High load acceleration sensor elastomer

Abstract

The application discloses a high-load acceleration sensor elastic body, and belongs to the technical field of sensors.The high-load acceleration sensor elastic body comprises an acceleration sensor main body; three fixed electrode plates are used to enclose a movable electrode plate to form a comb-shaped structure, and a capacitance change region is formed in the gap between the electrode plates to measure acceleration; the movable electrode plate is symmetrically connected through elastic support bodies on both sides to form a balance constraint mechanism; hollow holes are formed in the elastic support bodies to form a honeycomb structure, stress is dispersed by utilizing the hexagonal geometric characteristics, the elastic deformation space of the elastic support body is improved, and the deformation lag problem caused by the excessively strong rigidity of a traditional solid structure is avoided; stress is uniformly distributed when the hole wall of the hollow hole of the regular hexagon is stressed, local stress peaks can be effectively reduced, the plastic deformation risk of the elastic support body under high load can be reduced, the elastic column filled in the hollow hole is deformed cooperatively with the elastic support body, the overall structural rigidity is improved, excessive deformation is inhibited through elastic buffering, and fracture failure is avoided.

Description

Technical Field

[0001] This application relates to the field of sensor technology, and in particular to a high-load-bearing acceleration sensor elastomer. Background Technology

[0002] Accelerometers are widely used in vibration and shock measurement, and the performance of their core component, the elastomer, directly affects the sensor's measurement accuracy and reliability. Currently, as industrial equipment develops towards higher speeds and higher loads, higher demands are being placed on the load-bearing capacity and dynamic response characteristics of accelerometers.

[0003] Traditional elastomers are prone to plastic deformation or fracture under high load conditions, leading to sensor failure. Therefore, an improvement has been made to an elastomer for a high-load-bearing acceleration sensor. Utility Model Content

[0004] To address the shortcomings of existing technologies, this application provides a high-load-bearing acceleration sensor elastomer, which overcomes the deficiencies of existing technologies and aims to solve the problem that traditional elastomers are prone to plastic deformation or fracture under high load conditions, leading to sensor failure.

[0005] To achieve the above objectives, this application provides the following technical solution: a high-load-bearing accelerometer elastomer, comprising an accelerometer body, an internal storage groove, a signal processing chip fixedly installed inside the storage groove, a micromechanical comb-like structure on one side of the signal processing chip, the micromechanical comb-like structure including a base fixedly installed inside the storage groove, a movable groove on the upper surface of the base, three fixed electrode plates fixedly installed inside the movable groove, and a movable electrode plate disposed within the space formed by the three fixed electrode plates, the left side of the movable electrode plate being fixedly connected to the side wall of one of the fixed electrode plates via an elastic support, the right side of the fixed electrode plate being fixedly connected to the inner wall of the movable groove via an elastic support, the elastic support having a hollow hole inside, the hollow hole being a regular hexagonal structure and filled with an elastic column.

[0006] By adopting the above technical solution, three fixed plates surround the movable plate to form a comb-like structure, creating a capacitance change region between the plates. When acceleration occurs, the displacement of the movable plate is directly fed back through capacitance change to measure acceleration. The two sides of the movable plate are symmetrically connected by elastic supports to form a balance constraint mechanism. The regular hexagonal hollow holes inside the elastic supports form a honeycomb structure, utilizing the geometric characteristics of hexagons to disperse stress. This not only increases the elastic deformation space of the elastic support but also avoids the deformation lag problem caused by excessive rigidity in traditional solid structures. Furthermore, the stress distribution on the hole walls of the regular hexagonal hollow holes is uniform when under stress, which can effectively reduce local stress peaks and reduce the risk of plastic deformation of the elastic support under high loads. The elastic columns filled in the hollow holes deform in tandem with the elastic support, improving the overall structural stiffness while suppressing excessive deformation through elastic buffering, further preventing fracture failure.

[0007] As a preferred technical solution of this application, the elastic support body is designed with an n-shaped structure, and the hollow holes are evenly distributed along the length direction of the elastic support body.

[0008] By adopting the above technical solution, the bending design of the n-shaped structure disperses the force along the length of the elastic support, avoiding stress concentration at the fixed end. The evenly distributed hollow holes further balance the stiffness, making the deformation more uniform.

[0009] As a preferred technical solution of this application, the elastic support is made of silicon-based composite material, the elastic column is made of silicone rubber material, and the outer surface of the elastic column is closely fitted with the inner wall of the hollow hole.

[0010] By adopting the above technical solutions, the elastic support made of silicon-based composite material has high strength and good elasticity, and the elastic column made of silicone rubber has high elasticity and good fatigue resistance. It can recover after deformation, thereby ensuring that the elastic column can deform in tandem with the elastic support.

[0011] As a preferred technical solution of this application, the elastic support is an integrally molded structure, and the corner of the elastic support is provided with a rounded transition part.

[0012] By adopting the above technical solution, the arc transition section reduces stress concentration at the corner of the elastic support, thus preventing cracking.

[0013] As a preferred technical solution of this application, both the fixed electrode plate and the movable electrode plate are made of silicon-doped material, and the opposite sidewalls of the fixed electrode plate and the movable electrode plate are plated with a metal conductive layer.

[0014] By adopting the above technical solution, silicon doping is used to ensure the conductivity of the fixed electrode and the movable electrode, and the metal conductive layer further reduces the contact resistance and improves the signal transmission efficiency.

[0015] As a preferred technical solution of this application, a plurality of signal pins are symmetrically arranged on both outer walls of the accelerometer body, the signal processing chip is electrically connected to the signal pins through signal wires, and the fixed electrode plate is electrically connected to the signal processing chip through electrode wires.

[0016] By adopting the above technical solution, the accelerometer body is connected to an external electrical device through a signal pin, and the acceleration value is obtained by analyzing the capacitance change of the fixed plate through a signal processing chip.

[0017] In summary, the beneficial effects of this application are as follows:

[0018] In this application, three fixed plates surround a movable plate to form a comb-like structure, creating a capacitance change region between the plates. When acceleration occurs, the displacement of the movable plate is directly fed back through capacitance change to measure acceleration. The two sides of the movable plate are symmetrically connected by elastic supports to form a balance constraint mechanism. The hexagonal hollow holes inside the elastic supports form a honeycomb structure, utilizing the geometric characteristics of hexagons to disperse stress. This not only increases the elastic deformation space of the elastic support but also avoids the deformation lag problem caused by excessive rigidity in traditional solid structures. Furthermore, the stress distribution on the hole walls of the hexagonal hollow holes is uniform when under stress, which can effectively reduce local stress peaks and reduce the risk of plastic deformation of the elastic support under high loads. The elastic columns filled in the hollow holes deform in tandem with the elastic support, improving the overall structural stiffness while suppressing excessive deformation through elastic buffering, further preventing fracture failure. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the accelerometer sensor body of this application;

[0020] Figure 2 This is a schematic diagram of the internal structure of the accelerometer body of this application;

[0021] Figure 3 This is a complete structural schematic diagram of the micromechanical comb structure of this application;

[0022] Figure 4 This is a partial structural diagram of this application.

[0023] Explanation of reference numerals in the attached figures:

[0024] 1. Accelerometer body; 2. Storage slot; 3. Signal processing chip; 4. Substrate; 5. Movable slot; 6. Fixed electrode plate; 7. Movable electrode plate; 8. Elastic support; 9. Hollow hole; 10. Elastic column; 11. Arc transition section; 12. Signal pin. Detailed Implementation

[0025] To make the technical means, creative features, objectives and effects of this application easy to understand, the following describes this application in conjunction with specific implementation methods.

[0026] like Figure 1 - Figure 4 As shown, this embodiment provides a high-load-bearing accelerometer elastomer, including an accelerometer body 1. The accelerometer body 1 has a storage slot 2 inside, and a signal processing chip 3 is fixedly installed inside the storage slot 2. A micromechanical comb-like structure is provided on one side of the signal processing chip 3. The micromechanical comb-like structure includes a base 4 fixedly installed inside the storage slot 2. A movable slot 5 is provided on the upper surface of the base 4. Three fixed electrode plates 6 are fixedly installed inside the movable slot 5, and a movable electrode plate 7 is provided inside the space formed by the three fixed electrode plates 6. The left side of the movable electrode plate 7 is fixedly connected to the side wall of one of the fixed electrode plates 6 through an elastic support 8, and the right side of the fixed electrode plate 6 is fixedly connected to the inner wall of the movable slot 5 through the elastic support 8. The elastic support 8 has a hollow hole 9 inside, which is a regular hexagonal structure and filled with elastic pillars 10. In use, the three fixed electrode plates 10... The fixed electrode 6 surrounds the movable electrode 7 to form a comb-like structure, creating a capacitance change region between the electrodes. When acceleration occurs, the displacement of the movable electrode 7 is directly fed back through capacitance change to measure acceleration. The two sides of the movable electrode 7 are symmetrically connected by elastic supports 8 to form a balance constraint mechanism. The regular hexagonal hollow holes 9 inside the elastic supports 8 form a honeycomb structure, utilizing the geometric characteristics of hexagons to disperse stress. This not only increases the elastic deformation space of the elastic supports 8 but also avoids the deformation lag problem caused by excessive rigidity of traditional solid structures. Furthermore, the stress distribution of the hole walls of the regular hexagonal hollow holes 9 is uniform when under stress, which can effectively reduce local stress peaks and reduce the risk of plastic deformation of the elastic supports 8 under high loads. The elastic columns 10 filled in the hollow holes 9 deform in tandem with the elastic supports 8, improving the overall structural rigidity while suppressing excessive deformation through elastic buffering, further preventing fracture failure.

[0027] In this embodiment, as Figure 3 and 4 As shown, the elastic support 8 has an n-shaped structure design, and the hollow holes 9 are evenly distributed along the length of the elastic support 8. During use, the bending design of the n-shaped structure disperses the force along the length of the elastic support 8, avoiding stress concentration at the fixed end. The evenly distributed hollow holes 9 further balance the stiffness and make the deformation more uniform.

[0028] In this embodiment, as Figure 3 and 4As shown, the elastic support 8 is made of silicon-based composite material, and the elastic column 10 is made of silicone rubber. The outer surface of the elastic column 10 is tightly fitted to the inner wall of the hollow hole 9. In use, the elastic support 8 made of silicon-based composite material has high strength and good elasticity, and the elastic column 10 made of silicone rubber has high elasticity and good fatigue resistance. It can recover after deformation, thereby ensuring that the elastic column 10 can deform in tandem with the elastic support 8.

[0029] In this embodiment, as Figure 4 As shown, the elastic support 8 is an integrally molded structure, and the corner of the elastic support 8 is provided with a rounded transition part 11. During use, the rounded transition part 11 reduces the stress concentration at the corner of the elastic support 8 and avoids cracking.

[0030] In this embodiment, as Figure 4 As shown, both the fixed electrode 6 and the movable electrode 7 are made of silicon-doped material, and the opposite sidewalls of the fixed electrode 6 and the movable electrode 7 are plated with a metal conductive layer. In use, the silicon-doped material is used to ensure the conductivity of the fixed electrode 6 and the movable electrode 7, and the metal conductive layer further reduces the contact resistance and improves the signal transmission efficiency.

[0031] In this embodiment, as Figure 1 and 2 As shown, several signal pins 12 are symmetrically arranged on the outer walls of both sides of the accelerometer body 1. The signal processing chip 3 is electrically connected to the signal pins 12 through signal wires. The fixed electrode plate 6 is electrically connected to the signal processing chip 3 through electrode wires. In use, the accelerometer body 1 is connected to an external electrical device through the signal pins 12. The signal processing chip 3 analyzes the capacitance change of the fixed electrode plate 6 to obtain the acceleration value.

[0032] The working principle of this application is as follows: When using the high-load-bearing accelerometer elastomer of this application, three fixed plates 6 surround the movable plate 7 to form a comb-like structure, and a capacitance change region is formed in the gap between the plates. When the movable plate 7 displaces in the same direction as the acceleration due to inertial force, the elastic supports 8 on both sides of the movable plate 7 bend and deform. The regular hexagonal hollow hole 9 provides elastic space through the bending of the hole wall. The elastic column 10 filled inside deforms together with the elastic support 8, which not only ensures that the elastic support 8 produces sufficient deformation, but also suppresses excessive deformation through the buffer of the elastic column 10, preventing the elastic support 8 from tearing. At this time, the relative distance between the movable plate 7 and the fixed plate 6 changes with the displacement, which causes the capacitance value between the plates to change. The signal processing chip 3 receives the capacitance change signal and obtains the acceleration value.

[0033] In the description of this application, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0034] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0035] The present application has been described above with reference to specific embodiments. However, those skilled in the art should understand that these descriptions are exemplary and not intended to limit the scope of protection of the present application. Those skilled in the art can make various modifications and variations to the present application based on its spirit and principles, and these modifications and variations are also within the scope of the present application.

Claims

1. A high-load-bearing accelerometer elastomer, comprising an accelerometer body (1), characterized in that, The accelerometer body (1) has a storage slot (2) inside. A signal processing chip (3) is fixedly installed inside the storage slot (2). A micromechanical comb structure is provided on one side of the signal processing chip (3). The micromechanical comb structure includes a base (4) fixedly installed inside the storage slot (2). A movable slot (5) is provided on the upper surface of the base (4). Three fixed electrode plates (6) are fixedly installed inside the movable slot (5). A movable electrode plate (7) is provided inside the space formed by the three fixed electrode plates (6). The left side of the movable electrode plate (7) is fixedly connected to the side wall of one of the fixed electrode plates (6) through an elastic support (8). The right side of the fixed electrode plate (6) is fixedly connected to the inner wall of the movable slot (5) through an elastic support (8). A hollow hole (9) is provided inside the elastic support (8). The hollow hole (9) is a regular hexagonal structure and is filled with an elastic column (10).

2. The high-load-bearing accelerometer elastomer according to claim 1, characterized in that, The elastic support (8) is designed with an n-shaped structure, and the hollow holes (9) are evenly distributed along the length of the elastic support (8).

3. The high-load-bearing accelerometer elastomer according to claim 1, characterized in that, The elastic support (8) is made of silicon-based composite material, the elastic column (10) is made of silicone rubber, and the outer surface of the elastic column (10) is closely fitted to the inner wall of the hollow hole (9).

4. The high-load-bearing accelerometer elastomer according to claim 1, characterized in that, The elastic support (8) is an integrally molded structure, and the corner of the elastic support (8) is provided with a rounded transition part (11).

5. The high-load-bearing accelerometer elastomer according to claim 1, characterized in that, Both the fixed electrode (6) and the movable electrode (7) are made of silicon-doped material, and the opposite sidewalls of the fixed electrode (6) and the movable electrode (7) are plated with a metal conductive layer.

6. The high-load-bearing accelerometer elastomer according to claim 1, characterized in that, The two outer walls of the accelerometer body (1) are symmetrically provided with a number of signal pins (12). The signal processing chip (3) is electrically connected to the signal pins (12) through signal wires. The fixed electrode plate (6) is electrically connected to the signal processing chip (3) through electrode wires.

Images