Low power plasma flame generating device

Abstract

A small power plasma flame generating device, including installation bottom plate, anode nozzle, anode water cooling cavity, cathode gas distribution ring, insulating layer, cathode rod and cathode water cooling cavity, anode water cooling cavity is arranged in the top of installation bottom plate, the cathode water cooling cavity is arranged in the top of anode water cooling cavity, the insulating layer is arranged between cathode water cooling cavity and anode water cooling cavity, the small power plasma flame generating device of the utility model, through the size of adjusting inert gas flow, the constant current of direct current power supply, can provide different thermal load plasma flame, to cope with the use of different operating conditions, effectively reduce the benefit of increasing efficiency.And set up water cooling cavity effectively prevent in high dust process use after the outlet under the anode nozzle again form the agglomerate, thereby improve the service life of anode nozzle.

Description

Technical Field

[0001] This utility model relates to the field of industrial waste gas treatment technology, and in particular to a low-power plasma flame generator. Background Technology

[0002] In the manufacturing processes of the semiconductor industry (semiconductors, panels, solar energy, LEDs), fluorides, chlorides, hydrides, and other general harmful gases are generated. Plasma torches, combustion guns, and electric heating rods are typically used to provide the heat source required for the reaction. However, electric heating methods generally provide temperatures below 800℃, which is insufficient to effectively decompose greenhouse gases (the decomposition temperature of greenhouse gases is generally >1000℃). While combustion guns can meet the temperature requirements, they require natural gas as fuel, posing safety risks related to natural gas storage, transportation, and use. Furthermore, combustion produces a large amount of CO2, which contradicts the national carbon neutrality strategy. Plasma flame generators, on the other hand, provide highly active, high-temperature plasma jets, meeting the needs of various specialty gas reactions while reducing carbon emissions, offering convenient and quick installation, and safe and reliable operation.

[0003] Currently, these small plasma torches have a service life of less than six months during operation. Specifically, they suffer from problems such as rapid consumption of the cathode discharge electrode, corrosion and perforation of the anode nozzle and water cooling channel, anode nozzle burning off due to high temperature, poor arc voltage stability, and easy agglomeration at the outlet of some high-dust process torches.

[0004] To address the above issues, a novel low-power plasma flame generator was developed. Utility Model Content

[0005] The technical problem to be solved by this utility model is: in order to solve the problems of short service life and poor arc voltage stability of plasma torches in the prior art, this utility model provides a low-power plasma flame generating device.

[0006] The technical solution adopted by this utility model to solve its technical problem is: a low-power plasma flame generating device, including a mounting base plate, an anode nozzle, an anode water-cooling cavity, a cathode gas distribution ring, an insulating layer, a cathode rod, and a cathode water-cooling cavity; the anode water-cooling cavity is disposed above the mounting base plate, the cathode water-cooling cavity is disposed above the anode water-cooling cavity, and the insulating layer is disposed between the cathode water-cooling cavity and the anode water-cooling cavity.

[0007] Furthermore, the anode nozzle is located at the bottom of the anode water-cooling chamber, and the bottom of the anode water-cooling chamber is provided with a first water inlet and the top is provided with a first water outlet.

[0008] Furthermore, the anode water-cooling chamber is provided with a first forced flow channel, which enhances the heat exchange effect of the anode water-cooling chamber by allowing cooling water to flow through it. The first forced flow channel has a U-shaped structure, which can effectively improve the cooling effect on the mounting base plate and the anode nozzle. Cooling the mounting base plate can effectively prevent the formation of agglomerates at the outlet below the anode nozzle after use in high-dust processes, thereby improving the service life of the anode nozzle.

[0009] Furthermore, the cathode rod is disposed in the middle of the insulating layer, and the cathode gas distribution ring is sleeved on the cathode rod; the upper end of the cathode rod is connected to the cathode water cooling cavity; the bottom of the cathode rod is conical, and the cathode rod is made of a material with high conductivity, high temperature resistance, and high wear resistance.

[0010] Furthermore, the cathode water-cooling cavity has a second water inlet on its side and a second water outlet on its top. The cathode water-cooling cavity also has a second forced flow channel inside, which enhances the heat exchange effect by allowing cooling water to circulate. The second forced flow channel has a U-shaped structure, which can fully cool the cathode rod and improve its service life.

[0011] Furthermore, the cathode gas distribution ring is provided with two or more gas equalization holes, the diameter of which is 0.8-1.2 mm, and the gas equalization holes are inserted tangentially along the cathode gas distribution ring; the cathode gas distribution ring is made of a high-temperature resistant and insulating material.

[0012] Furthermore, the bottom of the mounting base plate is provided with a double-layer sealing ring.

[0013] Furthermore, the gap between the cathode rod and the anode nozzle is 1-2 mm, and the ratio of the channel length to the aperture of the anode nozzle is 1:15-20.

[0014] The beneficial effects of this utility model are:

[0015] The low-power plasma flame generator described in this invention can provide plasma flames with different heat loads by adjusting the inert gas flow rate and the DC power supply current to cope with different operating conditions, effectively reducing costs and increasing efficiency. Furthermore, the water-cooling chamber effectively prevents agglomeration at the outlet below the anode nozzle after use in high-dust processes, thereby improving the service life of the anode nozzle. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is a schematic diagram of the low-power plasma flame generator described in Embodiment 1 of this utility model;

[0018] Figure 2This is a cross-sectional view of the low-power plasma flame generator described in Embodiment 1 of this utility model;

[0019] In the diagram, 1. Mounting base plate, 2. Anode nozzle, 3. Anode water-cooling cavity, 4. Cathode gas distribution ring, 5. Insulating layer, 6. Cathode rod, 7. Cathode water-cooling cavity, 8. First water inlet, 9. First water outlet, 10. First forced flow channel, 11. Second water inlet, 12. Second water outlet, 13. Second forced flow channel, 14. Gas equalization hole. Detailed Implementation

[0020] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0021] In the description of this utility model, it should be understood that the terms "upper", "lower", "horizontal", "top", "inner", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] Example 1

[0024] like Figure 1-2 As shown, a low-power plasma flame generator includes a mounting base plate 1, an anode nozzle 2, an anode water-cooled cavity 3, a cathode gas distribution ring 4, an insulating layer 5, a cathode rod 6, and a cathode water-cooled cavity 7; the anode water-cooled cavity 3 is disposed above the mounting base plate 1, the cathode water-cooled cavity 7 is disposed above the anode water-cooled cavity 3, and the insulating layer 5 is disposed between the cathode water-cooled cavity 7 and the anode water-cooled cavity 3.

[0025] The anode nozzle 2 is located at the bottom of the anode water-cooling chamber 3. The bottom of the anode water-cooling chamber 3 is provided with a first water inlet 8, and the upper part is provided with a first water outlet 9. The anode water-cooling chamber 3 is provided with a first forced flow channel 10, which enhances the heat exchange effect of the anode water-cooling chamber 3 by allowing cooling water to flow. The first forced flow channel 10 has a U-shaped structure, which can effectively improve the cooling effect on the mounting base plate 1 and the anode nozzle 2. Cooling the mounting base plate 1 can effectively prevent the formation of agglomerates at the outlet below the anode nozzle 2 after use in high-dust processes, thereby improving the service life of the anode nozzle 2.

[0026] The cathode rod 6 is disposed in the middle of the insulating layer 5, and the cathode air distribution ring 4 is sleeved on the cathode rod 6; the upper end of the cathode rod 6 is connected to the cathode water-cooling cavity 7; the bottom of the cathode rod 6 is conical, and the cathode rod 6 is made of a material with high conductivity, high temperature resistance, and high wear resistance. The cathode water-cooling cavity 7 has a second water inlet 11 on its side and a second water outlet 12 on its top. The cathode water-cooling cavity 7 has a second forced flow channel 13 inside, which enhances the heat exchange effect by allowing cooling water to flow; the second forced flow channel 13 has a U-shaped structure, which can fully cool the cathode rod 6 and improve its service life.

[0027] The cathode gas distribution ring 4 is provided with two or more gas equalization holes 14, the diameter of which is 0.8-1.2 mm, and they enter tangentially along the cathode gas distribution ring 4. The cathode gas distribution ring 4 is made of a high-temperature resistant and insulating material. The bottom of the mounting base plate 1 is provided with a double-layer sealing ring. The gap between the cathode rod 6 and the anode nozzle 2 is 1-2 mm, and the ratio of the channel length to the aperture of the anode nozzle 2 is 1:15-20.

[0028] In operation, inert gas is evenly distributed through the air inlet on the insulating layer 5, then passes through the narrow channel between the cathode rod 6 and the anode nozzle 2, and is ejected through the anode nozzle 2. The cathode wire output from the DC power supply is connected to the cathode water-cooling cavity 7, and the anode wire output from the DC power supply is connected to the anode water-cooling cavity 3. To prevent short circuits between the anode water-cooling cavity 3 and the cathode water-cooling cavity 7, a high-temperature resistant and highly insulating insulating layer 5 is provided between them. When DC power is applied, an electric arc is formed between the cathode rod 6 and the anode nozzle 2, which excites the passing inert gas into a plasma state. This plasma is then compressed through the channel of the anode nozzle 2 to form a high-speed plasma jet. During the above process, the surfaces of the cathode rod 6 and the anode nozzle 2 will generate high temperatures. To improve service life, the anode water-cooling cavity 3 and the cathode water-cooling cavity 7 are provided for cooling. The cooling water passes through the forced flow channel in the water-cooling cavity, which enhances the heat exchange effect.

[0029] Example 2

[0030] This embodiment provides a low-power plasma flame generator based on embodiment 1. Its structure is roughly the same as that of the low-power plasma flame generator described in embodiment 1. The difference is that the mounting base plate 1 is thickened and has a separate water-cooling cavity inside. Setting up a separate water-cooling cavity can improve the cooling effect.

[0031] Example 3

[0032] This embodiment provides a low-power plasma flame generator based on embodiment 1. Its structure is roughly the same as that of the low-power plasma flame generator described in embodiment 1. The difference is that the anode water-cooling chamber 3 is configured with a finned water-cooling structure.

[0033] Example 4

[0034] This embodiment provides a low-power plasma flame generator based on embodiment 1. Its structure is roughly the same as that of the low-power plasma flame generator described in embodiment 1. The difference is that the bottom of the cathode rod 6 is spherical or the cathode rod 6 is cylindrical.

[0035] In this specification, the illustrative expressions of the terms do not necessarily refer to the same embodiments. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments.

[0036] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A low-power plasma flame generator, characterized in that, It includes a mounting base plate (1), an anode nozzle (2), an anode water-cooling cavity (3), a cathode gas distribution ring (4), an insulating layer (5), a cathode rod (6), and a cathode water-cooling cavity (7); the anode water-cooling cavity (3) is located above the mounting base plate (1), the cathode water-cooling cavity (7) is located above the anode water-cooling cavity (3), and the insulating layer (5) is located between the cathode water-cooling cavity (7) and the anode water-cooling cavity (3).

2. The low-power plasma flame generator according to claim 1, characterized in that, The anode nozzle (2) is located at the bottom of the anode water cooling chamber (3), and the bottom of the anode water cooling chamber (3) is provided with a first water inlet (8) and the top is provided with a first water outlet (9).

3. The low-power plasma flame generator according to claim 2, characterized in that, The anode water-cooled cavity (3) is provided with a first forced flow channel (10) to enhance the heat exchange effect of the anode water-cooled cavity (3) by allowing cooling water to flow through it; the first forced flow channel (10) has a U-shaped structure.

4. The low-power plasma flame generator according to claim 1, characterized in that, The cathode rod (6) is disposed in the middle of the insulating layer (5), and the cathode gas distribution ring (4) is sleeved on the cathode rod (6); the upper end of the cathode rod (6) is connected to the cathode water cooling cavity (7); the bottom of the cathode rod (6) is conical, and the cathode rod (6) is made of a material with high conductivity, high temperature resistance and high wear resistance.

5. The low-power plasma flame generator according to claim 1, characterized in that, The cathode water-cooled cavity (7) has a second water inlet (11) on its side and a second water outlet (12) on its top. The cathode water-cooled cavity (7) has a second forced flow channel (13) inside, which enhances the heat exchange effect by allowing cooling water to flow. The second forced flow channel (13) has a U-shaped structure.

6. The low-power plasma flame generator according to claim 1, characterized in that, The cathode gas distribution ring (4) is provided with two or more gas equalization holes (14), the diameter of the gas equalization holes (14) is 0.8-1.2 mm, and they enter tangentially along the cathode gas distribution ring (4); the cathode gas distribution ring (4) is made of a high temperature resistant and insulating material.

7. The low-power plasma flame generator according to claim 1, characterized in that, The bottom of the mounting base plate (1) is provided with a double-layer sealing ring.

8. The low-power plasma flame generator according to claim 1, characterized in that, The gap between the cathode rod (6) and the anode nozzle (2) is 1-2 mm, and the ratio of the channel length to the aperture of the anode nozzle (2) is 1:15-20.

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