Drying equipment and double-layer drying equipment

Abstract

This utility model belongs to the technical field of drying equipment, specifically relating to an air supply device for silicon wafers in a drying basket, and more particularly to a drying device and a double-layer drying device. The drying device includes: a housing, a sealing plate, and a base plate; the sealing plate has multiple mounting ports; each mounting port is detachably fitted with a drying air plate; the drying air plate has multiple air inlets to guide hot air blown in from the top of the housing into the housing and out through the air outlet of the base plate. By disassembling the sealing plate into multiple independently detachable drying air plates, precise maintenance of localized faults is achieved. When a single air plate is blocked, deformed, or damaged, it is not necessary to replace the entire sealing plate; only the faulty air plate needs to be replaced, significantly reducing maintenance costs and shortening downtime. Simultaneously, by changing the original method of opening the entire plate, only multiple small drying air plates need to have their air inlets opened, improving the precision of the air inlet openings, ensuring the uniformity of hot air distribution, and thus improving the drying effect.

Description

Technical Field

[0001] This utility model belongs to the technical field of drying equipment, specifically relating to an air supply device for drying silicon wafers in a drying basket, and particularly to a drying device and a double-layer drying device. Background Technology

[0002] Currently, common cleaning equipment mainly adopts trough-type and chain-type structures. In trough-type equipment, silicon wafers are carried by baskets, and robotic arms are used to transfer the baskets between cleaning tanks. After the cleaning process is completed, the silicon wafers need to be dried in drying equipment.

[0003] In related technologies, to improve drying efficiency and meet high production capacity demands, a double-layer drying equipment design is often adopted: the top layer is equipped with fans and heaters to generate hot air for drying the first drying station; the middle layer has a drying device as a hot air transfer channel; and the bottom layer is the second drying station. However, such equipment has the following prominent problems: the key component of the drying device, the sealing plate, is usually made of a single piece of sheet metal. Multiple dispersed air inlets are opened on the sealing plate to achieve hot air distribution. When a single air inlet becomes blocked, deformed, or damaged due to long-term use, it is impossible to perform localized repairs at the fault point; the entire sealing plate must be replaced, resulting in high maintenance costs and prolonged downtime. Furthermore, the processing precision requirements for the single-layer sealing plate are extremely high; even slight deviations in hole positions can affect the uniform distribution of hot air, thereby reducing the consistency of drying results.

[0004] Therefore, how to reduce the impact of the overall plate opening accuracy of the sealing plate in double-layer drying equipment on the drying effect while improving the convenience of maintenance is a technical problem that urgently needs to be solved.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one drying apparatus and a double-layer drying device.

[0007] In a first aspect, embodiments of this disclosure provide a drying apparatus, comprising:

[0008] case;

[0009] A sealing plate, which serves as the top of the housing;

[0010] The base plate serves as the bottom of the housing;

[0011] The sealing plate has multiple mounting ports;

[0012] Each of the aforementioned mounting ports is detachably fitted with a drying air plate;

[0013] The drying air plate has multiple air inlets to guide hot air blown in from the top of the housing into the housing and blow it out from the air outlet of the bottom plate.

[0014] In one optional embodiment, mounting holes are provided on the side of the drying air plate;

[0015] The sealing plate is provided with a fixing hole at the fitting point of the mounting hole;

[0016] The drying air plate is fixed to the fixing hole of the sealing plate by screws passing through the mounting hole.

[0017] In one alternative implementation, the locations of the plurality of mounting ports are adapted to the arrangement of the external flower baskets.

[0018] In one alternative embodiment, the mounting opening is a truncated pyramid shape that tapers inward;

[0019] The drying air plate is disposed on the top surface of the mounting port.

[0020] In one optional embodiment, a filter is provided inside the housing;

[0021] The filter is disposed between the sealing plate and the base plate.

[0022] In one optional embodiment, a flow equalization plate is further provided inside the housing;

[0023] The flow equalization plate is positioned below the filter.

[0024] In one optional embodiment, a make-up air branch pipe and a make-up air circulation pipe are respectively provided on both sides of the housing;

[0025] The housing is provided with a makeup air pipe that communicates with the makeup air branch pipe and the makeup air circulation pipe.

[0026] In one optional embodiment, the air supply pipe has multiple air supply holes;

[0027] The air supply hole is positioned facing the air outlet hole of the base plate.

[0028] Secondly, embodiments of this disclosure also provide a double-layer drying device, comprising:

[0029] The first drying station is used to dry the flower baskets;

[0030] The first drying station is equipped with an air intake fan and a heater;

[0031] The air intake fan is configured to send air into the heater for heating and then blow it into the first drying station;

[0032] The second drying station is set opposite to the first drying station;

[0033] The drying device described above is provided between the first drying station and the second drying station, and the drying device is used to send the hot air from the first drying station into the second drying station.

[0034] In one optional implementation, the first drying station is provided with multiple drying positions;

[0035] The location of each drying station is adapted to the location of the installation port.

[0036] The beneficial effects of this invention are that by disassembling the sealing plate into multiple independently detachable drying air plates, precise repair of localized faults is achieved. When a single air plate becomes blocked, deformed, or damaged, it is not necessary to replace the entire sealing plate; only the faulty air plate needs to be replaced, significantly reducing maintenance costs and shortening downtime. Simultaneously, by changing the original method of opening the entire plate, only air inlets need to be opened on multiple small drying air plates, improving the precision of the air inlet opening and ensuring the uniformity of hot air dispersion, thereby improving the drying effect.

[0037] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0038] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0039] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of the drying apparatus provided in the embodiments of this disclosure;

[0041] Figure 2 This is a schematic diagram of the structure of the drying air plate provided in an embodiment of this disclosure;

[0042] Figure 3 A side view of a drying apparatus provided in an embodiment of this disclosure;

[0043] Figure 4 This is a schematic diagram showing the connection between the branch duct, the air recirculation duct, and the air supply duct provided in an embodiment of this disclosure;

[0044] Figure 5 This is a schematic diagram of the structure of a double-layer drying device provided in an embodiment of this disclosure.

[0045] In the diagram: 100, housing; 200, sealing plate; 210, mounting port; 211, fixing hole; 220, drying air plate; 221, air inlet; 222, mounting hole; 230, filter; 240, flow equalization plate; 250, make-up air branch pipe; 260, make-up air circulation pipe; 270, make-up air pipe; 271, make-up air hole; 300, base plate; 310, air outlet; 400, drying device; 500, first drying station; 510, fan; 520, heater; 600, second drying station; 700, flower basket. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0047] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0048] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0049] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0050] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0051] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0052] Research has revealed that the key component of the drying equipment, the sealing plate, is usually made of a single piece of sheet metal. When a single air inlet becomes blocked, deformed, or damaged due to long-term use, it is impossible to perform local repairs on the fault point. The entire sealing plate must be replaced. At the same time, in order to ensure uniform distribution of hot air, the precision of opening the air inlet on the entire sealing plate must be improved, which results in an excessively high cost for the entire sealing plate.

[0053] Based on the above research, the present invention provides a drying device and a double-layer drying equipment. By disassembling the sealing plate 200 into multiple independent and detachable drying air plates 220, precise repair of local faults is achieved when a single drying air plate 220 fails. At the same time, the difficulty of opening the air inlet 221 on the small plate is much lower than the difficulty of opening the air inlet 221 on the whole plate. While ensuring the opening accuracy of the air inlet 221, the manufacturing cost is reduced.

[0054] The shortcomings of the above solutions are the result of the utility model inventor's practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as contributions made by the utility model inventor to this disclosure.

[0055] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0056] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0057] Please see Figure 1 and Figure 2 At least one embodiment provides a drying apparatus, comprising: a housing 100; a sealing plate 200 serving as the top of the housing 100; and a bottom plate 300 serving as the bottom of the housing 100; wherein the sealing plate 200 has a plurality of mounting openings 210; each mounting opening 210 is detachably mounted with a drying air plate 220; the drying air plate 220 has a plurality of air inlets 221 for guiding hot air blown in from above the housing 100 into the housing 100 and blowing it out from the air outlets 310 of the bottom plate 300.

[0058] Among them, the location of the air outlet is as follows Figure 3 As shown.

[0059] By disassembling the sealing plate 200 into multiple independently detachable drying air plates 220, precise maintenance of localized faults is achieved. When a single air plate becomes blocked, deformed, or damaged, it is not necessary to replace the entire sealing plate 200; only the faulty air plate needs to be replaced, significantly reducing maintenance costs and shortening downtime. Simultaneously, by changing the original method of opening the entire plate, only air inlets 221 need to be created on multiple small drying air plates 220, improving the precision of the air inlet 221 opening and ensuring the uniformity of hot air distribution, thereby improving the drying effect.

[0060] Please continue reading. Figure 1 and Figure 2The drying air plate 220 has a mounting hole 222 on its side; the sealing plate 200 has a fixing hole 211 at the fitting point of the mounting hole 222; the drying air plate 220 is fixed to the fixing hole 211 of the sealing plate 200 by screws passing through the mounting hole 222.

[0061] The drying air plate 220 is independently detachable and detachable through the screw connection design between the mounting holes 222 on the side of the drying air plate 220 and the fixing holes 211 of the sealing plate 200. When a single drying air plate 220 is blocked, it is not necessary to disassemble the entire sealing plate 200; the faulty module can be replaced simply by loosening the corresponding screws, thereby reducing maintenance time.

[0062] In other embodiments, a snap-fit ​​structure or other quick-release structure can be used to install the drying air plate 220 and the mounting port 210. It should be noted that any structure that enables quick release between the drying air plate 220 and the mounting port 210 is within the protection scope of this utility model.

[0063] like Figure 5 As shown, the positions of the multiple mounting ports 210 are adapted to the arrangement of the external flower baskets 700. The positions of the mounting ports 210 are set according to the arrangement of the external flower baskets 700, so that hot air can accurately enter the air inlet 221, reducing the loss of hot air and avoiding the scattering of hot air caused by the positional deviation of traditional whole-plate openings.

[0064] Please see Figure 3 The mounting opening 210 is a truncated pyramid shape that tapers inward; the drying air plate 220 is disposed on the top surface of the mounting opening 210.

[0065] The sloping structure of the frustum-shaped mounting port 210 guides the hot air, increases the air pressure of the hot air, and reduces the loss of hot air leakage.

[0066] Please continue reading. Figure 3 A filter 230 is provided inside the housing 100; the filter 230 is disposed between the sealing plate 200 and the bottom plate 300. A flow equalization plate 240 is also provided inside the housing 100; the flow equalization plate 240 is disposed below the filter 230.

[0067] The filter 230 intercepts particulate impurities, preventing the air outlet 310 of the base plate 300 from becoming blocked. Together with the flow equalization plate 240, it reduces the flow velocity difference of the filtered hot air in the housing 100, improves the uniformity of air pressure, and avoids micro-cracks caused by local over-baking of silicon wafers in the basket 700.

[0068] Please see Figure 1 and Figure 4The housing 100 is provided with a make-up air branch pipe 250 and a make-up air circulation pipe 260 on both sides respectively; the housing 100 is provided with a make-up air pipe 270 that communicates with the make-up air branch pipe 250 and the make-up air circulation pipe 260.

[0069] The make-up air branch pipe 250 and the make-up air circulation pipe 260 are connected through the make-up air pipe 270 to form a closed-loop hot air circulation. The design of the make-up air hole 271 facing the air outlet 310 allows the secondary make-up air to directly participate in the main airflow, improve the thermal energy utilization rate, and reduce the thermal energy loss of the heater 520.

[0070] It should be noted that the air supply pipe 270 has multiple air supply holes 271; wherein the air supply holes 271 are arranged facing the air outlet 310 of the base plate 300.

[0071] Please see Figure 5 At least one embodiment also provides a double-layer drying device, including: a first drying station 500 for drying a flower basket 700; wherein the first drying station 500 is provided with an air inlet fan 510 and a heater 520; the air inlet fan 510 is configured to send air into the heater 520 for heating and then blow it into the first drying station 500; a second drying station 600 is disposed opposite to the first drying station 500; wherein a drying device 400 as described above is disposed between the first drying station 500 and the second drying station 600, and the drying device is used to send hot air from the first drying station 500 into the second drying station 600.

[0072] Hot air from the first drying station 500 is introduced into the second drying station 600 via the drying device, achieving single-heating dual-station drying. The installation port 210 is designed to be compatible with the drying station position, which improves the efficiency of hot air reuse, increases production capacity, and reduces the equipment footprint.

[0073] It should be noted that the first drying station 500 is provided with multiple drying positions; wherein the opening position of each drying position is adapted to the position of the installation port 210.

[0074] In summary, this utility model provides a drying device and a double-layer drying equipment. The drying device includes: a housing 100; a sealing plate 200, which serves as the top of the housing 100; and a bottom plate 300, which serves as the bottom of the housing 100. The sealing plate 200 has multiple mounting ports 210. A drying air plate 220 is detachably mounted on each mounting port 210. The drying air plate 220 has multiple air inlets 221 to guide hot air blown in from the top of the housing 100 into the housing 100 and blow it out from the air outlets 310 of the bottom plate 300. By disassembling the sealing plate 200 into multiple independently detachable drying air plates 220, precise maintenance of local faults is achieved. When a single air plate is blocked, deformed, or damaged, it is not necessary to replace the entire sealing plate 200; only the faulty air plate needs to be replaced, significantly reducing maintenance costs and shortening downtime. At the same time, the original method of opening holes in the whole plate was changed. Only the air inlets 221 need to be opened on multiple small drying air plates 220, which improves the accuracy of opening the air inlets 221, ensures the uniformity of hot air distribution, and thus improves the drying effect.

[0075] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0076] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0077] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0078] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0079] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A drying apparatus, characterized in that, include: Casing (100); A sealing plate (200) serves as the top of the housing (100); A base plate (300) serves as the bottom of the housing (100); The sealing plate (200) has multiple mounting ports (210). Each of the mounting ports (210) is detachably mounted with a drying air plate (220); The drying air plate (220) has multiple air inlets (221) to guide hot air blown in from the upper part of the housing (100) into the housing (100) and blow it out from the air outlet (310) of the bottom plate (300).

2. The drying apparatus as described in claim 1, characterized in that, The drying air plate (220) has mounting holes (222) on its side. A fixing hole (211) is provided at the fitting point between the sealing plate (200) and the mounting hole (222); The drying air plate (220) is fixed to the fixing hole (211) of the sealing plate (200) by screws passing through the mounting hole (222).

3. The drying apparatus as described in claim 1, characterized in that, The opening positions of the plurality of mounting ports (210) are adapted to the arrangement positions of the external flower baskets (700).

4. The drying apparatus as described in claim 1, characterized in that, The mounting port (210) is a truncated pyramid shape that tapers inward; The drying air plate (220) is disposed on the top surface of the mounting port (210).

5. The drying apparatus as described in claim 4, characterized in that, A filter (230) is provided inside the housing (100); The filter (230) is disposed between the sealing plate (200) and the base plate (300).

6. The drying apparatus as described in claim 5, characterized in that, A flow equalization plate (240) is also provided inside the housing (100); The flow equalization plate (240) is disposed below the filter (230).

7. The drying apparatus as described in claim 6, characterized in that, The housing (100) is provided with a make-up air branch pipe (250) and a make-up air circulation pipe (260) on both sides respectively. The housing (100) is provided with a makeup air pipe (270) that is connected to the makeup air branch pipe (250) and the makeup air circulation pipe (260).

8. The drying apparatus as described in claim 7, characterized in that, The air supply pipe (270) has multiple air supply holes (271); The air supply hole (271) is positioned facing the air outlet hole (310) of the base plate (300).

9. A double-layer drying device, characterized in that, include: The first drying station (500) is used to dry the flower basket (700); The first drying station (500) is equipped with an air inlet fan (510) and a heater (520). The air intake fan (510) is configured to send air into the heater (520) for heating and then blow it into the first drying station (500); The second drying station (600) is set opposite to the first drying station (500); A drying device (400) as described in claim 1 is provided between the first drying station (500) and the second drying station (600), and the drying device (400) is used to send hot air from the first drying station (500) into the second drying station (600).

10. The double-layer drying equipment as described in claim 9, characterized in that, The first drying station (500) is equipped with multiple drying positions; The location of each drying station is adapted to the location of the installation port (210).

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