An automatic dicing apparatus and a device thereof

Abstract

This application relates to the field of automatic film removal equipment technology, and more particularly to an automatic film removal device and equipment, comprising: a transfer film removal support module, a multi-axis film-tearing module, a film removal module, and a film suction and placement module mounted on a mounting platform; the transfer film removal support module supports a carrier plate, on which an adhesive film and a film to be removed are attached, the adhesive film being attached to the surface of the carrier plate, and the film to be removed being attached to the adhesive film; when the automatic film removal device is in the film removal and tearing state, the suction end of the film suction and placement module is perpendicular to the carrier plate and suctions the film to be removed, the movable end of the multi-axis film-tearing module clamps the adhesive film and is set at an angle to the carrier plate, the movable end of the film removal module is located within the angle range between the adhesive film and the carrier plate and is set at an angle to the carrier plate, and the movable end of the film removal module abuts against the film to be removed through the adhesive film. Compared with the prior art, this application can avoid the problem of film breakage or adhesive film residue caused by uneven force during manual film removal, significantly improving film removal efficiency.

Description

Technical Field

[0001] This application relates to the field of automatic sheet removal equipment, and in particular to an automatic sheet removal device and equipment. Background Technology

[0002] Currently, mobile phones and other electronic products are indispensable in people's daily lives. Electronic products are usually composed of a variety of components, among which the screen cover is one of the important components. The inner surface of the screen cover needs to be sprayed with photoresist and then exposed to yellow light. This requires a film to be attached to a carrier board, and then adhesive to be sprayed on the film. After the adhesive is applied, the outer surface of the screen cover is bonded to the film, so that the screen cover is firmly attached to the film. After a carrier board is covered with screen covers, various processes (photoresist spraying, UV decomposition, etc.) are carried out. After the processing is completed, the screen covers need to be manually removed piece by piece. After the film is UV decomposed, the contact surfaces between the product and the film, and between the film and the carrier board, form a seamless vacuum plane bond. The vacuum adhesion is particularly strong, making it very laborious to manually remove the screen covers, and the production efficiency is low. Utility Model Content

[0003] This application provides an automatic wafer removal device and equipment to solve the technical problems of time-consuming, labor-intensive, and low-efficiency manual wafer removal in the prior art.

[0004] In a first aspect, this application proposes an automatic film removal device, comprising: a transfer and film removal support module, a multi-axis film-tearing module, a film removal module, and a film suction and placement module mounted on a mounting platform;

[0005] The transfer and disassembly support module supports a carrier plate, on which an adhesive film and a piece to be disassembled are attached. The adhesive film is attached to the surface of the carrier plate, and the piece to be disassembled is attached to the adhesive film.

[0006] When the automatic sheet removal device is in the sheet removal and film tearing state, the suction end of the sheet suction and placement module is perpendicular to the carrier plate and suctions the sheet to be removed. The movable end of the multi-axis film tearing module clamps the adhesive film and is set at an angle to the carrier plate. The movable end of the sheet removal module is located within the angle range between the adhesive film and the carrier plate and is set at an angle to the carrier plate. The movable end of the sheet removal module abuts against the sheet to be removed through the adhesive film.

[0007] Furthermore, the multi-axis film-tearing module includes: a film-tearing gripper assembly, a film-tearing gripper rotating assembly, a multi-axis film-tearing X-axis module, and a multi-axis film-tearing Z-axis module;

[0008] The film clamping gripper assembly is rotatably connected to the film clamping gripper rotating assembly, the film clamping gripper rotating assembly is movably connected to the multi-axis film clamping and tearing Z-axis module, and the multi-axis film clamping and tearing Z-axis module is movably connected to the multi-axis film clamping and tearing X-axis module.

[0009] Furthermore, the disassembly module includes: an X-axis transverse module assembly, a Z-axis lifting module assembly, a Y-axis module assembly, and a rotary telescopic disassembly assembly;

[0010] The X-axis lateral movement module assembly is perpendicularly arranged and movably connected to the Z-axis lifting module assembly, the Y-axis module assembly is movably arranged on the Z-axis lifting module assembly, and the rotary telescopic disassembly assembly is movably installed on the Y-axis module assembly.

[0011] Furthermore, the rotary telescopic detachment assembly includes: a fixing component, a rotary driving component, a top detachment driving component, a shovel, and a shovel fixing block;

[0012] The fixing member is movably connected to the Y-axis module assembly, the rotary drive member is fixedly connected to the fixing member, and its drive end is fixedly connected to the top plate drive member, the shovel is fixedly installed on the shovel fixing block, and the top plate drive member is fixedly connected to the shovel fixing block.

[0013] Furthermore, the transfer and disassembly support module includes: a positioning platform component, a disassembly moving module, a side positioning component, an end positioning component, and a support component;

[0014] The carrier plate is placed on the positioning platform assembly, the disassembly moving module is fixedly installed on the support assembly, the positioning platform assembly is movably installed on the disassembly moving module, and the side positioning assembly and the end positioning assembly are movably installed on the side and end of the positioning platform assembly, respectively.

[0015] Furthermore, the suction and placement module includes: a first multi-axis robot assembly and a suction and placement assembly;

[0016] The suction and placement component is movably connected to the drive end of the first multi-axis robot component.

[0017] Furthermore, the suction and placement assembly includes: a vacuum adsorption component, a vacuum suction fixing block, a lifting drive component, a connecting block, and a robot flange fixing seat;

[0018] The vacuum adsorption component is elastically mounted on the vacuum suction fixing block. The lifting drive component is driven and fixedly mounted on the connecting block. One end of the robot fixing flange is connected to the connecting block, and the other end is connected to the drive end of the first multi-axis robot assembly.

[0019] Furthermore, the automatic sheet removal device also includes a feeding module, which includes a second multi-axis robot assembly and a clamping assembly;

[0020] The clamping assembly clamps the carrier plate, and the clamping assembly is movably connected to the second multi-axis robot assembly.

[0021] Furthermore, the automatic sheet removal device also includes a material unloading transfer and positioning module, which includes: a placement table, a positioning support component, an X-axis positioning component, and a Y-axis positioning component;

[0022] The placement platform is mounted on the positioning support assembly, and both the X-axis positioning assembly and the Y-axis positioning assembly are movably mounted on the placement platform.

[0023] Secondly, this application also proposes an automatic wafer removal device, including a cabinet, a control module, and the automatic wafer removal device described in the first aspect. The automatic wafer removal device is installed on the top of the cabinet, and the control module is located inside the cabinet. The control module drives the automatic wafer removal device to perform wafer removal actions.

[0024] The technical solutions provided in this application have the following advantages compared with the prior art:

[0025] Compared with the prior art, the automatic film removal device proposed in this application, through the synergistic effect of the multi-axis film-tearing module and the film removal module, utilizes the precise displacement control and force direction adjustment of the multi-axis mechanical structure to apply a uniform tearing force to the adhesive film. At the same time, the film removal module applies micro-vibration or tilting separation force to the edge of the film to be removed, thereby disrupting the seamless contact state of the vacuum bonding surface. This achieves dual separation of the adhesive film from the carrier plate and the film to be removed from the adhesive film, avoiding the problem of the film to be removed breaking or adhesive film residue caused by uneven force application during manual film removal, and significantly improving the film removal efficiency. Attached Figure Description

[0026] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0027] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0029] Figure 1 This is a schematic diagram of the structure of an automatic sheet removal device provided in an embodiment of this application;

[0030] Figure 2 for Figure 1 Top view;

[0031] Figure 3 This is a schematic diagram of the structure of a transfer and dismantling support module in an automatic dismantling device provided in an embodiment of this application;

[0032] Figure 4 This is a schematic diagram of the structure of a multi-axis film-tearing module in an automatic film-removing device provided in an embodiment of this application;

[0033] Figure 5 This is a schematic diagram of the structure of a disassembly module in an automatic disassembly device provided in an embodiment of this application;

[0034] Figure 6 This is a schematic diagram of an automatic film removal device in the film removal state, provided in an embodiment of this application.

[0035] Figure 7 for Figure 6 Side view;

[0036] Figure 8 for Figure 1 Enlarged structural diagram at point A in the middle;

[0037] Figure 9 for Figure 5 Enlarged structural diagram at point B;

[0038] Figure 10 for Figure 6 Enlarged structural diagram at point C;

[0039] Figure 11 for Figure 2 Enlarged structural diagram at point D.

[0040] Explanation of reference numerals in the attached figures:

[0041] 1. Transfer and dismantling support module; 11. Positioning platform assembly; 12. Dismantling moving module; 13. Side positioning assembly; 14. End positioning assembly; 15. Support assembly;

[0042] 2. Carrier plate; 21. Adhesive film; 22. Plate to be removed;

[0043] 3. Multi-axis film clamping and tearing module; 31. Film clamping gripper assembly; 32. Film clamping gripper fixing assembly; 33. Film clamping gripper rotating assembly; 34. Film clamping gripper rotating support assembly; 35. Multi-axis film clamping and tearing support frame; 36. Multi-axis film clamping and tearing X-axis module; 37. Multi-axis film clamping and tearing Z-axis module;

[0044] 4. Slab removal module; 41. X-axis transverse traverse module assembly; 42. Z-axis lifting module assembly; 43. Y-axis module assembly; 44. Rotary telescopic slab removal assembly; 441. Fixing component; 442. Rotary drive component; 443. Top slab drive component; 444. Shovel blade; 445. Shovel blade fixing block;

[0045] 5. Suction and placement module; 51. First multi-axis robot assembly; 52. First robot mounting base; 53. Suction and placement assembly; 531. Vacuum adsorption component; 532. Vacuum suction fixing block; 533. Lifting drive component; 534. Connecting block; 535. Robot flange mounting base;

[0046] 6. Feeding module; 61. Second multi-axis robot assembly; 62. Second robot mounting base; 63. Robot flange fixing axis; 64. Feeding transfer block; 65. Clamping drive component; 66. Clamping block;

[0047] 7. Material unloading and transfer positioning module; 71. Placement table; 72. Positioning support assembly; 73. X-axis positioning assembly; 74. Y-axis positioning assembly;

[0048] 8. Server rack. Detailed Implementation

[0049] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0050] The following disclosure provides numerous different embodiments or examples for implementing various structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed.

[0051] For ease of description, spatial relative terms may be used in the text to describe the relative positional relationship or movement of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "front," "back," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure undergoes a positional flip, orientation change, or movement change, these directional indications will change accordingly. For instance, an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0052] To address the technical problems of time-consuming, labor-intensive, and inefficient manual film removal in existing technologies, this application provides an automatic film removal device and equipment. Through the synergistic action of the multi-axis film-tearing module 3 and the film removal module 4, and utilizing the precise displacement control and force direction adjustment of the multi-axis mechanical structure, a uniform tearing force can be applied to the adhesive film 21. At the same time, the film removal module 4 applies micro-vibration or tilting separation force to the edge of the film to be removed 22, disrupting the seamless contact state of the vacuum bonding surface. This achieves dual separation of the adhesive film 21 from the carrier plate 2 and the film to be removed 22 from the adhesive film 21, avoiding the problem of the film to be removed 22 breaking or the adhesive film 21 remaining due to uneven force application during manual film removal, and significantly improving the film removal efficiency.

[0053] like Figures 6 to 7 As shown, the working principle of the automatic sheet removal device provided in this application is as follows:

[0054] The multi-axis film-tearing module 3's film-clamping gripper assembly 31 clamps the adhesive film 21. Under the system's control, the adhesive film 21 is torn to the position to be removed and made to adhere to the lower arc surface of the product. The spade 444, under the control of the removal module 4, extends to the lower arc surface of the product and adheres tightly to the adhesive film 21. It also adheres to the carrier plate 2, forming a fixed support surface on the carrier plate 2. The removal module 4 controls the spade 444 to move forward and squeeze the adhesive film 21 and the piece to be removed 22. The adhesive film 21 is a soft film, which will undergo random bending deformation under the squeezing force, while the piece to be removed 22 is a rigid material and will not deform. This will inevitably cause a relative displacement between the piece and the adhesive film 21 (the piece to be removed 22 is inclined upward) and cause it to separate, thus completing the removal of the piece.

[0055] Please see Figures 1 to 11This application provides an automatic sheet removal device, including: a transfer sheet removal support module 1, a multi-axis film-tearing module 3, a sheet removal module 4, and a sheet suction and placement module 5 mounted on a mounting platform. The multi-axis film-tearing module 3, the sheet removal module 4, and the sheet suction and placement module 5 are arranged around the outside of the transfer sheet removal support module 1. The transfer sheet removal support module 1 is used to install and support a carrier plate 2, and the carrier plate 2 is used to attach an adhesive film 21 and the sheet 22 to be removed. The adhesive film 21 is attached to the carrier plate 2. On the surface of the film, the piece to be removed 22 is attached to the adhesive film 21; when the automatic film removal device is in the film removal and tearing state, the suction end of the suction and placement module 5 is perpendicular to the carrier plate 2 and suctions the piece to be removed 22. The movable end of the multi-axis clamping and tearing module 3 clamps the adhesive film 21 and is set at an angle to the carrier plate 2. The movable end of the film removal module 4 is set at an angle to the carrier plate 2 and is located within the angle range between the adhesive film 21 and the carrier plate 2. At the same time, the movable end of the film removal module 4 abuts against the piece to be removed 22 through the adhesive film 21.

[0056] Specifically, the transfer and disassembly support module 1 consists of a rigid support frame and an adjustable clamp. The clamp fixes the carrier plate 2, and an adhesive film 21 is attached to the surface of the carrier plate 2. The disassembled pieces 22 are evenly distributed in an array on the adhesive film 21. The multi-axis film-peeling module 3 includes a multi-axis robotic arm and a gripper assembly. The gripper is equipped with a high-friction material at its end to grasp the edge of the adhesive film 21. The robotic arm moves along a preset trajectory to peel the adhesive film 21 from the surface of the carrier plate 2. Tension control is maintained during the separation process to avoid tearing residue. The disassembly module 4 adopts a multi-axis drive structure with a flexible pin or pneumatic paddle installed at its end. By applying precise force, the disassembled pieces 22 are pushed off the surface of the adhesive film 21 one by one. The direction of movement is coordinated with the peeling direction of the adhesive film 21 to reduce the displacement deviation of the disassembled pieces 22. The sheet removal and placement module 5 consists of a vacuum suction cup array and a multi-axis drive mechanism. The suction cups adhere to the surface of the sheet to be removed 22 while it is still attached to the adhesive film 21. After the sheet 22 detaches from the adhesive film 21, it is transferred to a designated placement area via lifting and translation. The suction cups are controlled by a pressure sensor to ensure stable removal and placement. This method utilizes the multi-axis film-tearing module 3 to tilt and peel the adhesive film 21, while the sheet removal module 4 presses against the lower arc surface of the sheet 22 and applies forward force to break the vacuum adhesion between the adhesive film 21 and the sheet 22, thus separating the sheet 22. The suction module then vertically adsorbs and transfers the sheet. The three modules work together to achieve fully automated sheet removal, reducing manual intervention and improving efficiency. Simultaneously, the combination of the multi-axis robotic arm and the multi-axis film-tearing module 3 ensures complete peeling of the adhesive film 21, avoiding residue. The flexible force application design of the sheet removal module reduces the risk of damage to the sheet 22.

[0057] Preferably, in this embodiment, the piece to be removed 22 is a watch screen, the carrier plate 2 is a glass carrier plate, and the adhesive film 21 is a glass adhesive film. In other embodiments, the piece to be removed 22 can also be a mobile phone screen, various display screens, etc., the carrier plate 2 can also be made of metal, plastic, ceramic, gemstone, etc., and the adhesive film 21 can also be other flexible films. The specific settings can be made according to the actual situation, and are not limited here.

[0058] like Figure 1-2 and Figure 4 As shown, the multi-axis tear-off film module 3 includes: a film-clamping gripper assembly 31, a film-clamping gripper fixing assembly 32, a film-clamping gripper rotating assembly 33, a film-clamping gripper rotating support assembly 34, a multi-axis tear-off film support frame 35, a multi-axis tear-off film X-axis module 36, and a multi-axis tear-off film Z-axis module 37; the film-clamping gripper assembly 31 is fixedly installed on the film-clamping gripper fixing assembly 32, and the film-clamping gripper fixing assembly 32 is rotatably connected to the film-clamping gripper rotating assembly 33, and the film-clamping gripper... The rotating component 33 is fixedly installed on the film clamping gripper rotating support component 34. The multi-axis film clamping and tearing Z-axis module 37 is movably connected to the multi-axis film clamping and tearing X-axis module 36. The multi-axis film clamping and tearing X-axis module 36 is fixedly installed on the multi-axis film clamping and tearing support frame 35. The film clamping gripper rotating component 33 drives the film clamping gripper component 31 to rotate. The multi-axis film clamping and tearing X-axis module 36 and the multi-axis film clamping and tearing Z-axis module 37 respectively drive the film clamping gripper component 31 to move along the X-axis and Z-axis directions.

[0059] Specifically, the membrane-clamping pneumatic gripper assembly 31 consists of several pneumatic grippers. Each pneumatic gripper includes a gripper body and a drive structure. The drive structure includes a piston assembly and a cylinder. The piston assembly includes a piston, a piston rod, and a sealing ring, which converts air pressure into linear motion to drive the grippers open and close. The cylinder contains a compressed air chamber, which drives the piston movement through air pressure, providing clamping power. The pneumatic grippers are symmetrical metal claw arms that directly contact the object being clamped (the membrane 21), achieving gripping or release through opening and closing actions. In this embodiment, the pneumatic grippers clamp the edge of the membrane 21. The surface of the gripper body is covered with an anti-slip material to enhance gripping force. The clamping force can be adjusted by air pressure to adapt to different membrane 21 thicknesses.

[0060] Furthermore, in this embodiment, the number of pneumatic grippers is three. In other embodiments, the number of pneumatic grippers is not limited and can be designed according to the width of the adhesive film 21. All three pneumatic grippers are fixedly connected to the film-clamping gripper fixing assembly 32. The film-clamping gripper fixing assembly 32 is an L-shaped fixing plate with a mounting part and a movable part. The mounting part is used to mount the three pneumatic grippers, and the movable part is fixedly connected to the drive end of the film-clamping gripper rotating assembly 33. The film-clamping gripper rotating assembly 33 has a built-in servo motor that drives the grippers to rotate around a fixed axis, adjusting the clamping angle to adapt to different peeling directions. The film clamping gripper rotary support assembly 34 is a metal support component. The multi-axis film clamping and tearing X-axis module 36 and the multi-axis film clamping and tearing Z-axis module 37 are respectively provided with X-axis drive structure and Z-axis drive structure, and a connecting member is provided between them. The connecting member has a movable end and a fixed end. Both the X-axis drive structure and the Z-axis drive structure are provided with linear guide rails. The movable end is slidably set on the linear guide rail on the X-axis drive structure, while the fixed end is fixedly connected to the Z-axis drive structure. When the X-axis drive structure drives the movable end of the connecting member to move, it will drive the multi-axis film clamping and tearing Z-axis module 37 to move in the X-axis direction, thereby realizing the X-axis movement of the film clamping gripper assembly 31. One end of the film clamping gripper rotary support assembly 34 is fixedly connected to the film clamping gripper rotary assembly 33, and the other end is slidably connected to the linear guide rail of the Z-axis drive structure to realize the Z-axis movement of the film clamping gripper assembly 31.

[0061] It is understood that, except for the drive structure of the pneumatic gripper in the embodiments of this application, the other drive components are all servo motors. In other embodiments, they may also be stepper motors, hydraulic drives, pneumatic drives, etc. The specific settings are made according to the actual situation, and no limitations are made here. The drive structures in the following embodiments are also designed in the same way.

[0062] like Figure 1-2 and Figure 5 As shown, the disassembly module 4 includes: two X-axis transverse module assemblies 41, two Z-axis lifting module assemblies 42, a Y-axis module assemblies 43, and a rotary telescopic disassembly assembly 44; the X-axis transverse module assemblies 41 and the Z-axis lifting module assemblies 42 are vertically arranged and movably connected, the two X-axis transverse module assemblies 41 and the two Z-axis lifting module assemblies 42 form two sets of symmetrically spaced drive structures, the Y-axis module assemblies 43 are movably arranged between the two drive structures, and the rotary telescopic disassembly assembly 44 is movably installed on the Y-axis module assemblies 43; the X-axis transverse module assemblies 41, the Z-axis lifting module assemblies 42, and the Y-axis module assemblies 43 respectively drive the rotary telescopic disassembly assembly 44 to move in the X-axis, Z-axis, and Y-axis directions.

[0063] Specifically, the X-axis horizontal movement module assembly 41 includes a linear guide rail and a drive structure to achieve horizontal reciprocating movement along the X-axis. Two X-axis modules are symmetrically arranged and linked by a multi-axis controller to ensure synchronous movement on both sides. The Z-axis lifting module assembly 42 is vertically mounted on the X-axis module and is driven by a linear guide rail and a lead screw. The Y-axis module assembly 43 is driven by a motor to move up and down along the Z-axis. The rotary telescopic disassembly assembly 44 is slidably set on the Y-axis module assembly 43 to achieve movement in the Y-axis direction. In this way, the X, Y, and Z-axis modules are linked to adjust the spatial position of the rotary telescopic disassembly assembly 44 (covering three-dimensional space). The rotary telescopic disassembly assembly 44 performs the disassembly action. The multi-axis controller (such as a PLC or motion control card) achieves collaborative trajectory planning, thereby ensuring that the disassembly tool accurately contacts the piece to be disassembled 22, adapting to complex curved surfaces or inclined attachment scenarios. Through this multi-servo and module cooperation, the disassembly module 4 can mimic the flexible movements of human body disassembly, preventing damage to the disassembled piece 22 during the disassembly process, and is applicable to a wide range of free angles and spaces.

[0064] Preferably, the disassembly module 4 in this embodiment can also be replaced by a multi-axis robot. By controlling the adjustment of the spatial position of the rotating and telescopic disassembly component 44 through the multi-axis robot, the disassembly effect of different disassembly scenarios can also be met.

[0065] like Figure 9 As shown, the rotary telescopic slitting assembly 44 includes: a fixing member 441, a rotary drive member 442, a top slitting drive member 443, a shovel 444, and a shovel fixing block 445; the fixing member 441 is movably connected to the Y-axis module assembly 43, the rotary drive member 442 is fixedly connected to the fixing member 441, and its drive end is fixedly connected to the top slitting drive member 443, the shovel 444 is fixedly installed on the shovel fixing block 445, and the top slitting drive member 443 is fixedly connected to the shovel fixing block 445.

[0066] Specifically, the fixing component 441 includes a mounting plate and a slide connected to the Y-axis module assembly 43. The sliding connection between the slide and the linear guide rail on the Y-axis module assembly 43 enables the movement of the rotary telescopic blade assembly 44 along the Y-axis. The mounting plate serves as the mounting base for the rotary drive component 442. The rotary drive component 442 uses a servo motor and is rigidly connected to the fixing component 441 via a flange. The motor output shaft is coaxially fixed to the top blade drive component 443 via a coupling, driving it to rotate around the axis. The top blade drive component 443 is a pneumatic push rod or an electric linear module. One end is fixed to the output end of the rotary drive component 442, and the other end is connected to the blade fixing block 445, realizing the telescopic movement of the blade 444 (extending / retracting along the axial direction). The blade fixing block 445 adopts a split design, fixed to the end of the top blade drive component 443 by bolts or a quick-release structure. An internal slot for the blade 444 is provided for quick replacement. The scraper blade 444 is made of thin sheet metal or hard alloy, with a sharp or curved blade. It is inserted into the slot of the scraper blade fixing block 445 by screws or clips, directly contacting the piece 22 to be removed to perform the peeling action. The rotation drive 442 allows the scraper blade 444 to adjust the cutting angle, and the extension and retraction of the top blade drive 443 controls the contact depth between the scraper blade 444 and the piece 22 to be removed, adapting to the removal requirements of different adhesion strengths. At the same time, the rotation and extension actions are controlled in coordination by the drive assembly, which can avoid the scraper blade 444 from scraping hard and causing damage to the piece 22 or the adhesive membrane 21, thus improving the integrity rate of removal.

[0067] like Figure 1-3 As shown, the transfer and dismantling support module 1 includes: a positioning platform assembly 11, a dismantling moving module 12, a side positioning assembly 13, an end positioning assembly 14, and a support assembly 15; the dismantling moving module 12 is fixedly installed on the support assembly 15, the positioning platform assembly 11 is movably installed on the dismantling moving module 12, the side positioning assembly 13 and the end positioning assembly 14 are respectively movably installed on the side and end of the positioning platform assembly 11, the positioning platform assembly 11 is used to place the carrier plate 2, and the side positioning assembly 13 and the end positioning assembly 14 respectively perform side positioning and end positioning of the carrier plate 2.

[0068] Specifically, the positioning platform component 11 is made of a rigid plate (such as aluminum alloy or steel) with anti-slip textures or vacuum adsorption holes on the surface for fixing the carrier plate 2; the bottom integrates a slider or roller, which connects to the disassembly moving module 12 to enable the carrier plate 2 to move along a preset trajectory. The disassembly moving module 12 includes a linear guide rail and a drive motor (such as a servo motor) to drive the positioning platform component 11 to move horizontally, ensuring that the carrier plate 2 is accurately transferred to the disassembly station. The side positioning component 13 is driven by a pneumatic push rod (or electric slide), and an L-shaped positioning block is installed at the end. It clamps the two sides of the carrier plate 2 by moving laterally to achieve lateral position calibration. The end positioning component 14 has the same structure as the side positioning component 13. It abuts against the end face of the carrier plate 2 by moving longitudinally to complete the end position limit. The support component 15 is a support structure composed of a column and a base, using high-strength materials (such as steel welded parts or aluminum profiles) to provide rigid support for the disassembly moving module 12, and has reserved installation interfaces to adapt to other modules. This embodiment ensures that the carrier plate 2 does not shift during the moving and installation process through the coordinated action of the side / end positioning components, thereby improving the positional consistency of the disassembly operation. At the same time, the disassembly moving module 12 drives the positioning platform to move smoothly, reducing manual handling intervention and improving production efficiency.

[0069] like Figure 1-2 and Figure 6 As shown, the suction and placement module 5 includes: a first multi-axis robot assembly 51, a first robot mounting base 52, and a suction and placement component 53; the first multi-axis robot assembly 51 is fixedly installed on the first robot mounting base 52, and the suction and placement component 53 is movably connected to the drive end of the first multi-axis robot assembly 51.

[0070] Specifically, this embodiment employs a multi-joint robotic arm structure (such as a four-axis or six-axis serial robot), with each rotary or linear axis driven by a servo motor. The end flange interface is connected to the upper pressure suction plate pick-and-place assembly 53, enabling multi-degree-of-freedom spatial motion. The first robot mounting base 52 is constructed from a rigid base welded or cast from steel plates. The bottom is fixed to the ground or equipment frame by bolts, and an installation platform is provided on the top to ensure the stability of the robot components during high-speed operation.

[0071] like Figure 10 As shown, the suction and placement assembly 53 includes: a vacuum suction component 531, a vacuum suction fixing block 532, a lifting drive component 533, a connecting block 534, and a robot flange fixing seat 535; the vacuum suction component 531 is used to suction the piece 22 to be removed, and the vacuum suction component 531 is fixedly installed on the vacuum suction fixing block 532; the lifting drive component 533 is drivenly connected to the vacuum suction fixing block 532 and fixedly installed on the connecting block 534; one end of the robot fixing flange is connected to the connecting block 534, and the other end is connected to the drive end of the first multi-axis robot assembly 51.

[0072] Specifically, the vacuum suction component 531 includes multiple independently controlled vacuum suction cups. The suction cups are made of silicone or soft rubber and are connected to an external vacuum generator via air tubes to suction the surface of the sheet to be removed 22. The suction cup array layout is adjustable to accommodate sheets of different sizes or shapes. The vacuum suction fixing block 532 is made of aluminum alloy or engineering plastic, with suction cup mounting holes and air passages on its surface. It is elastically connected to the vacuum suction component 531 via an elastic element (such as a spring). The lifting drive component 533 is driven by a linear cylinder (or motor), and through a guide shaft and linear bearing, it drives the vacuum suction fixing block 532 to rise and fall vertically, adjusting the contact distance between the suction cups and the sheet to be removed 22. The connecting block 534 is a long strip metal plate structure. The lifting drive component 533 is fixed on one side, and the other side is connected to the robot flange fixing seat 535. Internal wiring holes are provided for integrating air passages and electrical signal lines. The robot flange mounting base 535 is a standardized flange interface. One end is rigidly connected to the connecting block 534 by bolts (or welding, riveting, etc.), and the other end is matched with the drive end of the first multi-axis robot component 51 to achieve rapid installation and high-precision positioning.

[0073] Furthermore, when the sheet to be removed 22 has not been pushed open and separated from the adhesive membrane 21, the sheet to be removed 22 will not be vacuum-adsorbed and lifted by the lifting drive component 533. After it rises to the correct position, the vacuum pressure reading set by the vacuum pressure gauge of the upper suction assembly will be fed back to the system to provide corresponding information indicating whether the sheet removal was successful or not. In this way, the lifting drive component 533 will only trigger the vacuum suction and lifting action when the sheet to be removed 22 is pushed open and separated from the adhesive membrane 21, avoiding "empty suction" or forced pulling that could damage the sheet due to incomplete separation, thereby improving equipment reliability and sheet removal success rate.

[0074] like Figure 1-2 and Figure 8 As shown, the automatic sheet removal device also includes a feeding module 6. The feeding module 6 is used to move the carrier plate 2 to the transfer sheet removal support module 1 to complete the feeding. The feeding module 6 includes: a second multi-axis robot assembly 61, a second robot fixed base 62, a robot flange fixed shaft 63, a feeding transfer block 64, a clamping drive component 65, and a clamping block 66. There are two clamping blocks 66 and two clamping drive components 65, which are respectively installed at both ends of the feeding transfer block 64. The clamping blocks 66 and the clamping drive components 65 are drivenly connected. One end of the robot flange fixed shaft 63 is connected to the feeding transfer block 64, and the other end is connected to the drive end of the second multi-axis robot assembly 61. The second multi-axis robot assembly 61 is fixedly installed on the second robot fixed base 62.

[0075] Specifically, the second multi-axis robot assembly 61 has the same structure as the first multi-axis robot assembly 51. Its drive end is connected to the robot flange fixing shaft 63 through a flange interface, realizing multi-degree-of-freedom motion and covering the pick-and-place path of the carrier plate 2. The robot flange fixing shaft 63 is a rigid metal shaft. One end is connected to the drive end of the second multi-axis robot assembly 61 through a flange, and the other end is rigidly fixed to the loading transfer block 64 through bolts or a quick-release structure. The loading transfer block 64 is a rectangular or U-shaped metal block with symmetrically machined mounting slots at both ends for fixing the clamping drive component 65. An internal air / electrical passage is reserved to integrate the control cable and air pipe of the clamping drive component 65. The clamping drive component 65 adopts an electric push rod, which is fixed to the end of the loading transfer block 64 by bolts. The drive end is connected to the clamping block 66 through a connecting rod or slide rail to control the opening and closing action of the clamping block 66. The clamping block 66 is an L-shaped metal block with anti-slip rubber or polyurethane pads attached to its inner side. It clamps / releases the edge of the carrier plate 2 by the telescopic action of the clamping drive 65, adapting to different thicknesses of the carrier plate 2.

[0076] like Figure 1-2 and Figure 11 As shown, the automatic sheet removal device also includes a material unloading transfer and positioning module 7. The material unloading transfer and positioning module 7 includes: a placement table 71, a positioning support component 72, an X-axis positioning component 73, and a Y-axis positioning component 74. The placement table 71 is used to place the separated sheet 22. The placement table 71 is installed on the positioning support component 72. The X-axis positioning component 73 and the Y-axis positioning component 74 are both movably installed on the placement table 71. The X-axis positioning component 73 moves in the X-axis direction of the placement table 71 to perform X-axis positioning of the sheet 22 to be removed. The Y-axis positioning component 74 moves in the Y-axis direction of the placement table 71 to perform Y-axis positioning of the sheet 22 to be removed.

[0077] Specifically, the placement platform 71 is a flat metal platform with an array of positioning grooves on its surface to support the separated sheet 22 and restrict its horizontal movement. The positioning support assembly 72 includes an adjustable-height support column or bracket, fixed to the equipment base at the bottom with bolts, and connected to the placement platform 71 at the top via a universal joint or floating joint, allowing for fine-tuning of the platform's level. The X-axis positioning assembly 73 consists of an X-axis linear guide rail and a lead screw driven by a servo motor, with an L-shaped pusher at the end. It moves along the X-axis of the placement platform 71, pushing the sheet 22 to be separated to a preset X-axis position. The Y-axis positioning assembly 74 is located behind the X-axis positioning assembly 73. Its pusher is spaced apart from the pusher of the X-axis positioning assembly 73, but its movement direction is perpendicular to the X-axis. The Y-axis pusher is controlled by an independent drive unit to move, completing the Y-axis positioning of the sheet 22. Through the independent driving and movement of the X / Y-axis assemblies, precise two-dimensional positioning of the sheet 22 in the plane can be achieved, ensuring that the sheets are neatly arranged.

[0078] Please see Figure 1-2This application also provides an automatic wafer removal device, including a cabinet 8, a control module, and the automatic wafer removal device described in the above embodiment. The automatic wafer removal device is installed on the top of the cabinet 8, and the control module is located inside the cabinet 8. The control module is used to control the automatic wafer removal device to perform wafer removal actions.

[0079] Specifically, cabinet 8 consists of a metal frame and a protective panel. A mounting platform is located on top, where the automatic chip removal device is secured using bolts (or welding, riveting, and snap-fit ​​connections). The cabinet interior features a layered layout with pre-installed cable channels and ventilation holes. Adjustable feet at the bottom ensure equipment leveling. The control module, comprising a PLC controller, servo driver, and power module, is integrated into the electrical cabinet within cabinet 8. It connects to the drive unit and sensors of the automatic chip removal device via cables, executing the logic control and motion command output for the chip removal action. This embodiment, through integrated and modular design, integrates the control module and chip removal device within cabinet 8, reducing external cable clutter and facilitating equipment transportation and on-site deployment.

[0080] In the above embodiments, the descriptions of each embodiment have different focuses. For parts that are not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0081] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0082] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0083] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0084] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0085] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0086] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Since these modifications and variations fall within the scope of the claims and their equivalents, this application also intends to include these modifications and variations.

[0087] The above description describes specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An automatic sheet-removing device, characterized in that, include: The transfer and disassembly support module, multi-axis film-tearing module, disassembly module, and film suction and placement module are installed on the mounting platform. The transfer and disassembly support module supports a carrier plate, on which an adhesive film and a piece to be disassembled are attached. The adhesive film is attached to the surface of the carrier plate, and the piece to be disassembled is attached to the adhesive film. When the automatic sheet removal device is in the sheet removal and film tearing state, the suction end of the sheet suction and placement module is perpendicular to the carrier plate and suctions the sheet to be removed. The movable end of the multi-axis film tearing module clamps the adhesive film and is set at an angle to the carrier plate. The movable end of the sheet removal module is located within the angle range between the adhesive film and the carrier plate and is set at an angle to the carrier plate. The movable end of the sheet removal module abuts against the sheet to be removed through the adhesive film.

2. The automatic sheet-removing device according to claim 1, characterized in that, The multi-axis film-tearing module includes: a film-tearing gripper assembly, a film-tearing gripper rotating assembly, a multi-axis film-tearing X-axis module, and a multi-axis film-tearing Z-axis module. The film clamping gripper assembly is rotatably connected to the film clamping gripper rotating assembly, the film clamping gripper rotating assembly is movably connected to the multi-axis film clamping and tearing Z-axis module, and the multi-axis film clamping and tearing Z-axis module is movably connected to the multi-axis film clamping and tearing X-axis module.

3. The automatic sheet-removing device according to claim 1, characterized in that, The disassembly module includes: an X-axis horizontal movement module assembly, a Z-axis lifting module assembly, a Y-axis module assembly, and a rotary telescopic disassembly assembly; The X-axis lateral movement module assembly is perpendicularly arranged and movably connected to the Z-axis lifting module assembly, the Y-axis module assembly is movably arranged on the Z-axis lifting module assembly, and the rotary telescopic disassembly assembly is movably installed on the Y-axis module assembly.

4. The automatic sheet removal device according to claim 3, characterized in that, The rotary telescopic detachment assembly includes: a fixing component, a rotary driving component, a top detachment driving component, a shovel, and a shovel fixing block; The fixing member is movably connected to the Y-axis module assembly, the rotary drive member is fixedly connected to the fixing member, and its drive end is fixedly connected to the top plate drive member, the shovel is fixedly installed on the shovel fixing block, and the top plate drive member is fixedly connected to the shovel fixing block.

5. The automatic sheet-removing device according to claim 1, characterized in that, The transfer and disassembly support module includes: a positioning platform component, a disassembly moving module, a side positioning component, an end positioning component, and a support component; The carrier plate is placed on the positioning platform assembly, the disassembly moving module is fixedly installed on the support assembly, the positioning platform assembly is movably installed on the disassembly moving module, and the side positioning assembly and the end positioning assembly are movably installed on the side and end of the positioning platform assembly, respectively.

6. The automatic sheet-removing device according to claim 1, characterized in that, The suction and placement module includes: a first multi-axis robot assembly and a suction and placement assembly; The suction and placement component is movably connected to the drive end of the first multi-axis robot component.

7. The automatic sheet-removing device according to claim 6, characterized in that, The suction and placement assembly includes: a vacuum suction component, a vacuum suction fixing block, a lifting drive component, a connecting block, and a robot flange fixing seat; The vacuum adsorption component is elastically mounted on the vacuum suction fixing block. The lifting drive component is driven and fixedly mounted on the connecting block. One end of the robot fixing flange is connected to the connecting block, and the other end is connected to the drive end of the first multi-axis robot assembly.

8. The automatic sheet-removing device according to claim 1, characterized in that, It also includes a feeding module, which comprises: a second multi-axis robot assembly and a clamping assembly; The clamping assembly clamps the carrier plate, and the clamping assembly is movably connected to the second multi-axis robot assembly.

9. The automatic sheet-removing device according to claim 1, characterized in that, It also includes a material unloading transfer and positioning module, which includes: a placement table, a positioning support component, an X-axis positioning component, and a Y-axis positioning component; The placement platform is mounted on the positioning support assembly, and both the X-axis positioning assembly and the Y-axis positioning assembly are movably mounted on the placement platform.

10. An automatic sheet-removal device, characterized in that, The device includes a cabinet, a control module, and an automatic chip removal device as described in any one of claims 1-9. The automatic chip removal device is installed on the top of the cabinet, and the control module is located inside the cabinet. The control module drives the automatic chip removal device to perform chip removal actions.

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