Thermal field protection assembly and processing apparatus

Abstract

The application provides a hot field protection assembly and a processing device, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of hot field damage caused by quartz tube burst in the process. The hot field protection assembly is applied to the processing device, the processing device comprises a furnace chamber, a furnace tube and a heating structure, and the hot field protection assembly comprises: a protective sleeve which is sleeved outside the furnace tube and is arranged between the heating structure and the furnace tube, the size of the protective sleeve in a first direction is greater than the size of the furnace tube in the first direction, so that the protective sleeve can wrap the side and both ends of the furnace tube, the protective sleeve has flexibility, wherein, after the furnace tube is broken, the protective sleeve can block the fragments of the furnace tube from contacting the heating structure, thereby preventing the hot field of the processing device from being damaged; and the protective sleeve can wrap the broken furnace tube and the fragments of the furnace tube, so that the protective sleeve can carry the broken furnace tube and the fragments of the furnace tube (and the fragments of the product) out of the furnace chamber, and the cleaning efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a thermal field protection component and processing equipment. Background Technology

[0002] In the production of photovoltaic materials, processing is required under special environments such as high temperature and high pressure, which are typically provided by sealed quartz tubes. However, the harsh environment of high temperature and high pressure can also lead to a short lifespan of the quartz tube. If the quartz tube breaks, the high or negative pressure inside will cause the quartz fragments to be ejected, making them come into contact with the heating wires inside the furnace outside the quartz tube. This can disrupt the thermal field of the processing equipment. Furthermore, if the product inside the quartz tube is a conductive product such as a silicon wafer, if the product falls into the thermal field and comes into contact with the heating wires, it can cause a short circuit in the heating wires.

[0003] In related technologies, aluminosilicate fibers are typically used to partially bury the heating wire, leaving only the remaining portion exposed. This reduces the susceptible area of ​​the heating wire and lowers the probability of damage caused by the quartz tube rupture. However, this structure cannot completely prevent damage from quartz tube rupture, especially furnace damage caused by quartz tube rupture. Furthermore, because the aluminosilicate fibers bury part of the heating wire, reducing the exposed area, the heating efficiency decreases, increasing energy consumption. Utility Model Content

[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a thermal field protection component and processing equipment.

[0005] In a first aspect, one embodiment of this application provides a thermal protection component applied to a processing equipment. The processing equipment includes a furnace chamber, a furnace tube, and a heating structure. The furnace chamber is fitted over the furnace tube, and the heating structure is disposed on the side of the furnace chamber near the furnace tube. The heating structure is configured to heat the furnace tube, which extends along a first direction. The thermal protection component includes a protective sleeve fitted over the furnace tube and disposed between the heating structure and the furnace tube. The protective sleeve has a larger dimension in the first direction than the furnace tube in the first direction, so that the protective sleeve can cover the sides and both ends of the furnace tube. The protective sleeve is flexible.

[0006] In some embodiments, the protective sleeve has at least one heat exchange hole through which the heat generated by the heating structure can be transferred to the furnace tube.

[0007] In some embodiments, the diameter of the heat exchange holes ranges from 1 mm to 2 mm.

[0008] In some embodiments, the pore density of the protective sleeve ranges from 10 ppi to 20 ppi.

[0009] In some embodiments, the furnace tube has a process chamber, the processing equipment further includes a gas path assembly, the protective sleeve has at least one opening through which the furnace tube passes to fit the protective sleeve onto the furnace tube, and the gas path assembly can communicate with the process chamber through the opening.

[0010] In some embodiments, the protective sleeve extends along a first direction and has an opening at one end in the first direction to allow the gas passage assembly to communicate with the process chamber through the opening. In the event of a furnace tube rupture, the protective sleeve can be dragged from the open end of the protective sleeve so that the fragments of the furnace tube remain inside the protective sleeve.

[0011] In some embodiments, the protective sleeve extends along a first direction, and the protective sleeve has openings at both ends in the first direction, so that the gas passage assembly can communicate with the process chamber through the openings at both ends of the protective sleeve; wherein, the thermal protection assembly further includes: a binding member, which is capable of binding at least one end of the protective sleeve, and after the furnace tube ruptures, the binding member is capable of binding one end of the protective sleeve so that when the protective sleeve is dragged from the other end of the protective sleeve, the fragments of the furnace tube remain inside the protective sleeve.

[0012] In some embodiments, the protective sleeve is made of aluminum silicate fiber or aluminum oxide fiber.

[0013] In some embodiments, the thickness of the protective sleeve ranges from 0.5 mm to 1 mm.

[0014] Secondly, one embodiment of this application provides a processing apparatus, including: a furnace tube having a process chamber configured to contain a product; a furnace chamber fitted outside the furnace tube; a heating structure disposed on the side of the furnace chamber near the furnace tube, the heating structure being configured to heat the furnace tube; and a thermal protection component of any of the first aspects described above, wherein a protective sleeve of the thermal protection component is fitted outside the furnace tube and disposed between the heating structure and the furnace tube.

[0015] The thermal protection component and processing equipment proposed in this application have the following advantages: First, since the protective sleeve is disposed between the heating structure and the furnace tube, after the furnace tube breaks, the protective sleeve can prevent the fragments of the furnace tube from contacting the heating structure after being ejected, thus preventing damage to the thermal field of the processing equipment. Second, the protective sleeve can also prevent the products (such as silicon wafers) in the process chamber from contacting the heating structure, thereby preventing a short circuit in the heating structure. Third, since the size of the protective sleeve in the first direction is larger than that of the furnace tube in the first direction, the protective sleeve can completely wrap around the furnace tube and furnace tube fragments. When cleaning the broken furnace tube and furnace tube fragments, the furnace tube and furnace tube fragments can be moved out of the furnace chamber by dragging the protective sleeve, improving cleaning efficiency. Fourth, since the protective sleeve is flexible, it is easy to tighten the opening of the protective sleeve when cleaning the broken furnace tube and furnace tube fragments, preventing the furnace tube fragments from falling out of the opening. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain the application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a schematic diagram of the structure of a protective sleeve provided in an exemplary embodiment of this application.

[0018] Figure 2 The diagram shown is a schematic representation of the protective sleeve and furnace tube provided in an exemplary embodiment of this application.

[0019] Figure 3 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0020] Figure label:

[0021] 100. Thermal protection component; 110. Protective sleeve; 111. Heat exchange hole; 112. Opening; 200. Processing equipment; 210. Furnace chamber; 211. Groove; 220. Furnace tube. Detailed Implementation

[0022] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0023] Figure 1 The diagram shown is a structural schematic of a protective sleeve provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a structural schematic of the protective sleeve and furnace tube provided in an exemplary embodiment of this application. Figure 3 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0024] like Figures 1-3As shown, this application embodiment provides a thermal protection component 100, applied to a processing equipment 200. The processing equipment 200 includes a furnace chamber 210, a furnace tube 220, and a heating structure (not shown). The furnace chamber 210 is sleeved outside the furnace tube 220, and the heating structure is disposed on the side of the furnace chamber 210 near the furnace tube 220. The heating structure is configured to heat the furnace tube 220. The furnace tube 220 extends along a first direction (such as the X direction in the figure). The thermal protection component 100 includes a protective sleeve 110, which is sleeved outside the furnace tube 220 and disposed between the heating structure and the furnace tube 220. The size of the protective sleeve 110 in the first direction is larger than the size of the furnace tube 220 in the first direction, so that the protective sleeve 110 can wrap around the sides and both ends of the furnace tube 220. The protective sleeve 110 is flexible.

[0025] In this configuration, after the furnace tube 220 ruptures, the protective sleeve 110 can prevent the fragments of the furnace tube 220 (and product fragments) from contacting the heating structure. Furthermore, the protective sleeve 110 can wrap the ruptured furnace tube 220 and its fragments (and product fragments), thereby enabling the protective sleeve 110 to carry the ruptured furnace tube 220 and its fragments (and product fragments) out of the furnace chamber 210.

[0026] For example, the processing equipment 200 is a low-pressure chemical vapor deposition (LPCVD) equipment.

[0027] For example, the heating structure includes multiple heating wires.

[0028] For example, the furnace chamber 210 has a groove 211 on the side near the furnace tube 220, and the heating structure is disposed in the groove 211.

[0029] For example, the furnace tube 220 is made of quartz.

[0030] For example, if the furnace tube 220 has a dimension of 1 meter in the first direction, then the protective sleeve 110 has a dimension of 1.2 meters in the first direction.

[0031] In the above embodiments, firstly, since the protective sleeve 110 is disposed between the heating structure and the furnace tube 220, after the furnace tube 220 breaks, the protective sleeve 110 can prevent fragments of the furnace tube 220 from contacting the heating structure after being emitted, thus preventing damage to the thermal field of the processing equipment 200; secondly, the protective sleeve 110 can also prevent products (such as silicon wafers) in the process chamber from contacting the heating structure, thereby preventing a short circuit in the heating structure; thirdly, since the size of the protective sleeve 110 in the first direction is larger than the size of the furnace tube 220 in the first direction... First, the protective sleeve 110 can completely cover the furnace tube 220 and its fragments. When cleaning the broken furnace tube 220 and its fragments, the furnace tube 220 and its fragments can be moved out of the furnace chamber 210 by dragging the protective sleeve 110, which improves cleaning efficiency. Second, because the protective sleeve 110 is flexible, it is easy to tighten the opening 112 of the protective sleeve 110 when cleaning the broken furnace tube 220 and its fragments, so as to prevent the furnace tube 220 fragments from falling out of the opening 112.

[0032] In some embodiments, such as Figure 1 As shown, the protective sleeve 110 has at least one heat exchange hole 111, through which the heat generated by the heating structure can be transferred to the furnace tube 220.

[0033] For example, the cross-sectional shape of the heat exchange hole 111 can be circular, elliptical, rectangular, rhomboid, or other polygonal.

[0034] For example, the multiple heat exchange holes 111 can be arranged in an M-row N-column configuration, or they can be arranged in an alternating pattern (such as a fishing net).

[0035] Since a protective sleeve 110 is added between the furnace tube 220 and the heating structure, it hinders the heat radiation of the heating structure to the furnace tube 220. In the above embodiment, by setting the heat exchange hole 111, the heat generated by the heating structure can be transferred to the furnace tube 220 through the heat exchange hole 111, thereby improving heating efficiency and reducing energy consumption.

[0036] In some embodiments, the diameter of the heat exchange hole 111 ranges from 1 mm to 2 mm.

[0037] For example, the diameter of the heat exchange hole 111 is 1.5 mm.

[0038] If the aperture of the heat exchange hole 111 is too small, the heat transfer efficiency will be low. If the aperture of the heat exchange hole 111 is too large, product fragments will easily detach from the protective sleeve 110 through the heat exchange hole 111, and the structural strength will be low. In the above embodiment, by making the aperture of the heat exchange hole 111 range from 1mm to 2mm, the heating efficiency can be improved while making it difficult for product fragments to detach from the protective sleeve 110 and having a certain structural strength.

[0039] In some embodiments, the pore density of the protective sleeve 110 ranges from 10 ppi to 20 ppi.

[0040] Porosity refers to the average number of pores per unit inch of length.

[0041] For example, the pore density of the protective sleeve 110 is 12 ppi.

[0042] In the above embodiments, by making the protective sleeve 110 have a sufficiently high pore density, even if the protective sleeve 110 has more heat exchange holes 111, more heat can pass through the heat exchange holes 111, thereby improving the heating efficiency.

[0043] In some embodiments, the furnace tube 220 has a process chamber, the processing equipment 200 further includes a gas path assembly, the protective sleeve 110 has at least one opening 112 through which the furnace tube 220 passes, so that the protective sleeve 110 is fitted onto the furnace tube 220, and the gas path assembly can communicate with the process chamber through the opening 112.

[0044] For example, the gas path assembly includes at least one gas conduit, and the gas path assembly is configured to introduce process gas into the process chamber.

[0045] In the above embodiments, by providing an opening 112 to the protective sleeve 110, the protective sleeve 110 can be fitted onto the furnace tube 220, and the gas passage assembly can pass through the protective sleeve 110 to communicate with the process chamber.

[0046] In some embodiments, the protective sleeve 110 extends along a first direction and has an opening 112 at one end in the first direction so that the gas passage assembly can communicate with the process chamber through the opening 112. After the furnace tube 220 ruptures, the protective sleeve 110 can be dragged by the end of the protective sleeve 110 with the opening 112 so that the fragments of the furnace tube 220 (and the fragments of the product) remain inside the protective sleeve 110.

[0047] In the above embodiment, after the furnace tube 220 breaks, if the end of the protective sleeve 110 with the opening 112 is dragged, the fragments of the furnace tube 220 (and the fragments of the product) will not easily fall out of the protective sleeve 110 from the opening 112.

[0048] In some embodiments, the protective sleeve 110 extends along a first direction, and each end of the protective sleeve 110 has an opening 112 in the first direction, so that the gas passage assembly can communicate with the process chamber through the openings 112 at both ends of the protective sleeve 110. The thermal protection assembly 100 further includes a strapping member (not shown). The strapping member is capable of strapping at least one end of the protective sleeve 110. After the furnace tube 220 ruptures, the strapping member can strap one end of the protective sleeve 110 so that when the protective sleeve 110 is dragged from the other end of the protective sleeve 110, fragments of the furnace tube 220 (and product fragments) remain inside the protective sleeve 110.

[0049] For example, such as Figure 2 As shown, the strapping can be tied at the position indicated by the dotted line. Specifically, when strapping, one end of the protective sleeve 110 can be tightened manually first, and then the strapping can be wrapped around that end of the protective sleeve 110 multiple times to tighten that end of the protective sleeve.

[0050] In the above embodiment, by providing two openings 112 to the protective sleeve 110, the gas path assembly can pass through the openings 112 to introduce process gas from both ends of the furnace tube 112 into the process chamber, making the gas in the process chamber more uniform. Furthermore, by providing a binding component, one end opening of the protective sleeve 110 can be sealed after the furnace tube 220 breaks, thereby preventing fragments of the furnace tube 220 (and product fragments) from falling out of the opening at the other end 110 of the protective sleeve when the protective sleeve 110 is dragged from one end.

[0051] In addition, when the protective sleeve 110 is put on the furnace tube 220, after the protective sleeve 110 is put on the first end of the furnace tube 220, the end of the protective sleeve 110 closest to the first end of the furnace tube 220 can be tied first. Then, by moving the furnace tube 220 or pulling the protective sleeve 110, the protective sleeve 110 can be wrapped around the second end of the furnace tube 220. After the protective sleeve 110 is put on, the tie can be removed.

[0052] In some embodiments, the protective cover 110 is made of aluminum silicate fiber or aluminum oxide fiber.

[0053] In the above embodiments, both aluminum silicate fiber and alumina fiber have advantages such as thermal shock resistance, high temperature resistance, high strength, and oxidation resistance. By using this material, the risk of damage to the strapping components can be reduced, and the strapping components can have a longer service life.

[0054] In some embodiments, the thickness of the protective cover 110 ranges from 0.5 mm to 1 mm.

[0055] For example, the thickness of the protective cover 110 is 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, or 1.0mm.

[0056] If the protective sleeve 110 is too thick, it will insulate heat, leading to reduced heating efficiency. If the protective sleeve 110 is too thin, it will be damaged during towing due to the weight of the broken furnace tube 220 and its fragments. In the above embodiment, by making the thickness of the protective sleeve 110 range from 0.5mm to 1mm, the protective sleeve 110 can have sufficient structural strength without excessively blocking heat transfer.

[0057] Based on the same concept, such as Figure 3 As shown in the illustration, this application provides a processing apparatus 200, which includes a furnace tube 220, a furnace chamber 210, a heating structure, and a thermal protection component 100 as described in the above embodiment. The furnace tube 220 has a process chamber configured to accommodate products. The furnace chamber 210 is sleeved outside the furnace tube 220. The heating structure is disposed on the side of the furnace chamber 210 near the furnace tube 220 and is configured to heat the furnace tube 220. The protective sleeve 110 of the thermal protection component 100 is sleeved outside the furnace tube 220 and disposed between the heating structure and the furnace tube 220.

[0058] Wherein, after the furnace tube 220 ruptures, the protective sleeve 110 is configured to prevent the fragments of the furnace tube 220 (and the product fragments) from contacting the heating structure, and the protective sleeve 110 is able to wrap the ruptured furnace tube 220 and the fragments of the furnace tube 220 (and the product fragments), thereby enabling the protective sleeve 110 to carry the ruptured furnace tube 220 and the fragments of the furnace tube 220 (and the product fragments) out of the furnace chamber 210.

[0059] For example, the product may be a silicon wafer, a crystal wafer, a glass substrate, etc.

[0060] Since the processing equipment 200 includes a thermal protection component 100, all the technical features and effects of the thermal protection component 100 in the processing equipment 200 will not be described in detail here.

[0061] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0062] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0063] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0064] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0065] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A thermal field protection component, characterized in that, The invention relates to a processing equipment comprising a furnace chamber, a furnace tube, and a heating structure. The furnace chamber is fitted outside the furnace tube, and the heating structure is disposed on the side of the furnace chamber near the furnace tube. The heating structure is configured to heat the furnace tube, which extends along a first direction. The thermal field protection component includes: A protective sleeve is fitted over the furnace tube and positioned between the heating structure and the furnace tube. The protective sleeve is larger in size in the first direction than the furnace tube in the first direction, so that the protective sleeve can cover the sides and both ends of the furnace tube. The protective sleeve is flexible.

2. The thermal field protection component according to claim 1, characterized in that, The protective sleeve has at least one heat exchange hole, through which the heat generated by the heating structure can be transferred to the furnace tube.

3. The thermal field protection component according to claim 2, characterized in that, The diameter of the heat exchange holes ranges from 1 mm to 2 mm.

4. The thermal field protection component according to claim 2 or 3, characterized in that, The pore density of the protective sleeve ranges from 10 ppi to 20 ppi.

5. The thermal field protection component according to any one of claims 1 to 3, characterized in that, The furnace tube has a process chamber, the processing equipment further includes a gas path assembly, the protective sleeve has at least one opening through which the furnace tube can pass to fit the protective sleeve onto the furnace tube, and the gas path assembly can pass through the opening to communicate with the process chamber.

6. The thermal field protection component according to claim 5, characterized in that, The protective sleeve extends along the first direction, and has the opening at one end in the first direction so that the gas passage assembly can communicate with the process chamber through the opening. After the furnace tube ruptures, the protective sleeve can be dragged from the end of the protective sleeve with the opening so that the fragments of the furnace tube remain inside the protective sleeve.

7. The thermal field protection component according to claim 5, characterized in that, The protective sleeve extends along the first direction, and the protective sleeve has openings at both ends in the first direction, so that the gas passage assembly can communicate with the process chamber through the openings at both ends of the protective sleeve. The thermal protection component further includes: A strapping device is provided, capable of securing at least one end of the protective sleeve. After the furnace tube ruptures, the strapping device is capable of securing one end of the protective sleeve so that when the protective sleeve is dragged from the other end of the protective sleeve, fragments of the furnace tube remain inside the protective sleeve.

8. The thermal field protection component according to any one of claims 1 to 3, characterized in that, The protective sleeve is made of aluminum silicate fiber or aluminum oxide fiber.

9. The thermal field protection component according to any one of claims 1 to 3, characterized in that, The thickness of the protective sleeve ranges from 0.5mm to 1mm.

10. A processing device, characterized in that, include: A furnace tube having a process chamber configured to contain a product; A furnace chamber, which is fitted over the furnace tube; A heating structure is disposed on the side of the furnace chamber near the furnace tube, and the heating structure is configured to heat the furnace tube; The thermal protection component according to any one of claims 1 to 9, wherein the protective sleeve of the thermal protection component is sleeved outside the furnace tube and disposed between the heating structure and the furnace tube.

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