A CVD tooling suitable for large sheet products
By designing CVD fixtures suitable for large sheet products, and adopting an inclined layout and adjustable support structure, the problem of carbon black formation caused by low flow rate areas was solved, the uniformity and stability of the deposited layer were improved, and the deposition quality was ensured.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANDONG WEIJI CARBON-TECH CO LTD
- Filing Date
- 2025-04-25
- Publication Date
- 2026-06-02
AI Technical Summary
When depositing large sheet products, traditional CVD fixtures are prone to forming low-flow-rate areas, which leads to carbon black formation, affecting coating uniformity and adhesion, and causing deposition failure.
A CVD fixture suitable for large sheet products was designed, which adopts an inclined layout and an adjustable support structure, including components such as a base, support arms, tie rods and support pins, to ensure uniform airflow and stable support of sheet products, and to avoid the formation of low flow rate areas.
It improves the uniformity and density of the deposited layer, enhances the adaptability and stability of the tooling, and ensures the deposition quality of sheet products.
Smart Images
Figure CN224313645U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of chemical vapor deposition furnaces, and specifically relates to a CVD tooling suitable for large sheet products. Background Technology
[0002] Chemical vapor deposition (CVD) technology, as an important method for material surface modification, plays an irreplaceable role in the field of materials science due to its unique process principle. This technology generates one or more coatings with specific properties on the surface of a substrate material through chemical reactions between the gas and gas phases, without altering the composition of the substrate material or weakening its mechanical strength. This characteristic has led to the widespread application of CVD technology in many high-tech fields, including but not limited to cutting tool materials, wear-resistant, heat-resistant, and corrosion-resistant materials, aerospace composite materials, nuclear reactor materials, and biomedical materials. Furthermore, CVD technology is widely used to prepare and synthesize various powder materials, bulk materials, new crystalline materials, ceramic fibers, and diamond films, demonstrating its powerful material preparation capabilities. Especially in large-scale integrated circuit technology, CVD technology is a key technology for the preparation of thin films of ferroelectric, insulating, magnetic, and optoelectronic materials, and its importance is self-evident.
[0003] Chemical vapor deposition (CVD) furnaces, as the core equipment for realizing the CVD process, mainly include key components such as the electrical control system, gas inlet system, gas exhaust system, lifting system, vacuum system, furnace shell, insulation layer, heater, muffle furnace, and product fixtures. Among these, the product fixture, as a key component that carries the product to be deposited, directly affects the deposition efficiency and quality of the CVD coating due to its rational design. An ideal product fixture should effectively increase the contact area between the product and the reaction atmosphere, promote the uniform distribution of the reactant gases, thereby improving deposition efficiency and ensuring the consistency of coating quality.
[0004] However, traditional tooling design faces significant challenges when performing CVD deposition on large, sheet-like products. For example... Figure 1 As shown, in current deposition processes, supports 4 are typically placed on the diffuser plate 2, and the sheet-like product 3 to be deposited is laid flat on the supports 4. Although this arrangement seems reasonable for sheet-like materials with a small overall volume, in reality, due to their special geometry and large planar dimensions, large low-flow-rate regions often form above the sheet-like product. In these low-flow-rate regions, the flow rate of the reactant gas slows down, causing carbon black to form in the deposited product. The formation of carbon black not only reduces the uniformity and purity of the CVD coating, but may also lead to a decrease in the adhesion between the coating and the substrate material, and even cause the coating to peel off, thus directly leading to deposition failure and seriously affecting the effectiveness of the deposition process and the quality of the final product. Utility Model Content
[0005] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a CVD fixture suitable for large sheet products, so as to solve the problem that carbon black is easily generated in the low flow rate area during the deposition of large sheet products, which leads to product deposition failure.
[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:
[0007] A CVD fixture suitable for large sheet products includes a base, which includes a horizontal plate and a vertical plate connected to one side of the middle of the horizontal plate. Two support arms are symmetrically arranged on both sides of the horizontal plate and are connected in the middle by a connecting rod. A pull rod is provided on the connecting rod, and one end of the pull rod is connected to the vertical plate. When the sheet product is vapor-deposited, its bottom is placed on the vertical plate of the base and its top is supported by the support arms. The sheet product is in an inclined state inside the muffle.
[0008] Furthermore, a boss is provided at one end of the longitudinal plate, and the root of the boss limits the bottom of the sheet-like product.
[0009] Furthermore, the longitudinal plate is provided with a through groove, and several first adjustment holes are provided on both sides of the through groove at equal intervals. The lower end of the pull rod is connected to the first adjustment hole through a first pin.
[0010] Furthermore, a first support nail is provided at one end of the longitudinal plate, and a second support nail is provided at the upper end of the support arm, with one end of both the first and second support nails being pointed.
[0011] Furthermore, the first support pin is threadedly connected to the longitudinal plate, and the second support pin is threadedly connected to the support arm.
[0012] Furthermore, each side of the horizontal plate is provided with a telescopic plate, and the telescopic plate is provided with a number of equidistantly arranged second adjustment holes. One end of the telescopic plate is provided with a fixed column, and the lower end of the support arm is installed on the fixed column. Both ends of the horizontal plate are provided with connecting holes, and a second pin is provided in the connecting holes.
[0013] Furthermore, the cross-section of the horizontal plate is an "L" shaped structure, and the telescopic arm is placed in the groove formed between the horizontal plate and the air diffuser plate.
[0014] Furthermore, a support strip is provided on the side of the telescopic plate away from the longitudinal plate.
[0015] Furthermore, one end of the support bar is movably connected to the end of the telescopic plate, and the support bar can rotate and fold around one end of the telescopic plate.
[0016] The beneficial effects of this utility model are:
[0017] 1) When this tooling performs gas deposition on large sheet products, the sheet products are tilted inside the muffle tube, which effectively guides the airflow to flow evenly along the product surface and avoids the formation of low flow velocity areas. In addition, the tilted layout extends the contact path between the airflow and the surface of the sheet products, promotes full contact between the reactant gas and the product surface, improves the transport efficiency of the deposited material, and thus improves the uniformity and density of the deposited layer.
[0018] 2) A boss is provided at the end of the longitudinal plate to limit the lower part of the sheet product, preventing the sheet product from sliding on the base and ensuring the stability of the sheet product during vapor deposition.
[0019] 3) Multiple first adjustment holes are set on the longitudinal plate. By installing the lower end of the pull rod in the first adjustment holes at different positions, the opening angle between the base and the two side support arms can be adjusted to meet the process requirements of sheet products of different shapes and sizes and enhance the adaptability of the tooling.
[0020] 4) A first support pin is threaded to one end of the longitudinal plate, and a second support pin is threaded to the upper end of the support arm. The first and second support pins not only reduce the impact of the tooling on the sheet product during vapor deposition, but also ensure the stability of the tooling's support for the bottom of the sheet product.
[0021] 5) By setting telescopic plates on both sides of the horizontal plate, the distance between the two support arms can be adjusted, which is suitable for vapor deposition operations of sheet products of different sizes.
[0022] 6) A support bar is pivotally connected to the end of the telescopic plate, so that there are support structures on both sides of the base, which prevents the tooling from tipping over and enhances the stability of the tooling. Attached Figure Description
[0023] Appendix Figure 1 This is a diagram showing the placement of sheet-like products during deposition in existing technologies.
[0024] Appendix Figure 2 This is a diagram showing the usage status of this tooling.
[0025] Appendix Figure 3 This is a schematic diagram of the tooling structure.
[0026] Appendix Figure 4 This is a schematic diagram of the base structure.
[0027] Appendix Figure 5 This is a schematic diagram showing the connection between the telescopic plate and the support strip.
[0028] Appendix Figure 6 This is a schematic diagram of the support arm structure.
[0029] Appendix Figure 7 This is a diagram showing the placement of sheet products exceeding the length of a muffle tube when this tooling is used for deposition.
[0030] In the diagram, 1. Muffle tube; 2. Air diffuser plate; 3. Sheet product; 4. Support pin; 5. Base; 51. Horizontal plate; 52. Vertical plate; 53. Through groove; 54. First adjustment hole; 55. First support pin; 56. Boss; 57. Connecting hole; 6. Telescopic plate; 61. Second adjustment hole; 62. Fixed column; 7. Support arm; 71. Second support pin; 72. Connecting rod; 8. Tie rod; 9. Support bar. Detailed Implementation
[0031] The following will be combined with the appendix Figures 1-7 The technical solutions in the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0032] In the description of this utility model, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0033] like Figure 3 As shown, a CVD fixture suitable for large sheet products includes a base 5, which includes a horizontal plate 51 and a vertical plate 52 connected to one side of the middle of the horizontal plate 51. Two support arms 7 are symmetrically arranged on both sides of the horizontal plate 51, and the two support arms 7 are connected in the middle by a connecting rod 72. A pull rod 8 is provided on the connecting rod 72, and one end of the pull rod 8 is connected to the vertical plate 52. When the sheet product 3 is vapor-deposited, its bottom is placed on the vertical plate 52 of the base 5, and its upper part is supported by the support arms 7, so that the sheet product 3 is in an inclined state in the muffle, which effectively guides the airflow to flow evenly along the product surface and avoids the formation of low flow rate areas. In addition, the inclined layout extends the contact path between the airflow and the surface of the sheet product 3, promotes full contact between the reactive gas and the product surface, improves the transport efficiency of the deposited material, and thus improves the uniformity and density of the deposited layer.
[0034] like Figure 3 , Figure 4 As shown, one end of the longitudinal plate 52 is provided with a boss 56. The root of the boss 56 limits the bottom of the sheet product 3, preventing the sheet product 3 from sliding on the base 5 and ensuring the stability of the sheet product 3 during vapor deposition.
[0035] like Figure 4 As shown, the longitudinal plate 52 is provided with a through groove 53, and several first adjustment holes 54 are provided on both sides of the through groove 53 at equal intervals. The lower end of the pull rod 8 is connected to the first adjustment hole 54 through a first pin. By installing the lower end of the pull rod 8 in the first adjustment hole 54 at different positions, the opening angle between the base 5 and the two side support arms 7 can be adjusted to meet the process requirements of sheet products 3 of different shapes and sizes, and enhance the adaptability of the tooling.
[0036] like Figure 3 As shown, the longitudinal plate 52 is provided with a first support pin 55 at one end, and the support arm 7 is provided with a second support pin 71 at the upper end. One end of the first support pin 55 and the second support pin 71 are both pointed. The first support pin 55 and the second support pin 71 are in point contact with the bottom of the sheet product 3, which reduces the influence of the tooling on the sheet product 3 during vapor deposition.
[0037] like Figure 4 As shown, the first support pin 55 is threadedly connected to the longitudinal plate 52, as... Figure 6 As shown, the second support pin 71 is threadedly connected to the support arm 7, which facilitates the adjustment of the length of the first support pin 55 or the second support pin 71 according to the shape and structure of the sheet product 3, ensuring the stability of the tooling support for the sheet product 3.
[0038] like Figure 3 As shown, a telescopic plate 6 is provided on each side of the horizontal plate 51, such as... Figure 5 As shown, the telescopic plate 6 is provided with several equidistantly arranged second adjustment holes 61. One end of the telescopic plate 6 is provided with a fixed post 62, and the lower end of the support arm 7 is installed on the fixed post 62. Both ends of the horizontal plate 51 are provided with connecting holes 57, and the connecting holes 57 are provided with second pins. The length of the telescopic plates 6 extending out of the horizontal plate 51 on both sides is adjusted according to the size of the product, thereby adjusting the spacing of the support arms 7 on both sides, further enhancing the applicability of the tooling.
[0039] like Figure 4 As shown, the cross section of the horizontal plate 51 is an "L" shaped structure, and the telescopic arm is placed in the groove formed between the horizontal plate 51 and the air diffuser plate 2, which ensures the stability of the telescopic plate 6.
[0040] like Figure 3 , Figure 5 As shown, the telescopic plate 6 has a support strip 9 on the side away from the longitudinal plate 52, so that the base 5 has a support structure on both sides, as shown. Figure 7 As shown, during the deposition of sheet-like products 3 with a length exceeding the diameter of the muffle tube 1, the support strip 9 enhances the stability of the tooling support and prevents the product from tipping over.
[0041] like Figure 5As shown, one end of the support bar 9 is movably connected to the end of the telescopic plate 6, so that the support bar 9 can rotate and fold around one end of the telescopic plate 6, reducing the space occupied when the tooling is stored. At the same time, the support angle of the support bars 9 on both sides can be adjusted according to the structure of the sheet product 3 to maintain the stability of the tooling.
[0042] The above description is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of this utility model.
Claims
1. A CVD tooling suitable for large sheet products comprising a base, characterised in that, The base includes a horizontal plate and a vertical plate connected to one side of the middle of the horizontal plate. Two support arms are symmetrically arranged on both sides of the horizontal plate. The two support arms are connected in the middle by a connecting rod. A pull rod is provided on the connecting rod, and one end of the pull rod is connected to the vertical plate. When the sheet product is vapor-deposited, its bottom is placed on the vertical plate of the base, and the upper part is supported by the support arms. The sheet product is in an inclined state inside the muffle.
2. The CVD tooling for large sheet products of claim 1, wherein, One end of the longitudinal plate is provided with a boss, and the root of the boss limits the bottom of the sheet-like product.
3. The CVD tooling for large sheet products of claim 1, wherein, The longitudinal plate is provided with a through groove, and several first adjustment holes are provided on both sides of the through groove at equal intervals. The lower end of the pull rod is connected to the first adjustment hole through a first pin.
4. The CVD tooling for large sheet products of claim 1, wherein, The longitudinal plate is provided with a first support nail at one end, and the upper end of the support arm is provided with a second support nail. Both the first support nail and the second support nail have pointed ends.
5. The CVD tooling for large sheet products of claim 4, wherein, The first support pin is threaded to the longitudinal plate, and the second support pin is threaded to the support arm.
6. A CVD tool suitable for large sheet products according to any one of claims 1-5, characterized in that, Each side of the horizontal plate is provided with a telescopic plate, and the telescopic plate is provided with several equidistantly arranged second adjustment holes. One end of the telescopic plate is provided with a fixed column, and the lower end of the support arm is installed on the fixed column. Both ends of the horizontal plate are provided with connecting holes, and a second pin is provided in the connecting holes.
7. The CVD tooling for large sheet products of claim 6, wherein, The cross-section of the horizontal plate is an "L" shaped structure, and the telescopic arm is placed in the groove formed between the horizontal plate and the air diffuser plate.
8. The CVD tooling for large sheet products of claim 6, wherein, The telescopic plate is provided with a support strip on the side away from the longitudinal plate.
9. The CVD tooling for large sheet products of claim 8, wherein, One end of the support bar is movably connected to the end of the telescopic plate, and the support bar can rotate and fold around one end of the telescopic plate.