Thermal insulated gate valve

Abstract

The utility model relates to a heat -insulated gate valve belongs to general manufacturing technical field, the utility model discloses a valve body subassembly and executive subassembly, the executive subassembly is installed on valve body subassembly, valve body subassembly includes bottom cover, valve body and top cap, and top cap and bottom cover are installed respectively in the upper and lower both ends of valve body, the executive subassembly includes apron, curb plate and bottom plate, and the upper end of two curb plates is installed on bottom cover, the bottom plate is installed in the lower end of two curb plates, and each curb plate is installed with a apron in the front and back two sides of two curb plates, and its structural characteristics lie in: still include motion subassembly, motion subassembly installs in the executive subassembly, motion subassembly includes double cylinder, connecting plate, lifting rod and baffle, the baffle is located in the valve body, and the baffle is connected with lifting rod, lifting rod is connected with connecting plate, connecting plate is connected with double cylinder, double cylinder installs on two curb plates, and the top cap installs observation window and purge gas pipe.

Description

Technical Field

[0001] This utility model relates to a heat-insulating gate valve, belonging to the field of general manufacturing technology. Background Technology

[0002] Chemical vapor deposition (CVD) equipment is commonly used in the semiconductor material processing field. This type of equipment typically consists of multiple chambers, with the flow between them controlled by gate valves. Generally, CVD equipment requires vacuum sealing. However, the reaction chambers in CVD equipment can reach internal reaction temperatures exceeding 1600°C and often use corrosive gases. Conventional vacuum-sealed gate valves can only provide isolation and vacuum sealing, and cannot be used directly in this environment. A common solution is to add a water-cooled narrow chamber between the gate valve and the reaction chamber, containing an openable and closable non-sealed quartz baffle. However, quartz is fragile and impact-sensitive, making rapid isolation impossible, and its lifespan is also short. Utility Model Content

[0003] The purpose of this utility model is to overcome the above-mentioned deficiencies in the prior art and provide a thermally insulated gate valve with reasonable structural design, low hardware cost and long service life for CVD equipment. The thermally insulated gate valve adopts water cooling and cylinder power and is used together with ordinary vacuum sealing gate valve to realize thermal insulation isolation between the reaction chamber of CVD equipment and other chambers.

[0004] The technical solution adopted by this utility model to solve the above problems is as follows: The heat-insulating gate valve includes a valve body assembly and an actuation assembly. The actuation assembly is installed on the valve body assembly. The valve body assembly includes a bottom cover, a valve body, and a top cover. The top cover and the bottom cover are respectively installed at the upper and lower ends of the valve body. The actuation assembly includes a cover plate, side plates, and a bottom plate. The upper ends of the two side plates are installed on the bottom cover, and the bottom plate is installed at the lower ends of the two side plates. A cover plate is installed on each of the front and rear sides of the two side plates. Its structural feature is that it also includes a motion assembly. The motion assembly is installed inside the actuation assembly. The motion assembly includes a double cylinder, a connecting plate, a lifting rod, and a partition plate. The partition plate is located inside the valve body and is connected to the lifting rod. The lifting rod is connected to the connecting plate, and the connecting plate is connected to the double cylinder.

[0005] Furthermore, the dual cylinders are mounted on two side plates.

[0006] Furthermore, an observation window is installed on the top cover.

[0007] Furthermore, a purge air pipe is installed on the top cover.

[0008] Furthermore, the lifting rod is connected to the connecting rod, and the connecting rod is connected to the connecting plate.

[0009] Furthermore, the lifting rod is fitted with a welded corrugated pipe, and the upper and lower ends of the welded corrugated pipe are connected to the bottom cover and the connecting plate, respectively.

[0010] Furthermore, fluororubber O-rings are installed between the valve body and the top and bottom covers, as well as between the welded bellows and the bottom cover and connecting plate.

[0011] Furthermore, the lifting rod penetrates through the bottom cover.

[0012] Furthermore, the valve body is internally machined with cooling water channels.

[0013] Compared with the prior art, the present invention has the following advantages:

[0014] (1) It adopts water cooling, which has a good cooling effect and can be used in environments above 1600℃;

[0015] (2) Powered by a double cylinder, it has a fast response speed, is impact resistant, and has a long service life. At the same time, the double cylinder has speed regulation and position holding functions, and has good safety.

[0016] (3) The main components are made of 316L stainless steel, the seal is made of fluororubber O-rings, and it can be connected to external purging gas, with good corrosion resistance. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the heat-insulating gate valve according to an embodiment of the present utility model.

[0018] Figure 2 This is a cross-sectional structural diagram of the heat-insulating gate valve according to an embodiment of the present utility model.

[0019] Figure 3 This is an exploded structural diagram of the heat-insulating gate valve according to an embodiment of the present invention.

[0020] In the diagram: Valve body assembly 1, Actuating assembly 2, Cover plate 3, Side plate 4, Bottom cover 5, Valve body 6, Top cover 7, Observation window 8, Purge air pipe 9, Base plate 10, Double cylinder 11, Connecting plate 12, Connecting rod 13, Welded bellows 14, Lifting rod 15, Partition 16, Fluororubber O-ring 17, Motion assembly 18, Cooling water channel 19. Detailed Implementation

[0021] The present invention will be further described in detail below with reference to the accompanying drawings and through embodiments. The following embodiments are explanations of the present invention, but the present invention is not limited to the following embodiments.

[0022] Example

[0023] See Figures 1 to 3As shown in the accompanying drawings, the structures, proportions, sizes, etc., depicted in this specification are merely for illustrative purposes to aid those skilled in the art and to provide a clear understanding. They are not intended to limit the scope of this invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, provided they do not affect the effectiveness or purpose of this invention, should still fall within the scope of the technical content disclosed in this invention. Furthermore, the use of terms such as "upper," "lower," "left," "right," "middle," and "one" in this specification is solely for clarity and not intended to limit the scope of this invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this invention.

[0024] The heat-insulating gate valve in this embodiment includes a valve body assembly 1, an actuation assembly 2, and a motion assembly 18. The actuation assembly 2 is mounted on the valve body assembly 1, and the motion assembly 18 is mounted inside the actuation assembly 2.

[0025] In this embodiment, the valve body assembly 1 includes a bottom cover 5, a valve body 6, and a top cover 7. The top cover 7 and the bottom cover 5 are respectively installed at the upper and lower ends of the valve body 6. An observation window 8 and a purge air pipe 9 are installed on the top cover 7. Cooling water channels 19 are machined inside the valve body 6.

[0026] The execution component 2 in this embodiment includes a cover plate 3, side plates 4 and a bottom plate 10. The upper ends of the two side plates 4 are mounted on the bottom cover 5, and the bottom plate 10 is mounted on the lower ends of the two side plates 4. A cover plate 3 is installed on each of the front and rear sides of the two side plates 4.

[0027] In this embodiment, the motion component 18 includes a double cylinder 11, a connecting plate 12, a lifting rod 15, and a partition 16. The partition 16 is located inside the valve body 6 and is connected to the lifting rod 15. The lifting rod 15 is connected to the connecting rod 13. The connecting rod 13 is connected to the connecting plate 12. The connecting plate 12 is connected to the double cylinder 11. The double cylinder 11 is mounted on two side plates 4.

[0028] In this embodiment, the lifting rod 15 is fitted with a welded bellows 14. The upper and lower ends of the welded bellows 14 are connected to the bottom cover 5 and the connecting plate 12, respectively. Fluororubber O-rings 17 are installed between the valve body 6 and the top cover 7 and the bottom cover 5, as well as between the welded bellows 14 and the bottom cover 5 and the connecting plate 12. The lifting rod 15 passes through the bottom cover 5.

[0029] Specifically, the valve body assembly 1 has the valve body 6 as its core structure, with the top cover 7, observation window 8, bottom cover 5, and purge air pipe 9 assembled on the upper part; the valve body 6 has cooling water channels 19 machined inside for circulating cooling water; the purge air pipe 9 connected to the top cover 7 can be connected to an external air source to purge the inside of the valve body 6; the observation window 8 has threaded holes for installing various sensors, which can be installed as needed to detect the entry and exit of internal materials into the heat-insulating gate valve.

[0030] The actuator 2 is mounted on the bottom cover 5 of the valve body assembly 1, and the frame is composed of the side plate 4, the cover plate 3 and the bottom cover 5. The motion assembly 18, which consists of a double cylinder 11, a connecting plate 12, a welded bellows 14, a connecting rod 13, a lifting rod 15 and a partition 16, is installed inside the valve body 6. The lifting rod 15 passes through the hole on the bottom cover 5 and connects to the partition 16 inside the valve body 6. The double cylinder 11 has speed regulation and position holding functions.

[0031] Fluororubber O-rings 17 are installed between the valve body 6 and the top cover 7, the bottom cover 5, and between the welded bellows 14 and the bottom cover 5 and the connecting plate 12 to ensure the vacuum sealing and corrosion resistance of the insulated gate valve when it is installed between the cavities. At the same time, the metal parts such as the valve body 6, top cover 7, bottom cover 5, purge air pipe 9, connecting plate 12, welded bellows 14, connecting rod 13, rising rod 15 and partition plate 16 are all made of 316L stainless steel to ensure the use of the insulated gate valve in corrosive environments.

[0032] This heat-insulating gate valve has a good cooling effect and can be used in applications above 1600℃; it has a fast response speed, is impact-resistant, and has a long service life. At the same time, the double cylinder 11 has speed regulation and position holding functions, which ensures good safety. Since the main components are made of 316L stainless steel and the seal uses fluororubber O-rings 17, it can be connected to external purging gas and also has good corrosion resistance.

[0033] In practical applications, one side of the valve body 6 is installed on the inlet and outlet of the reaction chamber of the CVD equipment, and the other side of the valve body 6 is installed with a vacuum-sealed gate valve and other connected chambers. The cooling water interface on the valve body 6 is connected to cooling water for cooling the valve body 6. The double cylinder 11 is connected to compressed air as a power source, and the purge air pipe 9 on the top cover 7 is connected to the purge gas pipeline.

[0034] During operation, the double cylinder 11 pushes the connecting plate 12, connecting rod 13, lifting rod 15 and partition 16 to rise. The cooling water inside the valve body 6 prevents the transfer of heat from the reaction chamber to the vacuum-sealed gate valve and other chambers. The double cylinder 11 has a position holding function, which can keep the partition 16 from falling in the event of power failure or gas failure. The purge gas pipe 9 can introduce purge gas into the heat-insulating gate valve before the reaction chamber needs to be opened for maintenance, thereby expelling harmful gases and ensuring personal safety during maintenance.

[0035] Furthermore, it should be noted that the specific embodiments described in this specification may differ in the shape and name of their components. The above description is merely illustrative of the structure of this utility model. All equivalent or simple variations made based on the structure, features, and principles described in this utility model patent concept are included within the protection scope of this utility model patent. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, as long as they do not deviate from the structure of this utility model or exceed the scope defined in these claims, all of which should fall within the protection scope of this utility model.

Claims

1. A heat-insulating gate valve, comprising a valve body assembly (1) and an actuator assembly (2), wherein the actuator assembly (2) is mounted on the valve body assembly (1), the valve body assembly (1) comprising a bottom cover (5), a valve body (6) and a top cover (7), the top cover (7) and the bottom cover (5) being respectively mounted on the upper and lower ends of the valve body (6), the actuator assembly (2) comprising a cover plate (3), side plates (4) and a bottom plate (10), the upper ends of the two side plates (4) being mounted on the bottom cover (5), the bottom plate (10) being mounted on the lower ends of the two side plates (4), and a cover plate (3) being mounted on the front and rear sides of each of the two side plates (4), characterized in that: It also includes a motion assembly (18) which is installed in the actuation assembly (2). The motion assembly (18) includes a double cylinder (11), a connecting plate (12), a lifting rod (15), and a partition (16). The partition (16) is located in the valve body (6) and is connected to the lifting rod (15). The lifting rod (15) is connected to the connecting plate (12), and the connecting plate (12) is connected to the double cylinder (11).

2. The heat-insulating gate valve according to claim 1, characterized in that: The dual cylinder (11) is mounted on two side plates (4).

3. The heat-insulating gate valve according to claim 1, characterized in that: An observation window (8) is installed on the top cover (7).

4. The heat-insulating gate valve according to claim 1, characterized in that: A purge air pipe (9) is installed on the top cover (7).

5. The heat-insulating gate valve according to claim 1, characterized in that: The lifting rod (15) is connected to the connecting rod (13), and the connecting rod (13) is connected to the connecting plate (12).

6. The heat-insulating gate valve according to claim 1, characterized in that: The lifting rod (15) is fitted with a welded corrugated pipe (14), and the upper and lower ends of the welded corrugated pipe (14) are connected to the bottom cover (5) and the connecting plate (12) respectively.

7. The heat-insulating gate valve according to claim 1, characterized in that: Fluororubber O-rings (17) are installed between the valve body (6) and the top cover (7) and the bottom cover (5), as well as between the welded bellows (14) and the bottom cover (5) and the connecting plate (12).

8. The heat-insulating gate valve according to claim 1, characterized in that: The lifting rod (15) passes through the bottom cover (5).

9. The heat-insulating gate valve according to claim 1, characterized in that: The valve body (6) has cooling water channels (19) machined inside.

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