A tool structure for quickly dismounting a cathode target

Abstract

This utility model discloses a tooling structure for quick assembly and disassembly of cathode targets, including a target back plate and an assembly / disassembly tooling. The target back plate includes a back plate body and rotating fixing plates evenly distributed along the outer circumference of the back plate body, with assembly notches formed between adjacent rotating fixing plates. The assembly / disassembly tooling includes a drive handle, a connecting plate, and connecting clips. The drive handle and connecting clips are respectively fixed on both sides of the connecting plate, and the connecting clips correspond one-to-one with the rotating fixing plates. Each rotating fixing plate has a connecting hole that engages with the connecting clip. This utility model effectively transmits circumferential torque to the target back plate through the engagement of the connecting clips with the connecting holes, driving the assembly of the target back plate and the cathode target to rotate relative to the target pressure plate, thereby releasing the locking state of the rotating fixing plates and the target pressure plate. This structure allows for quick circumferential unlocking and axial separation of the target assembly, effectively improving the replacement efficiency of the cathode target.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a tooling structure for quick assembly and disassembly of cathode targets. Background Technology

[0002] In physical vapor deposition (PVD) coating technology, the cathode target is a core component, forming a functional coating on the substrate surface through sputtering of the target material. Modern PVD equipment typically uses multiple cathode target sources to meet continuous production needs, and the target material, as a consumable, requires periodic replacement. Traditional target replacement relies on manual disassembly, but in practical applications, the target material is often subjected to high-temperature sputtering, plasma bombardment, and thermal stress over a long period, resulting in surface deformation, edge oxidation, or jamming at the target holder interface, significantly increasing disassembly resistance. Operators must frequently use pry bars, hammering, and other forced methods, which is not only inefficient but also prone to causing target breakage, damage to equipment sealing surfaces, and personnel injuries. While some auxiliary disassembly tools exist in existing technologies, their versatility is insufficient, making it difficult to adapt to targets with different degrees of deformation, leading to increased maintenance costs and extended equipment downtime. Therefore, there is an urgent need for a solution that is simple in structure, highly adaptable, and can improve the efficiency of target disassembly. Utility Model Content

[0003] In view of the problems of low target disassembly efficiency, high wear and tear of vulnerable parts and operational safety hazards in the existing technology, this utility model provides a tooling structure for easy disassembly and assembly of cathode targets.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A tooling structure for quick assembly and disassembly of a cathode target includes a target backplate. The target backplate includes a backplate body and rotating fixing plates that are evenly distributed and extend circumferentially along the outer circumference of the backplate body. An assembly notch is formed between adjacent rotating fixing plates. The tooling also includes an assembly and disassembly fixture, which includes a drive handle, a connecting plate, and connecting clips. The drive handle and connecting clips are respectively fixed on both sides of the connecting plate. The connecting clips are provided in a one-to-one correspondence with the rotating fixing plates. Each rotating fixing plate is provided with a connecting hole that engages with each connecting clip.

[0006] To better implement the above technical solution, optionally, the number of connecting clips is four, the connecting plate has a near-cross-shaped structure, and a connecting clip is provided on each of the four end sidewalls of the connecting plate.

[0007] Optionally, each connecting hole is located at the end position on the same side of each rotating fixed plate.

[0008] Optionally, the end of the rotating fixing plate is provided with a boss facing the assembly / disassembly tooling side around the connecting hole.

[0009] Optionally, the boss constitutes a rotation limiting part of the rotating fixing plate.

[0010] Optionally, the backplate body has a cavity for accommodating the cathode target.

[0011] The beneficial effects of this utility model are:

[0012] This utility model discloses a tooling structure for quick assembly and disassembly of cathode targets. Through the insertion and engagement of the connecting clip and the connecting hole, circumferential torque can be effectively transmitted to the target back plate, driving the assembly of the target back plate and the cathode target to rotate relative to the target pressure plate. This releases the locking state between the rotating fixing plate and the target pressure plate. This structure can quickly achieve circumferential unlocking and axial separation of the target assembly, effectively improving the replacement efficiency of the cathode target and reducing the labor intensity of maintenance operations. Attached Figure Description

[0013] Figure 1 This is a three-dimensional schematic diagram of a tooling structure for quick assembly and disassembly of a cathode target according to an embodiment of this utility model;

[0014] Figure 2 yes Figure 1 Exploded view;

[0015] Figure 3 This is a schematic diagram of the cathode target material assembled inside the target holder;

[0016] Figure 4 yes Figure 3 Schematic diagram of the installation of the cathode target;

[0017] Figure 5 yes Figure 4 Exploded view;

[0018] Figure label:

[0019] Target backplate 10, backplate body 11, cavity 111, rotating fixing plate 12, connecting hole 121, boss 122, disassembly and assembly tooling 20, drive handle 21, connecting plate 22, connecting clip 23, cathode target 30, target base 40, target pressure plate 41, anti-detachment inner protrusion plate 411. Detailed Implementation

[0020] The technical solution of this utility model will be described in detail below with reference to the accompanying drawings and specific embodiments. Identical components are indicated by the same reference numerals.

[0021] Please see Figure 1 and Figure 2 This utility model discloses a tooling structure for quick assembly and disassembly of cathode targets, including a target backplate 10 and an assembly / disassembly tooling 20.

[0022] Specifically, the target backplate 10 includes a backplate body 11 and rotating fixing plate portions 12 that are evenly distributed and extend circumferentially along the outer circumferential surface of the backplate body 11. More specifically, the backplate body 11 and the rotating fixing plate portions 12 are an integral structure. An assembly notch is formed between adjacent rotating fixing plate portions 12 along the circumferential direction of the backplate body 11. The backplate body 11 has a cavity 111 for accommodating the cathode target 30. The cathode target 30 is embedded in the cavity 111 and forms an integral structure with the target backplate 10. The disassembly and assembly fixture 20 includes a drive handle 21, a connecting plate 22, and a connecting clip 23. The drive handle 21 and the connecting clip 23 are respectively fixed on both sides of the connecting plate 22. The connecting clips 23 are correspondingly arranged with the rotating fixing plate portions 12. Each rotating fixing plate portion 12 is provided with a connecting hole 121 that is inserted and engaged with each connecting clip 23.

[0023] like Figures 3 to 5 As shown in the figure, this utility model provides a tooling structure for quick assembly and disassembly of a cathode target. When assembling the cathode target 30 onto the target holder 40: First, the connecting clip 23 of the assembly / disassembly tool 20 is inserted into the connecting hole 121 of the rotating fixing plate 12 to achieve initial connection and positioning between the assembly / disassembly tool 20 and the target back plate 10; then, the assembly assembly of the target back plate 10 and the cathode target 30 is moved to the target pressure plate 41 mounting position on the target holder 40 by holding the drive handle 21. Through axial alignment, the assembly notch is aligned with the target pressure plate 41. The anti-detachment inner protrusion 411, the rotating fixing plate 12, and the notch of the target pressure plate 41 form an axial alignment relationship. Then, the disassembly and assembly tool 20 is rotated circumferentially, which drives the target back plate 10 to rotate synchronously until a part of the rotating fixing plate 12 is embedded under the anti-detachment inner protrusion 411 of the target pressure plate 41. At this time, the combination of the target back plate 10 and the cathode target 30 is axially and radially limited and fixed through this fitting structure, and circumferential anti-loosening locking is achieved through frictional damping between the contact surfaces. Finally, the disassembly and assembly tool 20 is pulled out to complete the assembly process.

[0024] The process of disassembling the cathode target 30 is as follows: reconnect the disassembly tool 20 to the target back plate 10, rotate the drive handle 21 in the circumferential direction opposite to the assembly direction, so that the rotating fixed plate 12 and the anti-disengagement inner protrusion 411 of the target pressure plate 41 are completely disengaged from the fitting state and restored to the initial axial alignment position; apply axial striking force to the target base 40 by impact tool or axial striking tool (such as hammer), and use gravity or auxiliary pulling force to separate the combination of the target back plate 10 and the cathode target 30 from the target base 40.

[0025] This invention provides a tooling structure for quick assembly and disassembly of a cathode target 30. Through the insertion and engagement of the connecting clip 23 and the connecting hole 121, circumferential torque can be effectively transmitted to the target back plate 10, driving the assembly of the target back plate 10 and the cathode target 30 to rotate relative to the target pressure plate 41, thereby releasing the locking state between the rotating fixing plate 12 and the target pressure plate 41. This structure allows for rapid circumferential unlocking and axial separation of the target assembly, effectively improving the replacement efficiency of the cathode target 30 and reducing the labor intensity of maintenance operations.

[0026] In this embodiment of the utility model, there are four connecting clips 23, and the connecting plate 22 has a near-cross-shaped structure. Each of the four end sidewalls of the connecting plate 22 is provided with a connecting clip 23. The four connecting clips 23 and four connecting holes 121 cooperate with each other to make the circumferential torque distribution more uniform. Each connecting hole 121 is located at the end position on the same side of each rotating fixing plate part 12. This allows the rotating fixing plate part 12 and the anti-detachment inner protrusion plate 411 to have a larger overlapping area during the assembly of the target back plate 10 and the cathode target 30, thereby helping to improve stability.

[0027] In an embodiment of the present invention, the end of the rotating fixing plate portion 12 is provided with a boss 122 facing the side of the disassembly and assembly tool 20 around the connecting hole 121. The boss 122 constitutes a rotation limiting portion of the rotating fixing plate portion 12. The rotation limiting portion can restrict the rotating fixing plate portion 12 from rotating excessively so that the rotating fixing plate portion 12 is completely blocked by the anti-detachment inner protrusion 411.

[0028] In the embodiments of this utility model, it should be noted that the structure in which the cathode target 30 is assembled in the target holder 40 and fixed by the target pressure plate 41 is a known technology. This utility model only relates to the disassembly and assembly structure of the target back plate 10 and the cathode target 30 assembly. Therefore, the connection structure between the target holder 40 and the target pressure plate 41 will not be described here.

[0029] The technical solution of this utility model has been described in detail above with reference to specific embodiments. The specific embodiments described are used to help understand the concept of this utility model. Derivations and modifications made by those skilled in the art based on the specific embodiments of this utility model also fall within the protection scope of this utility model.

Claims

1. A tooling structure for quick assembly and disassembly of a cathode target, comprising a target back plate (10), the target back plate (10) comprising a back plate body (11) and rotating fixing plate portions (12) uniformly distributed and extending circumferentially along the outer circumferential surface of the back plate body (11), wherein an assembly notch is formed between adjacent rotating fixing plate portions (12), characterized in that: It also includes a disassembly and assembly fixture (20), which includes a drive handle (21), a connecting plate (22), and a connecting clip (23). The drive handle (21) and the connecting clip (23) are respectively fixed on both sides of the connecting plate (22). The connecting clip (23) is provided in a one-to-one correspondence with the rotating fixed plate part (12). Each rotating fixed plate part (12) is provided with a connecting hole (121) that is inserted and engaged with each connecting clip (23).

2. The tooling structure for quick assembly and disassembly of a cathode target according to claim 1, characterized in that, The number of the connecting clips (23) is four, and the connecting plate (22) has a near-cross-shaped structure. A connecting clip (23) is provided on each of the four end sidewalls of the connecting plate (22).

3. The tooling structure for quick assembly and disassembly of a cathode target according to claim 1, characterized in that, Each connecting hole (121) is located at the end position on the same side of each rotating fixed plate part (12).

4. The tooling structure for quick assembly and disassembly of a cathode target according to claim 3, characterized in that, The end of the rotating fixing plate (12) is provided with a boss (122) facing the assembly / disassembly fixture (20) around the connecting hole (121).

5. The tooling structure for quick assembly and disassembly of a cathode target according to claim 4, characterized in that, The boss (122) constitutes the rotation limiting part of the rotating fixing plate part (12).

6. The tooling structure for quick assembly and disassembly of a cathode target according to claim 1, characterized in that, The backplate body (11) has a cavity (111) for accommodating the cathode target (30).

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