A primer protection layer for optical films

Abstract

The utility model relates to the technical field of mask preparation, specifically provide a kind of for optical film's bottom glue protective layer, including sequentially laminated adhesive film, release film, the release film is hollow, the release surface of release film is towards aluminium frame, the adhesive surface of adhesive film is towards the release film;The utility model under, adhesive film has viscosity, after being laminated below aluminium frame by release film, it can replace conventional release film to protect the inside of aluminium frame, and since the hollow setting of release film for the bottom glue protective layer, even if the release film has scratch and so on, the fine particle generated by it can be directly stuck by adhesive film, without worrying that fine particle generated by release film is transmitted to optical film.

Description

Technical Field

[0001] This invention relates to the field of photomask fabrication technology, and specifically provides a base adhesive protective layer for optical films. Background Technology

[0002] The optical film of a photomask is an indispensable component in most integrated circuit manufacturing processes and high-resolution projection imaging systems. The optical film prevents dust particles from entering the photomask and causing image distortion on the wafer, thus ensuring the quality of the photomask. However, the optical film is not formed simultaneously with the photomask. It is manufactured by the factory and placed at one end of a rectangular aluminum frame, with an adhesive backing for bonding the photomask at the other end. After being transported to the photomask manufacturer, the optical film, along with the rectangular aluminum frame, is bonded to the photomask. To ensure that downstream users can directly bond the optical film to the photomask, existing optical film manufacturers apply a release film to the adhesive backing end of the rectangular aluminum frame. This protects the adhesive and prevents impurities and dust from entering the rectangular frame, thus ensuring the yield rate of the optical film.

[0003] However, release films on the market are generally divided into three types: silicone, non-silicone, and fluorinated. These three types of release films often suffer from scratches or abrasions during cutting and pasting. During the transportation of optical films, particles caused by scratches on the release film can easily be transferred to the optical film due to vibration, causing contamination. Utility Model Content

[0004] To address the aforementioned problems, this invention provides an optical film bottom adhesive protective layer that can provide optical film bottom protection and prevent impurities from contaminating the optical film.

[0005] The technical solution of this utility model is as follows:

[0006] An adhesive protective layer for optical films includes an adhesive film and a release film bonded together in sequence. The release film is hollow, with the release surface of the release film facing an aluminum frame, and the adhesive surface of the adhesive film facing the release film.

[0007] In this solution, the adhesive film, due to its adhesive properties, can replace the conventional release film to protect the inside of the aluminum frame after being bonded to the bottom of the aluminum frame by the release film. Furthermore, since the release film used for the base adhesive protective layer is hollow, even if the release film is scratched, the particles generated will be directly adhered by the adhesive film, so there is no need to worry about the particles generated by the release film being transferred to the optical film.

[0008] Preferably, the area of ​​the adhesive film is the same as the size of the aluminum frame, and the shape and area of ​​the release film are adapted to the aluminum frame.

[0009] In this solution, the release film only serves to temporarily adhere the adhesive film to the aluminum frame. Its smaller area reduces the possibility of scratches and thus the generation of impurity particles. At the same time, the shape of the release film is compatible with the aluminum frame, which means it is also compatible with the base adhesive on the aluminum frame, effectively preventing the adhesive film from coming into contact with the base adhesive.

[0010] Preferably, the adhesive film comprises a pressure-sensitive adhesive coated on a PET base film.

[0011] In this solution, to prevent the adhesive film from generating impurity particles after scratching, just like the release film, pressure-sensitive adhesive is applied to the PET base film to form an adhesive film. When an adhesive film layer is formed on the PET base film, no particles will fall off even if scratched.

[0012] Preferably, the release film is provided with a first gripping corner, which facilitates the removal of the entire base adhesive protective film from the aluminum frame.

[0013] Since the base adhesive protective layer is not set together with the aluminum frame during the optical film preparation, the base adhesive protective layer can be produced uniformly. To ensure that the produced base adhesive protective layers do not stick together during storage, a release paper is preferably included, wherein the release paper and release film are bonded together. In this solution, the release paper provides a shield for the adhesive surface with the adhesive film exposed, preventing dust from adhering prematurely and also preventing the base adhesive protective layers from sticking together during storage.

[0014] Preferably, the release paper is coated with silicone oil on both sides, and the side facing away from the release film is smooth, which can effectively prevent dust from adhering.

[0015] Preferably, the adhesive film is provided with a second gripping angle that is adapted to the release film. By using the second gripping angle in conjunction with the first gripping angle, the release paper can be easily separated from the release film and the adhesive film.

[0016] The beneficial effects of this utility model are:

[0017] The adhesive film provided in this invention has adhesive properties. After being attached to the bottom of the aluminum frame by the release film, it can replace the conventional release film to protect the inside of the aluminum frame. Furthermore, since the release film used for the base adhesive protective layer is hollow, even if the release film is scratched, the particles generated will be directly adhered by the adhesive film, so there is no need to worry about the particles generated by the release film being transferred to the optical film. Attached Figure Description

[0018] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional schematic diagram of the present invention;

[0020] Figure 2 This is a side sectional view of the present invention;

[0021] Figure 3 This is a schematic diagram of the present invention in use.

[0022] In the above figures, the corresponding reference numerals are as follows:

[0023] 1-Adhesive film, 11-Second corner, 2-Release film, 21-Second corner, 3-Aluminum frame, 4-Base adhesive, 5-Release paper, 6-Optical film. Detailed Implementation

[0024] The technical solution of the present invention will be clearly and completely described in conjunction with the accompanying drawings and through specific implementation methods of the embodiments of the present invention.

[0025] Example 1:

[0026] An adhesive protective layer for optical films, such as Figure 1 The image shows an adhesive film 1 and a release film 2 that are sequentially bonded together. The release film 2 is hollow, with the release surface of the release film 2 facing the aluminum frame 3, and the adhesive surface of the adhesive film 1 facing the release film 2.

[0027] Specifically, such as Figure 3 As shown, since the protective layer of the base adhesive 4 in this embodiment is directly attached to the base adhesive 4 under the aluminum frame 3 of the optical film 6, the release film 2 in contact with the base adhesive 4 is set as a hollow structure, and the shape and area of ​​the release film 2 are adapted to the aluminum frame 3. Preferably, the release film 2 and the aluminum frame 3 are of the same structural frame. In this embodiment, the aluminum frame 3 is a rectangular aluminum frame 3, so the release film 2 is also cut into the same shape as the frame width of the aluminum frame 3 by a cutting machine or cutting machine. When the release film 2 with release force faces the aluminum frame 3 and is attached to the aluminum frame 3, the release surface of the release film 2 contacts the base adhesive 4 and can just cover the entire base adhesive 4. Since the area of ​​the release film 2 is reduced, the possibility of scratches is reduced, thereby reducing the generation of impurity particles.

[0028] In this embodiment, adhesive film 1 replaces conventional release film 2 to protect the interior of aluminum frame 3. The area of ​​adhesive film 1 needs to be larger than the hollow area of ​​aluminum frame 3, so as to completely cover the hollow part of aluminum frame 3. Preferably, the area of ​​adhesive film 1 is the same as the size of aluminum frame 3, that is, the shape of adhesive film 1 is the same as the outer frame shape of release film 2. By adhering the adhesive surface of adhesive film 1 to release film 2, adhesive film 1 can be placed under aluminum frame 3 without affecting the base adhesive 4.

[0029] Furthermore, since the release membrane 2 has a hollow structure, such as Figure 2 As shown, this arrangement allows the adhesive film 1 to directly contact the hollow interior space of the aluminum frame 3. The adhesive film 1 has a much stronger adhesion than the release film 2, effectively adhering impurity particles in the aluminum frame 3. Furthermore, the adhesive film 1 preferably includes pressure-sensitive adhesive applied to the PET base film, forming an adhesive film layer on the PET base film. Even if the same scratch problem occurs as with the release film 2, the presence of this adhesive film layer prevents scattered particles from being transferred to the optical film 6 during vibration.

[0030] Furthermore, the release film 2 is provided with a first gripping corner. When the optical film 6 is transported to the photomask factory, the protective layer of the base adhesive 4 needs to be removed. Since the release film 2 and the adhesive film 1 are the same size as the aluminum frame 3, separating the release film 2 from the frame is inconvenient. By pre-reserving a gripping corner when cutting the release film 2, the entire protective layer of the base adhesive 4 can be easily peeled off from the aluminum frame 3 by simply pulling the first gripping corner.

[0031] Example 2:

[0032] Since the base adhesive 4 protective layer is not set together with the aluminum frame 3 during the preparation of the optical film 6, the base adhesive 4 protective layer can be produced uniformly. To ensure that the produced base adhesive 4 protective layers do not stick together during storage, based on Example 1, as follows... Figure 1 Figure 2 As shown, when this invention is not in use, release paper 5 is also attached to the release surface of the release film 2. Release paper 5 can provide a shield for the exposed adhesive surface of the adhesive film 1, preventing dust from adhering prematurely, and also preventing the protective layers of the base adhesive 4 from sticking together during storage.

[0033] Furthermore, both sides of the release paper 5 are coated with silicone oil, and the side facing away from the release film 2 is smooth, which can effectively prevent dust adhesion. Also, when the base adhesive 4 protective layers provided by this invention are stacked, each base adhesive 4 protective layer will not stick together.

[0034] Furthermore, since release paper 5 is provided, it needs to be torn off when using this invention. Therefore, a second gripping corner 11 adapted to the release film 2 is provided on the adhesive film 1. The first and second gripping corners 11 are preferably the same size and shape. By simultaneously gripping the second and first gripping corners 11, the release paper 5 can be easily separated from the release film 2 and the adhesive film 1, eliminating concerns about the release film 2 detaching from the adhesive film 1.

[0035] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A protective base coat for optical films, characterized in that, It includes an adhesive film (1) and a release film (2) that are bonded together in sequence. The release film (2) is hollow, and the release surface of the release film (2) faces the aluminum frame (3). The adhesive surface of the adhesive film (1) faces the release film (2).

2. The primer protective layer for optical films according to claim 1, characterized in that, The area of ​​the adhesive film (1) is the same as the size of the aluminum frame (3), and the shape and area of ​​the release film (2) are adapted to the aluminum frame (3).

3. The primer protective layer for optical films according to claim 1, characterized in that, The adhesive film (1) includes applying pressure-sensitive adhesive to a PET base film.

4. The primer protective layer for optical films according to claim 1, characterized in that, The release film (2) is provided with a first corner.

5. A protective base coat for optical films according to any one of claims 1 to 4, characterized in that, It also includes release paper (5), which is bonded to release film (2).

6. The primer protective layer for optical films according to claim 5, characterized in that, The release paper (5) is coated with silicone oil on both sides.

7. The primer protective layer for optical films according to claim 6, characterized in that, The adhesive film (1) is provided with a second angle (11) that is adapted to the release film (2).

Images