Double-sided epitaxial wafer single wafer cassette

Abstract

The utility model discloses a double -sided epitaxial wafer single wafer box for depositing double -sided epitaxial wafer, including box body, elastic pressure claw and with box body adaptation box cover, the box body side wall is constructed with the stepped limiting platform in, elastic pressure claw includes the planar connecting piece, the inclined plane connecting piece and the broken line shape presser foot that connect in proper order, wherein the inclined plane connecting piece and broken line shape presser foot are multiple and surround planar connecting piece even arrangement, the double -sided epitaxial wafer is placed on the stepped limiting platform, when the box cover closes, the planar connecting piece of box cover under -pressure elastic pressure claw drives broken line shape presser foot and press the double -sided epitaxial wafer tightly on the stepped limiting platform. This single wafer box can effectively steady double -sided epitaxial wafer, and the positive and negative two sides epitaxial layer of double -sided epitaxial wafer are not destroyed.

Description

Technical Field

[0001] This utility model relates to the field of epitaxial wafer packaging technology, specifically to a single-wafer box for double-sided epitaxial wafers. Background Technology

[0002] Double-sided epitaxial wafers are an important material in the semiconductor industry. They refer to epitaxial layers grown on both sides of a substrate, resulting in epitaxial layers with different materials or doping properties on both sides of the substrate. Double-sided epitaxial wafers can realize high-precision functional layers on both sides of the substrate, avoiding the stress problems caused by excessive thickness of single-sided stacking, while improving wafer space utilization. Growing epitaxial layers on both sides of the substrate can effectively isolate different functional regions, reduce crosstalk and parasitic effects between devices, and is particularly suitable for high-frequency / high-density integrated circuit design.

[0003] A single-sided epitaxial wafer refers to an epitaxial layer grown on one side of a substrate, where all functional characteristics are realized in the epitaxial layer on one side of the substrate.

[0004] Currently, existing single-wafer cassettes for storing epitaxial wafers adopt the existing SEMI standard F57. This standard only regulates the packaging of single-sided epitaxial wafers and cannot meet the requirement that the epitaxial layers on both sides of double-sided epitaxial wafers must not be damaged. In view of this, this utility model is proposed. Utility Model Content

[0005] The purpose of this invention is to provide a single-wafer box for double-sided epitaxial wafers, which can better protect the surface of double-sided epitaxial wafers while fixing them.

[0006] The technical solution of this utility model is described in detail below:

[0007] A single-wafer box for storing double-wafer epitaxial wafers (4) includes a box body (1), elastic pressure claws (2), and a box cover (3) adapted to the box body. The side wall of the box body (1) is constructed with a stepped limiting platform (103). The elastic pressure claws (2) include a planar connecting piece (201), an inclined connecting piece (202), and a zigzag pressure foot (203) connected in sequence. The inclined connecting piece (202) and the zigzag pressure foot (203) are multiple and are evenly arranged around the planar connecting piece (201).

[0008] The double-sided epitaxial sheet (4) is placed on the stepped limiting stage (103). When the box cover (3) is closed, the box cover (3) presses down the flat connecting piece (201) of the elastic pressure claw (2), which drives the folded pressure foot (203) to press the double-sided epitaxial sheet (4) onto the stepped limiting stage (103).

[0009] Optionally or preferably, in the above-mentioned double-sided epitaxial wafer single-wafer box, the outer peripheral edge of the double-sided epitaxial wafer (4) is constructed with a snap-edge (401) without an epitaxial layer, and the width of the stepped limiting platform (103) is adapted to the size of the snap-edge (401).

[0010] Optionally or preferably, the upper surface of the stepped limiting stage (103) of the above-mentioned double-sided epitaxial wafer single-wafer box is constructed with a ramp (101) that slides down the inner side wall of the box body (1) toward the center of the bottom inside the box body (1).

[0011] Optionally or preferably, the aforementioned double-sided epitaxial wafer cassette has a notch (102) on the stepped limiting stage (103).

[0012] Optionally or preferably, in the above-mentioned double-sided epitaxial wafer single-wafer cassette, the notch (102) extends downward to the bottom of the cassette body (1).

[0013] Optionally or preferably, in the above-mentioned double-sided epitaxial wafer single-piece box, the planar connecting piece (201), the inclined connecting piece (202), and the zigzag presser foot (203) are integrally formed.

[0014] Optionally or preferably, in the above-mentioned double-sided epitaxial wafer single-piece box, the inclined connecting piece (202) is made of elastic material.

[0015] Optionally or preferably, in the above-mentioned double-sided epitaxial wafer single-piece box, the folded presser foot (203) is made of elastic material, and the bending method is to bend inward and then outward from the end connected to the inclined connecting piece (202).

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] This utility model is a single-wafer box specifically designed for storing double-sided epitaxial wafers. During the growth process of double-sided epitaxial wafers, the edge of the substrate fails to cover the growth material, thus forming an area without an epitaxial layer, which is called the clasp (401). The stepped limiting stage (103) supports the clasp of the double-sided epitaxial wafer (4). The lower surface of the double-sided epitaxial wafer is suspended (not in contact with the bottom of the box), and the upper surface is also suspended by the elastic pressure claw (2). Only the outer periphery of the clasp is pressed into contact with the stepped limiting stage (103) and the zigzag pressure foot (203), thereby stabilizing the double-sided epitaxial wafer and protecting the epitaxial layers on both sides of the double-sided epitaxial wafer from damage.

[0018] The stepped limiting platform (103) is also equipped with a ramp (101), which serves as a guide when the double-sided epitaxial sheet is placed. After the snap edge (401) contacts the ramp (101), it will automatically slide onto the platform of the stepped limiting platform (103) due to its own gravity. The notch (102) design makes it easier to operate with tweezers. When taking out the double-sided epitaxial sheet, tweezers can be inserted through the notch (102) and picked out. The notch (102) extends downward to the bottom of the box (1) to provide more operating space.

[0019] The flat connecting piece (201) of the elastic pressure claw (2) is mainly used to hold the lid (3) in place, preventing damage to the double-sided extension sheet caused by external compression deformation of the lid (3). The inclined connecting piece (202) and the zigzag pressure foot (203) together provide elastic support space between the lid (3) and the stepped limiting platform (103). When the lid (3) is pressed down, the pressure is transmitted to the zigzag pressure foot (203) through the inclined connecting piece (202). One or both of them undergo elastic deformation, pressing down on the double-sided extension sheet (4) on the one hand, and acting on the lid (3) to support and protect the double-sided extension sheet (4) on the other hand. The structure of the zigzag pressure foot (203) can meet the above requirements and has the advantages of simple shape and convenient processing. Attached Figure Description

[0020] Figure 1 This is a structural breakdown diagram of the single-wafer box for the double-sided epitaxial wafer in Example 1.

[0021] Figure 2 This is a schematic diagram of the box structure of the double-sided epitaxial wafer single-wafer box in Example 1.

[0022] Figure 3 This is a schematic diagram of the elastic gripper structure of the double-sided epitaxial wafer single-wafer box in Example 1.

[0023] Figure 4 This is a cross-sectional structural diagram of the double-sided epitaxial wafer cassette in Example 1 with the lid closed after the double-sided epitaxial wafer is placed inside.

[0024] Figure 5 This is a top view of Example 1 with the double-sided epitaxial wafer in the single-wafer box after the double-sided epitaxial wafer has been placed inside, with the box lid open.

[0025] Figure 6 This is a schematic diagram of a single-wafer structure for a double-sided epitaxial wafer.

[0026] In the picture:

[0027] 1-Box body, 101-Slope, 102-Notch, 103-Stepped limiting platform, 2-Elastic pressure claw, 201-Flat connecting piece, 202-Sloping connecting piece, 203-Folded pressure foot, 3-Box lid, 4-Double-sided extension piece, 401-Edge fastening. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present application, the present application will be clearly and completely described below with reference to embodiments and accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present application.

[0029] Example 1

[0030] Please refer to Figure 6 The double-sided epitaxial wafer 4 has a circular structure with epitaxial layers grown on both the upper and lower surfaces (the part indicated by dots). There is no epitaxial layer around the edge, which is called the edge 401.

[0031] Please refer to Figure 1 The double-sided epitaxial wafer cassette includes a cassette body 1, elastic clamps 2, and a cassette cover 3 that fits the cassette body. There are various ways the cassette cover 3 can be joined to the cassette body 1, all of which are conventional technologies, such as snap-fit ​​or threaded engagement. Figure 2 The box body 1 consists of a round bottom and side walls extending vertically upwards along the outer perimeter of the round bottom. A stepped limiting platform 103 is constructed within the side walls. The overall diameter of the stepped limiting platform 103 (measured from the outer edge of the platform) is slightly larger than the diameter of the double-sided epitaxial sheet 4 to adequately accommodate it. The width of the stepped limiting platform 103 is adapted to the size of the retaining edge 401, approximately equal to the width of the retaining edge 401. Since the double-sided epitaxial sheet 4 has epitaxial layers on both its upper and lower surfaces, it cannot be handled with a regular pen; tweezers are preferable. Therefore, in this embodiment, the single-piece box has a notch 102 extending downwards to the bottom of the box body 1 in the stepped limiting platform 103, providing space for tweezers. The upper surface of the stepped limiting platform 103 also has a ramp 101 that slides down along the side wall of the box body 1 towards the center of the bottom inside the box body 1. Please refer to... Figure 4 The longitudinal section of the stepped limiting platform 103 is at a right angle.

[0032] Please refer to Figure 3 The elastic pressure claw 2 includes a flat connecting piece 201, a beveled connecting piece 202, and a zigzag pressure foot 203, all integrally formed and connected in sequence. There are four beveled connecting pieces 202 and four zigzag pressure feet 203, evenly arranged around the flat connecting piece 201. The flat connecting piece 201 and the zigzag pressure feet 203 are located at two horizontal positions, one above the other, connected by the beveled connecting piece 202. The zigzag pressure foot 203 bends from the end connected to the beveled connecting piece 202, first bending inwards (towards the center of the box) and then outwards (away from the center of the box). The edge curvature of the zigzag pressure foot 203 matches the curvature of the stepped limiting platform 103 and the double-sided extension piece 4 (i.e., the curvature of the outer edges of the three are consistent when viewed from above), ensuring that the double-sided extension piece 4 is evenly stressed and stable when the lid 3 is closed.

[0033] When using this single-wafer cassette, first open the cassette lid 3, use tweezers to pick up the retaining edge 401 of the double-sided epitaxial wafer 4 and place it on the stepped limiting platform 103 inside the cassette body 1. Place the elastic pressure claw 2 on the double-sided epitaxial wafer 4, and use the stepped limiting platform 103 to fix the double-sided epitaxial wafer 4 and the elastic pressure claw 2 horizontally. Close the cassette lid 3, and press the double-sided epitaxial wafer 4 and the elastic pressure claw 2 vertically downwards to fix them. Use the stepped limiting platform 3 and the zigzag-shaped pressure foot 203 at the tail of the elastic pressure claw 2 to elastically press and fix the double-sided epitaxial wafer 4, thereby ensuring that only the retaining edge 401 of the double-sided epitaxial wafer 4 is in contact, and that the epitaxial layers on the upper and lower surfaces of the double-sided epitaxial wafer 4 are not damaged. When removing the double-sided epitaxial wafer 4, use tweezers to reach into the notch 102 and pick it out.

[0034] This document uses specific examples to illustrate the inventive concept in detail. The description of the embodiments above is only for the purpose of helping to understand the core idea of ​​this application. It should be noted that any obvious modifications, equivalent substitutions or other improvements made by those skilled in the art without departing from the inventive concept should be included within the protection scope of this application.

Claims

1. A double-sided epitaxial wafer cassette for storing double-sided epitaxial wafers (4), comprising a cassette body (1), elastic clamps (2), and a cassette cover (3) adapted to the cassette body, characterized in that, The box body (1) has a stepped limiting platform (103) inside its side wall; the elastic pressure claw (2) includes a planar connecting piece (201), an inclined connecting piece (202) and a zigzag pressure foot (203) connected in sequence, wherein there are multiple inclined connecting pieces (202) and zigzag pressure feet (203) and they are evenly arranged around the planar connecting piece (201); The double-sided epitaxial sheet (4) is placed on the stepped limiting stage (103). When the box cover (3) is closed, the box cover (3) presses down the flat connecting piece (201) of the elastic pressure claw (2), which drives the folded pressure foot (203) to press the double-sided epitaxial sheet (4) onto the stepped limiting stage (103).

2. The double-sided epitaxial wafer cassette according to claim 1, characterized in that, The outer peripheral edge of the double-sided epitaxial wafer (4) is constructed with an epitaxial layer-free edge (401), and the width of the stepped limiting platform (103) is adapted to the size of the edge (401).

3. The double-sided epitaxial wafer cassette according to claim 1, characterized in that, The upper surface of the stepped limiting platform (103) is constructed with a ramp (101) that slides down the inner side wall of the box (1) toward the center of the bottom inside the box (1).

4. The double-sided epitaxial wafer cassette according to claim 1, characterized in that, The stepped limiting platform (103) has a notch (102).

5. The double-sided epitaxial wafer cassette according to claim 4, characterized in that, The notch (102) extends downward to the bottom of the box (1).

6. The double-sided epitaxial wafer cassette according to claim 1, characterized in that, The planar connecting piece (201), the inclined connecting piece (202), and the zigzag presser foot (203) are integrally formed.

7. The double-sided epitaxial wafer cassette according to claim 1, characterized in that, The inclined connecting piece (202) is made of elastic material.

8. The double-sided epitaxial wafer cassette according to claim 1, characterized in that, The zigzag presser foot (203) is made of elastic material, and the bending method is to bend inward and then outward from the end connected to the inclined connecting piece (202).

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