Indium phosphide production quartz tube opening device

Abstract

The utility model discloses a quartz tube opening device for indium phosphide production relates to indium phosphide production technical field, including work box and pipe body, a plurality of fixed seats are fixedly arranged in the work box, the pipe body is placed on the fixed seat, the top of pipe body is provided with the support, the support is fixedly arranged in the work box, the movable block is slidably connected on the support, the bottom of movable block is installed with the drive motor, the drive end fixed connection of drive motor has the cutting knife, the top fixed mounting of support has the rack, the top rotary connection of movable block has the gear, the bottom of gear is engaged connection with rack, the utility model discloses through drive motor drive cutting knife rotation, servo motor drive gear moves along the rack, has realized the automatic circumference cutting of quartz tube, does not need manual knock to break, operation is more simple and convenient.

Description

Technical Field

[0001] This utility model relates to the field of indium phosphide production technology, specifically to a quartz tube opening device for indium phosphide production. Background Technology

[0002] In the indium phosphide crystal growth or epitaxial production process, the quartz tube serves as the core reaction vessel, playing a crucial role in providing a stable and inert environment for the high-temperature and high-pressure reaction. Inside, a crucible containing indium phosphide raw materials and dopants is typically placed. When crystal growth is complete or sampling is required, the quartz tube needs to be opened to remove the crucible.

[0003] However, current tube-opening operations generally rely on the primitive method of manually breaking the quartz tube. This process poses multiple safety and environmental hazards: under the high temperature and pressure environment inside the tube, white phosphorus, converted from red phosphorus, reacts violently with air at the moment of tube breaking, triggering sudden spontaneous combustion or even deflagration. The large amount of phosphorus pentoxide fumes produced are highly corrosive and toxic, posing not only a risk of inhalation injury to operators but also leading to heavy metal pollution and excessive phosphate levels in the workshop environment. The traditional manual intervention mode is not only inefficient but also fails to effectively control the combustion and explosion energy of white phosphorus during tube breaking. The flying quartz fragments generated during breaking further exacerbate the operational hazards.

[0004] To address this issue, we designed a quartz tube opening device for indium phosphide production. Utility Model Content

[0005] The purpose of this invention is to provide a quartz tube opening device for indium phosphide production, so as to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the present invention provides a quartz tube opening device for indium phosphide production, comprising a working box and a tube body. Multiple fixed seats are fixedly arranged inside the working box, and the tube body is placed on the fixed seats. A bracket is arranged above the tube body, and the bracket is fixedly arranged inside the working box. A moving block is slidably connected to the bracket, and a drive motor is installed at the bottom inside the moving block. A cutting blade is fixedly connected to the drive end of the drive motor.

[0007] Furthermore, a rack is fixedly installed at the top of the bracket, and a gear is rotatably connected to the top of the movable block, with the bottom end of the gear meshing with the rack.

[0008] Furthermore, a motor housing is installed on the top outer wall of the movable block, and a servo motor is installed inside the motor housing. The drive end of the servo motor is fixedly connected to the rotating shaft on the gear.

[0009] Furthermore, a storage tank is provided on the top wall of the working box, and a feed pipe is provided at the bottom opening of the storage tank. The storage tank is inserted into the top of the feed pipe, and the bottom end of the feed pipe extends through the top wall of the working box into the working box.

[0010] Furthermore, a water storage tank is installed on the top wall of the work box, and a water outlet pipe is provided inside the water storage tank. The water outlet pipe extends to the top wall of the work box and is connected to a water spray head. The water spray head is fixedly installed on the inner top wall of the work box.

[0011] Furthermore, the feed pipe and the water spray head are both located at the top of the pipe body cutting section, and a collection trough is provided at the bottom of the pipe body cutting section, which is located on the inner bottom wall of the working box.

[0012] Furthermore, there are two fixing seats, which are set at the bottom end of the section of the tube that does not need to be cut. A clamp is hinged to one side of the top of each fixing seat, and a bolt is connected to the other end of the clamp. The bottom end of the bolt is threaded onto the fixing seat.

[0013] Furthermore, the upper and lower outer side walls of the opening of the work box are fixedly connected with slide rails, and a door is slidably connected between the two slide rails. A transparent observation window is provided on the door.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] This device uses a drive motor to rotate the cutting blade, and a servo motor to drive the gears along the rack, achieving automatic circumferential cutting of quartz tubes. This eliminates the need for manual crushing, making operation simpler, more efficient, and reducing labor intensity. During the cutting process, operations such as water spraying from the storage tank and catalyst addition from the storage tank can be linked to the cutting action, automating the entire pipe opening and exhaust gas treatment process, thus improving production efficiency and stability. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the exterior of this utility model;

[0017] Figure 2 This is a schematic diagram of the internal structure of the front of this utility model;

[0018] Figure 3 This is a cross-sectional view of the movable block of this utility model;

[0019] Figure 4 This utility model Figure 2 Enlarged view of point A in the image.

[0020] In the diagram: 1. Working box; 2. Pipe body; 3. Fixed base; 4. Support; 5. Rack; 6. Moving block; 7. Cutting blade; 8. Gear; 9. Motor box; 10. Collection trough; 11. Storage tank; 12. Feed pipe; 13. Water tank; 14. Spray head; 15. Clamping plate; 16. Bolt; 17. Slide rail; 18. Door stop; 19. Observation window. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1 and Figure 3 This utility model provides a technical solution: a quartz tube opening device for indium phosphide production, including a working box 1 and a tube body 2. The quartz tube body 2 is opened inside the working box 1. Multiple fixed seats 3 are fixedly installed inside the working box 1, and the tube body 2 is placed on the fixed seats 3. A bracket 4 is installed above the tube body 2 and is fixedly installed inside the working box 1. A moving block 6 is slidably connected to the bracket 4. A drive motor is installed at the bottom inside the moving block 6. A cutting blade 7 is fixedly connected to the drive end of the drive motor. The cutting blade 7 is circular and is used to cut the tube body 2. A rack 5 is fixedly installed at the top of the bracket 4. A gear 8 is rotatably connected to the top of the moving block 6. The bottom end of the gear 8 is meshed with the rack 5. A motor box 9 is installed on the top outer wall of the moving block 6. A servo motor is installed inside the motor box 9. The drive end of the servo motor is fixedly connected to the rotating shaft on the gear 8. When the cutting blade 7 is started, the servo motor is turned on to drive the gear 8 to rotate. The gear 8 will move along the rack 5 and simultaneously drive the cutting blade 7 to move and cut the tube body 2.

[0023] In practice, when cutting the quartz tube body 2, the drive motor inside the moving block 6 is activated, driving the circular cutting blade 7 to rotate at a high speed of 3000-5000 r / min. Simultaneously, the servo motor inside the motor housing 9 drives the gear 8 to move laterally along the rack 5, and the cutting blade 7 performs a circumferential cut on the tube body 2 at a feed speed of 0.5-2 mm / s, completing the tube cutting process. The quartz tube cutting takes only 30 seconds.

[0024] See Figure 2The top wall of the working chamber 1 is equipped with a storage tank 11, and a feed pipe 12 is installed at the bottom opening of the storage tank 11. The storage tank 11 is inserted into the top of the feed pipe 12, and the bottom end of the feed pipe 12 extends through the top wall of the working chamber 1 into the working chamber 1. A one-way valve is installed on the feed pipe 12. The storage tank 11 contains a catalyst, such as platinum, palladium, or metal oxides such as copper oxide, iron oxide, and manganese dioxide. Under the action of the catalyst, white phosphorus reacts with oxygen to produce phosphorus pentoxide. The top wall of the working chamber 1 is also equipped with a water storage tank 13, and a water outlet pipe is installed in the water storage tank 13. The water outlet pipe extends into the top wall of the working chamber 1 and is connected to a water spray head 14. The water spray head 14 is fixedly installed. The inner top wall of the working chamber 1 contains a water tank filled with water or sodium hydroxide solution. The part of the water outlet pipe exposed to the outside is equipped with a regulating valve to control the opening of the spray pipe valve. The spray system is turned on 5-10 seconds before the quartz tube begins to be cut, so that a certain spray environment is pre-formed in the working chamber 1, reducing the local temperature and preventing the heat generated during the cutting moment from causing the white phosphorus to spontaneously combust. At the same time, it can also preliminarily absorb the exhaust gas that will be generated. As the catalyst in the storage tank 11 falls, the phosphorus pentoxide produced is easily soluble in water. The water spray or sodium hydroxide solution will absorb the phosphorus pentoxide to generate phosphoric acid or phosphate. After the pipe is turned on, the regulating valve is controlled to turn off the spray system.

[0025] In practice, while the quartz tube body 2 is being cut, the water storage tank 13 sprays cooling water onto the cutting area through the water spray head 14. At the same time, the one-way valve on the feed pipe 12 is opened, and the catalyst in the storage tank 11 enters the working box 1. It mixes with the white phosphorus tail gas generated during the cutting of the quartz tube body 2. Under the action of the catalyst, the white phosphorus reacts with the residual oxygen to generate phosphorus pentoxide. At the same time, the generated phosphorus pentoxide is absorbed by the water or alkaline solution sprayed from the water spray head 14 and reacts to generate phosphate. The absorption efficiency of the spray system for phosphorus pentoxide can reach 95%.

[0026] See Figure 2 The feed pipe 12 and the water spray head 14 are both located at the top of the cutting part of the pipe body 2. A collection trough 10 is located at the bottom of the cutting part of the pipe body 2. The collection trough 10 is located on the inner bottom wall of the working box 1. In this way, the waste generated by the feed pipe 12 and the water spray head 14 at the cutting part will directly enter the collection trough 10 for easy recycling.

[0027] In practice, the absorbent falls into the collection tank 10, and after being separated from the quartz fragments, it is discharged into a special treatment pool through the waste liquid pipeline. After neutralization and sedimentation treatment, it is discharged after meeting the standards.

[0028] See Figure 4There are two fixing seats 3. The two fixing seats 3 are set at the bottom end of the part of the pipe body 2 that does not need to be cut. A clamping plate 15 is hinged to one side of the top of the fixing seat 3. The other end of the clamping plate 15 is connected to a bolt 16. The bottom end of the bolt 16 is threaded to the fixing seat 3. After the pipe body 2 is placed on the fixing seat 3, the clamping plate 15 is closed on the fixing seat 3. Then the bolt 16 is connected inside the fixing seat 3 to fix the pipe body 2 and prevent the pipe body 2 from shifting during the cutting process.

[0029] In practice, the quartz tube 2 containing the indium phosphide crucible is placed on two fixed seats 3 inside the work box 1, with the part of the tube 2 to be cut suspended above the collection tank 10. The non-cutting end of the tube 2 is clamped by the hinged clamping plate 15 and bolts 16 to ensure no displacement during cutting.

[0030] See Figure 1 The upper and lower outer side walls of the opening of the work box 1 are fixedly connected with slide rails 17, and a door 18 is slidably connected between the two slide rails 17. A transparent observation window 19 is provided on the door 18.

[0031] In practice, after the quartz tube is placed, the baffle 18 is closed to seal the working chamber 1. In addition, a sealing ring can be set inside the baffle 18 to increase the sealing effect and prevent harmful gases generated during the cutting of the tube body 2 from leaking into the outside environment and polluting it. The transparent observation window 19 makes it easy to observe the working conditions inside the working chamber 1.

[0032] Working principle: First, the quartz tube 2 containing the indium phosphide crucible is placed on the fixed seat 3 inside the working box 1. The tube 2 is fixed with clamps 15 and bolts 16, and the stop door 18 is closed. Then, the drive motor is started to rotate the cutting blade 7, and at the same time, the servo motor is turned on to drive the gear 8 to move along the rack 5, so that the cutting blade 7 cuts the tube 2. During cutting, the water storage tank 13 sprays water or sodium hydroxide solution onto the cutting area through the water spray head 14 to cool it down. The white phosphorus-containing exhaust gas generated at the moment of cutting causes the white phosphorus to react with oxygen to generate phosphorus pentoxide as the catalyst in the storage tank 11 falls. Subsequently, the water or alkaline solution sprayed by the water spray head 14 absorbs the phosphorus pentoxide. The absorbent liquid and the debris generated during cutting fall into the collection tank 10. After cutting is completed, the crucible inside the tube is removed by a robotic arm, and the collection tank 10 is cleaned.

[0033] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A quartz tube opening device for indium phosphide production, comprising a working box (1) and a tube body (2), characterized in that, Multiple fixed seats (3) are fixedly installed inside the work box (1). The tube body (2) is placed on the fixed seat (3). A bracket (4) is installed above the tube body (2). The bracket (4) is fixedly installed inside the work box (1). A moving block (6) is slidably connected to the bracket (4). A drive motor is installed at the bottom inside the moving block (6). A cutting blade (7) is fixedly connected to the drive end of the drive motor.

2. The quartz tube opening device for indium phosphide production as described in claim 1, characterized in that: A rack (5) is fixedly installed at the top of the bracket (4), and a gear (8) is rotatably connected to the top of the moving block (6). The bottom end of the gear (8) meshes with the rack (5).

3. The quartz tube opening device for indium phosphide production as described in claim 2, characterized in that: The top outer wall of the movable block (6) is equipped with a motor housing (9), and a servo motor is installed inside the motor housing (9). The drive end of the servo motor is fixedly connected to the rotating shaft on the gear (8).

4. The quartz tube opening device for indium phosphide production as described in claim 3, characterized in that: The top wall of the working box (1) is provided with a storage tank (11), and the bottom opening of the storage tank (11) is provided with a feed pipe (12). The storage tank (11) is inserted into the top of the feed pipe (12), and the bottom end of the feed pipe (12) extends through the top wall of the working box (1) into the working box (1).

5. The quartz tube opening device for indium phosphide production as described in claim 4, characterized in that: A water storage tank (13) is installed on the top wall of the working box (1). A water outlet pipe is provided inside the water storage tank (13). The water outlet pipe extends to the top wall of the working box (1) and is connected to a water spray head (14). The water spray head (14) is fixedly installed on the inner top wall of the working box (1).

6. The quartz tube opening device for indium phosphide production as described in claim 5, characterized in that: The feed pipe (12) and the spray head (14) are both located at the top of the cut part of the pipe body (2). A collection trough (10) is provided at the bottom of the cut part of the pipe body (2). The collection trough (10) is located on the inner bottom wall of the working box (1).

7. The quartz tube opening device for indium phosphide production as described in claim 6, characterized in that: There are two fixing seats (3). The two fixing seats (3) are set at the bottom end of the part of the tube (2) that does not need to be cut. A clamping plate (15) is hinged to one side of the top of the fixing seat (3). A bolt (16) is connected to the other end of the clamping plate (15). The bottom end of the bolt (16) is threaded to the fixing seat (3).

8. The quartz tube opening device for indium phosphide production as described in claim 7, characterized in that: The upper and lower outer side walls of the opening of the work box (1) are fixedly connected with slide rails (17), and a door (18) is slidably connected between the two slide rails (17). A transparent observation window (19) is provided on the door (18).

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