High purity silane filling apparatus

Abstract

The utility model discloses a kind of high-purity silane filling equipment, including compressor, further including protective box, silane storage tank, flow automatic regulating assembly and gas pipe, the flow automatic regulating assembly is located on the air outlet of compressor, the gas pipe is located on flow automatic regulating assembly and extends to protective box, the silane storage tank is located in protective box, the gas inlet of the gas pipe is connected with silane storage tank, the positioning assembly for positioning silane storage tank is equipped in protective box.The utility model relates to the technical field of silane production, specifically provides a kind of high-purity silane filling equipment, which is convenient for automatic flow regulation and has higher safety.

Description

Technical Field

[0001] This utility model relates to the field of silane production technology, specifically to a high-purity silane filling device. Background Technology

[0002] To facilitate the storage and transportation of silanes, filling equipment is typically used to fill the silanes into storage tanks.

[0003] For example, Chinese utility model patent with publication number "CN213576784U" discloses a silane filling device, including a compressor, an inlet, an outlet pipe, and a silane bottle. One side of the outlet pipe is connected to an inflation pipe, and one side of the inflation pipe is connected to an inflation port. An inlet switch is installed on one side of the inflation port, and the silane bottle is fixed to the bottom of the inlet switch. A protective structure is provided on the outer surface of the inlet switch. This utility model, by installing a first adjusting plate and a second adjusting plate inside the outlet pipe, with the first and second adjusting plates in close contact, can control the flow rate of the silane. Since the flow rate of the silane needs to be adjusted during filling to prevent overfilling, rotating the adjusting switch causes the second adjusting plate and the first adjusting plate to rotate, causing the adjusting holes on the second and first adjusting plates to be interleaved. By adjusting the permeability between the adjusting holes, the flow rate of the silane can be adjusted.

[0004] However, the above-mentioned filling device still has some shortcomings: when adjusting the flow rate, the first and second adjustment plates need to be manually rotated and adjusted. On the one hand, manual adjustment may not be precise enough, and on the other hand, manual operation may pose safety hazards in a high-pressure environment. In the above-mentioned filling device, the protective shell is connected to the protective block by threads. The threads are prone to corrosion or wear, and can only protect the filling part, so its protective effect is poor. Utility Model Content

[0005] In view of the above situation and to overcome the shortcomings of the prior art, this utility model provides a high-purity silane filling device that is easy to automatically adjust the flow rate and has higher safety.

[0006] The technical solution adopted by this utility model is as follows: This utility model provides a high-purity silane filling device, including a compressor, a protective box, a silane storage tank, an automatic flow regulating component, and a gas delivery pipe. The automatic flow regulating component is located at the outlet of the compressor, the gas delivery pipe is located on the automatic flow regulating component and extends into the protective box, the silane storage tank is located inside the protective box, the gas delivery pipe is connected to the inlet of the silane storage tank, and a positioning component for positioning the silane storage tank is provided inside the protective box.

[0007] Furthermore, the automatic flow regulation assembly includes a regulating valve, a regulating cylinder, a spring, a sliding plate, a second cylinder, and a piston. The regulating valve is fixed to the compressor outlet via a flange, and the gas delivery pipe is fixed to the regulating valve via a flange. The regulating valve has an inlet channel, an outlet channel, and a regulating chamber. The regulating chamber has a partition that divides the regulating chamber into a first chamber and a second chamber from top to bottom. The compressor outlet communicates with the second chamber via the inlet channel, and the gas delivery pipe communicates with the first chamber via the outlet channel. The first chamber and the second chamber... The two parts are connected by an opening. The regulating cylinder is located at the opening and extends upward to the outside of the regulating valve. The portion of the regulating cylinder located in the first cavity has several sets of regulating ports arranged in a ring array. The spring is located on the inner top wall of the regulating cylinder. The sliding plate is located on the spring. The sliding plate and the regulating cylinder are connected in a sealed sliding connection. The second cylinder is located at the top of the regulating cylinder. The piston is located on the output shaft of the second cylinder. The piston can block the regulating ports. The sliding plate and the output shaft of the second cylinder are connected in a sealed sliding connection. The piston and the regulating cylinder are connected in a sealed sliding connection.

[0008] Furthermore, the positioning component includes a first cylinder and a clamping plate. The first cylinder is mounted on the protective box, and the clamping plate is mounted on the output shaft of the first cylinder. Two sets of the first cylinder are symmetrically arranged, and the number of clamping plates is equal to the number of the first cylinders and corresponds one-to-one.

[0009] Furthermore, a silane concentration detector is installed inside the protective box on the side near the air inlet of the silane storage tank, and an alarm is installed on the top of the protective box. The silane concentration detector is electrically connected to the alarm.

[0010] Furthermore, the protective box is hinged to a door, and the door is equipped with a lock, which locks the door to the protective box.

[0011] Furthermore, the protective box is equipped with a fireproof layer inside.

[0012] Furthermore, the protective box is made of aluminum alloy or stainless steel.

[0013] The beneficial effects of this utility model using the above structure are as follows: This solution includes an automatic flow adjustment component, which facilitates automatic flow adjustment, improves adjustment accuracy, simplifies operation procedures, and reduces the risk of human error. This solution also includes a protective box, which provides comprehensive protection for the silane storage tank, enhancing the overall safety of the equipment. Furthermore, this solution includes a positioning component, which facilitates clamping and positioning of the silane storage tank during filling, thus better ensuring the stability of the silane storage tank during the filling process. Finally, this solution includes a silane concentration detector and an alarm. The silane concentration detector monitors the silane concentration inside the protective box; if the concentration is too high, there may be a risk of leakage, and the alarm will sound, promptly alerting staff to take appropriate measures. Attached Figure Description

[0014] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0015] Figure 1 This is a perspective view of an embodiment of the present utility model;

[0016] Figure 2 This is an exploded view of the automatic flow adjustment component in an embodiment of this utility model;

[0017] Figure 3 This is a front view of an embodiment of the present utility model;

[0018] Figure 4 This is a left view of an embodiment of the present utility model;

[0019] Figure 5 This is a top view of an embodiment of the present utility model;

[0020] Figure 6 for Figure 4 A sectional view along section AA;

[0021] Figure 7 for Figure 6 Enlarged view of part A in the middle.

[0022] The components include: 1. Compressor; 2. Protective box; 3. Silane storage tank; 4. Automatic flow regulation component; 5. Gas delivery pipe; 6. Box door; 7. Lock; 8. Positioning component; 9. First cylinder; 10. Clamping plate; 11. Regulating valve; 12. Regulating cylinder; 13. Spring; 14. Sliding plate; 15. Second cylinder; 16. Piston; 17. Inlet channel; 18. Outlet channel; 19. Partition; 20. First chamber; 21. Second chamber; 22. Regulating port; 23. Silane concentration detector; 24. Alarm; 25. Fireproof layer. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0024] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0025] like Figures 1-7 As shown, this utility model discloses a high-purity silane filling device, including a compressor 1, a protective box 2, a silane storage tank 3, an automatic flow regulating component 4, and a gas delivery pipe 5. The automatic flow regulating component 4 is located at the outlet of the compressor 1, and the gas delivery pipe 5 is located on the automatic flow regulating component 4 and extends into the protective box 2. The silane storage tank 3 is located inside the protective box 2, and the gas delivery pipe 5 is connected to the inlet of the silane storage tank 3. The protective box 2 is equipped with a positioning component 8 for positioning the silane storage tank 3. A door 6 is hinged on the protective box 2, and a lock 7 is provided on the door 6. The door 6 is locked to the protective box 2 by the lock 7. The protective box 2 has a fireproof layer 25 inside. The protective box 2 is made of aluminum alloy or stainless steel. A silane concentration detector 23 is provided on the side of the protective box 2 near the inlet of the silane storage tank 3. An alarm 24 is provided on the top of the protective box 2, and the silane concentration detector 23 is electrically connected to the alarm 24.

[0026] The automatic flow control assembly 4 includes a control valve 11, a control cylinder 12, a spring 13, a sliding plate 14, a second cylinder 15, and a piston 16. The control valve 11 is fixed to the outlet of the compressor 1 via a flange, and the gas delivery pipe 5 is fixed to the control valve 11 via a flange. The control valve 11 has an inlet channel 17, an outlet channel 18, and a control chamber. The control chamber has a partition 19, which divides the control chamber into a first chamber 20 and a second chamber 21 from top to bottom. The outlet of the compressor 1 is connected to the second chamber 21 via the inlet channel 17, and the gas delivery pipe 5 is connected to the first chamber 20 via the outlet channel 18. The first chamber 20 and the second chamber 21 are connected in series. The two parts are connected by an opening. The regulating cylinder 12 is located at the opening and extends upward to the outside of the regulating valve 11. The part of the regulating cylinder 12 located in the first cavity 20 has several sets of regulating ports 22 arranged in a ring array. The spring 13 is located on the inner top wall of the regulating cylinder 12. The sliding plate 14 is located on the spring 13. The sliding plate 14 and the regulating cylinder 12 are sealed and slidably connected. The second cylinder 15 is located at the top of the regulating cylinder 12. The piston 16 is located on the output shaft of the second cylinder 15. The piston 16 can block the regulating ports 22. The sliding plate 14 and the output shaft of the second cylinder 15 are sealed and slidably connected. The piston 16 and the regulating cylinder 12 are sealed and slidably connected.

[0027] The positioning component 8 includes a first cylinder 9 and a clamping plate 10. The first cylinder 9 is mounted on the protective box 2, and the clamping plate 10 is mounted on the output shaft of the first cylinder 9. Two sets of the first cylinder 9 are symmetrically arranged, and the number of clamping plates 10 is equal to the number of the first cylinder 9 and corresponds one-to-one.

[0028] In practical use, place the silane storage tank 3 into the protective box 2, then start the first cylinder 9. The first cylinder 9 drives the clamping plate 10 to move closer to the silane storage tank 3. The two sets of clamping plates 10 clamp and position the silane storage tank 3. Then connect the gas supply pipe 5 to the gas inlet of the silane storage tank 3. After the connection is complete, close the box door 6 and lock the box door 6 with the lock 7. Only then can the silane in the compressor 1 be filled into the silane storage tank 3.

[0029] When it is necessary to adjust the flow rate of silane, simply start the second cylinder 15, which will drive the piston 16 to rise and fall. By raising and lowering the piston 16, the opening of the regulating port 22 can be adjusted, thereby adjusting the flow rate of silane. Silane will enter the regulating cylinder 12 through the air intake channel 17 and the second chamber 21 in sequence, and then enter the first chamber 20 and the air outlet channel 18 through the regulating port 22 in sequence, and finally be filled into the silane storage tank 3.

[0030] The protective box 2 can provide overall protection for the silane storage tank 3 during the filling process, which helps to improve the protection effectiveness and enhance the safety of the equipment. During the filling process, the silane concentration detector 23 can monitor the silane concentration in the protective box 2. If the concentration is too high, there may be a risk of leakage. At this time, the alarm 24 will sound an alarm to promptly remind the staff to take countermeasures.

[0031] In summary, this solution includes an automatic flow rate adjustment component 4, which facilitates automatic flow rate adjustment, improves adjustment accuracy, simplifies operation procedures, and reduces human error risks. The solution also includes a protective enclosure 2, which provides comprehensive protection for the silane storage tank 3, enhancing the overall safety of the equipment. Furthermore, a positioning component 8 is included, which allows for clamping and positioning of the silane storage tank 3 during filling, ensuring its stability. Finally, the solution incorporates a silane concentration detector 23 and an alarm 24. The detector 23 monitors the silane concentration within the protective enclosure 2; if the concentration is too high, a potential leakage risk is detected, triggering the alarm 24 to promptly alert personnel to take appropriate measures.

[0032] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0033] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0034] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A high-purity silane filling device, comprising a compressor (1), characterized in that: It also includes a protective box (2), a silane storage tank (3), an automatic flow regulating component (4), and a gas delivery pipe (5). The automatic flow regulating component (4) is located at the outlet of the compressor (1). The gas delivery pipe (5) is located on the automatic flow regulating component (4) and extends into the protective box (2). The silane storage tank (3) is located inside the protective box (2). The gas delivery pipe (5) is connected to the inlet of the silane storage tank (3). The protective box (2) is equipped with a positioning component (8) for positioning the silane storage tank (3). The automatic flow control assembly (4) includes a control valve (11), a control cylinder (12), a spring (13), a sliding plate (14), a second cylinder (15), and a piston (16). The control valve (11) is fixed to the outlet of the compressor (1) by a flange. The gas delivery pipe (5) is fixed to the control valve (11) by a flange. The control valve (11) is provided with an inlet channel (17), an outlet channel (18), and a control chamber. The control chamber is provided with a partition (19). The partition (19) divides the control chamber into a first chamber (20) and a second chamber (21) from top to bottom. The outlet of the compressor (1) is connected to the second chamber (21) through the inlet channel (17). The gas delivery pipe (5) is connected to the first chamber (20) through the outlet channel (18). The first chamber (20) and the second chamber (21) are connected to each other. The bodies (21) are connected by an opening. The regulating cylinder (12) is located at the opening and extends upward to the outside of the regulating valve (11). The portion of the regulating cylinder (12) located in the first cavity (20) has several sets of regulating ports (22) arranged in a ring array. The spring (13) is located on the inner top wall of the regulating cylinder (12). The sliding plate (14) is located on the spring (13). The sliding plate (14) and the regulating cylinder (12) are connected in a sealed sliding connection. The second cylinder (15) is located at the top of the regulating cylinder (12). The piston (16) is located on the output shaft of the second cylinder (15). The piston (16) can block the regulating ports (22). The sliding plate (14) and the output shaft of the second cylinder (15) are connected in a sealed sliding connection. The piston (16) and the regulating cylinder (12) are connected in a sealed sliding connection.

2. The high-purity silane filling equipment according to claim 1, characterized in that: The positioning component (8) includes a first cylinder (9) and a clamping plate (10). The first cylinder (9) is mounted on the protective box (2), and the clamping plate (10) is mounted on the output shaft of the first cylinder (9). The first cylinder (9) is symmetrically arranged in two sets, and the number of clamping plates (10) is equal to the number of the first cylinder (9) and corresponds one-to-one.

3. The high-purity silane filling equipment according to claim 1, characterized in that: The protective box (2) is equipped with a silane concentration detector (23) on the side near the air inlet of the silane storage tank (3), and an alarm (24) is provided on the top of the protective box (2). The silane concentration detector (23) is electrically connected to the alarm (24).

4. The high-purity silane filling equipment according to claim 1, characterized in that: The protective box (2) is hinged with a door (6), and the door (6) is equipped with a lock (7). The door (6) is locked to the protective box (2) by the lock (7).

5. The high-purity silane filling equipment according to claim 1, characterized in that: The protective box (2) is equipped with a fireproof layer (25) inside.

6. The high-purity silane filling equipment according to claim 1, characterized in that: The protective box (2) is made of aluminum alloy or stainless steel.

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