore, the difference between this total resistance and the leakage resistance of the first virtual connection points (i.e., multiple first virtual connection points formed by the reduced insulation resistance of the first and second insulating layers at high temperatures, allowing the first and second thermocouple wires to conduct through the first and second insulating layers) is small. This allows the temperature measuring component to determine the temperature based on the electromotive force at the actual temperature measuring point, improving the anti-interference capability of the temperature measuring device. Attached Figure Description

[0019] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0020] Figure 1 The diagram shown is a schematic of a traditional thermocouple.

[0021] Figure 2 The diagram shows the structural structure of a traditional thermocouple resistor.

[0022] Figure 3 The diagram shown is a structural schematic of a temperature measuring device provided in an exemplary embodiment of this application.

[0023] Figure 4 The diagram shown is a schematic diagram of the structure of a reactor provided in an exemplary embodiment of this application.

[0024] Figure label:

[0025] 10. Traditional thermocouple; 11. Thermocouple wire; 12. Temperature measuring point; 13. Virtual connection; 100. Temperature measuring device; 110. First thermocouple wire; 120. Second thermocouple wire; 130. Temperature measuring component; 140. Conductor; 150. Temperature measuring point; 160. First virtual connection; 170. Second virtual connection; 200. Reactor; 210. Furnace tube. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0027] Application Overview

[0028] Figure 1 The diagram shows the structure of a traditional thermocouple. Figure 1 As shown, a conventional thermocouple 10 includes two thermocouple wires 11, and the connection point of the two thermocouple wires 11 is the temperature measuring point 12 of the conventional thermocouple 10. The two thermocouple wires 11 are covered with an insulating layer. Analyzing the structural principle of a thermocouple, high temperatures can damage the insulating layer of the thermocouple wires 11. Specifically, the insulation resistance of the insulating layer decreases exponentially with increasing temperature, making it easy for the two thermocouple wires 11 to conduct to each other at locations other than the temperature measuring point 12, thus creating multiple virtual connection points 13. Figure 1 Only one virtual connection is shown in the image (13).

[0029] Figure 2 The diagram shows the structural structure of a traditional thermocouple resistor.

[0030] Typically, thermocouple wire 11 is made of a platinum-rhodium precious metal wire, approximately 4 meters long, with a cross-sectional diameter (also called wire diameter) of approximately 0.3 millimeters. Figure 2 As shown, since the diameter of thermocouple wire 11 is very small, the internal resistance of thermocouple wire 11 (if thermocouple wire 11 is divided into multiple parts, the internal resistance of each part is R) is... S The leakage resistance (indicated by R) at the virtual connection 13 is relatively large. Due to the increased length and thickness of the thermal field, thermal radiation is further enhanced, resulting in a higher leakage resistance. L (This indicates) will become smaller. Thus, R... S With R L The difference will increase over time, leading to R under extreme conditions. L Much smaller than R SThis means that the conventional thermocouple 10 will obtain the temperature based on the electromotive force at the virtual connection 13, rather than the electromotive force at the actual temperature measurement point 12, thus making the conventional thermocouple 10 unable to accurately measure the temperature.

[0031] In view of this, this application proposes a temperature measuring device and a reactor. The first end of a conductor is electrically connected to the temperature measuring point. The other parts of the conductor, excluding the first end, can conduct through a first insulating layer and a second insulating layer to a first thermocouple wire and a second thermocouple wire, forming multiple second virtual connection points. This allows the conductor to be connected in parallel with multiple parts of the first and second thermocouple wires. For each part of the first and second thermocouple wires, the total resistance of the conductor connected in parallel with each part is much smaller than the internal resistance of each part. Furthermore, the difference between this total resistance and the leakage resistance of the first virtual connection points (i.e., multiple first virtual connection points formed by the reduced insulation resistance of the first and second insulating layers at high temperatures, allowing the first and second thermocouple wires to conduct through the first and second insulating layers) is small. This allows the temperature measuring component to determine the temperature based on the electromotive force at the actual temperature measuring point, improving the anti-interference capability of the temperature measuring device.

[0032] Exemplary device

[0033] Figure 3 The diagram shown is a structural schematic of a temperature measuring device provided in an exemplary embodiment of this application. Figure 3 As shown, this application embodiment provides a temperature measuring device 100, which includes: a first thermocouple wire 110, a second thermocouple wire 120, a temperature measuring component 130, a first insulating layer, a second insulating layer, and a conductor 140. The first thermocouple wire 110 is along a first direction (e.g., Figure 3 Extending in the X direction (as shown), a first thermocouple wire 110 has a first end and a second end. A second thermocouple wire 120 extends in the first direction, also having a first end and a second end. The first end of the second thermocouple wire 120 is electrically connected to the first end of the first thermocouple wire 110, such that the connection between the first end of the second thermocouple wire 120 and the first end of the first thermocouple wire 110 forms a temperature measuring point 150. A temperature measuring assembly 130 is electrically connected to the second end of the first thermocouple wire 110 and the second end of the second thermocouple wire 120, and is configured to measure the thermoelectric potential between the first thermocouple wire 110 and the second thermocouple wire 120, and determine the temperature around the temperature measuring point 150 based on the thermoelectric potential. A first insulating layer is sleeved on the first thermocouple wire 110. A second insulating layer is sleeved on the second thermocouple wire 120. The conductor 140 extends along a first direction and is disposed adjacent to the first insulating layer and the second insulating layer. The conductor 140 has a first end and a second end, and the first end of the conductor 140 is electrically connected to the temperature measuring point 150.

[0034] For example, the material of the first thermocouple wire 110 or the second thermocouple wire 120 includes platinum and rhodium.

[0035] For example, the temperature measurement component 130 includes a digital voltmeter (DVM).

[0036] For example, the second end of conductor 140 may be left floating or grounded.

[0037] For example, conductor 140 is a wire.

[0038] The first and second insulating layers have high insulation resistance at room temperature, thus preventing the parts of the first thermocouple wire 110 and the second thermocouple wire 120, except for the first end, from contacting and conducting with each other. However, at high temperatures, the insulation resistance of the first and second insulating layers decreases, allowing the first thermocouple wire 110 and the second thermocouple wire 120 to conduct through the first and second insulating layers, forming multiple first virtual connection points 160. The first end of the conductor 140 is electrically connected to the temperature measuring point 150. The parts of the conductor 140, except for the first end, can conduct with the first thermocouple wire 110 and the second thermocouple wire 120 through the first and second insulating layers, forming multiple second virtual connection points 170, allowing the conductor 140 to be connected in parallel with multiple parts of the first thermocouple wire 110 and the second thermocouple wire 120. For each part of the first thermocouple wire 110 and the second thermocouple wire 120, the total resistance of the conductor 140 connected in parallel with each part is much smaller than the internal resistance of each part (denoted by R). S (represented), and the total resistance is related to the leakage resistance (in R) at the first virtual connection 160. L The difference between the values ​​is small, which allows the temperature measuring component 130 to determine the temperature based on the electromotive force at the actual temperature measuring point 150, thereby improving the anti-interference capability of the temperature measuring device 100.

[0039] In some embodiments, the length of conductor 140 is greater than the length of the first thermocouple wire 110. Alternatively, the length of conductor 140 may be greater than the length of the second thermocouple wire 120.

[0040] For example, the first thermocouple wire 110 is 4 meters long, the second thermocouple wire 120 is 4 meters long, and the conductor 140 is longer than 2 meters.

[0041] In the above embodiment, the length of conductor 140 is greater than the length of the first thermocouple wire 110. This allows conductor 140 to be at least... The above parts are connected in parallel by making the length of conductor 140 greater than the length of the second thermocouple wire 120. This allows conductor 140 to be at least... The above parts are connected in parallel, which can greatly improve the anti-interference capability of the temperature measuring device 100.

[0042] In some embodiments, the length of conductor 140 is the same as the length of the first thermocouple wire 110, or the length of conductor 140 is the same as the length of the second thermocouple wire 120.

[0043] For example, the first thermocouple wire 110 is 4 meters long, the second thermocouple wire 120 is 4 meters long, and the conductor 140 is 4 meters long.

[0044] In the above embodiments, by making the length of conductor 140 the same as the length of the first thermocouple wire 110, conductor 140 can be connected in parallel with each part of the first thermocouple wire 110. By making the length of conductor 140 the same as the length of the second thermocouple wire 120, conductor 140 can be connected in parallel with each part of the second thermocouple wire 120, thereby greatly improving the anti-interference capability of the temperature measuring device 100.

[0045] In some embodiments, the conductor 140 is made of a metallic material.

[0046] Because metal materials have the advantages of high temperature resistance and strong conductivity, in the above embodiment, the conductor 140 made of metal material can work in a high-temperature process environment and can be connected to the first thermocouple wire 110 and the second thermocouple wire 120 through the first insulation layer and the second insulation layer.

[0047] In some embodiments, the conductor 140 is made of stainless steel, nickel-chromium, tantalum, niobium, or titanium.

[0048] Since conductor 140 is bound together with the first thermocouple wire 110 and the second thermocouple wire 120, and conductor 140 is made of different materials than the first thermocouple wire 110 and the second thermocouple wire 120, and different materials have different coefficients of thermal expansion, if the degree of thermal expansion deformation of conductor 140 differs significantly from that of the first thermocouple wire 110 and the second thermocouple wire 120, the stress generated by the difference in deformation can easily tear the first thermocouple wire 110 and the second thermocouple wire 120 apart. Therefore, selecting a conductor 140 made of a softer material can reduce the risk of damage to the first thermocouple wire 110 and the second thermocouple wire 120. Among the aforementioned materials, stainless steel wire is relatively hard, nickel-chromium wire is relatively soft, tantalum wire is soft, niobium wire is very soft, and titanium wire is very soft. Tests have shown that stainless steel wire and nickel-chromium wire can maintain their metallic elasticity under oxidizing conditions at 1050 degrees Celsius and are not easily broken, but stainless steel wire is harder, while nickel-chromium wire is more flexible and suitable for bending.

[0049] Furthermore, conductor 140 is prone to oxidation at high temperatures, producing oxide impurities. If the quartz tube (details below) breaks, these oxide impurities risk entering the reaction chamber inside the furnace tube, thus contaminating the product. Therefore, selecting conductor 140, made of a material that is not easily oxidized, can reduce the risk of product contamination. For example, to test whether stainless steel wire, nichrome wire, tantalum wire, niobium wire, and titanium wire are easily oxidized in high-temperature processes, stainless steel wire, nichrome wire, tantalum wire, niobium wire, and titanium wire with a cross-sectional diameter (i.e., wire diameter) of 0.5 mm and a length of approximately 80 mm were sequentially placed in a quartz tube with a purity of 4N. Observation was performed using a metallographic microscope. Under high-temperature oxidation conditions, oxides formed by chromium, manganese, and iron elements inside the stainless steel wire could adhere to the inner wall of the quartz tube, forming a white haze-like contamination and causing crystallization in the quartz tube. Long-term use may cause the quartz tube to break. Tantalum wire, niobium wire, and titanium wire are also unsuitable for use in high-temperature oxidation environments. In contrast, the nichrome wire showed slight oxide layer detachment during oxidation, without significantly affecting the surface of the quartz tube.

[0050] In summary, the preferred material for conductor 140 is nickel-chromium.

[0051] In some embodiments, the diameter of the cross-section of conductor 140 is 2 to 3 times the diameter of the cross-section of the first thermocouple wire 110, and / or the diameter of the cross-section of conductor 140 is 2 to 3 times the diameter of the cross-section of the second thermocouple wire 120.

[0052] For example, the diameter of the cross-section of the first thermocouple wire 110 is 0.3 mm, the diameter of the cross-section of the second thermocouple wire 120 is 0.3 mm, and the diameter of the cross-section of the conductor 140 is 0.6 mm.

[0053] In the above embodiments, by making the diameter of the cross-section of the conductor 140 2 to 3 times the diameter of the cross-section of the first thermocouple wire 110 and / or the second thermocouple wire 120, it can be ensured that the conductor 140 has a low resistance value, so that the total resistance value of the conductor 140 connected in parallel with each part is much smaller than the internal resistance of each part.

[0054] In some embodiments, the temperature measuring device 100 further includes a protective tube. The protective tube is sleeved outside the first and second insulating layers and disposed adjacent to the conductor 140, and is configured to insulate against heat.

[0055] In the above embodiments, by providing a protective tube, the first thermocouple wire 110 and the second thermocouple wire 120 can be prevented from being damaged by high temperature.

[0056] In some embodiments, the protective tube is made of ceramic. The resistance of ceramic also decreases sharply at high temperatures, allowing the portion of conductor 140 other than the first end to conduct through the protective tube, the first insulating layer, and the second insulating layer to the first thermocouple wire 110 and the second thermocouple wire 120.

[0057] In some embodiments, the temperature measuring device 100 further includes a quartz tube. The quartz tube is fitted over the protective tube and the conductor 140 and is configured to insulate against heat and prevent the escape of oxides generated by the conductor 140.

[0058] In the above embodiments, by setting a quartz tube, the first thermocouple wire 110 and the second thermocouple wire 120 can be prevented from being damaged by high temperature, and the oxides generated by the conductor 140 can be prevented from entering the reaction chamber of the furnace tube and contaminating the product.

[0059] Figure 4 The diagram shown is a schematic diagram of the structure of a reactor provided in an exemplary embodiment of this application.

[0060] Based on the same concept, such as Figure 4 As shown in the illustration, this application also provides a reaction furnace 200, which includes a furnace tube 210 and a temperature measuring device 100 as described in the above embodiments. The furnace tube 210 has a reaction chamber configured to contain a product. The temperature measuring device 100 extends at least partially into the reaction chamber and is configured to detect the temperature of the reaction chamber.

[0061] For example, the product is a solar cell, silicon wafer, crystal wafer, or glass substrate.

[0062] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0063] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0064] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0065] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0066] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A temperature measuring device, characterized in that, include: A first thermocouple wire extends along a first direction, and the first thermocouple wire has a first end and a second end; A second thermocouple wire extends along the first direction. The second thermocouple wire has a first end and a second end. The first end of the second thermocouple wire is electrically connected to the first end of the first thermocouple wire, so that the connection between the first end of the second thermocouple wire and the first end of the first thermocouple wire forms a temperature measuring point. A temperature measuring component, electrically connected to the second end of the first thermocouple wire and the second thermocouple wire, is configured to measure the thermoelectric potential between the first thermocouple wire and the second thermocouple wire, and determine the temperature around the temperature measuring point based on the thermoelectric potential; The first insulating layer is sleeved outside the first thermocouple wire; The second insulating layer is sleeved outside the second thermocouple wire; A conductor extending along the first direction is disposed adjacent to the first insulating layer and the second insulating layer. The conductor has a first end and a second end, and the first end of the conductor is electrically connected to the temperature measuring point.

2. The temperature measuring device according to claim 1, characterized in that, The length of the conductor is greater than the length of the first thermocouple wire. Alternatively, the length of the conductor is greater than the length of the second thermocouple wire.

3. The temperature measuring device according to claim 2, characterized in that, The length of the conductor is the same as the length of the first thermocouple wire, or the length of the conductor is the same as the length of the second thermocouple wire.

4. The temperature measuring device according to any one of claims 1 to 3, characterized in that, The conductor is made of a metallic material.

5. The temperature measuring device according to claim 4, characterized in that, The conductor is made of stainless steel, nickel-chromium, tantalum, niobium, or titanium.

6. The temperature measuring device according to any one of claims 1 to 3, characterized in that, The diameter of the conductor's cross-section is 2 to 3 times the diameter of the first thermocouple wire's cross-section, and / or the diameter of the conductor's cross-section is 2 to 3 times the diameter of the second thermocouple wire's cross-section.

7. The temperature measuring device according to any one of claims 1 to 3, characterized in that, Also includes: A protective tube, sleeved over the first and second insulating layers and disposed adjacent to the conductor, is configured to insulate against heat.

8. The temperature measuring device according to claim 7, characterized in that, The protective tube is made of ceramic.

9. The temperature measuring device according to claim 7, characterized in that, Also includes: A quartz tube, fitted over the protective tube and the conductor, is configured to insulate against heat and prevent the escape of oxides generated by the conductor.

10. A reactor, characterized in that, include: A furnace tube having a reaction chamber configured to contain products; The temperature measuring device according to any one of claims 1 to 9 extends at least partially into the reaction chamber and is configured to detect the temperature of the reaction chamber.

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