A laser processing head and a laser processing apparatus

Abstract

The application relates to a laser processing head and a laser processing device, and relates to the technical field of laser processing. The laser processing head comprises a collimating mirror assembly, a machine body and an adjusting assembly. One end of the collimating mirror assembly is provided with a fiber interface. A cavity is formed in the machine body, and the end of the collimating mirror assembly away from the fiber interface extends into the cavity; a reflecting mirror for receiving a collimating mirror light beam is arranged in the cavity. The adjusting assembly comprises a rotating body which is rotatably arranged on the machine body; an installation part is arranged on the rotating body and extends into the cavity; at least two integral copper mirrors are symmetrically arranged around the rotation center of the rotating body on the installation part, and the integral copper mirrors are used for reflecting the light beam reflected by the reflecting mirror to a target position. The laser processing head of the application can change the processing mode of the laser processing head by switching different integral copper mirrors, the whole laser processing head does not need to be replaced, the function of the laser processing head is increased, and the adjusting process is simple and convenient.

Description

Technical Field

[0001] This application relates to the field of laser processing technology, and more specifically, to a laser processing head and laser processing equipment. Background Technology

[0002] With the continuous emergence of high-power, high-performance laser processing equipment, technologies such as laser welding, cladding, and surface treatment are attracting increasing attention and are rapidly developing in manufacturing fields such as automobiles, ships, molds, mining machinery, petrochemical equipment, and aerospace. They are playing an increasingly important role in improving product quality, labor productivity, automation, pollution reduction, and material consumption. Laser welding, quenching, surface treatment, and cladding are all efficient processing methods that utilize high-energy-density laser beams as a heat source. However, existing laser processing equipment often uses processing heads that can only perform one function, resulting in limited functionality and difficulties in adjustment.

[0003] In related technologies, when it is necessary to switch laser processing equipment to different processing modes, different processing heads are usually replaced. This not only makes the switching mode inflexible and cumbersome, but also delays processing efficiency. Utility Model Content

[0004] In order to at least address some of the deficiencies mentioned in the related technologies, this application provides a laser processing head and a laser processing device.

[0005] To achieve the above objectives, this application provides a laser processing head, including a collimating lens assembly, a body, and an adjustment assembly. One end of the collimating lens assembly is provided with an optical fiber interface. A cavity is formed within the body, and the end of the collimating lens assembly furthest from the optical fiber interface extends into the cavity; a reflector for receiving the collimating lens beam is disposed within the cavity. The adjustment assembly includes a rotating body rotatably mounted on the body; a mounting portion is provided on the rotating body, and the mounting portion extends into the cavity; at least two integrating copper mirrors are centrally symmetrically arranged around the rotation center of the rotating body on the mounting portion, and the integrating copper mirrors are used to reflect the beam reflected by the reflector to the target position.

[0006] Furthermore, the machine body has a through hole communicating with the outside, and the rotating body has a recessed portion, which is sealed and installed inside the through hole.

[0007] Furthermore, a first fixing part is provided on the rotating body extending outside the cavity, and a corresponding second fixing part is provided on the machine body. The first fixing part can be fixed relative to the second fixing part. The number of second fixing parts corresponds to the number of integrating copper mirrors, and the second fixing parts are centrally symmetrically arranged around the rotation center of the rotating body.

[0008] Furthermore, the collimating lens assembly includes a collimating cavity, which is mounted on the body and communicates with the cavity. A protective mirror is also provided between the collimating cavity and the optical fiber interface. The light beam entering at the optical fiber interface passes sequentially through the protective mirror and the collimating cavity and illuminates the reflector.

[0009] Furthermore, a focusing tube is also provided inside the collimating cavity, and a lens for focusing is provided inside the focusing tube. The light beam entering at the optical fiber interface passes through the focusing tube.

[0010] Furthermore, the outer wall of the focusing tube has a locking groove in a direction perpendicular to the moving path of the focusing tube, and a focusing part is rotatably disposed on the collimating cavity, the focusing part having a protrusion extending into the locking groove. The length of the locking groove is L1, and the diameter of the focusing part is L2, satisfying: L1≥L2.

[0011] Furthermore, a limiting groove is formed on the outer wall of the focusing tube along the moving direction of the focusing tube, and a limiting block is provided on the inner wall of the collimation cavity, the limiting block being engaged in the limiting groove.

[0012] Furthermore, a disc is provided at the position where the focusing part extends outside the collimation cavity, and the edge of the disc is provided with a scale.

[0013] Furthermore, a beam splitter assembly is disposed on the body at a position away from the collimating lens assembly. The beam splitter assembly includes a beam splitter and a charge-coupled device (CCD). The beam splitter is positioned on the path of the light beam reflected from the integrating copper mirror, and the beam splitter is capable of directing the light beam toward the CCD.

[0014] This application also provides a laser processing device, including the laser processing head described in any of the above embodiments.

[0015] With the above technical solution, when using the laser processing head of this embodiment, the output end of the fiber optic output device is connected to the fiber optic interface of the collimating lens assembly. The light beam entering from the fiber optic interface irradiates the reflector in the cavity and is reflected by the reflector to one of the integrating copper mirrors of the adjustment assembly. The integrating copper mirror then reflects the light beam to the exit position to perform laser processing on the workpiece.

[0016] When the processing method needs to be adjusted, stop the beam input at the fiber optic interface and adjust the rotating body to make the integrating copper mirror rotate, and rotate the other integrating copper mirror to a position that can cooperate with the reflector in the cavity. Then fix the rotating body relative to the machine body, and the beam input at the fiber optic interface can continue to be used to continue laser processing of the workpiece.

[0017] The laser processing head of this application can change the processing mode by changing different integrating copper mirrors without replacing the entire laser processing head, thus increasing the functionality of the laser processing head and making the adjustment process simple and convenient.

[0018] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a laser processing head provided in an embodiment of this application;

[0021] Figure 2 This is a schematic diagram of the laser processing head provided in an embodiment of this application from another perspective;

[0022] Figure 3 A cross-sectional view of the laser processing head provided in an embodiment of this application;

[0023] Figure 4 This is a schematic diagram of the structure of the adjustment component provided in an embodiment of this application from one perspective;

[0024] Figure 5 This is a schematic diagram of the focusing tube provided in an embodiment of this application from one perspective.

[0025] icon:

[0026] 100-Collimating lens assembly; 110-Fiber optic interface; 120-Collimating cavity; 130-Protective lens; 140-Focusing tube; 141-Snap-fit ​​slot; 142-Limiting slot; 150-Disc; 200-Body; 210-Cavity; 220-Reflector; 300-Adjustment assembly; 310-Mounting part; 320-Integrating copper mirror; 330-Recessed part; 340-First fixing part; 400-Beam splitter assembly; 410-Beam splitter; 420-Charge-coupled device. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0028] In the description of this application, it should be noted that the terms "inner" and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0029] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] This embodiment provides a laser processing head to solve the problems in related technologies where the laser processing head has a single function and requires the entire laser processing head to be replaced when switching processing modes, which is complicated and cumbersome.

[0031] Please see Figures 1 to 4 This embodiment provides a laser processing head, including a collimating lens assembly 100, a body 200, and an adjustment assembly 300. One end of the collimating lens assembly 100 is provided with an optical fiber interface 110. A cavity 210 is formed within the body 200, and the end of the collimating lens assembly 100 furthest from the optical fiber interface 110 extends into the cavity 210; a reflector 220 for receiving the collimating lens beam is disposed within the cavity 210. The adjustment assembly 300 includes a rotating body rotatably mounted on the body 200; a mounting portion 310 is provided on the rotating body, and the mounting portion 310 extends into the cavity 210; at least two integrating copper mirrors 320 are centrally symmetrically arranged around the rotation center of the rotating body on the mounting portion 310, and the integrating copper mirrors 320 are used to reflect the beam reflected by the reflector 220 to the target position.

[0032] Specifically, when using the laser processing head of this embodiment, the embodiment is installed in a suitable position on the laser processing equipment. Then, the output end of the fiber optic output device is connected to the fiber optic interface 110 of the collimating lens assembly 100, allowing the laser beam to enter the machine body 200. After entering the machine body 200, the laser beam illuminates the reflecting mirror 220 inside the cavity 210 and is reflected by the reflecting mirror 220 to an integrating copper mirror 320. The integrating copper mirror 320 then reflects the laser beam to the exit of the laser processing head for processing the workpiece.

[0033] When it is necessary to adjust the processing mode of the laser processing head, turn off the fiber beam input and adjust the rotating body so that the rotating body drives the integrating copper mirror 320 to rotate synchronously, and rotate until the other integrating copper mirror 320 is in a suitable position that can cooperate with the reflecting mirror 220. Then the fiber beam input can be continued to continue the processing of the workpiece for the next process.

[0034] The laser processing head of this embodiment has a rotating body containing multiple integrating copper mirrors 320 mounted on the body 200. When the processing method needs to be adjusted, only the rotating body needs to be adjusted to replace the different integrating copper mirrors 320. This not only enriches the functionality of the laser processing head but also simplifies the adjustment process, eliminating the need to disassemble the entire laser processing head; only the rotating body needs to be adjusted, thus improving the practicality and convenience of this embodiment.

[0035] It should be noted that in the laser processing head, the integrating copper mirror 320 is a key component, primarily used to optimize the quality and distribution of the laser beam. The integrating copper mirror 320 is typically made of a high-reflectivity material such as copper and undergoes special treatment to ensure its surface has extremely high reflection efficiency. This allows the integrating copper mirror 320 to homogenize the energy distribution of the laser beam, improve beam quality, and thus enhance processing accuracy and efficiency. Furthermore, depending on the different types of laser processing requirements, such as cutting, welding, quenching, and marking, the design parameters of the integrating copper mirror 320 can be adjusted to meet specific process needs and achieve optimal processing results.

[0036] In detail, the design parameters of the integrating copper mirror 320 include mirror shape and size, reflective coating, optical design, and installation angle and position. Adjusting these parameters allows for different processing methods. For example, regarding the mirror shape, the surface of the integrating copper mirror 320 can be designed as a plane, concave, or convex surface to control the focusing degree and divergence angle of the laser beam. High-precision marking applications may require finer focusing effects, while large-area welding may require a larger spot size. Regarding the reflective coating, different coatings can be selected according to different processing purposes. Commonly used reflective materials include copper and silver, which have different reflectivities and heat resistance properties. For high-power applications, materials with good thermal conductivity and high reflectivity are typically chosen.

[0037] In this way, by pre-setting different parameters on the rotating body, different integrating copper mirrors 320 can achieve different processing methods. When adjusting the processing method of this embodiment, the rotating body is rotated to change the integrating copper mirror 320 participating in the optical path.

[0038] In one embodiment, exemplarily, such as Figures 1 to 4 As shown, the body 200 has a through hole communicating with the outside, and the rotating body has a recess 330, which is sealed and installed inside the through hole. This design, where the recess 330 is sealed and installed inside the through hole, effectively prevents dust, smoke, and other contaminants from entering the laser processing head, which is especially crucial for protecting key optical components such as the alignment mirror assembly 100 and the reflector 220. This helps maintain the cleanliness of the optical path and ensures the quality and stability of the laser beam.

[0039] The sealed installation design provides additional mechanical support, reducing displacement or offset of the rotating body due to vibration or external impact during operation. This not only improves the overall stability of this embodiment but also ensures that the integrating copper mirror 320 is always in the optimal working position, thereby improving machining accuracy.

[0040] In one embodiment, exemplarily, such as Figure 1 , Figure 4 As shown, a first fixing part 340 is provided on the rotating body extending outside the cavity 210, and a corresponding second fixing part is provided on the machine body 200. The first fixing part 340 can be fixed relative to the second fixing part. The number of second fixing parts corresponds to the number of integrating copper mirrors 320, and the second fixing parts are centrally symmetrically arranged around the rotation center of the rotating body. When the first fixing part 340 is fixed relative to the second fixing part, an additional mechanical locking mechanism is provided to prevent the rotating body from rotating or displacing unexpectedly during operation. This enhances the stability and reliability of the system, ensures that the optical path remains unchanged during processing, and avoids errors caused by vibration or other external factors.

[0041] The selection and replacement of the integrating bronze mirror 320 can be quickly accomplished by simply adjusting the fit between the first fixing part 340 and the corresponding second fixing part. No complicated tools or procedures are required; simply rotate the rotating body to the appropriate position and lock it, greatly simplifying the adjustment process and improving work efficiency.

[0042] The cooperation between the first fixing part 340 and the second fixing part increases the safety of this embodiment and reduces safety hazards caused by accidental movement of the rotating body. Especially in high-power laser processing, any unexpected change in the optical path can have serious consequences, and this mechanical locking mechanism can effectively prevent such accidents from occurring.

[0043] Furthermore, since the number of second fixing parts corresponds to the number of integrating copper mirrors 320, a suitable integrating copper mirror 320 can be selected for operation according to different processing requirements. For example, an integrating copper mirror 320 with a specific focusing effect can be used when fine marking is required; while for large-area welding, an integrating copper mirror 320 suitable for a large spot size can be selected. This flexibility greatly enriches the functionality of the laser processing head and meets diverse processing requirements. Moreover, during switching, simply aligning the first fixing part 340 with the appropriate second fixing part ensures that the integrating copper mirror 320 is in the working position, further improving the convenience of adjustment.

[0044] The first fixing part 340 and the second fixing part can be configured with any structure, as long as they meet the requirements of this embodiment. In this embodiment, for example, the first fixing part 340 is a threaded hole on the rotating body, and the second fixing part is a threaded hole on the machine body 200. The first fixing part 340 and the second fixing part can be fixedly connected by fastening bolts. When it is necessary to adjust the integrating copper mirror 320, it is only necessary to unscrew the fastening bolts, rotate the rotating body, and then re-fix the fastening bolts.

[0045] Please continue reading. Figure 4 In this embodiment, two second fixing parts are provided, and correspondingly, two integrating copper mirrors 320 are also provided. In this way, when the first fixing part 340 is fixed on the second fixing part, the integrating copper mirror 320 will be in the working position, preventing the integrating copper mirror 320 from being out of the working position and affecting the normal operation of the laser processing head.

[0046] In one embodiment, exemplarily, such as Figures 1 to 3 As shown, the collimating lens assembly 100 includes a collimating cavity 120, which is mounted on the body 200 and communicates with the cavity 210. A protective mirror 130 is also disposed between the collimating cavity 120 and the fiber optic interface 110. The light beam entering through the fiber optic interface 110 passes sequentially through the protective mirror 130 and the collimating cavity 120 and illuminates the reflector 220. The protective mirror 130, located between the fiber optic interface 110 and the collimating cavity 120, effectively prevents dust, splashes, and other contaminants from entering the collimating cavity 120, avoiding contamination or damage to the collimating lens and other critical optical components. Furthermore, the protective mirror 130 is typically made of durable materials and designed for quick disassembly and replacement. Compared to the collimating lens or other precision optical components directly exposed to the external environment, the protective mirror 130 is easier to clean and replace, thereby reducing the overall equipment maintenance cost and downtime.

[0047] Of course, the presence of the protective mirror 130 can create a relatively closed optical path environment, reducing the impact of external air flow, temperature changes and other factors on the laser beam transmission path, which helps to maintain the stability and consistency of the optical path.

[0048] In one embodiment, exemplarily, such as Figure 3 , Figure 5 As shown, a focusing tube 140 is also provided inside the collimating cavity 120. A lens for focusing is installed inside the focusing tube 140, and the light beam entering through the fiber optic interface 110 passes through the focusing tube 140. The lens inside the focusing tube 140 can further focus the collimated laser beam. By adjusting the position of the focusing tube 140 or the distance between the internal lenses, the focal point of the laser beam can be precisely controlled. This is particularly important for processing materials of different thicknesses and types; for example, processes such as cutting, welding, or marking require different focal depths.

[0049] It is understandable that when adjusting the processing mode of the laser processing head in this embodiment, after replacing the working integrating copper mirror 320, the focal length also needs to be adjusted accordingly to ensure the beam quality.

[0050] In one embodiment, for example, please refer to [link / reference needed]. Figure 3 , Figure 5 The outer wall of the focusing tube 140 has a locking groove 141 perpendicular to its moving path. A focusing part is rotatably mounted on the collimating cavity 120, and the focusing part has a protrusion extending into the locking groove 141. The length of the locking groove 141 is L1, and the diameter of the focusing part is L2, satisfying L1≥L2. Thus, when the operator adjusts the focusing tube 140 by rotating the focusing part, the protrusion performs a circular motion. The horizontal motion is converted into relative movement between the protrusion and the locking groove 141, while the vertical movement causes the focusing tube 140 to move synchronously, thereby adjusting the focal length. The length of the locking groove 141 determines the range of movement of the focusing tube 140, while the protrusion on the focusing part is restricted when sliding within the locking groove 141, ensuring that the focusing tube 140 can only move within a predetermined range. To prevent the focusing tube 140 from exceeding its effective working range, and to avoid equipment damage or laser beam deviation from the target position due to over-adjustment.

[0051] Because the movement of the focusing tube 140 is mechanically constrained by the locking groove 141 and the protrusion, the focusing tube 140 will not accidentally shift even under external vibration or other disturbances. This improves the safety of the system, especially in high-power laser processing, and effectively prevents safety hazards caused by focus deviation.

[0052] It is understandable that the focusing section and the collimation cavity 120 are interference-fitted. This can effectively ensure that the focusing tube 140 is restricted by the focusing section and prevent the focusing tube 140 from being displaced by external forces, thus affecting the normal use of this embodiment.

[0053] In one embodiment, exemplarily, such as Figure 5 As shown, a limiting groove 142 is formed on the outer wall of the focusing tube 140 along the moving direction of the focusing tube 140, and a limiting block is provided on the inner wall of the collimating cavity 120, which is engaged within the limiting groove 142. The design of the limiting block and the limiting groove 142 ensures that the focusing tube 140 moves precisely only along a predetermined straight path, avoiding possible offset or tilting problems during focusing. This maintains stable focusing of the laser beam and improves processing accuracy.

[0054] In one embodiment, exemplarily, such as Figure 5 As shown, a disc 150 is positioned outside the collimation cavity 120, extending from the focusing unit. The edge of the disc 150 is marked with graduations. This graduation design allows the operator to quantify the rotation angle or movement distance of the focusing unit by reading specific values ​​on the edge of the disc 150, thus achieving more precise focusing operations. The graduations on the disc 150 also provide the operator with an intuitive feedback mechanism, allowing them to clearly see the current position and adjustment amount of the focusing unit.

[0055] When the same type of workpiece needs to be processed multiple times, the operator can quickly and accurately adjust to the required focal position based on the previously recorded scale values, ensuring the consistency and repeatability of each processing.

[0056] In one embodiment, exemplarily, such as Figures 1 to 3 As shown, a beam splitter assembly 400 is positioned on the machine body 200 away from the collimating lens assembly 100. The beam splitter assembly 400 includes a beam splitter 410 and a charge-coupled device (CCD) 420. The beam splitter 410 is positioned along the path of the light beam reflected from the integrating copper mirror 320, and it can direct the light beam towards the CCCD 420. By guiding a portion of the laser beam to the CCCD 420 through the beam splitter 410, real-time monitoring of the laser processing process can be achieved. The CCCD 420 can capture key parameters such as the energy distribution and focal position of the laser beam, providing immediate feedback to the operator so that processing parameters can be adjusted in a timely manner to ensure processing quality.

[0057] Of course, using the information captured by the charge-coupled device 420, the laser processing equipment can also automatically adjust the position of the focusing tube 140 or the state of other optical elements to achieve the best focusing effect. This ensures the effectiveness of this embodiment in performing high-precision processing tasks, such as micro-cutting and precision welding, and helps to improve processing accuracy and consistency.

[0058] This embodiment also provides a laser processing device, including the laser processing head in any of the above embodiments.

[0059] This embodiment includes the laser processing head from any of the above embodiments, and thus possesses all the beneficial effects of a laser processing head, which will not be elaborated further here.

[0060] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0061] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A laser processing head, characterized in that, include: Collimating lens assembly (100), one end of which is provided with an optical fiber interface (110); The body (200) has a cavity (210) inside, and one end of the collimating lens assembly (100) away from the optical fiber interface (110) extends into the cavity (210); the cavity (210) is provided with a reflector (220) for receiving the collimating lens beam. An adjustment assembly (300) includes a rotating body rotatably mounted on the body (200); the rotating body is provided with a mounting part (310) extending into the cavity (210); at least two integrating copper mirrors (320) are centrally symmetrically arranged around the rotation center of the rotating body on the mounting part (310), the integrating copper mirrors (320) being used to reflect the light beam reflected by the reflecting mirror (220) to the target position.

2. The laser processing head according to claim 1, characterized in that, The body (200) has a through hole that communicates with the outside, and the rotating body has a recess (330) that is sealed and installed in the through hole.

3. The laser processing head according to claim 2, characterized in that, A first fixing part (340) is provided on the rotating body extending to the outside of the cavity (210), and a second fixing part is provided on the body (200) accordingly. The first fixing part (340) can be fixed relative to the second fixing part. The number of the second fixing parts corresponds to the number of the integrating copper mirror (320), and the second fixing parts are arranged symmetrically around the rotation center of the rotating body.

4. The laser processing head according to claim 1, characterized in that, The collimating lens assembly (100) includes a collimating cavity (120), which is mounted on the body (200) and communicates with the cavity (210); A protective mirror (130) is also provided between the collimating cavity (120) and the optical fiber interface (110). The light beam entering through the optical fiber interface (110) passes through the protective mirror (130) and the collimating cavity (120) in sequence and irradiates the reflector (220).

5. The laser processing head according to claim 4, characterized in that, The collimation cavity (120) is also provided with a focusing tube (140), and the focusing tube (140) is provided with a lens for focusing. The light beam entering at the fiber optic interface (110) passes through the focusing tube (140).

6. The laser processing head according to claim 5, characterized in that, The outer wall of the focusing tube (140) has a locking groove (141) in a direction perpendicular to the moving path of the focusing tube (140). The collimating cavity (120) is rotatably provided with a focusing part, and the focusing part is provided with a protrusion that extends into the locking groove (141). The length of the snap-fit ​​groove (141) is L1, and the diameter of the focusing part is L2, satisfying: L1≥L2.

7. The laser processing head according to claim 6, characterized in that, A limiting groove (142) is provided on the outer wall of the focusing tube (140) along the moving direction of the focusing tube (140), and a limiting block is provided on the inner wall of the collimation cavity (120), and the limiting block is engaged in the limiting groove (142).

8. The laser processing head according to claim 6, characterized in that, A disc (150) is provided at the position where the focusing part extends to the outside of the collimation cavity (120), and the edge of the disc (150) is provided with a scale.

9. The laser processing head according to claim 1, characterized in that, A beam splitter assembly (400) is provided on the body (200) at a position away from the collimating lens assembly (100). The beam splitter assembly (400) includes a beam splitter (410) and a charge-coupled device (420). The beam splitter (410) is positioned on the path of the light beam reflected from the integrating copper mirror (320), and the beam splitter (410) can split the light beam toward the charge-coupled device (420).

10. A laser processing device, characterized in that, Includes the laser processing head as described in any one of claims 1 to 9.

Images