Cavity and reaction furnace

Abstract

The present disclosure relates to the field of photovoltaic and semiconductor technology, and particularly relates to a cavity and a reaction furnace, which solves the problem that the inner cavity of the cavity cannot be extended under high temperature, resulting in deformation of the inner cavity. The cavity comprises an inner cavity, an outer cavity, at least two first limiting components, a first flange and a heating element. The outer cavity and the inner cavity both extend along a first horizontal direction, the outer cavity contains the inner cavity, and the inner cavity contains a product. The first limiting component limits the first end of the inner cavity, the inner cavity is connected with the first flange, and the first flange passes through a limiting hole of the second end of the outer cavity. On a cross section perpendicular to the first horizontal direction, the outer diameter of the second end of the inner cavity is greater than the hole diameter of the limiting hole, and in the first horizontal direction, there is a gap between the inner end surface of the second end of the outer cavity and the outer end surface of the second end of the inner cavity, so that the inner cavity can be extended along the first horizontal direction under high temperature, and deformation of the inner cavity is avoided.

Description

Technical Field

[0001] This disclosure relates to the fields of photovoltaic and semiconductor technology, and more specifically to a cavity and a reactor. Background Technology

[0002] Silicon wafers, used as the substrate for solar cells, typically undergo a series of production processes including texturing, diffusion, laser cutting, coating, printing, sintering, and testing. Currently, the industry commonly uses reactors to process silicon wafers, and some production processes require high-temperature conditions.

[0003] Reactors in this technology typically consist of an outer cavity and an inner cavity. The outer cavity serves as a protective layer, while the inner cavity contains the product. The inner cavity expands and stretches under high temperatures, with the greatest stretch occurring along its extension direction. However, in these reactors, no space is provided between the outer and inner cavities to allow the inner cavity to extend along its extension direction. This prevents the inner cavity from expanding smoothly under high temperatures, leading to deformation and poor structural stability. Utility Model Content

[0004] In view of this, the present disclosure provides a cavity and a reactor, which solves the problem that the inner cavity of the cavity cannot be stretched under high temperature conditions, resulting in deformation of the inner cavity.

[0005] In a first aspect, embodiments of this disclosure provide a cavity, comprising: an inner cavity extending along a first horizontal direction, having a first end and a second end in the first horizontal direction, configured to receive a product; an outer cavity extending along the first horizontal direction, configured to receive the inner cavity, the second end of the outer cavity having a limiting hole extending along the first horizontal direction; at least two first limiting components, at least one of the first limiting components being disposed between the bottom of the first end of the inner cavity and the outer cavity, and respectively connected to or abutting against the bottom of the inner cavity and the outer cavity, and at least another first limiting component being disposed between the top of the first end of the inner cavity and the outer cavity, and respectively connected to or abutting against the top of the inner cavity and the outer cavity, to accommodate a product. A first end of the inner cavity is vertically limited; a first flange is connected to the second end of the inner cavity and extends along the first horizontal direction, the first flange passing through the limiting hole so that the second end of the outer cavity supports the second end of the inner cavity through the first flange; at least one heating element is connected to the inner cavity or the outer cavity and configured to heat the inner cavity; wherein, in a cross-section perpendicular to the first horizontal direction, the outer diameter of the second end of the inner cavity is larger than the diameter of the limiting hole, and in the first horizontal direction, there is a gap between the inner end face of the second end of the outer cavity and the outer end face of the second end of the inner cavity, the gap being configured to provide clearance space for the extension of the inner cavity along the first horizontal direction.

[0006] In some embodiments, a plurality of the first limiting components are respectively disposed at the bottom edge region and the middle region of the first end of the inner cavity.

[0007] In some embodiments, the cavity further includes: at least two second limiting components, respectively disposed on both sides of the first end of the inner cavity and between the outer cavity, wherein the second limiting components are connected to or abut against the side of the inner cavity and the outer cavity, respectively, to limit the first end of the inner cavity along a second horizontal direction; wherein the second horizontal direction is perpendicular to the first horizontal direction.

[0008] In some embodiments, the diameter of the limiting hole gradually increases along the direction from the first end of the outer cavity to the second end of the outer cavity; and / or, along the direction from the first end of the outer cavity to the second end of the outer cavity, the limiting hole includes a first limiting segment and a second limiting segment that are interconnected, the first limiting segment having the same diameter, and the second limiting segment having a diameter that gradually increases along the direction from the first end of the outer cavity to the second end of the outer cavity.

[0009] In some embodiments, the first limiting component includes: a first limiting seat connected to the top or bottom of the inner cavity; a first limiting rod vertically disposed, with a first end threadedly connected to the first limiting seat and a second end abutting against the outer cavity; a first locking member disposed on the side of the first limiting seat away from the inner cavity, threadedly connected to the first limiting rod, and configured to lock the first limiting rod and the first limiting seat; and / or, the second limiting component includes: a second limiting seat connected to the side of the inner cavity; a second limiting rod disposed along the second horizontal direction, with a first end threadedly connected to the second limiting seat and a second end abutting against the outer cavity; and a second locking member disposed on the side of the second limiting seat away from the inner cavity, threadedly connected to the second limiting rod, and configured to lock the second limiting rod and the second limiting seat.

[0010] In some embodiments, the inner cavity has a first opening at its first end and a second opening at its second end, allowing the product to enter and exit the inner cavity through the first opening; wherein, in a cross-section perpendicular to the first horizontal direction, the maximum size of the second opening is smaller than the maximum size of the first opening and greater than or equal to the diameter of the limiting hole; wherein, the first end of the first flange is connected to the second end of the inner cavity; wherein, the outer cavity includes: an annular body, the first end of which has a third opening and the second end of which has a fourth opening, allowing the inner cavity and the first limiting assembly to enter and exit the outer cavity through the third opening or the fourth opening; a cover plate, connected to the second end of the annular body to close the fourth opening; wherein, the cover plate has the limiting hole, and the limiting hole penetrates the cover plate along the first horizontal direction, with the second end of the first flange passing through the limiting hole.

[0011] In some embodiments, the cavity further includes a bellows sleeved on the first flange, wherein a first end of the bellows is sealed to the cover plate, and the inner end face of the second end of the bellows is sealed to the end face of the second end of the first flange.

[0012] In some embodiments, the first limiting seat has a first limiting surface that contacts the top or bottom of the inner cavity; wherein, the first limiting component further includes: a first limiting block connected to the first limiting seat, the first limiting block having a second limiting surface that abuts against the top or bottom of the inner cavity; the first limiting surface and the second limiting surface together support the bottom and top of the first end of the inner cavity, so that the end face of the first end of the inner cavity is parallel to the end face of the first end of the outer cavity.

[0013] In some embodiments, the cavity further includes: at least one support member disposed on the bottom of the outer cavity near the inner cavity, the support member extending along the first horizontal direction and configured to support the inner cavity; a plurality of first limiting members connected to the support member and arranged at intervals along the first horizontal direction; a plurality of second limiting members connected to the outer cavity and arranged at intervals along the first horizontal direction; wherein each second limiting member has a limiting groove, and the plurality of first limiting members respectively engage with the plurality of limiting grooves.

[0014] In a second aspect, embodiments of this disclosure provide a reactor, comprising: the cavity described in the first aspect, wherein a first end of the inner cavity of the cavity has a first opening, and a first end of the outer cavity of the cavity has a third opening; an inner furnace door configured to open or close the first opening; and an outer furnace door configured to open or close the third opening.

[0015] The cavity provided in this embodiment includes an inner cavity, an outer cavity, at least two first limiting components, a first flange, and at least one heating element. Both the outer and inner cavities extend along a first horizontal direction. The outer cavity accommodates the inner cavity, and the inner cavity accommodates the product. The first limiting components vertically limit a first end of the inner cavity. The inner cavity is connected to the first flange, which passes through a limiting hole at a second end of the outer cavity, allowing the second end of the outer cavity to support the second end of the inner cavity via the first flange. In a cross-section perpendicular to the first horizontal direction, the outer diameter of the second end of the inner cavity is larger than the diameter of the limiting hole. Furthermore, in the first horizontal direction, there is a gap between the inner end face of the second end of the outer cavity and the outer end face of the second end of the inner cavity. This gap provides clearance for the extension of the inner cavity along the first horizontal direction, enabling the inner cavity to extend along the first horizontal direction at high temperatures. This avoids the problem of the inner cavity being unable to extend along the first horizontal direction due to interference from the outer cavity, leading to deformation in directions other than the first horizontal direction and resulting in poor structural stability. Attached Figure Description

[0016] Figure 1 The diagram shown is a structural schematic of a cavity provided in an embodiment of this disclosure.

[0017] Figure 2 As shown Figure 1 The cavity shown is a cross-sectional view along the AA direction.

[0018] Figure 3 As shown Figure 2 The cavity shown is a magnified view of a portion of region B.

[0019] Figure 4 The diagram shown is a structural schematic of a cavity provided in another embodiment of this disclosure.

[0020] Figure 5 As shown Figure 4 The cavity shown is a magnified view of a portion of region C.

[0021] Figure 6 As shown Figure 4 The cavity shown is a magnified view of a portion of region D.

[0022] Figure 7 The image shown is a side view of a cavity provided in an embodiment of this disclosure.

[0023] Figure 8 As shown Figure 7 The cavity shown is a cross-sectional view along the EE direction.

[0024] Figure 9 As shown Figure 8 The cavity shown is a magnified view of a portion of region F.

[0025] Figure 10 As shown Figure 8 The cavity shown is a magnified view of a portion of region G.

[0026] Figure 11 The diagram shown is a structural schematic of a cavity provided in another embodiment of this disclosure.

[0027] Figure 12 As shown Figure 11 The cavity shown is a cross-sectional view along the HH direction.

[0028] Figure 13 As shown Figure 12 The cavity shown is a magnified view of a portion of region I.

[0029] Figure 14 The diagram shown is a structural schematic of a cavity provided in another embodiment of this disclosure.

[0030] Figure 15 As shown Figure 14 The cavity shown is a cross-sectional view along the JJ direction.

[0031] Figure 16 As shown Figure 15 The cavity shown is a magnified view of a portion of region K.

[0032] Figure 17 The image shown is a cross-sectional view of a reactor provided in an embodiment of this disclosure.

[0033] Figure label:

[0034] 1. Reactor; 10. Cavity; 100. Inner cavity; 101. First end of the inner cavity; 102. Second end of the inner cavity; 1001. First opening; 1002. Second opening; 1003. Gap; 1004. Positioning hole; 200. Outer cavity; 201. First end of the outer cavity; 202. Second end of the outer cavity; 2001. Limiting hole; 2011. First limiting section; 2021. Second limiting section; 200 2. Third opening; 2003. Fourth opening; 210. Annular body; 220. Cover plate; 300. First limiting component; 310. First limiting seat; 3101. First limiting surface; 320. First limiting rod; 3201. First end of the first limiting rod; 3202. Second end of the first limiting rod; 330. First locking element; 340. First limiting block; 3401. Second limiting surface; 350. Positioning element; 400 1. First flange; 401. First end of the first flange; 402. Second end of the first flange; 500. Heating element; 600. Second limiting assembly; 610. Second limiting seat; 620. Second limiting rod; 6201. First end of the second limiting rod; 6202. Second end of the second limiting rod; 630. Second locking element; 700. Bellows; 701. First end of the bellows; 702. Second end of the bellows; 800. Support element; 900. First limiting element; 1000. Second limiting element; 1010. Limiting groove; 1100. Second flange; 1101. First end of the second flange; 1102. Second end of the second flange; 1200. Connecting bellows; 1201. First end of the connecting bellows; 1202. Second end of the connecting bellows; X1. First horizontal direction; X2. Second horizontal direction; 20. Inner furnace door; 30. Outer furnace door. Detailed Implementation

[0035] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0036] Figure 1 The diagram shown is a structural schematic of a cavity provided in an embodiment of this disclosure. Figure 2 As shown Figure 1 The cavity shown is a cross-sectional view along the AA direction. Figure 3 As shown Figure 2 The image shows a magnified view of a portion of the cavity in region B. Figures 1 to 3As shown, the cavity 10 includes an inner cavity 100, an outer cavity 200, at least two first limiting assemblies 300, a first flange 400, and at least one heating element 500. The inner cavity 100 extends along a first horizontal direction X1 and has a first end and a second end in the first horizontal direction X1. The inner cavity 100 is configured to receive a product. The outer cavity 200 extends along the first horizontal direction X1 and is configured to receive the inner cavity 100. The second end 202 of the outer cavity has a limiting hole 2001 extending along the first horizontal direction X1. At least one first limiting component 300 is disposed between the bottom of the first end 101 of the inner cavity and the outer cavity 200, and is connected to or abuts against the bottom of the inner cavity 100 and the outer cavity 200 respectively. At least another first limiting component 300 is disposed between the top of the first end 101 of the inner cavity and the outer cavity 200, and is connected to or abuts against the top of the inner cavity 100 and the outer cavity 200 respectively, to limit the first end 101 of the inner cavity in the vertical direction. A first flange 400 is connected to the second end 102 of the inner cavity and extends in the first horizontal direction X1. The first flange 400 passes through a limiting hole 2001 so that the second end 202 of the outer cavity supports the second end 102 of the inner cavity through the first flange 400. At least one heating element 500 is connected to the inner cavity 100 or the outer cavity 200, and the heating element 500 is configured to heat the inner cavity 100.

[0037] In a cross section perpendicular to the first horizontal direction X1, the outer diameter L1 of the second end 102 of the inner cavity is larger than the aperture R1 of the limiting hole 2001. In the first horizontal direction X1, there is a gap 1003 between the inner end face of the second end 202 of the outer cavity and the outer end face of the second end 102 of the inner cavity. The gap 1003 is configured to provide clearance space for the extension of the inner cavity 100 along the first horizontal direction X1, so that the inner cavity 100 can extend along the first horizontal direction X1 under high temperature conditions. This avoids the problem that the inner cavity 100 cannot extend along the first horizontal direction X1 due to the interference of the outer cavity 200, which would cause the inner cavity 100 to deform in a direction other than the first horizontal direction X1, resulting in poor structural stability of the inner cavity 100.

[0038] Exemplarily, the inner cavity 100 and the first flange 400 are an integral structure. Exemplarily, the inner cavity 100 and the first flange 400 are detachable and sealed together.

[0039] The number and placement of the heating elements 500 can be set according to actual needs. For example, such as... Figure 2 As shown, the heating element 500 is disposed between the inner cavity 100 and the outer cavity 200 and extends along the first horizontal direction X1, which improves the heating efficiency and heating uniformity of the heating element 500 on the inner cavity 100.

[0040] For example, the heating element 500 may be a heating rod, a heating plate, etc.

[0041] For example, the product may be a silicon wafer, a glass substrate, a crystal wafer, etc. For example, the product is a silicon wafer with a cross section, the inner cavity 100 accommodates the silicon wafer with the cross section, and a coating process is performed on the cross section of the silicon wafer to reduce minority carrier recombination and reflectivity of the silicon wafer, thereby improving the conversion efficiency of the solar cell fabricated using the silicon wafer.

[0042] In some embodiments, such as Figure 1 As shown, multiple first limiting components 300 are respectively disposed in the edge region and the middle region of the bottom of the first end 101 of the inner cavity, which further improves the limiting stability of the first limiting component 300 on the first end 101 of the inner cavity, thereby further preventing the inner cavity 100 from shifting during the extension process.

[0043] The number and setting area of ​​the first limit component 300 can be set according to actual needs.

[0044] For example, such as Figure 1 As shown, three first limiting components 300 are disposed between the bottom of the first end 101 of the inner cavity and the outer cavity 200. One first limiting component 300 is disposed in the middle region of the bottom of the first end 101 of the inner cavity, and the other two first limiting components 300 are respectively disposed on the edge regions on both sides of the middle region of the bottom of the first end 101 of the inner cavity. Exemplarily, the number of first limiting components 300 disposed at the bottom of the first end 101 of the inner cavity can also be four, five, or even more.

[0045] For example, such as Figure 1 As shown, two first limiting components 300 are disposed between the top of the first end 101 of the inner cavity and the outer cavity 200, and both are disposed in the middle region of the top of the first end 101 of the inner cavity, further improving the limiting stability of the first limiting components 300 on the first end 101 of the inner cavity, thereby further preventing the inner cavity 100 from shifting during the extension process. Exemplarily, the number of first limiting components 300 disposed on the top of the first end 101 of the inner cavity can also be three, four, or even more, and multiple first limiting components 300 are respectively disposed in the middle region and edge region of the top of the first end 101 of the inner cavity, to further improve the limiting stability of the first end 101 of the inner cavity.

[0046] In some embodiments, such as Figure 1As shown, the cavity 10 also includes at least two second limiting components 600, which are respectively disposed on both sides of the first end 101 of the inner cavity and between the outer cavity 200. The second limiting components 600 are connected to or abut against the side of the inner cavity 100 and the outer cavity 200, respectively, to limit the first end 101 of the inner cavity along the second horizontal direction X2, which is perpendicular to the first horizontal direction X1.

[0047] By using the first limiting component 300 to limit the first end 101 of the inner cavity in the vertical direction, and the second limiting component 600 to limit the first end 101 of the inner cavity in the second horizontal direction X2, the limiting stability of the first end 101 of the inner cavity is further improved, thereby further preventing the inner cavity 100 from shifting during the extension process.

[0048] The number and setting area of ​​the second limiting components 600 can be set according to actual needs. For example, such as... Figure 1 As shown, multiple second limiting components 600 are respectively disposed on both sides of the first end 101 of the inner cavity and between the outer cavity 200, and every two second limiting components 600 are disposed opposite each other in the second horizontal direction X2, further improving the limiting stability of the first end 101 of the inner cavity along the second horizontal direction X2. Exemplarily, the number of second limiting components 600 can be two, four, six or even more.

[0049] In some embodiments, the diameter of the limiting hole 2001 gradually increases along the direction from the first end 201 of the outer cavity to the second end 202 of the outer cavity.

[0050] The above configuration enables the second end 202 of the outer cavity to support the first flange 400 in a point-contact manner. In addition, since the diameter of the limiting hole 2001 gradually increases along the direction from the first end 201 of the outer cavity to the second end 202 of the outer cavity, it can minimize the possibility that the first flange 400 will be stuck in the limiting hole 2001 when the inner cavity 100 extends along the first horizontal direction X1 and the first flange 400 extends in the direction intersecting the first horizontal direction X1. This avoids the inner cavity 100 from being unable to extend along the first horizontal direction X1 due to the first flange 400 being stuck in the limiting hole 2001.

[0051] In some embodiments, such as Figure 2 and Figure 3As shown, along the direction from the first end 201 of the outer cavity to the second end 202 of the outer cavity, the limiting hole 2001 includes a first limiting segment 2011 and a second limiting segment 2021 that are interconnected. The first limiting segment 2011 has the same aperture, and the aperture of the second limiting segment 2021 gradually increases along the direction from the first end 201 of the outer cavity to the second end 202 of the outer cavity. That is, the aperture of the first limiting segment 2011 is R1, the aperture of the second limiting segment 2021 is R2, R2 is greater than R1, and R2 gradually increases along the direction from the first end 201 of the outer cavity to the second end 202 of the outer cavity.

[0052] The above configuration enables the second end 202 of the outer cavity to support the first flange 400 in a line contact manner, that is, the outer end face of the first flange 400 is in line contact with the inner wall of the first limiting segment 2011, thereby improving the support stability of the second end 202 of the outer cavity for the first flange 400. In addition, since the diameter of the hole of the second limiting segment 2021 gradually increases along the direction from the first end 201 of the outer cavity to the second end 202 of the outer cavity, it can minimize the possibility that the first flange 400 will be stuck in the limiting hole 2001 when the inner cavity 100 extends along the first horizontal direction X1 and the first flange 400 extends in the direction intersecting the first horizontal direction X1. This avoids the inner cavity 100 being unable to extend along the first horizontal direction X1 due to the first flange 400 being stuck in the limiting hole 2001.

[0053] In some embodiments, such as Figure 4 , Figure 5 as well as Figures 7 to 9 As shown, the first limiting assembly 300 includes a first limiting seat 310, a first limiting rod 320, and a first locking member 330. The first limiting seat 310 is connected to the top or bottom of the inner cavity 100. The first limiting rod 320 is vertically arranged, with its first end 3201 threadedly connected to the first limiting seat 310 and its second end 3202 abutting against the outer cavity 200. The first locking member 330 is located on the side of the first limiting seat 310 away from the inner cavity 100, threadedly connected to the first limiting rod 320, and configured to lock the first limiting rod 320 and the first limiting seat 310.

[0054] The first limiting component 300 has a simple structure and a simple and reliable limiting method. In addition, since the first limiting component 300 is connected to the inner cavity 100, it is convenient to place the first limiting component 300 and the inner cavity 100 simultaneously in the outer cavity 200 or remove them from the outer cavity 200.

[0055] For example, the first limiting seat 310 is detachably connected to the inner cavity 100 to facilitate replacement or maintenance of the first limiting component 300.

[0056] For example, such as Figure 8 and Figure 9 As shown, the inner cavity 100 has positioning holes 1004 at both the top and bottom, and the first limiting assembly 300 also includes a positioning member 350. The positioning member 350 is connected to the side of the first limiting seat 310 away from the first locking member 330. When installing the first limiting assembly 300, the positioning member 350 is inserted into the positioning hole 1004 to position the first limiting assembly 300.

[0057] For example, when the first limiting rod 320 and the first limiting seat 310 are not locked, the distance between the first limiting seat 310 and the outer cavity 200 in the vertical direction can be adjusted by rotating the first limiting rod 320, thereby adjusting the position of the inner cavity 100 relative to the outer cavity 200 in the vertical direction. By locking the first limiting rod 320 and the first limiting seat 310 by the first locking member 330, the distance between the first limiting seat 310 and the outer cavity 200 in the vertical direction can be fixed, thereby fixing the position of the inner cavity 100 relative to the outer cavity 200 in the vertical direction. For example, the inner cavity 100 is centered relative to the outer cavity 200 in the vertical direction.

[0058] In some embodiments, such as Figure 4 , Figure 6 and Figure 10 As shown, the second limiting assembly 600 includes a second limiting seat 610, a second limiting rod 620, and a second locking member 630. The second limiting seat 610 is connected to the side of the inner cavity 100. The second limiting rod 620 is disposed along a second horizontal direction X2, with its first end 6201 threadedly connected to the second limiting seat 610 and its second end 6202 abutting against the outer cavity 200. The second locking member 630 is disposed on the side of the second limiting seat 610 away from the inner cavity 100, threadedly connected to the second limiting rod 620, and configured to lock the second limiting rod 620 and the second limiting seat 610.

[0059] The second limiting component 600 has a simple structure and a simple and reliable limiting method. In addition, since the second limiting component 600 is connected to the inner cavity 100, it is convenient to place the second limiting component 600 and the inner cavity 100 simultaneously in the outer cavity 200 or remove them from the outer cavity 200.

[0060] For example, the second limiting seat 610 is detachably connected to the inner cavity 100 to facilitate replacement or maintenance of the second limiting assembly 600.

[0061] For example, when the second limiting rod 620 and the second limiting seat 610 are not locked, the distance between the second limiting seat 610 and the outer cavity 200 in the second horizontal direction X2 can be adjusted by rotating the second limiting rod 620, so as to adjust the position of the inner cavity 100 relative to the outer cavity 200 in the second horizontal direction X2. By locking the second limiting rod 620 and the second limiting seat 610 by the second locking member 630, the distance between the second limiting seat 610 and the outer cavity 200 in the second horizontal direction X2 can be fixed, thereby fixing the position of the inner cavity 100 relative to the outer cavity 200 in the second horizontal direction X2. For example, the inner cavity 100 is centrally located relative to the outer cavity 200 in the second horizontal direction X2.

[0062] In some embodiments, such as Figure 2 and Figure 3 As shown, the inner cavity has a first opening 1001 at its first end 101 and a second opening 1002 at its second end 102, allowing the product to enter and exit the inner cavity 100 through the first opening 1001. In a cross-section perpendicular to the first horizontal direction X1, the maximum dimension L2 of the second opening 1002 is smaller than the maximum dimension L3 of the first opening 1001, and greater than or equal to the diameter R1 of the limiting hole 2001. The first end 401 of the first flange is connected to the second end 102 of the inner cavity. The outer cavity 200 includes an annular body 210 and a cover plate 220. The first end of the annular body 210 has a third opening 2002, and the second end of the annular body 210 has a fourth opening 2003. The inner cavity 100 and the first limiting assembly 300 can enter and exit the outer cavity 200 through either the third opening 2002 or the fourth opening 2003. The cover plate 220 is connected to the second end of the annular body 210 to close the fourth opening 2003. The cover plate 220 has a limiting hole 2001, and the limiting hole 2001 penetrates the cover plate 220 along the first horizontal direction X1, and the second end 402 of the first flange passes through the limiting hole 2001.

[0063] The above configuration enables the second end 202 of the outer cavity to support the second end 102 of the inner cavity through the first flange 400, while reducing the contact area between the first flange 400 and the second end 202 of the outer cavity.

[0064] For example, the cover plate 220 is detachably connected to the second end of the annular body 210 so that the inner cavity 100 and the first limiting component 300 can enter and exit the outer cavity 200 through the fourth opening 2003.

[0065] In some embodiments, such as Figures 1 to 3As shown, the cavity 10 also includes a bellows 700, which is sleeved on the first flange 400. The first end 701 of the bellows is sealed to the cover plate 220, and the inner end face of the second end 702 of the bellows is sealed to the end face of the second end 402 of the first flange. This achieves a sealed connection between the cover plate 220 and the second end 402 of the first flange through the bellows 700, thereby isolating the inner cavity 100 and the outer cavity 200. Furthermore, because the bellows 700 is elastic, it can extend along the first horizontal direction X1 when the inner cavity 100 extends along the first horizontal direction X1, thus avoiding obstruction to the extension of the inner cavity 100 along the first horizontal direction X1.

[0066] For example, the first end 701 of the bellows and the cover plate 220, as well as the inner end face of the second end 702 of the bellows and the end face of the second end 402 of the first flange, are sealed together by sealing rings.

[0067] For example, such as Figures 11 to 13 As shown, the cavity 10 also includes a second flange 1100 and a connecting bellows 1200. The first end 1101 of the second flange is sealed to the outer end face of the second end 702 of the bellows, the second end 1102 of the second flange is sealed to the first end 1201 of the connecting bellows, and the second end 1202 of the connecting bellows is sealed to the exhaust pipe. Exemplarily, the first end 1101 of the second flange and the outer end face of the second end 702 of the bellows are sealed together by a sealing ring. Exemplarily, the first end 1201 of the connecting bellows is connected to the second end 1102 of the second flange using a third flange and flange clamps, and the second end 1202 of the connecting bellows is connected to the exhaust pipe.

[0068] In some embodiments, such as Figure 4 and Figure 5 As shown, the first limiting seat 310 has a first limiting surface 3101, which contacts the top or bottom of the inner cavity 100. The first limiting assembly 300 further includes a first limiting block 340, which is connected to the first limiting seat 310. The first limiting block 340 has a second limiting surface 3401, which abuts against the top or bottom of the inner cavity 100. The first limiting surface 3101 and the second limiting surface 3401 together support the bottom and top of the first end 101 of the inner cavity, so that the end face of the first end 101 of the inner cavity is parallel to the end face of the first end 201 of the outer cavity.

[0069] In some embodiments, such as Figures 14 to 16As shown, the cavity 10 further includes at least one support member 800, a plurality of first limiting members 900, and a plurality of second limiting members 1000. The support member 800 is disposed on the bottom of the outer cavity 200 near the inner cavity 100, extending along a first horizontal direction X1 and configured to support the inner cavity 100. The plurality of first limiting members 900 are connected to the support member 800 and are arranged at intervals along the first horizontal direction X1. The plurality of second limiting members 1000 are connected to the outer cavity 200 and are arranged at intervals along the first horizontal direction X1. Each second limiting member 1000 has a limiting groove 1010, and the plurality of first limiting members 900 respectively engage with the plurality of limiting grooves 1010.

[0070] Multiple limiting grooves 1010 are used to limit the support member 800 along the first horizontal direction X1, and the end of the support member 800 is detachably connected to the bottom of the outer cavity 200, so as to improve the installation stability and ease of installation and removal of the support member 800.

[0071] In addition, when loading and unloading the inner cavity 100, the inner cavity 100 is supported by the support member 800 so that the inner cavity 100 can be pushed into or pulled out of the outer cavity 200.

[0072] Figure 17 The image shown is a cross-sectional view of a reactor provided according to an embodiment of this disclosure. Figure 17 As shown, the reactor 1 includes the cavity 10, inner furnace door 20, and outer furnace door 30 mentioned in the above embodiments. The first end 101 of the inner cavity of the cavity 10 has a first opening 1001, and the first end 201 of the outer cavity of the cavity 10 has a third opening 2002. The inner furnace door 20 is configured to open or close the first opening 1001, and the outer furnace door 30 is configured to open or close the third opening 2002.

[0073] For example, when the end face of the first end 101 of the inner cavity is parallel to the end face of the first end 201 of the outer cavity, the furnace door drive device drives the parallel inner furnace door 20 and outer furnace door 30 to move simultaneously toward the cavity 10, so that the inner furnace door 20 closes the first opening 1001 and the outer furnace door 30 closes the third opening 2002.

[0074] Since the reactor 1 includes a cavity 10, all the technical features and effects of the reactor 1 including the cavity 10 will not be described in detail here.

[0075] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0076] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0077] It should be understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0078] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0079] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0080] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A cavity, characterized in that, include: An inner cavity, extending along a first horizontal direction, having a first end and a second end in the first horizontal direction, is configured to accommodate a product; An outer cavity, extending along the first horizontal direction, is configured to accommodate the inner cavity, and a second end of the outer cavity has a limiting hole extending along the first horizontal direction; At least two first limiting components are provided, at least one of which is disposed between the bottom of the first end of the inner cavity and the outer cavity, and is connected to or abuts against the bottom of the inner cavity and the outer cavity respectively; at least another first limiting component is disposed between the top of the first end of the inner cavity and the outer cavity, and is connected to or abuts against the top of the inner cavity and the outer cavity respectively, so as to limit the first end of the inner cavity in the vertical direction. A first flange is connected to the second end of the inner cavity and extends along the first horizontal direction. The first flange passes through the limiting hole so that the second end of the outer cavity supports the second end of the inner cavity through the first flange. At least one heating element is connected to the inner cavity or the outer cavity and is configured to heat the inner cavity; Wherein, in a cross section perpendicular to the first horizontal direction, the outer diameter of the second end of the inner cavity is larger than the diameter of the limiting hole, and in the first horizontal direction, there is a gap between the inner end face of the second end of the outer cavity and the outer end face of the second end of the inner cavity, the gap being configured to provide clearance space for the extension of the inner cavity along the first horizontal direction.

2. The cavity according to claim 1, characterized in that, Multiple first limiting components are respectively disposed at the bottom edge region and middle region of the first end of the inner cavity.

3. The cavity according to claim 1, characterized in that, Also includes: At least two second limiting components are respectively disposed on both sides of the first end of the inner cavity and between the outer cavity. The second limiting components are respectively connected to or abut against the side of the inner cavity and the outer cavity to limit the first end of the inner cavity along the second horizontal direction; wherein, the second horizontal direction is perpendicular to the first horizontal direction.

4. The cavity according to claim 1, characterized in that, The diameter of the limiting hole gradually increases along the direction from the first end of the outer cavity to the second end of the outer cavity; And / or, Along the direction from the first end of the outer cavity to the second end of the outer cavity, the limiting hole includes a first limiting segment and a second limiting segment that are interconnected. The first limiting segment has the same diameter, and the diameter of the second limiting segment gradually increases along the direction from the first end of the outer cavity to the second end of the outer cavity.

5. The cavity according to claim 3, characterized in that, The first limiting component includes: The first limiting seat is connected to the top or bottom of the inner cavity; The first limiting rod is vertically set, with its first end threadedly connected to the first limiting seat and its second end abutting against the outer cavity. The first locking member is disposed on the side of the first limiting seat away from the inner cavity, and is connected to the... The first limiting rod is threaded and configured to lock the first limiting rod and the first limiting seat; And / or, The second limiting component includes: The second limiting seat is connected to the side of the inner cavity; The second limiting rod is arranged along the second horizontal direction. The first end of the second limiting rod is threadedly connected to the second limiting seat, and the second end of the second limiting rod abuts against the outer cavity. The second locking member is disposed on the side of the second limiting seat away from the inner cavity, and is threadedly connected to the second limiting rod, and is configured to lock the second limiting rod and the second limiting seat.

6. The cavity according to any one of claims 1 to 5, characterized in that, The inner cavity has a first opening at its first end and a second opening at its second end, allowing the product to enter and exit the inner cavity through the first opening; wherein, in a cross-section perpendicular to the first horizontal direction, the maximum size of the second opening is smaller than the maximum size of the first opening and greater than or equal to the diameter of the limiting hole; wherein, the first end of the first flange is connected to the second end of the inner cavity. The outer cavity includes: The ring-shaped body has a third opening at its first end and a fourth opening at its second end. The inner cavity and the first limiting component can enter and exit the outer cavity through the third opening or the fourth opening. A cover plate is connected to the second end of the annular body to close the fourth opening; The cover plate has the limiting hole, and the limiting hole penetrates the cover plate along the first horizontal direction, and the second end of the first flange passes through the limiting hole.

7. The cavity according to claim 6, characterized in that, Also includes: A bellows is fitted onto the first flange, with the first end of the bellows being sealed to the cover plate, and the inner end face of the second end of the bellows being sealed to the end face of the second end of the first flange.

8. The cavity according to claim 5, characterized in that, The first limiting seat has a first limiting surface, which contacts the top or bottom of the inner cavity; The first limiting component further includes: A first limiting block is connected to a first limiting seat. The first limiting block has a second limiting surface, which abuts against the top or bottom of the inner cavity. The first limiting surface and the second limiting surface together support the bottom and top of the first end of the inner cavity, so that the end face of the first end of the inner cavity is parallel to the end face of the first end of the outer cavity.

9. The cavity according to claim 6, characterized in that, Also includes: At least one support member is disposed at the bottom of the outer cavity on the side near the inner cavity, the support member extending along the first horizontal direction and configured to support the inner cavity; Multiple first limiting members are connected to the support member and are arranged sequentially at intervals along the first horizontal direction; Multiple second limiting members are connected to the outer cavity and are arranged sequentially at intervals along the first horizontal direction; wherein each second limiting member has a limiting groove, and the multiple first limiting members are respectively engaged with the multiple limiting grooves.

10. A reactor, characterized in that, include: The cavity according to any one of claims 1 to 9, wherein the first end of the inner cavity of the cavity has a first opening, and the first end of the outer cavity of the cavity has a third opening; The inner furnace door is configured to open or close the first opening; The outer furnace door is configured to open or close the third opening.

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