A cooling medium regulating system and etching apparatus
By employing a dynamically adjustable cooling medium system in the etching equipment, combined with temperature detection and adjustment components, the problem of poor adaptability of traditional water cooling systems is solved, enabling precise control of the temperature of the upper electrode and the upper cover, thereby improving the manufacturing quality of semiconductor chips and the degree of equipment integration.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ADVANCED MATERIALS TECH & ENG INC
- Filing Date
- 2025-05-21
- Publication Date
- 2026-06-05
AI Technical Summary
Traditional water cooling systems are difficult to adapt to changing production environments and process requirements, and the complexity of the equipment makes maintenance inconvenient.
The system employs a dynamically adjustable cooling medium system, which connects the cooling channels of the upper electrode and the upper cover via a water distribution block. Combined with temperature detection and adjustment components, it achieves dynamic temperature regulation of the upper electrode and the upper cover, resulting in a high degree of integration and reduced equipment costs.
It enables precise control of the temperature of the top electrode and the top cover, adapts to rapidly changing production needs, improves chip quality and consistency, and reduces equipment footprint and maintenance costs.
Smart Images
Figure CN224329870U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a cooling medium conditioning system and etching equipment. Background Technology
[0002] In semiconductor manufacturing, precise control of the water cooling system in etching equipment is crucial for ensuring production efficiency and chip quality. Traditional water cooling systems primarily rely on static regulation mechanisms, maintaining system stability by setting fixed flow and pressure parameters. This method often struggles to adapt quickly to dynamic adjustments in varying production environments, such as temperature changes and process requirements. Furthermore, in existing technologies, cooling equipment is typically directly connected to components like the top cover, upper electrode, and lower electrode via complex piping, increasing equipment costs and hindering system maintenance.
[0003] Therefore, there is an urgent need for a cooling medium regulation system and etching equipment to solve the above-mentioned problems. Utility Model Content
[0004] Based on the above, the purpose of this utility model is to provide a cooling medium regulation system and etching equipment, which realizes dynamic regulation of the temperature of the upper electrode and the upper cover, and integrates two cooling modules into one water distribution block, with a high degree of integration; it has a small footprint, is easy to install, reduces equipment costs, and facilitates the maintenance of the cooling medium regulation system.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] A cooling medium regulation system, comprising:
[0007] The upper electrode is provided with a first cooling channel;
[0008] The upper cover is provided with a second cooling channel and is disposed above the upper electrode;
[0009] Cooling equipment, used to transport cooling media;
[0010] The cooling device is connected to the first cooling channel through the water distribution block to form a first loop, and the cooling device is connected to the second cooling channel through the water distribution block to form a second loop;
[0011] A first regulating component is disposed on the first circuit, and the first regulating component is used to regulate the flow rate of the cooling medium in the first circuit;
[0012] The second regulating component is disposed on the second circuit and is used to regulate the flow rate of the cooling medium in the second circuit;
[0013] A temperature detection component is used to detect the temperature of the upper electrode and the upper cover, and the temperature detection component is electrically connected to the first adjustment component and the second adjustment component.
[0014] As a preferred technical solution for a cooling medium regulation system, the cooling device is provided with a first water inlet and a first water return outlet; the two ends of the first cooling flow channel are provided with a second water inlet and a second water return outlet; the water distribution block is provided with a water distribution block inlet, a water distribution block return outlet, an upper electrode return outlet, and a first upper electrode inlet; the water distribution block is provided with a first flow channel and a second flow channel; the first flow channel is connected to the water distribution block inlet and the first upper electrode inlet respectively; the second flow channel is connected to the water distribution block return outlet and the upper electrode return outlet respectively; the first water inlet, the water distribution block inlet, the first flow channel, the first upper electrode inlet, the second water inlet, the first cooling flow channel, the second water return outlet, the upper electrode return outlet, the second flow channel, the water distribution block return outlet, and the first water return outlet are sequentially connected to form the first loop.
[0015] As a preferred technical solution of a cooling medium regulation system, the first regulation component includes a first solenoid valve, the first upper electrode water inlet is connected to the second water inlet through a first pipeline, and the first solenoid valve is disposed on the first pipeline.
[0016] As a preferred technical solution of a cooling medium regulation system, the first regulation component further includes a flow regulation detector. The water distribution block is also provided with a second upper electrode inlet that communicates with the first flow channel. The second upper electrode inlet is connected to the downstream of the first solenoid valve through a second pipeline. The flow regulation detector is disposed on the second pipeline and is used to detect and regulate the flow rate of the cooling medium in the second pipeline.
[0017] As a preferred technical solution for a cooling medium regulation system, the flow regulation detector is equipped with a flow meter and a flow control valve. The flow meter is used to detect the flow rate of the cooling medium in the second pipeline, and the flow control valve is used to regulate the flow rate of the cooling medium in the second pipeline.
[0018] As a preferred technical solution for a cooling medium regulation system, the second cooling channel is provided with a third inlet and a third outlet at both ends; the water distribution block is also provided with an upper cover inlet and an upper cover outlet, the upper cover inlet is connected to the first channel, and the upper cover outlet is connected to the second channel. The first inlet, the water distribution block inlet, the first channel, the upper cover inlet, the third inlet, the second cooling channel, the third outlet, the upper cover outlet, the second channel, the water distribution block outlet, and the first outlet are sequentially connected to form the second loop.
[0019] As a preferred technical solution of a cooling medium regulation system, the second regulation component includes a second solenoid valve. The water distribution block is also provided with a third flow channel and a transition inlet and a transition outlet connected through the third flow channel. The upper cover inlet, the transition inlet, the transition outlet, and the third inlet are connected in sequence. The upper cover inlet and the transition inlet are connected through a third pipeline. The second solenoid valve is disposed on the third pipeline.
[0020] As a preferred technical solution for a cooling medium conditioning system, the cooling medium conditioning system further includes a lower electrode, which is disposed above the upper electrode. The lower electrode is provided with a third cooling channel, and the cooling device is connected to the third cooling channel.
[0021] As a preferred technical solution for a cooling medium regulation system, the temperature detection component includes multiple temperature sensors, which are used to detect the temperature of the upper electrode and the temperature of the upper cover.
[0022] On the other hand, an etching apparatus is provided, including the cooling medium conditioning system described in any of the above claims.
[0023] The beneficial effects of this utility model are as follows:
[0024] This invention provides a cooling medium regulation system and etching equipment. The cooling equipment is connected to a first cooling channel via a water distribution block to form a first loop. Cooling medium flows through the first loop to cool the upper electrode. The cooling equipment is also connected to a second cooling channel via the water distribution block to form a second loop. Cooling medium flows through the second loop to cool the upper cover. When the temperature of the upper electrode and the upper cover needs to be adjusted, a temperature detection component detects the temperatures of the upper electrode and the upper cover. A first regulation component adjusts the flow rate of the cooling medium in the first loop based on the temperature detection data of the upper electrode, thereby regulating the temperature of the upper electrode. A second regulation component adjusts the flow rate of the cooling medium in the second loop based on the temperature detection data of the upper cover, thereby regulating the temperature of the upper cover. This invention, through the cooperation of the temperature detection component, the first regulation component, and the second regulation component, achieves dynamic regulation of the temperature of the upper electrode and the upper cover. By monitoring process conditions in real time and automatically adjusting the flow rate and pressure of the cooling medium, it ensures precise control of the temperature and pressure of the upper electrode and the upper cover during the etching process. This fine-tuning can adapt to rapidly changing production needs and improve the manufacturing quality and consistency of semiconductor chips. Furthermore, by setting up a water distribution block, the first cooling channel, the second cooling channel, and the cooling equipment are all connected to the water distribution block. The first loop and the second loop form two cooling modules. The two cooling modules are integrated into one water distribution block, resulting in a high degree of integration. It occupies a small area, is easy to install, reduces equipment costs, and facilitates the maintenance of the cooling medium adjustment system. Attached Figure Description
[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.
[0026] Figure 1 This is a schematic diagram of the cooling medium regulating system provided in a specific embodiment of this utility model;
[0027] Figure 2 This is a cross-sectional view of the upper electrode provided in a specific embodiment of this utility model;
[0028] Figure 3 This is a cross-sectional view of the top cover provided in a specific embodiment of this utility model;
[0029] Figure 4 This is a partial structural schematic diagram of the cooling medium regulating system provided in a specific embodiment of this utility model;
[0030] Figure 5This is a top view of the water distribution block provided in a specific embodiment of this utility model;
[0031] Figure 6 This is a schematic diagram of the structure of the first adjustment component provided in a specific embodiment of the present invention;
[0032] Figure 7 This is a schematic diagram of the structure of the second adjustment component provided in a specific embodiment of this utility model.
[0033] The markings in the image are as follows:
[0034] 1. Upper electrode; 11. First cooling channel; 12. Second water inlet; 13. Second water return outlet;
[0035] 2. Top cover; 21. Second cooling channel; 22. Third water inlet; 23. Third water return outlet;
[0036] 3. Cooling equipment; 31. First water inlet; 32. First water return outlet;
[0037] 4. Divider block; 41. Divider block inlet; 42. Upper electrode return inlet; 43. First upper electrode inlet; 44. Second upper electrode inlet; 45. Top cover inlet; 46. Top cover return inlet; 47. Transition inlet;
[0038] 5. First regulating component; 51. First solenoid valve; 52. First pipeline; 53. Flow regulating detector; 54. Second pipeline;
[0039] 6. Second regulating component; 61. Second solenoid valve; 62. Third pipeline;
[0040] 7. Heating device; 8. Lower electrode. Detailed Implementation
[0041] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0042] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0043] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0044] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0045] like Figures 1-4 As shown, this embodiment provides an etching apparatus, which includes a cooling medium regulation system. The cooling medium regulation system includes an upper electrode 1, an upper cover 2, a cooling device 3, a water distribution block 4, a first regulation component 5, a second regulation component 6, and a temperature detection component. Specifically, the upper electrode 1 is provided with a first cooling channel 11; the upper cover 2 is provided with a second cooling channel 21, and the upper cover 2 is positioned above the upper electrode 1; the cooling device 3 is used to transport the cooling medium; the cooling device 3 is connected to the first cooling channel 11 through the water distribution block 4 to form a first loop, and the cooling device 3 is connected to the second cooling channel 21 through the water distribution block 4 to form a second loop; the first regulation component 5 is disposed on the first loop and is used to regulate the flow rate of the cooling medium in the first loop; the second regulation component 6 is disposed on the second loop and is used to regulate the flow rate of the cooling medium in the second loop; the temperature detection component is used to detect the temperature of the upper electrode 1 and the upper cover 2, and the temperature detection component is electrically connected to the first regulation component 5 and the second regulation component 6. In this embodiment, the upper cover 2 and the upper electrode 1 are prior art and will not be described in detail here.
[0046] The cooling device 3 is connected to the first cooling channel 11 via the water distribution block 4 to form a first loop. The cooling medium flows through the first loop to cool the upper electrode 1. The cooling device 3 is also connected to the second cooling channel 21 via the water distribution block 4 to form a second loop. The cooling medium flows through the second loop to cool the upper cover 2. When it is necessary to adjust the temperature of the upper electrode 1 and the upper cover 2, the temperature detection component detects the temperature of the upper electrode 1 and the upper cover 2. The first adjustment component 5 adjusts the flow rate of the cooling medium in the first loop according to the detection data of the temperature detection component on the upper electrode 1, thereby adjusting the temperature of the upper electrode 1. The second adjustment component 6 adjusts the flow rate of the cooling medium in the second loop according to the detection data of the temperature detection component on the upper cover 2, thereby adjusting the temperature of the upper cover 2. This embodiment achieves dynamic temperature regulation of the upper electrode 1 and upper cover 2 through the cooperation of a temperature detection component with the first adjustment component 5 and the second adjustment component 6. By monitoring process conditions in real time and automatically adjusting the flow rate and pressure of the cooling medium, it ensures precise control of the temperature and pressure of the upper electrode 1 and upper cover 2 during the etching process. This fine-tuning can adapt to rapidly changing production needs and improve the manufacturing quality and consistency of semiconductor chips. Furthermore, by setting up a water distribution block 4, the first cooling channel 11, the second cooling channel 21, and the cooling device 3 are all connected to the water distribution block 4. The first loop and the second loop form two cooling modules, which are integrated into one water distribution block 4, resulting in a high degree of integration; a small footprint, convenient installation, reduced equipment costs, and easier maintenance of the cooling medium adjustment system. In this embodiment, the water distribution block 4 uses a simulated flow channel design, which, without affecting the footprint and installation, and with a higher degree of equipment integration, is more in line with the flow channels of fluid mechanics and heat transfer.
[0047] It should be noted that the temperature detection component is electrically connected to the first regulating component 5 and the second regulating component 6 via a PLC (Programmable Logic Controller). The temperature information detected by the temperature sensor and the flow information of the first regulating component 5 and the second regulating component 6 are both transmitted to the PLC, which then performs temperature judgment and controls the first regulating component 5 and the second regulating component 6 to perform corresponding flow adjustments.
[0048] In this embodiment, the temperature detection component includes multiple temperature sensors, which are used to detect the temperature of the upper electrode 1. The first adjustment component 5 obtains the average temperature of the upper electrode 1 based on the temperature sensors. The multiple temperature sensors are used to detect the temperature of the upper cover 2, and the second adjustment component 6 obtains the average temperature of the upper cover 2 based on the temperature sensors.
[0049] Furthermore, such as Figure 2 , Figures 4-6As shown, the cooling device 3 is provided with a first inlet 31 and a first return inlet 32; the two ends of the first cooling channel 11 are provided with a second inlet 12 and a second return inlet 13; the water distribution block 4 is provided with a water distribution block inlet 41, a water distribution block return inlet, an upper electrode return inlet 42, and a first upper electrode inlet 43. The water distribution block 4 is provided with a first channel and a second channel. The first channel is connected to the water distribution block inlet 41 and the first upper electrode inlet 43, respectively, and the second channel is connected to the water distribution block return inlet and the upper electrode return inlet 42, respectively. The first inlet 31, the water distribution block inlet 41, the first channel, the first upper electrode inlet 43, the second inlet 12, the first cooling channel 11, the second return inlet 13, the upper electrode return inlet 42, the second channel, the water distribution block return inlet, and the first return inlet 32 are sequentially connected to form a first loop. The cooling medium of the cooling device 3 circulates in the first loop to cool the upper electrode 1.
[0050] In this embodiment, the first regulating component 5 includes a first solenoid valve 51. The first upper electrode inlet 43 is connected to the second inlet 12 via a first pipe 52, and the first solenoid valve 51 is disposed on the first pipe 52. The cooling medium entering from the water distribution block inlet 41 can flow through a first flow channel to the first pipe 52. The first solenoid valve 51 can control the on / off state of the cooling medium in the first pipe 52 and regulate the flow rate of the cooling medium according to the temperature of the upper electrode 1.
[0051] More preferably, the first regulating component 5 further includes a flow regulating detector 53. The water distribution block 4 is also provided with a second upper electrode inlet 44 communicating with the first flow channel. The second upper electrode inlet 44 is connected to the downstream of the first solenoid valve 51 via a second pipe 54. The flow regulating detector 53 is disposed on the second pipe 54 and is used to detect and regulate the flow rate of the cooling medium in the second pipe 54. The flow regulating detector 53 can control the flow rate of the cooling medium and also help regulate the flow rate, further aiding in temperature control. The cooling medium entering from the water distribution block inlet 41 can flow through the first flow channel to the second pipe 54, and then through the second pipe 54 to the first cooling flow channel 11. The first pipe 52 and the second pipe 54 can respectively deliver cooling medium to the upper electrode 1. The first solenoid valve 51 and the flow regulating detector 53 cooperate to jointly achieve temperature regulation of the upper electrode 1. In this embodiment, the second pipe 54 and the first pipe 52 can be connected by a T-junction. The second pipe 54 can serve as flow compensation for the cooling medium, improving the cooling efficiency of the upper electrode 1.
[0052] Specifically, the flow regulating detector 53 is equipped with a flow meter and a flow control valve. The flow meter is used to detect the flow rate of the cooling medium in the second pipeline 54, and the flow control valve is used to regulate the flow rate of the cooling medium in the second pipeline 54.
[0053] like Figure 1As shown, in this embodiment, the cooling medium regulation system further includes a heating device 7, which is used to heat the upper electrode 1. The upper electrode 1 is heated by the heating device 7, and the upper electrode 1 is cooled by the cooling medium. The heating device 7 and the cooling medium work together to achieve the heating and cooling of the upper electrode 1. In this embodiment, the heating device 7 includes a heating plate, which is attached to the upper electrode 1.
[0054] Furthermore, such as Figures 3-7 As shown, the second cooling channel 21 has a third inlet 22 and a third outlet 23 at both ends; the water distribution block 4 also has an upper cover inlet 45 and an upper cover outlet 46. The upper cover inlet 45 is connected to the first channel, and the upper cover outlet 46 is connected to the second channel. The first inlet 31, the water distribution block inlet 41, the first channel, the upper cover inlet 45, the third inlet 22, the second cooling channel 21, the third outlet 23, the upper cover outlet 46, the second channel, the water distribution block outlet, and the first outlet 32 are sequentially connected to form a second loop. The cooling medium of the cooling device 3 circulates in the second loop to cool the upper electrode 1.
[0055] In this embodiment, the second regulating component 6 includes a second solenoid valve 61. The water distribution block 4 is also provided with a third flow channel and a transition inlet 47 and a transition outlet connected through the third flow channel. The top cover inlet 45, the transition inlet 47, the transition outlet, and the third inlet 22 are connected in sequence. The top cover inlet 45 and the transition inlet 47 are connected through a third pipe 62. The second solenoid valve 61 is disposed on the third pipe 62. The cooling medium entering from the water distribution block inlet 41 can flow through the first flow channel to the top cover inlet 45, and then sequentially enter the third pipe 62, the third flow channel, and the second cooling flow channel 21. The second solenoid valve 61 can control the on / off state of the cooling medium in the third pipe 62 and regulate the flow rate of the cooling medium according to the temperature of the top cover 2, thereby realizing the dynamic regulation of the temperature of the top cover 2 and enabling independent adjustment of the temperatures of the top cover 2 and the upper electrode 1.
[0056] In this embodiment, the water inlet 41 of the water distribution block, the water return port 42 of the upper electrode, the water inlet 43 of the first upper electrode, the water inlet 44 of the second upper electrode, the water inlet 45 of the upper cover, the water return port 46 of the upper cover, and the transition water inlet 47 are located on the first side wall of the water distribution block 4, and the water return port and the transition water outlet of the water distribution block 4 are located on the side of the water distribution block 4 away from the first side wall.
[0057] Furthermore, such as Figure 1As shown, the cooling medium regulation system also includes a lower electrode 8, which is positioned above the upper electrode 1. The lower electrode 8 has a third cooling channel, and the cooling device 3 is connected to the third cooling channel. The cooling device 3 drives the cooling medium to circulate within the third cooling channel, thereby regulating the temperature of the lower electrode 8. Alternatively, a regulating valve can be installed on the pipeline between the cooling device 3 and the third cooling channel to regulate the flow rate of the cooling medium within the third cooling channel.
[0058] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.
Claims
1. A cooling medium regulating system, characterized in that, include: The upper electrode (1) is provided with a first cooling channel (11); The upper cover (2) is provided with a second cooling channel (21), and the upper cover (2) is disposed above the upper electrode (1); Cooling equipment (3), which is used to transport cooling medium; The water distribution block (4) connects the cooling device (3) to the first cooling channel (11) and forms a first loop through the water distribution block (4), and the cooling device (3) connects to the second cooling channel (21) and forms a second loop through the water distribution block (4). A first regulating component (5) is disposed on the first circuit, and the first regulating component (5) is used to regulate the flow rate of the cooling medium in the first circuit; The second regulating component (6) is disposed on the second circuit and is used to regulate the flow rate of the cooling medium in the second circuit; A temperature detection component is used to detect the temperature of the upper electrode (1) and the upper cover (2), and the temperature detection component is electrically connected to the first adjustment component (5) and the second adjustment component (6).
2. The cooling medium regulating system according to claim 1, characterized in that, The cooling device (3) is provided with a first inlet (31) and a first return inlet (32); the first cooling channel (11) is provided with a second inlet (12) and a second return inlet (13) at both ends; the water distribution block (4) is provided with a water distribution block inlet (41), a water distribution block return inlet, an upper electrode return inlet (42), and a first upper electrode inlet (43); the water distribution block (4) is provided with a first channel and a second channel, the first channel being connected to the water distribution block inlet (41) and the first upper electrode respectively. The inlet (43) and the second flow channel are respectively connected to the water distribution block return port and the upper electrode return port (42). The first inlet (31), the water distribution block inlet (41), the first flow channel, the first upper electrode inlet (43), the second inlet (12), the first cooling flow channel (11), the second return port (13), the upper electrode return port (42), the second flow channel, the water distribution block return port and the first return port (32) are sequentially connected to form the first loop.
3. The cooling medium regulating system according to claim 2, characterized in that, The first regulating component (5) includes a first solenoid valve (51), the first upper electrode inlet (43) is connected to the second inlet (12) through a first pipeline (52), and the first solenoid valve (51) is disposed on the first pipeline (52).
4. The cooling medium regulating system according to claim 3, characterized in that, The first regulating component (5) further includes a flow regulating detector (53). The water distribution block (4) is also provided with a second upper electrode inlet (44) that communicates with the first flow channel. The second upper electrode inlet (44) is connected to the downstream of the first solenoid valve (51) through a second pipeline (54). The flow regulating detector (53) is provided on the second pipeline (54). The flow regulating detector (53) is used to detect and regulate the flow rate of the cooling medium in the second pipeline (54).
5. The cooling medium regulating system according to claim 4, characterized in that, The flow regulation detector (53) is equipped with a flow meter and a flow control valve. The flow meter is used to detect the flow rate of the cooling medium in the second pipeline (54), and the flow control valve is used to regulate the flow rate of the cooling medium in the second pipeline (54).
6. The cooling medium regulating system according to claim 2, characterized in that, The second cooling channel (21) is provided with a third water inlet (22) and a third water return outlet (23) at both ends; the water distribution block (4) is also provided with an upper cover water inlet (45) and an upper cover water return outlet (46). The upper cover water inlet (45) is connected to the first channel, and the upper cover water return outlet (46) is connected to the second channel. The first water inlet (31), the water distribution block water inlet (41), the first channel, the upper cover water inlet (45), the third water inlet (22), the second cooling channel (21), the third water return outlet (23), the upper cover water return outlet (46), the second channel, the water distribution block water return outlet and the first water return outlet (32) are sequentially connected to form the second loop.
7. The cooling medium regulating system according to claim 6, characterized in that, The second regulating component (6) includes a second solenoid valve (61). The water distribution block (4) is also provided with a third flow channel and a transition inlet (47) and a transition outlet connected through the third flow channel. The top cover inlet (45), the transition inlet (47), the transition outlet, and the third inlet (22) are connected in sequence. The top cover inlet (45) and the transition inlet (47) are connected through a third pipeline (62). The second solenoid valve (61) is provided on the third pipeline (62).
8. The cooling medium regulating system according to any one of claims 1-6, characterized in that, The cooling medium regulation system further includes a lower electrode (8), which is disposed above the upper electrode (1). The lower electrode (8) is provided with a third cooling channel, and the cooling device (3) is connected to the third cooling channel.
9. The cooling medium regulating system according to any one of claims 1-6, characterized in that, The temperature detection component includes multiple temperature sensors, which are used to detect the temperature of the upper electrode (1) and the temperature of the upper cover (2).
10. An etching apparatus, characterized in that, Includes the cooling medium regulation system as described in any one of claims 1-9.