Splash guard and evaporation boat

Abstract

The utility model discloses a kind of anti-splashing device and evaporation boat, the evaporation boat is inwardly concave with evaporation groove from its top, the anti-splashing device includes the fence of two ends opening, the fence is set in the evaporation boat top, and is surrounded in the groove perimeter of the evaporation groove, the fence is gradually decreased from bottom to top inner perimeter size overall presents non-increasing tendency, and at least one continuous region gradually decreases. The utility model is by being provided with fence, and fence can effectively block splashing metal liquid, improve the quality of finished product after preparation.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation coating technology, and in particular to an anti-splash device and an evaporation boat. Background Technology

[0002] The composite current collector mainly adopts a sandwich structure of "metal-polymer material-metal". In the preparation process, a vacuum deposition method is used to deposit metal on the surface of the base film. Vacuum deposition usually involves placing a rolled base film in a vacuum chamber, which is equipped with an evaporation boat and a wire feeding mechanism. The top of the evaporation boat has an evaporation tank. During operation, an electric current is used to heat the evaporation boat to a preset temperature. The wire feeding mechanism guides metal wires such as aluminum and copper to the top of the evaporation tank. The metal wires melt into liquid metal at high temperature and drip into the evaporation tank. Under the continuous heating of the evaporation boat, the liquid metal vaporizes to form metal vapor and adheres to the surface of the base film, thereby preparing the composite current collector.

[0003] However, in the actual preparation process, factors such as the melting and dripping of metal wire causing instability of the liquid surface or the boiling of the liquid metal during vaporization can lead to splashing of the liquid metal. The splashed liquid metal will adhere to the base film, forming bumps on the base film, resulting in problems with the appearance quality of the metal layer and affecting its use.

[0004] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Utility Model Content

[0005] The purpose of this invention is to provide an anti-splash device and an evaporation boat to reduce the probability of molten metal splashing out of the evaporation boat.

[0006] The purpose of this utility model is achieved through the following technical solution: an anti-splash device for an evaporation boat, wherein the evaporation boat is provided with an evaporation groove recessed from its top, the anti-splash device includes a fence with openings at both ends, the fence is set on the top of the evaporation boat and surrounds the periphery of the groove opening of the evaporation groove, the inner circumferential size of the fence is non-increasing from bottom to top, and at least one continuous area gradually decreases.

[0007] Furthermore, the fence includes at least a decreasing segment, and the decreasing method of the decreasing segment includes single linear decreasing, piecewise linear decreasing, nonlinear decreasing, and piecewise composite decreasing.

[0008] Furthermore, the fence may consist only of decreasing segments, and the decreasing segment may be at least one; or the fence may consist of at least one constant segment and at least one decreasing segment.

[0009] Furthermore, the fence includes a first fence segment and a second fence segment connected from bottom to top. The first fence segment is connected to the evaporation boat. The inner circumference of the first fence segment is constant in the vertical direction, while the inner circumference of the second fence segment gradually decreases in the vertical direction.

[0010] Furthermore, the ratio of the depth of the evaporation tank to the height of the enclosure is 1:5 to 1:8; and / or, the ratio of the height of the second enclosure segment to the height of the first enclosure segment is 1:1.5 to 1:2.5.

[0011] Furthermore, the inner circumferential dimensions of the second fence segment decrease linearly, and the angle between the inner wall of the second fence segment and the vertical direction ranges from 10° to 25°.

[0012] Furthermore, the inner circumferential dimensions of the second fence segment decrease non-linearly, and the inner wall surface of the second fence segment is an arc-shaped concave surface.

[0013] Furthermore, the anti-splash device also includes a connecting structure, through which the fence can be detachably fixed to the evaporation boat.

[0014] Furthermore, the inner circumferential contour of the fence matches the inner circumferential contour of the evaporation tank, and in the vertical direction, the projection of the bottom opening of the fence completely covers the opening of the evaporation tank.

[0015] In addition, this utility model also provides an evaporation boat, including the aforementioned anti-splash device.

[0016] Compared with the prior art, this utility model has the following beneficial effects: Since the dripping or boiling molten metal does not splash strictly in a vertical direction, but has a certain flight angle with the vertical direction, the fence surrounding the evaporation tank opening can effectively block splashed metal, improve the quality of the finished product, improve the cleanliness of the evaporation tank perimeter, and avoid material waste; the inner circumference of the fence decreases from bottom to top, so that the inner wall of the fence approaches the center of the evaporation tank from bottom to top. When the splashed molten metal bounces off the inner wall of the fence, it can prevent the molten metal from bouncing out of the evaporation tank opening, promote the backflow of splashed metal, and guide the metal vapor to flow upward in a concentrated manner, reducing lateral diffusion, thereby improving the uniformity and deposition efficiency of the vapor in the coating area and improving the coating quality; since the fence is open at both ends, after the anti-splash device is installed on the evaporation boat, the metal wire fed by the wire feeding mechanism can flow into the evaporation tank through the openings at both ends of the fence without additional modification to the wire feeding mechanism, making it highly versatile. Attached Figure Description

[0017] Figure 1 This is an exploded structural diagram of the anti-splash device and the evaporation boat of this utility model.

[0018] Figure 2 This is a schematic diagram of the installation of the anti-splash device and the evaporation boat of this utility model.

[0019] Figure 3 This is a cross-sectional schematic diagram of the fence in this utility model.

[0020] Figure 4 This is a cross-sectional view of the fence after the swing blade assembly is installed in this utility model.

[0021] Figure 5 This is a top view of the fence after the swing blade assembly is installed in this utility model.

[0022] Figure 6 This is a schematic diagram of the structure of the swing blade in this utility model.

[0023] Explanation of reference numerals in the attached figures:

[0024] 100. Anti-splash device; 110. Fence; 111. First fence section; 112. Second fence section; 120. Corner bracket; 130. Oscillating blade assembly; 131. Oscillating blade; 132. Connecting shaft; 200. Evaporation boat; 210. Evaporation tank. Detailed Implementation

[0025] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0026] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0027] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0028] Please see Figures 1 to 3 As shown, a splash-proof device 100, corresponding to a preferred embodiment of the present invention, is used in an evaporation boat 200. The evaporation boat 200 has an evaporation tank 210 recessed from its top. The splash-proof device 100 includes a fence 110 with openings at both ends. The fence 110 is disposed on the top of the evaporation boat 200 and surrounds the periphery of the opening of the evaporation tank 210. The inner circumferential dimensions of the fence 110 are generally non-increasing from bottom to top, and at least one continuous area gradually decreases.

[0029] Since the dripping or boiling molten metal does not splash strictly in a vertical direction, but at a certain angle to the vertical, the fence 110 surrounding the opening of the evaporation tank 210 can effectively block splashed metal, improve the quality of the finished product, increase the cleanliness of the evaporation tank 210, and avoid material waste. The inner circumferential dimensions of the fence 110 are generally non-increasing, and at least one continuous area gradually decreases, so that the inner wall of the fence 110 approaches the center of the evaporation tank 210 from bottom to top. When the splashed molten metal bounces off the inner wall of the fence 110, it can prevent the molten metal from bouncing out of the opening of the evaporation tank 210, promote the backflow of splashed metal, and guide the metal vapor to flow upward in a concentrated manner, reducing lateral diffusion, thereby improving the uniformity and deposition efficiency of the vapor in the coating area and improving the coating quality. Since the fence 110 is open at both ends, when the anti-splash device 100 is installed on the evaporation boat 200, the metal wire fed by the wire feeding mechanism can flow into the evaporation tank 210 through the openings at both ends of the fence 110 without additional modification to the wire feeding mechanism, making it highly versatile.

[0030] Furthermore, the fence 110 includes at least a decreasing section, specifically referring to the portion whose inner circumference gradually decreases from bottom to top. The decreasing method of the decreasing section includes single linear decreasing, piecewise linear decreasing, nonlinear decreasing, and piecewise composite decreasing. Specifically, when using single linear decreasing, the inner wall of the decreasing section is a single inclined plane, making the fence 110 very convenient to manufacture and effectively reducing costs. When the decreasing section uses piecewise linear decreasing, the inner wall of the decreasing section can be composed of multiple inclined planes with different inclination angles. Planes with different inclination angles can specifically change the rebound path of the splashed molten metal, reducing the splash escape rate. When the decreasing section uses nonlinear decreasing, the inner wall of the decreasing section is a concave curved surface. The continuous curvature of the curved surface forces the momentum of the splashed molten metal to decompose into tangential and normal components upon impact. Compared to an inclined plane, it has a better blocking effect on the molten metal, resulting in a lower splash molten metal escape rate. When the decreasing segment adopts a segmented composite decreasing pattern, it can simultaneously incorporate both inclined surfaces and curved surfaces, thus combining the advantages of both.

[0031] In one embodiment, the fence 110 may only include a decreasing section. However, with the above structure, at a preset height, the top opening size of the fence 110 is too small, reducing the vapor coverage area and affecting deposition efficiency. In a preferred embodiment, the fence 110 includes at least one constant section and at least one decreasing section. The constant section refers to the portion of the fence 110 whose inner circumference is constant in the vertical direction. By setting a constant section, at the same height, the top opening size of the fence 110 can be avoided from being too small, ensuring deposition efficiency.

[0032] Furthermore, the inner circumferential contour of the enclosure 110 is adapted to the inner circumferential contour of the evaporation tank 210. That is, when the evaporation tank 210 is a square tank, the inner circumferential contour of the enclosure 110 is also square; when the evaporation tank 210 is a circular tank, the inner circumferential contour of the enclosure 110 is also circular, so that the enclosure 110 and the evaporation tank 210 are more compact as a whole. Preferably, the projection of the bottom opening of the enclosure 110 completely covers the opening of the evaporation tank 210, so as to prevent the bottom opening from obstructing the rise of steam in the evaporation tank 210, and also to avoid the generation of dead corners.

[0033] Furthermore, the enclosure 110 includes a first enclosure segment 111 and a second enclosure segment 112 connected from bottom to top. The first enclosure segment 111 is connected to the evaporation boat 200. The first enclosure segment 111 is a constant segment, with its inner circumference remaining constant along the vertical direction. The second enclosure segment 112 is a decreasing segment, with its inner circumference gradually decreasing along the vertical direction. By adopting the above structure, the enclosure 110 can have a simple overall structure, be easy to form, and have excellent anti-splash effect and high deposition efficiency.

[0034] The first fence section 111 and the second fence section 112 can be integrally formed or separately formed and then welded together. This utility model does not impose any restrictions on this. The connection between the first fence section 111 and the second fence section 112 is smooth to avoid creating dead angles that would hinder the backflow of molten metal. The fence 110 is made of high-temperature resistant metal material, such as molybdenum or tungsten, to ensure reliability in high-temperature environments.

[0035] Preferably, the ratio of the depth of the evaporation tank 210 to the height of the enclosure 110 is 1:5 to 1:8; and / or, the ratio of the height of the second enclosure section 112 to the height of the first enclosure section 111 is 1:1.5 to 1:2.5. Tests have shown that by limiting the above ratios, the escape rate of the molten metal can be minimized.

[0036] Furthermore, in this embodiment, the inner circumferential dimension of the second enclosure segment 112 decreases linearly, and the angle between the inner wall surface of the second enclosure segment 112 and the vertical direction ranges from 10° to 25°. This ensures that the molten metal rebounds back into the evaporation tank 210 to a maximum extent, while the top opening of the second enclosure segment 112 is larger to avoid obstructing the normal steam flow out of the evaporation tank 210. Admittedly, in another embodiment, the inner circumferential dimension of the second enclosure segment 112 decreases non-linearly, and the inner wall surface of the second enclosure segment 112 is an arc-shaped concave surface.

[0037] Furthermore, the anti-splash device 100 also includes a connecting structure, through which the fence 110 is detachably fixed to the evaporation boat 200. When the evaporation boat 200 needs to be replaced during production, the anti-splash device 100 on the old evaporation boat 200 can be removed and reinstalled on the new evaporation boat 200. The anti-splash device 100 can be reused, avoiding waste and effectively reducing costs.

[0038] In one embodiment, the connection structure is an L-shaped corner bracket 120, which is placed between the fence 110 and the evaporation boat 200. The corner bracket 120 and the fence 110 are fixed together by threaded fasteners, and the corner bracket 120 and the evaporation boat 200 are tightened together by threaded fasteners, including bolts, screws, etc. Several corner brackets 120 can be evenly arranged along the circumference of the fence 110 to improve the stability of the connection between the two.

[0039] In another embodiment, the connection structure is a magnetic attraction structure, which includes a permanent magnet and a magnetic conductor. The permanent magnet is embedded in the bottom end of the fence 110, and the top of the evaporation boat 200 is recessed with an installation groove in which the magnetic conductor is embedded. When the fence 110 is installed in a preset position, the permanent magnet and the magnetic conductor correspond to each other to achieve magnetic attraction, thus securing the fence 110 and the evaporation boat 200 together. Preferably, the top of the evaporation boat 200 may also be provided with several positioning blocks, which surround the periphery of the fence 110 to position the fence 110 and facilitate reliable alignment of the permanent magnet and the magnetic conductor.

[0040] In addition, the connection structure can also use a snap-fit ​​method to fasten the evaporation boat 200 and the enclosure 110. For example, the bottom end of the enclosure 110 is integrated with multiple elastic claws, and the top of the evaporation boat 200 is recessed with corresponding and compatible slots. By pressing down on the enclosure 110, the elastic claws deform and embed into the slots, automatically locking. When it is necessary to disassemble the enclosure 110, only a large upward force needs to be applied to separate the two. Alternatively, a rotary locking snap-fit ​​can be used, such as a chuck with a spiral groove at the bottom of the enclosure 110, and a corresponding locking post fixed at the top of the evaporation boat 200. When the enclosure 110 is placed on top of the evaporation boat 200, rotating the enclosure 110 vertically causes the locking post to slide into the locking position along the spiral groove.

[0041] It should be noted that the above-mentioned connection structures are all made of high-temperature resistant materials to reliably connect the fence 110 and the evaporation boat 200 in high-temperature environments.

[0042] Furthermore, referring to Figures 4 to 6 As shown, in a preferred embodiment, the anti-splash device 100 further includes a blade assembly 130, which blocks the opening of the evaporation tank 210. The blade assembly 130 includes multiple blades 131 arranged side by side with adjustable angles, and gaps are formed between adjacent blades 131 to allow steam to flow. By setting the blade assembly 130, it can cooperate with the enclosure 110 to block splashed molten metal, further reducing the escape rate of molten metal. At the same time, since the angle of the blades 131 is adjustable, it can adjust the outflow direction of molten metal vapor to meet different deposition requirements.

[0043] In this embodiment, the pendulum blade 131 is housed within the second enclosure section 112 and located near its top opening. Each pendulum blade 131 has a connecting shaft 132 on both sides. The connecting shaft 132 is rotatably connected to the inner wall of the second enclosure section 112, and its axial direction is parallel to the horizontal direction, thereby driving the pendulum blade 131 to rotate. The connecting shaft 132 and the second enclosure section 112 are tightly fitted together, relying on friction to ensure that the pendulum blade 131 and the second enclosure section 112 are relatively fixed when no adjustment force is applied. For example, a damper can be provided between the connecting shaft 132 and the second enclosure section 112.

[0044] The multiple swing blades 131 can be arranged side by side along the length or width of the second fence section 112. This utility model does not limit this. When the multiple swing blades 131 are arranged along the length of the second fence section 112, the two connecting shafts 132 of the swing blades 131 are respectively connected to the two long sides of the second fence section 112. When the multiple swing blades 131 are arranged along the width of the second fence section 112, the two connecting shafts 132 of the swing blades 131 are respectively connected to the two short sides of the second fence section 112.

[0045] In addition, this utility model also provides an evaporation boat 200, which includes the aforementioned anti-splash device 100.

[0046] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A splash-proof device for an evaporation boat (200), said evaporation boat (200) having an evaporation groove (210) recessed inward from its top, characterized in that, The anti-splash device (100) includes a fence (110) with openings at both ends. The fence (110) is set on the top of the evaporation boat (200) and surrounds the periphery of the opening of the evaporation tank (210). The inner circumferential dimensions of the fence (110) are generally non-increasing from bottom to top, and at least one continuous area gradually decreases.

2. The splash-proof device as described in claim 1, characterized in that, The fence (110) includes at least a decreasing segment, and the decreasing method of the decreasing segment includes single linear decreasing, piecewise linear decreasing, nonlinear decreasing and piecewise composite decreasing.

3. The splash-proof device as described in claim 2, characterized in that, The fence (110) comprises only a decreasing segment, and the decreasing segment is at least one; or, the fence (110) comprises at least one constant segment and at least one decreasing segment.

4. The splash-proof device as described in claim 1, characterized in that, The fence (110) includes a first fence section (111) and a second fence section (112) connected from bottom to top. The first fence section (111) is connected to the evaporation boat (200). The inner circumference of the first fence section (111) is constant in the vertical direction, and the inner circumference of the second fence section (112) gradually decreases in the vertical direction.

5. The splash-proof device as described in claim 4, characterized in that, The depth of the evaporation tank (210) is in the ratio of the height of the fence (110) to 1:5 to 1:8; and / or the height ratio of the second fence section (112) to the first fence section (111) is 1:1.5 to 1:2.

5.

6. The splash-proof device as described in claim 4, characterized in that, The inner circumferential dimension of the second fence section (112) decreases linearly, and the angle between the inner wall surface of the second fence section (112) and the vertical direction ranges from 10° to 25°.

7. The splash-proof device as described in claim 4, characterized in that, The inner circumferential dimensions of the second fence section (112) decrease non-linearly, and the inner wall surface of the second fence section (112) is an arc-shaped concave surface.

8. The splash-proof device as claimed in claim 1, characterized in that, The splash-proof device (100) also includes a connecting structure, through which the fence (110) is detachably fixed to the evaporation boat (200).

9. The splash-proof device as claimed in claim 1, characterized in that, The inner circumferential contour of the fence (110) matches the inner circumferential contour of the evaporation tank (210), and in the vertical direction, the projection of the bottom opening of the fence (110) completely covers the opening of the evaporation tank (210).

10. An evaporation boat, characterized in that, Includes the splash-proof device (100) as described in any one of claims 1 to 9.

Images