Antistatic fluid on-off device

Abstract

The application provides an antistatic fluid opening and closing device, which is applied to the technical field of semiconductor manufacturing, wherein the inflow side flow path in the device body is communicated with the outflow side flow path through the chamber; a diaphragm is clamped between the conductive shell and the device body, and the diaphragm can be matched with the adjacent chamber through the control port of the chamber, so as to control the communication on-off between the inflow side flow path and the outflow side flow path; the diaphragm comprises a conductive area; the conductive area is conductively connected with the conductive shell, and the material of the conductive area and the conductive shell is conductive fluorine-containing resin material. The antistatic fluid opening and closing device of the application can make the accumulated static electricity in the device transmitted to the conductive shell through the conductive area of the diaphragm and released, so as to control the phenomenon that a large number of adsorbed particulate matters are generated due to the accumulated static electricity, and in addition, larger particulate matters are not easy to accumulate, and thus the fluid will not cause damage to products such as cleaning wafers.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and specifically to an antistatic fluid opening and closing device. Background Technology

[0002] Fluoropolymers, such as polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), and soluble polytetrafluoroethylene (PFA), have a wide range of applications, especially in the rapidly developing semiconductor and liquid crystal electronic component industries. Fluoropolymers are widely used in fluid control devices across various industries, including chemical plants, semiconductor manufacturing, liquid crystal manufacturing, and the food industry. However, due to the high insulating properties of fluoropolymers, these devices are prone to static electricity buildup during production, transportation, and use, leading to the adsorption of large amounts of particulate matter and resulting in excessive particulate matter levels.

[0003] Therefore, a new technological solution is needed. Utility Model Content

[0004] In view of this, embodiments of this specification provide an antistatic fluid opening and closing device.

[0005] The embodiments in this specification provide the following technical solutions:

[0006] This specification provides an antistatic fluid opening and closing device, which includes a device body, a diaphragm, and a conductive housing.

[0007] The device body is provided with a chamber, an inflow side flow path and an outflow side flow path, and the inflow side flow path is connected to the outflow side flow path through the chamber;

[0008] The diaphragm is sandwiched between the conductive housing and the device body to seal the control port of the chamber;

[0009] The diaphragm can be connected to the cavity through the control port to control the connection between the inflow side flow path and the outflow side flow path;

[0010] The diaphragm includes a conductive region; the conductive region is electrically connected to the conductive shell, and both the conductive region and the conductive shell are made of conductive fluorinated resin material.

[0011] Preferably, the chamber is provided with a seat, and the diaphragm further includes a mating seat area; the mating seat area can be mated with the seat to realize the control of the connection and disconnection between the inflow side flow path and the outflow side flow path through the diaphragm.

[0012] Preferably, the material of the mating seat area is a fluoropolymer insulating material.

[0013] Preferably, the material of the mating seat area is a conductive fluorinated resin material; the mating seat area is electrically connected to the conductive area.

[0014] Preferably, the conductive fluorinated resin material is formed by blending conductive materials into a fluorinated resin material.

[0015] Preferably, the conductive material is carbon black or carbon nanotubes.

[0016] Preferably, a driving mechanism is provided inside the conductive housing;

[0017] The driving mechanism drives the mating seat area, so that the mating seat area can mate with the seat;

[0018] The drive mechanism is electrically conductively configured to allow for conductive connection between the drive mechanism and the mating seat area.

[0019] Preferably, the driving mechanism includes a piston and a driving rod; the piston is housed within the conductive housing through reciprocating motion; the driving rod connects the piston and the diaphragm; a closed space is formed between the piston, the conductive housing, and the diaphragm; the driving rod drives the diaphragm to deform through the reciprocating motion of the piston.

[0020] The drive rod and the piston are made of conductive fluorinated resin, and the drive rod, the piston and the mating seat area are electrically connected.

[0021] Preferably, the conductive housing is connected to a grounding component for conducting static electricity to the outside of the device.

[0022] Compared with the prior art, the beneficial effects that at least one technical solution adopted in the embodiments of this specification can achieve include at least:

[0023] The antistatic fluid opening and closing device of this application is applicable to various industries such as chemical plants, semiconductor manufacturing, liquid crystal manufacturing, and food processing. Static electricity generated and accumulated within the device is transferred to the conductive housing through the conductive area of ​​the diaphragm and released. This helps control the accumulation of static electricity and the resulting adsorption of large amounts of particulate matter during the use of the fluid opening and closing device, thus controlling excessive particulate matter levels. It also prevents scaling, facilitates easy cleaning of the diaphragm device's interior, maintains internal cleanliness, and ensures the diaphragm device's sealing performance and normal operation. It offers high cleanliness, better corrosion resistance, reduces the frequency of diaphragm device replacement, and extends its service life. Furthermore, it prevents the accumulation of large particles, thus avoiding damage to products such as cleaned wafers in the fluid. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the antistatic fluid opening and closing device in this application.

[0026] Reference numerals: 1. Device body; 2. Cylinder head; 3. Cylinder block; 4. Diaphragm; 5. Mounting plate; 6. Piston; 7. Bolt; 8. Open gasket; 9. Flat gasket; 10. Air source plug; 11. O-ring; 12. Indicator; 13. Spring; 14. Hex nut; 15. Dust plug. Detailed Implementation

[0027] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0028] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0030] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0031] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0032] In light of this, the applicant, through in-depth research and improvement exploration of fluid opening and closing devices and fluoropolymers, discovered that: due to the handling of highly corrosive fluids or fluids requiring pollution prevention, fluoropolymer materials with excellent corrosion resistance or pollution resistance are widely used in fluid opening and closing devices for components in contact with the fluid. For example, in a fluoropolymer diaphragm device, when fluid flows through it, static electricity is generated on the inner surface of the flow path, the surface of the chamber, and the liquid contact surface of the diaphragm through friction with the fluid. This static electricity accumulates on the components of the fluoropolymer diaphragm device, and impurities and particles in the fluid easily adhere to the inner surface of the flow path, causing contamination.

[0033] Fluoropolymer materials, due to their high volume resistivity, cannot adequately dissipate static electricity generated by friction with the liquid flowing through the piping system, thus easily accumulating static electricity. This is particularly true in fluoropolymer diaphragm devices, where the increased flow rate during opening and closing of the diaphragm makes it prone to static accumulation and charging. Corners and other areas within the diaphragm device can easily become congested, allowing fine particles such as impurities to be attracted and adhere to the chamber walls or diaphragm due to static electricity, causing them to agglomerate and grow larger. These enlarged particles, when the diaphragm is opened and closed, can detach due to the vertical movement of the diaphragm or changes in flow rate, releasing them into the fluid and becoming a major cause of fluid contamination. In particular, these enlarged particles pose a problem during cleaning processes such as in semiconductor wafer manufacturing, potentially damaging the wafers.

[0034] Based on this, the technical solutions provided by the various embodiments of this application will be described below with reference to the accompanying drawings.

[0035] This specification provides an antistatic fluid opening and closing device, such as... Figure 1 As shown, it includes a device body 1, a diaphragm 4, and a conductive housing.

[0036] The device body 1 contains a chamber, an inflow path, and an outflow path, with the inflow path connected to the outflow path via the chamber. A diaphragm 4 is sandwiched between the conductive housing and the device body 1, used to seal the control port of the chamber. The diaphragm 4 can be engaged with the adjacent chamber via the control port, used to control the connection between the inflow path and the outflow path. The diaphragm 4 includes a conductive region; the conductive region is electrically connected to the conductive housing, and both the conductive region and the conductive housing are made of conductive fluoropolymer resin.

[0037] Specifically, the outer peripheral edge of the diaphragm 4 is sandwiched between the conductive fluororesin housing and the device body 1, and the conductive area can be sandwiched between the conductive fluororesin housing and the device body 1. The diaphragm 4 is elastically deformable, especially the conductive area of ​​the diaphragm 4. When the diaphragm 4 is fully deformed and in contact with the cavity, it completely fits the inner wall of the cavity, blocking the connection between the inflow side flow path and the outflow side flow path. The conductive housing can be composed of a cylinder body 3 and a cylinder head 2; the diaphragm 4 can also be called a membrane, and the device body 1 can be mounted on a mounting plate 5. In one embodiment, a seat is provided in the cavity, and the diaphragm 4 also includes a mating seat area; the mating seat area can be mated with the mating seat to realize the control of the connection and disconnection between the inflow side flow path and the outflow side flow path through the diaphragm 4.

[0038] Specifically, the conductive area surrounds the mating seat area, and the mating seat area is fixedly connected to the conductive area. The mating seat area serves as the diaphragm 4, excluding the conductive area. The mating seat area can be deformable or non-deformable. When the mating seat area is in contact with the seat, the diaphragm 4 blocks the flow between the inflow and outflow paths; when the mating seat area is not in contact with the seat, the diaphragm 4 opens the flow between the inflow and outflow paths. The flow rate between the inflow and outflow paths can be controlled by the distance between the mating seat area and the seat; the shorter the distance, the smaller the flow rate; the greater the distance, the larger the flow rate.

[0039] In one embodiment, the material used in the mating area is a fluoropolymer insulating material.

[0040] In one embodiment, the material of the mating seat area is a conductive fluorinated resin material; the mating seat area and the conductive area are electrically connected. That is, if the diaphragm 4 is formed of a conductive fluorinated resin material, it becomes even easier to release the static electricity generated on the diaphragm 4 to the pneumatic actuator housing, reducing the charge, especially in applications in the semiconductor manufacturing field, it can prevent the adverse effects of electrostatic adsorption of particles.

[0041] In one embodiment, the conductive fluorinated resin material is formed by blending conductive materials into a fluorinated resin material.

[0042] In one embodiment, the conductive material is carbon black or carbon nanotubes. That is, the conductive material, such as carbon black or carbon nanotubes, contained in the conductive fluoropolymer material can improve the conductivity and heat dissipation of the conductive fluoropolymer material, thereby improving the heat resistance of the device body 1. The proportion of carbon black or carbon nanotubes in the conductive fluoropolymer material can be 20% to 50%, with 30% being optimal.

[0043] In one example, a driving mechanism is provided inside the conductive housing; the driving mechanism drives the mating seat area, so that the mating seat area can mate with the mating seat; the driving mechanism is electrically connected, so that the driving mechanism and the mating seat area are electrically connected.

[0044] In one embodiment, the driving mechanism includes a piston 6 and a driving rod; the piston 6 is housed within a conductive housing through reciprocating motion; the driving rod connects the piston 6 and the diaphragm 4; a closed space is formed between the piston 6, the conductive housing, and the diaphragm 4, and the driving rod drives the diaphragm 4 to deform through the reciprocating motion of the piston 6. The driving rod and piston 6 are made of conductive fluoropolymer resin, and the driving rod, piston 6, and mating seat area are electrically connected.

[0045] In one embodiment, the antistatic fluid opening and closing device also includes components such as bolt 7, open gasket 8, flat gasket 9, air source plug 10, O-ring 11, indicator 12, spring 13, hexagonal nut 14, and dust plug 15.

[0046] In one embodiment, the antistatic fluid opening and closing device is, for example, an antistatic fluoropolymer diaphragm device, configured such that a chamber located in the center of the device body 1 is connected to an inflow side flow path and an outflow side flow path. A diaphragm 4 is sandwiched between the device body 1 and the pneumatic actuator housing mounted on the upper part of the device body 1 to isolate the internal space of the chamber and the pneumatic actuator housing. By connecting the diaphragm 4 to the lower end of a rod driven by a drive mechanism located in the internal space of the pneumatic actuator housing, the body supported by the diaphragm 4 is brought into contact with or separated from the seat located in the chamber, thereby opening and closing the inflow side flow path and the outflow side flow path.

[0047] In one embodiment, the antistatic fluoropolymer diaphragm device is, for example, an antistatic fluoropolymer diaphragm valve. The device body 1 is the valve body of the diaphragm valve, and the chamber is the valve chamber of the diaphragm valve. The seat is the valve seat. That is, the antistatic fluoropolymer diaphragm valve includes: a diaphragm valve body, a valve seat, a diaphragm 4, and a pneumatic actuator. The valve body forms a valve chamber, an inlet flow path, and an outlet flow path, which are connected to the valve chamber. The inlet flow path is the inflow side flow path, and the outlet flow path is the outflow side flow path. The diaphragm 4 is connected to or separated from the valve seat; the pneumatic actuator is used to drive the diaphragm 4. The fluoropolymer diaphragm valve opens and closes the inlet flow path and the outlet flow path by connecting or separating the diaphragm 4 from the valve seat.

[0048] The pneumatic actuator housing is connected to the diaphragm valve body by clamping the outer periphery of the diaphragm 4 between the pneumatic actuator housing and the diaphragm valve body. The pneumatic actuator housing is formed of a conductive fluoropolymer material. The diaphragm valve body needs to conduct static electricity to the outside, and the pneumatic actuator uses an external auxiliary mechanism, such as a grounding component, to conduct static electricity to the outside of the device. The diaphragm 4 is entirely annular, with its outer circumferential edge being a conductive area formed of conductive fluoropolymer material, and the remaining portion being a non-conductive area formed of non-conductive fluoropolymer material. The outer circumferential edge of the diaphragm 4 is electrically connected in the vertical direction to the cylinder body 3 and cylinder head 2 of the conductive housing.

[0049] The outer periphery of the diaphragm 4 is held between the valve body and the pneumatic actuator housing. The pneumatic actuator housing, which connects the non-liquid contact portion of the diaphragm 4, is made of a conductive fluoropolymer material. Therefore, the static electricity generated by the diaphragm 4 can be released to the pneumatic actuator housing, reducing the charge on the diaphragm 4. Consequently, fine particles such as impurities in the fluid become difficult to adhere to the diaphragm 4, inhibiting their growth. As a result, particles that have grown larger due to adhesion to the diaphragm 4 are reduced from being released into the fluid due to the up-and-down movement of the diaphragm 4 or rapid changes in flow velocity during valve opening and closing. In other words, the charge on the diaphragm 4 is reduced, reducing the adhesion and growth of particles. Consequently, larger particles are reduced from being detached from the diaphragm 4 and released into the fluid due to the up-and-down movement of the diaphragm 4 or rapid changes in flow velocity during valve opening and closing, thus reducing the possibility of larger particles contaminating the fluid.

[0050] Furthermore, since the pneumatic actuator housing is made of conductive fluorinated resin material, even if fluid in the valve chamber leaks from the diaphragm 4 into the pneumatic actuator housing due to damage to the diaphragm 4, corrosion of the pneumatic actuator housing caused by the fluid can be prevented.

[0051] The pneumatic actuator includes a rod and a drive mechanism. The rod is connected to the diaphragm 4 and is made of a conductive fluoropolymer material. All components of the pneumatic actuator connected to the diaphragm 4 are made of conductive fluoropolymer material. If all components of the pneumatic actuator adjacent to the diaphragm 4, such as the rod, are made of conductive fluoropolymer material, the discharge channels for static electricity generated in the diaphragm 4 are increased, further improving the static reduction effect of the diaphragm 4.

[0052] The drive mechanism may include a piston 6 housed within the pneumatic actuator housing in a reciprocating manner. A rod is connected to the piston 6 and is driven by its reciprocating motion. The piston 6 is formed of a conductive fluoropolymer material. The diaphragm 4 or the pneumatic actuator housing may also be connected to a grounding component for discharging static electricity to the outside.

[0053] Existing fluororesin diaphragm devices include a diaphragm 4, made of fluororesin insulating material, with a fluid contact surface, and components on the inner surface of the fluid flow path that are prone to static electricity generation. To reduce static electricity in the components of the fluororesin diaphragm device, this application presents a high-cleanliness, antistatic fluororesin diaphragm device that can be used in diaphragm valves. This reduces the adhesion of charged particles to the fluororesin diaphragm device, mitigating fluid contamination caused by particles and helping to address the problem of excessive particulate matter in fluororesin diaphragm devices. Furthermore, if impurities are present in the diaphragm device, static particles can increase corrosion. The diaphragm device of this application, after becoming conductive, is less prone to adsorbing impurities and static particles, thus improving the corrosion resistance of the diaphragm device.

[0054] In one embodiment, the conductive housing is connected to a grounding component for conducting static electricity to the outside of the device.

[0055] This specification also provides a method of using an antistatic fluoropolymer membrane device. The antistatic fluoropolymer membrane device using any of the above embodiments includes: static electricity generated in the device body 1 is released to the conductive shell through a conductive area; the diaphragm 4 cooperates with the chamber to control the connection between the inflow side flow path and the outflow side flow path; and fluid is transferred from the inflow side flow path through the chamber to the outflow side flow path.

[0056] In this specification, the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, the descriptions of the embodiments described later are relatively simple, and relevant parts can be referred to the descriptions of the foregoing embodiments.

[0057] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An antistatic fluid opening and closing device, characterized in that, It includes the device body (1), the diaphragm (4), and the conductive housing; The device body (1) is provided with a chamber, an inflow side flow path and an outflow side flow path, and the inflow side flow path is connected to the outflow side flow path through the chamber; The diaphragm (4) is sandwiched between the conductive housing and the device body (1) to seal the control port of the chamber; The diaphragm (4) can be connected to the cavity through the control port to control the connection between the inflow side flow path and the outflow side flow path; The diaphragm (4) includes a conductive region; the conductive region is electrically connected to the conductive shell, and both the conductive region and the conductive shell are made of conductive fluorinated resin material.

2. The antistatic fluid opening and closing device according to claim 1, characterized in that, The chamber is provided with a seat, and the diaphragm (4) also includes a mating seat area; the mating seat area can be mated with the seat to realize the control of the connection between the inflow side flow path and the outflow side flow path through the diaphragm (4).

3. The antistatic fluid opening and closing device according to claim 2, characterized in that, The material of the mating seat area is fluoropolymer insulating material.

4. The antistatic fluid opening and closing device according to claim 2, characterized in that, The material of the mating seat area is a conductive fluorinated resin material; the mating seat area is electrically connected to the conductive area.

5. The antistatic fluid opening and closing device according to any one of claims 1-4, characterized in that, The conductive fluorinated resin material is formed by blending conductive materials into a fluorinated resin material.

6. The antistatic fluid opening and closing device according to claim 5, characterized in that, The conductive material is carbon black or carbon nanotubes.

7. The antistatic fluid opening and closing device according to claim 4, characterized in that, A driving mechanism is provided inside the conductive housing; The driving mechanism drives the mating seat area, so that the mating seat area can mate with the seat; The drive mechanism is electrically conductively configured to allow for conductive connection between the drive mechanism and the mating seat area.

8. The antistatic fluid opening and closing device according to claim 7, characterized in that, The driving mechanism includes a piston (6) and a driving rod; the piston (6) is housed in the conductive housing through reciprocating motion; the driving rod connects the piston (6) and the diaphragm (4); a closed space is formed between the piston (6), the conductive housing and the diaphragm (4), and the driving rod drives the diaphragm (4) to deform through the reciprocating motion of the piston (6); The drive rod and the piston (6) are made of conductive fluorinated resin material, and the drive rod, the piston (6) and the mating seat area are electrically connected.

9. The antistatic fluid opening and closing device according to claim 1, characterized in that, The conductive housing is connected to a grounding component for conducting static electricity to the outside of the device.

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