A glass substrate testing device

Abstract

This utility model relates to the field of testing equipment technology, and in particular to a glass substrate testing device, including a frame, a support platform mounted on the frame and provided with a positioning surface for fixing the surface of the material to be tested, a testing camera assembly mounted above the support platform, the testing camera assembly being movable relative to the support platform, and the lens of the testing camera assembly reciprocating on the positioning surface, a positioning and locking mechanism being mounted at the edge of the positioning surface and assembled to position at least one side of the surface of the material to be tested, and an elastic pressing positioning unit connected to the testing camera assembly, capable of pressing the upper surface of the material to be tested so that the upper surface of the material to be tested is perpendicular to the lens direction of the testing camera assembly. This device can improve testing accuracy and efficiency, and can accurately acquire internal morphological information of micropores, as well as measure key parameters of micropores.

Description

Technical Field

[0001] This utility model relates to the field of testing equipment technology, and in particular to a glass substrate testing device. Background Technology

[0002] In the semiconductor and microelectronics packaging field, through-glass via (TGV) technology has attracted much attention due to its unique advantages. This technology uses high-quality borosilicate glass or quartz glass as substrates, and through a series of precision processes such as seed layer sputtering, electroplating, and chemical mechanical planarization, vertically penetrating micro-vias are fabricated on the glass substrate and filled with conductive material, achieving efficient and stable electrical 3D interconnects. It possesses excellent high-frequency electrical characteristics and outstanding mechanical stability, while also having relatively low manufacturing costs, making it a promising candidate for applications in MEMS sensors, chip-level packaging, and other fields.

[0003] However, in practical applications of TGV technology, glass substrates are highly susceptible to defects such as blocked holes, cracks, and foreign matter blockages during critical processes like laser drilling and etching. These defects severely impact the final product yield and have become one of the key factors restricting the large-scale industrialization of TGV technology. Therefore, high-precision testing of TGV substrates is particularly important.

[0004] Currently, commonly used detection methods in the industry have significant limitations. Traditional manual inspection using two-dimensional equipment is not only inefficient but also lacks accuracy. This method can only observe the surface features of micropores and cannot obtain information about the internal morphology of micropores, let alone measure key parameters such as perpendicularity and taper. Although electron microscopes can accurately present the three-dimensional morphology of TGV micropores through layer-by-layer scanning, the equipment is expensive, the detection efficiency is extremely low, and it cannot comprehensively detect all through-holes, resulting in a high risk of missed detections. This makes it difficult to meet the detection needs of large-scale industrial production. Utility Model Content

[0005] The purpose of this invention is to provide a glass substrate testing device that addresses the structural deficiencies in the aforementioned technical problems, thereby solving the issues of low testing accuracy and efficiency. This device can accurately acquire internal morphological information of micropores and measure key parameters of the micropores.

[0006] The technical solution adopted in this utility model is as follows:

[0007] A glass substrate testing device, comprising:

[0008] frame;

[0009] A support platform is mounted on the frame and has a positioning surface for fixing the plate of material to be tested.

[0010] The detection camera assembly is positioned above the support platform;

[0011] The lens of the detection camera assembly points to the positioning surface of the support platform, and the detection camera assembly and the support platform are movable relative to each other. The lens of the detection camera assembly moves back and forth on the positioning surface to perform scanning and detection of micropores on the surface of the material to be detected.

[0012] It also includes a positioning and locking mechanism, which is disposed at the edge of the positioning surface and is assembled to perform positioning on at least one side of the material plate to be tested;

[0013] An elastic clamping and positioning unit is connected to the detection camera assembly and is assembled to clamp the upper surface of the material to be detected so that the upper surface of the material to be detected remains perpendicular to the lens direction of the detection camera assembly.

[0014] This utility model also has the following technical features:

[0015] In one embodiment of this utility model, the positioning and locking mechanism is used to position both sides of the material plate to be tested.

[0016] In one embodiment of this utility model, a drive mechanism is provided on the frame, and the drive mechanism drives the support platform to reciprocate within the horizontal plane below the detection camera assembly.

[0017] In one embodiment of the present invention, the detection camera assembly is connected to a lifting mechanism, and the lifting mechanism drives the detection camera assembly to move up and down and move closer to or further away from the positioning surface.

[0018] In one embodiment of this utility model, a negative pressure adsorption mechanism is provided on the support platform. The negative pressure adsorption mechanism is provided with adsorption ports and multiple sets are arranged along the edge length direction of the support platform. The adsorption ports are located on the edge side of the support platform where the positioning and locking mechanism is located.

[0019] In one embodiment of this utility model, a glass support platform is provided on the support platform, and the material to be tested is placed on the glass support platform.

[0020] In one embodiment of the present invention, a cantilever is provided on the frame, and a slider is vertically slidably provided on the cantilever end, and the detection camera assembly is mounted on the slider;

[0021] The elastic clamping and positioning unit includes a positioning slider disposed on the slider, the positioning slider being vertically slidably disposed on the slider, and a pressure roller disposed on the positioning slider, the pressure roller being abutting against or separating from the surface of the material to be tested;

[0022] The slider is equipped with a motor and a magnetic spring. The motor drives the slider vertically and is connected to the positioning slider. The magnetic spring is vertical and its lower end is connected to the positioning slider.

[0023] In one embodiment of this utility model, the positioning and locking mechanism includes claws disposed on the edge of the support platform. Multiple sets of claws are arranged along the length direction of the edge of the support platform. All sets of claws are mounted on a drive rod. The drive rod is rotatably disposed at the edge of the support platform. The drive rod is connected to a drive motor. The drive motor drives the drive rod to rotate and causes the multiple sets of claws to rotate synchronously.

[0024] In one embodiment of this utility model, the end of the claw away from the locking end is rotatably mounted on the drive rod, and a spring is also provided on the claw, with the two ends of the spring abutting against the drive rod and the claw respectively.

[0025] In one embodiment of the present invention, a re-inspection camera assembly is further provided on the slider, which is located next to the detection camera assembly. The re-inspection camera assembly is used to perform a re-inspection of the micropores on the surface of the material to be inspected.

[0026] A front light source is provided next to the detection camera assembly, and a back light source is provided below the support platform. The front light source is vertically downward and the back light source is vertically upward.

[0027] Compared with existing technologies, the beneficial effects of this utility model are reflected in the following: the lens of the detection camera assembly can move back and forth on the positioning surface, which can fully cover the surface of the material to be detected, realizing efficient scanning and detection of micropores. Compared with traditional manual detection using two-dimensional equipment, the detection efficiency is greatly improved. At the same time, this design can acquire multi-directional information of micropores, breaking through the limitation of traditional methods that can only observe surface features. The elastic clamping positioning unit is connected to the detection camera assembly. By applying pressure to the surface of the material to be detected, it ensures that the surface of the material is always perpendicular to the lens direction of the detection camera assembly, ensuring the flatness of the material to be detected, as well as the clarity and accuracy of the captured image. This is beneficial for subsequent accurate measurement of key parameters such as the perpendicularity and taper of micropores, overcoming the defects of low detection efficiency and inability to detect comprehensively by electron microscopes, effectively reducing the risk of missed detection, significantly improving the comprehensiveness and yield of product detection, and meeting the needs of high-precision and high-efficiency detection of glass substrates in large-scale industrial production. Attached Figure Description

[0028] Figure 1 and Figure 2 These are schematic diagrams of the overall structure of the glass substrate testing equipment in one embodiment of the present invention from two different perspectives.

[0029] Figure 3 and Figure 4 These are schematic diagrams of the detection camera assembly and the elastic clamping positioning unit from two different perspectives in one embodiment of this utility model;

[0030] Figure 5 This is a schematic diagram of the support platform in one embodiment of the present invention;

[0031] Figure 6 This is a plan view of the support platform in one embodiment of the present invention;

[0032] Figure 7 These are schematic diagrams of the elastic clamping and positioning unit from two different perspectives in one embodiment of the present invention.

[0033] Figure 8 This is a plan view of the cooperation between the detection camera assembly and the elastic clamping and positioning unit with the glass support stage and the backlight in one embodiment of the present invention.

[0034] Figure 9 This is a partial cross-sectional schematic diagram of the glass substrate in one embodiment of the present invention;

[0035] Figure 10 This is a schematic diagram of the detection path in one embodiment of the present invention.

[0036] Explanation of icon numbers:

[0037] 10. Frame; 11. Cantilever; 12. Slider; 121. Positioning slider; 122. Pressure roller; 123. Motor; 124. Magnetic spring;

[0038] 20. Support platform; 21. Adsorption port; 22. Claw; 221. Spring; 23. Drive rod; 231. Drive motor; 24. Glass support platform; 25. Backlight;

[0039] 30. Inspect camera components; 31. Re-inspect camera components; 32. Front light source;

[0040] a. Orifice; b. Waist hole. Detailed Implementation

[0041] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0042] The illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show the components related to this utility model and are not drawn according to the actual number, shape and size of the components. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0043] It should be noted that traditional manual inspection using two-dimensional equipment is not only inefficient but also lacks accuracy. This method can only observe the surface features of micropores and cannot obtain information about the internal morphology of the micropores, nor can it measure key parameters such as perpendicularity and taper. Although electron microscopes can accurately present the three-dimensional morphology of TGV micropores through layer-by-layer scanning, the equipment is expensive, the inspection efficiency is extremely low, and it cannot comprehensively inspect all through-holes, resulting in a high risk of missed detections. This makes it difficult to meet the inspection needs of large-scale industrial production. To address this, a glass substrate inspection device is proposed, comprising: a frame 10; a support stage 20, which is mounted on the frame 10 and has a positioning surface for fixing the surface of the material to be inspected; and an inspection camera assembly 30, which is positioned above the support stage 20. The lens of the inspection camera assembly 30 points towards the positioning surface of the support stage 20, and the inspection camera assembly 30 is aligned with the support stage 20. The carrier platforms 20 are movable relative to each other, and the lens of the detection camera assembly 30 reciprocates on the positioning surface to scan and detect the micropores on the surface of the material to be detected; it also includes a positioning and locking mechanism, which is disposed at the edge of the positioning surface and is assembled to position at least one side of the surface of the material to be detected; and an elastic pressing and positioning unit, which is connected to the detection camera assembly 30 and is assembled to press the upper surface of the material to be detected so that the upper surface of the material to be detected is perpendicular to the lens direction of the detection camera assembly 30.

[0044] See Figure 9 The diagram shows a micropore array on the surface of the material to be tested. The micropores are arranged in an array, and are dumbbell-shaped with larger openings at both ends and a smaller opening in the middle. In actual testing, the diameters of the upper and lower openings (a) and the middle opening (b) need to be measured. After the glass substrate is placed on the support stage 20, the detection camera assembly 30 can move relative to the support stage 20, thereby allowing the detection camera assembly 30 to move relative to the glass substrate. This allows for scanning of the entire glass substrate and transmitting the scanned image to the system, thus enabling the detection of micropores on the glass substrate.

[0045] In one embodiment, see Figure 1The positioning surface of the support stage 20 is a horizontal plane. To ensure the flatness of the entire positioning surface and reduce damage to the glass substrate when in contact with it, a glass support stage 24 is provided on the positioning surface of the support stage 20. The material to be tested is placed on the glass support stage 24. By setting the glass support stage 24, the flatness of the positioning surface of the support stage 20 can be ensured, ensuring that the detection camera assembly 30 can accurately obtain the upper aperture diameter and the middle waist aperture diameter of the micro-holes on the glass substrate. In actual testing, after the glass substrate is placed on the glass support stage 24, the positioning and locking mechanism performs locking and positioning on at least one edge of the glass substrate, thereby preventing the glass substrate from shifting during the testing process. During the testing process, the elastic pressing and positioning unit can perform pressing and positioning on the upper surface of the glass substrate, ensuring that the upper surface of the glass substrate is perpendicular to the lens direction of the detection camera assembly 30, thereby ensuring the accuracy of the detection camera assembly 30 in scanning the micro-holes.

[0046] In one embodiment, see Figure 5 and Figure 6 To ensure the reliability of the glass substrate locking mechanism, the positioning and locking mechanism is used to position both sides of the material to be tested.

[0047] In one embodiment, see Figure 5 and Figure 6 The positioning and locking mechanism includes claws 22 disposed on the edge of the support platform 20. Multiple sets of claws 22 are arranged along the length of the edge of the support platform 20. The claws 22 are segmented and disposed on both sides of the support platform 20, which can accommodate glass substrate materials of different sizes. When the glass substrate is placed on the glass support platform 24, the claws 22 are flipped so that the claws 22 abut against the upper surface of the edge of the glass substrate, thereby achieving positioning of both sides of the glass substrate.

[0048] Specifically, in order to achieve synchronous driving of multiple sets of jaws 22, multiple sets of jaws 22 are mounted on drive rods 23. The drive rods 23 are rotatably set at the edge of the support platform 20. The drive rods 23 are connected to drive motors 231. The drive motors 231 drive the drive rods 23 to rotate and drive multiple sets of jaws 22 to rotate synchronously.

[0049] In one embodiment, see Figure 5 and Figure 6 The drive rods 23 are all horizontally arranged and rotatably installed at the edge of the support platform 20. A synchronous pulley is provided in the middle section of the drive rod 23, and a synchronous pulley is also provided on the output shaft of the drive motor 231. The synchronous pulley of the drive rod 23 and the synchronous pulley of the drive motor 231 can be connected by a synchronous belt. By starting the drive motor 231, the synchronous rotation of multiple sets of claws 22 can be achieved.

[0050] In one embodiment, see Figure 5 The enlarged view shows that the individual claw 22 can be a two-section structure, including a fixed section fixed to the drive rod 23, and a snap-fit ​​section that is rotatably mounted on the fixed section of the drive rod 23. A spring 221 is also provided on the snap-fit ​​section of the claw 22, with both ends of the spring 221 abutting against the fixed section and the snap-fit ​​section respectively. Therefore, by adding springs 221 to the two sections of the claw 22, the entire claw 22 is elastically connected. When the claw 22 is driven by the drive motor 231, it flips, allowing the snap-fit ​​section to elastically abut against the upper surface of one side of the glass substrate, preventing damage to the glass substrate.

[0051] In one embodiment, when the support stage 20 moves relative to the detection camera assembly 30, a drive mechanism is provided on the frame 10. The drive mechanism drives the support stage 20 to reciprocate within the horizontal plane below the detection camera assembly 30. By activating the drive mechanism, the support stage 20 reciprocates horizontally, allowing the glass substrate on the support stage 20 to be positioned below the detection camera assembly 30, enabling the scanning of micro-holes on the glass substrate through the detection camera assembly 30.

[0052] Specifically, see Figure 1 An X-axis slide rail can be installed on the frame 10, and an X-axis slider can be installed on the X-axis slide rail. An X-axis voice coil motor can be installed between the frame 10 and the X-axis slide rail to accurately drive the X-axis slider to move on the X-axis. A Y-axis slide rail is installed on the X-axis slider, and a support stage 20 is installed on the Y-axis slide rail. A Y-axis voice coil motor is installed on the support stage 20 to activate the Y-axis voice coil motor, causing the support stage 20 to move on the Y-axis. The aforementioned voice coil motors on the X-axis and Y-axis enable the support stage 20 to move on the X-axis and Y-axis, so that the detection camera assembly 30 can perform scanning of the glass substrate.

[0053] In one embodiment, in order for the elastic pressing and positioning unit to press and position the upper surface of the glass substrate, the detection camera assembly 30 is connected to the lifting mechanism, and the lifting mechanism drives the detection camera assembly 30 to move up and down and get closer to or away from the positioning surface.

[0054] Specifically, see Figure 3 and Figure 4The frame 10 is equipped with a cantilever 11, and a slider 12 is vertically slidably mounted on the cantilever end of the cantilever 11. The detection camera assembly 30 is mounted on the slider 12. When the slider 12 is vertically raised or lowered, a vertical cylinder is provided on the cantilever 11. The piston rod of the vertical cylinder is connected to the slider 12. By activating the vertical cylinder, the slider 12 is raised or lowered, thereby bringing the detection camera assembly 30 closer to or further away from the surface of the glass substrate to be inspected. Simultaneously, the elastic clamping and positioning unit descends synchronously to perform elastic clamping and positioning on the surface of the glass substrate, ensuring that the glass substrate remains perpendicular to the lens of the detection camera assembly 30 and ensuring the accuracy of the scanning detection.

[0055] In one embodiment, in order to effectively position the glass substrate and avoid displacement of the glass substrate, a negative pressure adsorption mechanism is provided on the support platform 20. The negative pressure adsorption mechanism is provided with adsorption ports 21 and multiple sets are arranged along the edge length direction of the support platform 20. The adsorption ports 21 are located on the edge side of the support platform 20 where the positioning and locking mechanism is located.

[0056] In one embodiment, see Figure 5 and Figure 6 Each adsorption port 21 is independently designed and supplied with gas through an independent vacuum pipeline. Different negative pressure pumps are activated according to the edge length of the glass substrate, so that the adsorption ports 21 at different positions on the edge of the support platform 20 can adsorb the lower surface of the glass substrate, thereby adapting to the adsorption and positioning requirements of glass substrates of various sizes.

[0057] Specifically, see Figure 7 The elastic clamping and positioning unit includes a positioning slider 121 disposed on the slider 12. The positioning slider 121 is vertically slidably disposed on the slider 12. A pressure roller 122 is disposed on the positioning slider 121. The pressure roller 122 abuts against or separates from the surface of the material to be tested. A motor 123 and a magnetic spring 124 are disposed on the slider 12. The driving slider of the motor 123 is vertical and connected to the positioning slider 121. The magnetic spring 124 is vertical and its lower end is connected to the positioning slider 121.

[0058] In one embodiment, the motor 123 is a voice coil motor. When performing the pressing operation on the upper surface of the glass substrate, the positioning slider 121 moves up and down by starting the motor 123, thereby realizing that the pressure roller 122 abuts or separates from the surface of the material to be tested. The magnetic spring 124 can balance the gravity of the elastic pressing positioning unit to avoid damage to the glass substrate.

[0059] In one embodiment, see Figure 1To further improve the accuracy of detection, a re-inspection camera assembly 31 is also provided on the slider 12. The re-inspection camera assembly 31 is located next to the detection camera assembly 30 and is used to perform a re-inspection of the micropores on the surface of the material to be inspected.

[0060] In one embodiment, a front light source 32 is provided on the side of the detection camera assembly 30, and a back light source 25 is provided below the support platform 20. The front light source 32 is vertically downward and the back light source 25 is vertically upward.

[0061] When performing micropore inspection on a glass substrate, refer to Figure 8 and Figure 9 The aperture of the micro-hole can be detected by turning on the front light source 32 and using the detection camera assembly 30. The aperture of the micro-hole can be detected by turning off the front light source 32, turning on the back light source 25, and using the detection camera assembly 30.

[0062] In one embodiment, after one side of the glass substrate has been inspected, the glass substrate is flipped over to inspect the back side of the glass substrate.

[0063] See Figure 10 In actual glass substrate inspection, the support stage 20 moves with the drive mechanism and moves to the starting point of the inspection position on the X and Y axes. The pressure roller 122 moves downward with the guide rail structure under the drive of the motor 123 to flatten the glass substrate. The support stage 20 will move in a "bow" shape on the X and Y axes. Referring to the arrow direction in the figure, the inspection camera assembly 30 can perform a full-board scan of the glass substrate product. When the arrow path changes, the pressure roller 122 needs to be lifted to separate from the glass substrate. When the arrow direction changes, the pressure roller 122 presses down and abuts against the glass substrate.

[0064] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0065] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A glass substrate detection device, characterized in that, Comprising: A frame (10); A carrying platform (20), arranged on the frame (10) and provided with a positioning surface for fixing the plate surface of the material to be detected; A detection camera assembly (30), arranged above the carrying platform (20); The lens of the detection camera assembly (30) points to the positioning surface of the carrying platform (20), and the detection camera assembly (30) and the carrying platform (20) can move relatively. The lens of the detection camera assembly (30) moves reciprocally on the positioning surface to scan and detect the micropores on the plate surface of the material to be detected; It further includes a positioning and clamping mechanism, arranged at the edge position of the positioning surface and assembled to be able to position at least one side of the plate surface of the material to be detected; An elastic pressing and positioning unit, connected to the detection camera assembly (30) and assembled to be able to press the upper plate surface of the material to be detected, so that the upper plate surface of the material to be detected is perpendicular to the lens direction of the detection camera assembly (30).

2. The glass substrate detection device according to claim 1, wherein The positioning and clamping mechanism is used to position both sides of the plate surface of the material to be detected.

3. The glass substrate detection device according to claim 1, wherein A driving mechanism is arranged on the frame (10), and the driving mechanism drives the carrying platform (20) to reciprocally move in the horizontal plane where it is located below the detection camera assembly (30).

4. The glass substrate detection device according to claim 1, wherein The detection camera assembly (30) is connected to a lifting mechanism, and the lifting mechanism drives the detection camera assembly (30) to move up and down and approach or move away from the positioning surface.

5. The glass substrate detection device according to claim 2, wherein A negative pressure adsorption mechanism is arranged on the carrying platform (20), and adsorption ports (21) are arranged on the negative pressure adsorption mechanism and multiple groups are arranged along the edge length direction of the carrying platform (20). The adsorption ports (21) are arranged on the edge side of the carrying platform (20) where the positioning and clamping mechanism is located.

6. The glass substrate detection device according to claim 1, wherein, A glass carrying platform (24) is arranged on the carrying platform (20), and the material to be detected is placed on the glass carrying platform (24).

7. The glass substrate detection device according to claim 1, wherein, A cantilever (11) is arranged on the frame (10), and a slider (12) is vertically slidably arranged at the overhanging end of the cantilever (11). The detection camera assembly (30) is installed on the slider (12); The elastic pressing and positioning unit includes a positioning slider (121) arranged on the slider (12). The positioning slider (121) is vertically slidably arranged on the slider (12), and a pressing wheel (122) is arranged on the positioning slider (121). The pressing wheel (122) abuts against or separates from the plate surface of the material to be detected; A motor (123) and a magnetic spring (124) are arranged on the slider (12). The motor (123) drives the slider vertically and is connected to the positioning slider (121), and the magnetic spring (124) is vertical and its lower end is connected to the positioning slider (121).

8. The glass substrate detection device according to claim 2, wherein The positioning and clamping mechanism includes clamping claws (22) arranged at the edge of the carrying platform (20). Multiple groups of the clamping claws (22) are arranged along the length direction of the edge of the carrying platform (20). Multiple groups of the clamping claws (22) are all installed on a driving rod (23). The driving rod (23) is rotatably arranged at the edge position of the carrying platform (20). The driving rod (23) is connected to a driving motor (231). The driving motor (231) drives the driving rod (23) to rotate and联动 multiple groups of the clamping claws (22) to rotate synchronously.

9. The glass substrate detection device according to claim 8, wherein, One end of the clamping claw (22) far from the clamping end is rotatably installed on the driving rod (23). A spring (221) is further arranged on the clamping claw (22). Two ends of the spring (221) respectively abut against the driving rod (23) and the clamping claw (22).

10. The glass substrate detection device according to claim 7, wherein, A re-inspection camera assembly (31) is further arranged on the slider (12). The re-inspection camera assembly (31) is arranged beside the inspection camera assembly (30). The re-inspection camera assembly (31) is used to re-inspect the micropores on the surface of the material to be detected. A front light source (32) is further arranged beside the inspection camera assembly (30). A back light source (25) is arranged below the carrying platform (20). The front light source (32) is vertically downward, and the back light source (25) is vertically upward.

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