A cleaning device and wet scrubber

Abstract

The utility model provides a kind of cleaning device and wet scrubber, belong to the technical field of semiconductor manufacturing. Including: installation part, inside is provided with cylindrical containing space, is provided with N spiral grooves on the inner wall of installation part;Scrape head, edge and the inner wall sliding connection of installation part;Rod, first end and the first end surface of scrape head fixed connection;Driving element, with the second end of rod connection;Cleaning element, including connecting portion and N cleaning parts, the first end of connecting portion inserts the second end surface of scrape head and with scrape head rotary connection, the second end of connecting portion is respectively with the first end fixed connection of N cleaning parts, the second end of cleaning part extends into corresponding spiral groove.The utility model's technical scheme can realize the automatic cleaning of scraper, effectively improve cleaning efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a cleaning device and a wet scrubber. Background Technology

[0002] A wet scrubber is a device for treating exhaust gases from an epitaxial reactor. Located between the reactor and the thermal scrubber, it is primarily used to treat exhaust gases containing HCl (hydrogen chloride), TCS (trichlorosilane), and H2. Its core principle is to dissolve readily soluble HCl and slightly soluble TCS in the exhaust gas through water washing. When the exhaust gas enters the bottom of the X-shaped tube through a pumped pipeline, HCl is first diluted and removed by water. However, TCS, being poorly soluble in water, readily reacts with oxygen to form solid SiO2, which adheres to the inner wall of the pipe. Long-term accumulation reduces the pipe's cross-sectional area, causing airflow turbulence and pressure fluctuations. Simultaneously, the generated particulate matter contaminates the reactor chamber environment, affecting wafer production quality.

[0003] As a critical maintenance device, the scraper adopts a double-linked symmetrical structure at the bottom of the X-shaped pipe. It mainly consists of a cylinder, a metal rod, and a scraper head, which can scrape off SiO2 from the inner wall of the pipe. Due to long-term exposure to TCS airflow, stalactite-like SiO2 solids will gradually accumulate at the bottom of the scraper head. If it is not cleaned regularly, not only will the scraper efficiency be reduced, but the residual solids will also exacerbate the risk of particulate matter pollution.

[0004] However, the scraper is currently mainly cleaned manually. The cleaning process requires disassembling the X-shaped tube and the scraper before cleaning, which results in very low cleaning efficiency. In addition, since SiO2 solid is flammable, there are great safety hazards in the manual cleaning process. Utility Model Content

[0005] This invention provides a cleaning device and a wet scrubber that can automatically clean the scraper, effectively improving cleaning efficiency and reducing safety hazards.

[0006] To achieve the above objectives, the technical solution adopted in this utility model embodiment is as follows:

[0007] A cleaning device, comprising:

[0008] The mounting part has a cylindrical accommodating space inside, and the inner wall of the mounting part has N spiral grooves with a preset rotation angle, where N is a positive integer.

[0009] A scraper head is disposed within the accommodating space, and the edge of the scraper head is slidably connected to the inner wall of the mounting portion;

[0010] A rod is disposed within the accommodating space, and the first end of the rod is fixedly connected to the first end face of the scraper head.

[0011] A driving component is connected to the second end of the rod;

[0012] A cleaning component includes: a connecting part and N cleaning parts, wherein the first end of the connecting part is inserted into the second end face of the scraper head and is rotatably connected to the scraper head, the second end of the connecting part is fixedly connected to the first ends of the N cleaning parts respectively, and the second ends of the N cleaning parts respectively extend into the corresponding spiral grooves.

[0013] In some embodiments, the preset angle is one-Nth of a full circle.

[0014] In some embodiments, the second end face of the scraper head is recessed with a mounting hole, the wall of the mounting hole is provided with a first spiral pattern, and the first end of the connecting part is provided with a second spiral pattern that matches the first spiral pattern.

[0015] In some embodiments, the N spiral grooves are evenly distributed on the inner wall of the mounting portion.

[0016] In some embodiments, the surfaces formed by the N cleaning sections are parallel to the second end face of the scraper head and are spaced at a predetermined distance.

[0017] In some embodiments, the cleaning part is in the shape of a round rod, and N cleaning parts are evenly distributed circumferentially along the connecting part.

[0018] In some embodiments, the width of the spiral groove is greater than the diameter of the cross-section of the cleaning section.

[0019] In some embodiments, the cleaning unit is made of stainless steel.

[0020] In some embodiments, N is 3.

[0021] This utility model embodiment also provides a wet scrubber, including the cleaning device described above.

[0022] The beneficial effects of this utility model are:

[0023] In this embodiment, the driving component can drive the rod to reciprocate within the accommodating space, thereby causing the scraper head to also reciprocate. Since the connecting part of the cleaning component is rotatably connected to the scraper head, and the second end of the cleaning part in the cleaning component extends into the spiral groove, the cleaning component rotates under the drive of the scraper head. This allows the cleaning component to remove impurities from the second end face of the scraper head during rotation. Thus, the impurities accumulated at the bottom of the scraper head can be automatically removed, which not only improves production efficiency but also eliminates the safety hazards present in manual cleaning, effectively enhancing production safety. Attached Figure Description

[0024] Figure 1A diagram illustrating the working principle of a wet scrubber;

[0025] Figure 2 A schematic diagram showing the position of the scraper in a non-working state according to an embodiment of the present invention;

[0026] Figure 3 A schematic diagram showing the position of the scraper moving downwards to the bottom of the X-shaped tube during operation according to an embodiment of this utility model;

[0027] Figure 4-1 A top view showing the cleaning component according to an embodiment of the present utility model;

[0028] Figure 4-2 A side view showing the cleaning component according to an embodiment of the present invention;

[0029] Figure 5 This is a schematic diagram showing the assembly of the scraper head and cleaning component according to an embodiment of the present invention. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the described embodiments of this application are within the scope of protection of this application.

[0031] Related technical introduction:

[0032] The wet scrubber, as a treatment device for exhaust gas from an epitaxial reactor, is usually located between the epitaxial reactor and the heat scrubber. It is the first-stage exhaust gas treatment station and can treat part of the exhaust gas from the epitaxial reactor.

[0033] The exhaust gas from the epitaxial reactor contains components such as HCl (highly soluble), TCS (slightly soluble), and H2. The working principle of the Wet Scrubber is to dissolve the HCl (easily soluble) and TCS (slightly soluble) in the exhaust gas of the epitaxial reactor in water through washing.

[0034] like Figure 1As shown, the exhaust gas from the epitaxial reactor flows downwards into the WetScrubber via the pumping line. It first passes through an X-shaped tube, where it undergoes a first water wash at the bottom, diluting the HCl gas in the exhaust gas. However, because TCS gas is almost insoluble in water and readily reacts with O2 to form SiO2 solid, this solid adheres to the inner wall of the tube. If not cleaned for a long time, this will gradually reduce the cross-sectional area of ​​the tube, leading to gas turbulence and pressure fluctuations. Furthermore, it will generate particles, polluting the environment of the epitaxial reactor chamber.

[0035] The scraper 6, a key maintenance device for cleaning SiO2 solids inside pipes, adopts a double-unit symmetrical structure and is configured at the bottom of the X-shaped pipe. It supports both timed automatic activation and manual triggering modes. The scraper 6 mainly consists of a cylinder, a metal rod, and a scraper head. Driven by nitrogen (N2), the metal rod can push the scraper head downwards, thereby scraping off the SiO2 solids adhering to the inner wall of the pipe.

[0036] Because the scraper 6 is located in the TCS airflow and contaminated piping, a large amount of SiO2 solids will adhere to the bottom of the scraper head over time, resembling inverted stalactites (their volume is related to the usage time and TCS flow rate). Therefore, it is necessary to clean the SiO2 solids on the scraper head regularly; otherwise, particles will easily be generated, reducing the quality of the produced wafers.

[0037] Currently, when cleaning the SiO2 solids accumulated on the scraper 6, it is usually necessary to disassemble the X-shaped tube and scraper 6 within a certain period before manual cleaning. The disassembly, cleaning, and installation steps take a lot of time, resulting in low cleaning efficiency and seriously affecting the production schedule. In addition, since SiO2 solids are flammable when exposed to air, especially in the event of a strong collision, improper operation during manual cleaning may cause safety accidents, posing a fire and explosion hazard and poor safety.

[0038] To address the aforementioned technical problems, this utility model provides a cleaning device and a wet scrubber that can automatically clean the scraper 6, effectively improving cleaning efficiency and reducing safety hazards.

[0039] This utility model provides a cleaning device, including: a mounting part 1, a scraper head 2, a rod 3, a driving component and a cleaning component 4.

[0040] The mounting part 1 has a cylindrical accommodating space inside, and the inner wall of the mounting part 1 has N spiral grooves with a preset rotation angle, where N is a positive integer.

[0041] Here, the spiral grooves are spiral-shaped and are provided on the inner wall of the mounting part 1. The starting points of the N spiral grooves are on the same horizontal plane, the ending points of the N spiral grooves are on the same horizontal plane, and the pitch of each spiral groove is the same.

[0042] It should be noted that in some specific examples, the installation part 1 can be a section of pipe in a wet scrubber, for example, it can be as follows: Figures 2-3 The X-shaped tube shown is a section of pipe at the bottom; in other specific examples, the mounting part 1 can be a separate tubular structure that can be installed inside the pipe of the wet scrubber to facilitate the installation of the cleaning component 4.

[0043] The scraper head 2 is disposed within the accommodating space, and the edge of the scraper head 2 is slidably connected to the inner wall of the mounting part 1.

[0044] Understandably, the size of the scraper head 2 needs to match the inner diameter of the mounting part 1 to ensure that when the scraper head 2 reciprocates along the axis, it can effectively scrape off the residue (such as SiO2 solid) adhering to the inner wall of the mounting part 1, thereby cleaning the inner wall of the mounting part 1.

[0045] Rod 3 is disposed within the accommodating space, and the first end of rod 3 is fixedly connected to the first end face of scraper 2.

[0046] Here, rod 3 can be made of metal to ensure that rod 3 can meet the strength requirements.

[0047] The driving component is connected to the second end of the rod 3.

[0048] Here, the driving component can specifically be a cylinder. The cylinder, rod 3, and scraper head 2 can form a scraper 6, which works together to clean the inner wall of the mounting part 1. Specifically, the rod 3, driven by the cylinder, pushes the scraper head 2 to reciprocate within the mounting part 1, thereby scraping off the SiO2 solids adhering to the inner wall of the mounting part 1.

[0049] like Figure 4-1 and Figure 4-2 As shown, the cleaning component 4 includes: a connecting part 401 and N cleaning parts 402. The first end of the connecting part 401 is inserted into the second end face of the scraper head 2 and is rotatably connected to the scraper head 2. The second end of the connecting part 401 is fixedly connected to the first ends of the N cleaning parts 402 respectively. The second ends of the N cleaning parts 402 respectively extend into the corresponding spiral grooves.

[0050] The driving member drives the rod 3 to reciprocate along the axial direction of the accommodating space. The scraper head 2 reciprocates along the axial direction under the drive of the rod 3. The cleaning part 402 rotates along the corresponding spiral groove under the drive of the scraper head 2 to remove impurities 5 (such as SiO2 solid) on the second end face of the scraper head 2.

[0051] In this embodiment, when the driving rod 3 reciprocates within the accommodating space, it drives the scraper head 2 to reciprocate as well. Since the connecting part 401 of the cleaning component 4 is rotatably connected to the scraper head 2, and the second end of the cleaning part 402 in the cleaning component 4 extends into the spiral groove, the cleaning component 4 rotates under the drive of the scraper head 2. This allows the cleaning component 4 to remove impurities 5 from the second end face of the scraper head 2 during rotation, eliminating the need for the operator to come into contact with the SiO2 solid. Thus, the impurities accumulated at the bottom of the scraper head 2 can be automatically removed, improving production efficiency and eliminating safety hazards associated with manual cleaning, effectively enhancing production safety.

[0052] In some embodiments, the preset angle is one-Nth of a full circle.

[0053] For example, if N=3, the preset angle is 120°, which means that on the inner wall of the stroke area where the scraper head 2 moves up and down along the axis, the angle of rotation of each spiral groove is 120°.

[0054] like Figure 5 As shown, in some embodiments, the second end face of the scraper head 2 is recessed with a mounting hole, the wall of the mounting hole is provided with a first spiral pattern, and the first end of the connecting part 401 is provided with a second spiral pattern that matches the first spiral pattern.

[0055] In some embodiments, the N spiral grooves are evenly distributed on the inner wall of the mounting portion 1.

[0056] For example, if N=3, then the distance between two adjacent spiral grooves is 120°.

[0057] In some embodiments, the surfaces formed by the N cleaning sections 402 are parallel to the second end face of the scraper head 2 and are spaced at a preset distance.

[0058] Here, the preset distance can be set according to specific circumstances, such as 1mm. In this way, the cleaning unit 402 and the scraper head 2 will not rub against each other, preventing wear on the scraper head 2.

[0059] As shown in Figure 4, in some embodiments, the cleaning part 402 is in the shape of a round rod, and N cleaning parts 402 are evenly distributed around the connecting part 401.

[0060] like Figure 5 As shown, the length of the cleaning part 402 is slightly larger than the radius of the lower end face of the shaving head 2. This ensures that the cleaning range is sufficient to cover the entire lower end face of the shaving head 2. The cross-section of the cleaning part 402 can be a circle with a diameter of 2mm.

[0061] In some embodiments, the width of the spiral groove is greater than the diameter of the cross-section of the cleaning section 402.

[0062] It should be noted that the dimensions (such as width and depth) of the spiral groove can be set according to specific circumstances. These dimensions need to match the dimensions of the second end of the cleaning part 402 to ensure that the second end of the cleaning part 402 can rotate stably and reliably along the spiral groove. For example, the width of the spiral groove needs to be slightly larger than the widest point of the cross-section of the second end of the cleaning part 402. If the cleaning part 402 is a cylindrical rod, then the width of the spiral groove needs to be slightly larger than the diameter of the cross-section of the cleaning part 402.

[0063] It is understandable that if the size of the spiral groove is too large, it will be difficult to effectively limit the second end of the cleaning part 402, and it will be difficult to ensure that the second end of the cleaning part 402 moves stably along the preset spiral path; if the size of the spiral groove is too small, the second end of the cleaning part 402 cannot be inserted into the spiral groove, and it will also be difficult to achieve stable rotational movement.

[0064] In some embodiments, the cleaning unit 402 is made of stainless steel.

[0065] It should be noted that stainless steel has the advantages of being acid-resistant, wear-resistant, corrosion-resistant, and having high hardness. Here, stainless steel can be selected to make the cleaning part 402, which can meet the structural strength required for the long-term periodic reciprocating motion of the scraper 6, is not easily damaged, can ensure the durability and reliability of the cleaning part 402, effectively guarantee the service life of the cleaning part 402, and can also better adapt to the working environment requirements of wet scrubbers.

[0066] In some specific embodiments, N is 3.

[0067] It should be noted that, in a preferred embodiment, three spiral grooves can be formed on the inner wall of the mounting part 1, so that the cleaning part 4 has three cleaning parts 402, such as... Figure 4-1 As shown, the cleaning component 4 has a trident-shaped structure, which can achieve better cleaning results.

[0068] Here, taking N=3 as an example, the cleaning process of the cleaning device provided in this embodiment of the utility model will be specifically described:

[0069] When the driving component pushes the rod 3 downward along the axis, the rod 3 drives the scraper head 2 downward, thereby causing the cleaning component 4, which is rotatably connected to the scraper (specifically, the scraper head 2), to also move downward. In the cleaning component 4, the second end of each cleaning part 402 is inserted into its corresponding spiral groove. Since the three spiral grooves extend in a 120° spiral pattern, the cleaning component 4 rotates 120° along the trajectory of the spiral grooves while moving downward. Thus, the cleaning component 4 rotates while moving downward, effectively scraping away the SiO2 solids accumulated at the bottom of the scraper head 2. The fallen SiO2 solids are then discharged with the wastewater, achieving the purpose of removing the SiO2 solids accumulated at the bottom of the scraper head 2.

[0070] After the scraper completes its downward movement, it can return to its original position, repeating this motion. Correspondingly, as the scraper moves upward along the axis, the cleaning component 4, driven by the scraper head 2, will move upward while simultaneously spiraling 120° in the opposite direction along the spiral groove back to its original position, cleaning the bottom of the scraper head 2 again.

[0071] Thus, during the complete stroke of the scraper head moving downwards to the lowest point and then returning to its original position, the cleaning component 4 can rotate once in the forward and once in the reverse direction, which can fully scrape away the SiO2 solids accumulated at the bottom of the scraper head 2, thereby achieving the purpose of automatically cleaning the SiO2 solids at the bottom of the scraper head 2.

[0072] In this embodiment, by setting the spiral groove and the cleaning component 4, the SiO2 solids accumulated at the bottom of the scraper head 2 can be automatically removed during the scraper's operation. This not only improves production efficiency but also eliminates the safety hazards present in manual cleaning, effectively enhancing production safety.

[0073] This utility model embodiment also provides a wet scrubber, including the cleaning device described above.

[0074] It is understood that the wet scrubber in this embodiment can achieve the same cleaning effect as the cleaning device described above, and will not be elaborated further.

[0075] It should be noted that the various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, since the embodiments are basically similar to the product embodiments, the descriptions are relatively simple, and the relevant parts can be referred to the descriptions of the product embodiments.

[0076] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described objects changes.

[0077] It is understandable that when a component such as a layer, film, region, or substrate is referred to as being "above" or "below" another component, the component may be "directly" located "above" or "below" the other component, or there may be intermediate components present.

[0078] In the description of the above embodiments, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0079] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A cleaning device, characterized in that, include: The mounting part (1) has a cylindrical accommodating space inside. The inner wall of the mounting part (1) is provided with N spiral grooves with a preset rotation angle, where N is a positive integer. A scraper head (2) is disposed within the accommodating space, and the edge of the scraper head (2) is slidably connected to the inner wall of the mounting part (1); A rod (3) is disposed within the accommodating space, and the first end of the rod (3) is fixedly connected to the first end face of the scraper (2); The driving component is connected to the second end of the rod (3); The cleaning component (4) includes: a connecting part (401) and N cleaning parts (402). The first end of the connecting part (401) is inserted into the second end face of the scraper head (2) and is rotatably connected to the scraper head (2). The second end of the connecting part (401) is fixedly connected to the first end of each of the N cleaning parts (402). The second ends of the N cleaning parts (402) extend into the corresponding spiral grooves.

2. The cleaning device according to claim 1, characterized in that, The preset angle is one-Nth of a full circle.

3. The cleaning device according to claim 1, characterized in that, The second end face of the scraper (2) is recessed with a mounting hole, the wall of the mounting hole is provided with a first spiral pattern, and the first end of the connecting part (401) is provided with a second spiral pattern that matches the first spiral pattern.

4. The cleaning device according to claim 1, characterized in that, N spiral grooves are evenly distributed on the inner wall of the mounting part (1).

5. The cleaning device according to claim 1, characterized in that, The surfaces formed by the N cleaning sections (402) are parallel to the second end face of the scraper head (2) and are spaced at a preset distance.

6. The cleaning device according to claim 1, characterized in that, The cleaning part (402) is in the shape of a round rod, and N cleaning parts (402) are evenly distributed around the circumference of the connecting part (401).

7. The cleaning device according to claim 6, characterized in that, The width of the spiral groove is greater than the diameter of the cross-section of the cleaning part (402).

8. The cleaning device according to claim 1, characterized in that, The cleaning unit (402) is made of stainless steel.

9. The cleaning device according to claim 1, characterized in that, N is 3.

10. A wet scrubber, characterized in that, Includes the cleaning device as described in any one of claims 1 to 9.

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