Assembly positioning device for semiconductor production equipment frame

Abstract

The utility model relates to a kind of assembling positioning device for semiconductor production equipment frame, including front positioning mechanism, side positioning mechanism I, side positioning mechanism II, rear positioning mechanism I, rear positioning mechanism II, intermediate positioning mechanism and upper positioning pressboard, front positioning mechanism includes front positioning stand, and the front positioning rod capable of position adjustment in front and back direction;Side positioning mechanism I includes side positioning stand I, and the side positioning rod capable of position adjustment in left and right direction;Side positioning mechanism II and side positioning mechanism I are arranged side by side at the same side;Rear positioning mechanism II is between two rear positioning mechanism I;Intermediate positioning mechanism is arranged between two side positioning mechanism II;Upper positioning pressboard is set in the top of rear positioning mechanism I and intermediate positioning mechanism.The utility model can realize the quick and accurate positioning of each component of frame, effectively improve the efficiency of assembly and welding, and positioning precision, ensure the processing quality of frame.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment processing technology, specifically relating to an assembly and positioning device for a semiconductor manufacturing equipment frame. Background Technology

[0002] Semiconductor manufacturing equipment, such as LPCVD (Liquid Crystallization) furnaces, is primarily used to deposit solid thin films on wafer surfaces. The outer casing of this equipment requires the initial fabrication of a frame during production, upon which corresponding sealing plates are then fixed. The frame structure is relatively complex, composed of a base frame, side frames, and columns. During fabrication, all components are assembled manually, which not only affects welding efficiency but also makes it impossible to guarantee the perpendicularity and positional accuracy of each component. Furthermore, deformation during the welding process cannot be controlled, directly impacting the final quality of the frame. Utility Model Content

[0003] The purpose of this invention is to provide an assembly positioning device for semiconductor manufacturing equipment frames to solve the problem of poor frame assembly positioning accuracy.

[0004] The assembly and positioning device for a semiconductor manufacturing equipment frame according to this utility model is implemented as follows:

[0005] An assembly positioning device for a semiconductor manufacturing equipment frame, comprising:

[0006] The front positioning mechanism has two parts arranged symmetrically on the front side. The front positioning mechanism includes a front positioning column and a front positioning rod arranged on the side of the front positioning column and capable of being adjusted in the front-back direction.

[0007] Side positioning mechanism I, which has two parts and is arranged symmetrically on both sides, includes a side positioning column I and a side positioning rod arranged on the side of the side positioning column I and capable of being adjusted in the left and right direction;

[0008] Side positioning mechanism II, which has two parts and is arranged symmetrically on both sides, with the side positioning mechanism II on the same side arranged side by side with the side positioning mechanism I;

[0009] Rear positioning mechanism I, which has two parts arranged side by side on the rear side;

[0010] A rear positioning mechanism II is provided, which is located between two rear positioning mechanisms I and is arranged side by side with the rear positioning mechanisms I;

[0011] The intermediate positioning mechanism is located between the two side positioning mechanisms II;

[0012] The upper positioning plate is located on top of the rear positioning mechanism I and the intermediate positioning mechanism.

[0013] Furthermore, it also includes a base plate, on which the front positioning mechanism, side positioning mechanism I, side positioning mechanism II, rear positioning mechanism I, rear positioning mechanism II, and intermediate positioning mechanism are all mounted.

[0014] Furthermore, front slide blocks are provided on opposite sides of the two front positioning columns, and the front positioning rods are movably mounted in the slide grooves of the front slide blocks. Front stops are provided on opposite sides of the two front positioning rods respectively.

[0015] A front limiting plate for limiting the front end of the front positioning rod is installed on the front end surface of the front slide block;

[0016] A front locking plate for locking the position of the front positioning rod is provided on the side where the slide groove of the front slide is located.

[0017] Furthermore, a central positioning block is provided between the two front positioning mechanisms, and the central positioning block is provided with a central positioning through hole located in the front-rear direction.

[0018] Furthermore, a side slide block is provided on the rear side of the side positioning column I, and the side positioning rod is movably mounted in the slide block groove.

[0019] A side stop is provided on the rear side of the side positioning rod;

[0020] A side limiting plate for limiting the outer end of the opposite positioning rod is installed on the outer end face of the side slide block;

[0021] The rear side of the side slide is provided with a side locking plate for locking the position of the side positioning rod;

[0022] Side positioning blocks I are provided on opposite sides of the two side positioning columns I.

[0023] Furthermore, the side positioning mechanism II includes a side positioning column II and a side positioning block II disposed on opposite sides of the two side positioning columns II.

[0024] Furthermore, the rear positioning mechanism I includes a positioning frame, and a T-shaped positioning seat I and a rear positioning block I disposed on the front side of the positioning frame.

[0025] Furthermore, two rear positioning mechanisms II are provided;

[0026] The rear positioning mechanism II includes a rear positioning column, a rear positioning block II and a support seat disposed on the front side of the rear positioning column.

[0027] Furthermore, the intermediate positioning mechanism includes an intermediate positioning column and a T-shaped positioning seat II disposed on the front side of the intermediate positioning column.

[0028] Furthermore, the rear positioning mechanism I is provided with a top plate I, the middle positioning mechanism is provided with a top plate II, and the upper positioning pressure plate is installed above the top plate I and the top plate II.

[0029] After adopting the above technical solution, the beneficial effects of this utility model are as follows:

[0030] This invention, through the cooperation of various positioning mechanisms and the upper positioning plate, enables rapid and accurate positioning of each component of the frame, effectively improving the efficiency of assembly and welding, as well as the positioning accuracy, and ensuring the processing quality of the frame. Attached Figure Description

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0032] Figure 1 This is a structural diagram of an assembly and positioning device for a semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention;

[0033] Figure 2 This is a structural diagram from a first-view perspective of the front positioning mechanism of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention;

[0034] Figure 3 This is a structural diagram from a second perspective of the front positioning mechanism of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention.

[0035] Figure 4 This is a first-view structural diagram of the side positioning mechanism I of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention;

[0036] Figure 5 This is a structural diagram of the side positioning mechanism I of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention, from a second perspective.

[0037] Figure 6 This is a structural diagram of the side positioning mechanism II of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention;

[0038] Figure 7 This is a structural diagram of the rear positioning mechanism I of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention, taken from a first-view perspective.

[0039] Figure 8 This is a structural diagram of the rear positioning mechanism I of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention, from a second perspective.

[0040] Figure 9This is a structural diagram of the rear positioning mechanism II of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of this utility model;

[0041] Figure 10 This is a structural diagram of the intermediate positioning mechanism of the assembly positioning device for the semiconductor manufacturing equipment frame according to a preferred embodiment of the present invention;

[0042] Figure 11 This is a structural diagram of the semiconductor manufacturing equipment frame assembly positioning device in the positioning state according to a preferred embodiment of the present invention;

[0043] Figure 12 This is a structural diagram of the semiconductor manufacturing equipment frame using a preferred embodiment of the present invention;

[0044] In the diagram: Front positioning mechanism 1, front positioning column 11, front positioning rod 12, front slide block 13, front stop block 14, front limiting plate 15, front locking plate 16; Side positioning mechanism I 2, side positioning column I 21, side positioning rod 22, side slide block 23, side stop block 24, side limiting plate 25, side locking plate 26, side positioning block I 27; Side positioning mechanism II 3, side positioning column II 31, side positioning block II 32; Rear positioning mechanism I 4, positioning frame 41, T-shaped positioning seat Ⅰ42, Rear Positioning Block Ⅰ43, Top Plate Ⅰ44, Rear Positioning Mechanism Ⅱ5, Rear Positioning Column 51, Rear Positioning Block Ⅱ52, Support Seat 53, Intermediate Positioning Mechanism 6, Intermediate Positioning Column 61, T-Shaped Positioning Seat Ⅱ62, Top Plate Ⅱ63, Upper Positioning Pressure Plate 7, Base Plate 8, Center Positioning Block 9, Center Positioning Through Hole 91, Frame X, Bottom Frame X1, Horizontal Bending Beam X2, Vertical Beam X3, Rear Column X4, Horizontal Beam X5, Center Column X6, Top Block X7. Detailed Implementation

[0045] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0046] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0047] like Figure 1-11 As shown, an assembly positioning device for a semiconductor manufacturing equipment frame includes a front positioning mechanism 1, side positioning mechanisms I2, side positioning mechanisms II3, rear positioning mechanisms I4, rear positioning mechanisms II5, a middle positioning mechanism 6, and an upper positioning pressure plate 7. Two front positioning mechanisms 1 are symmetrically arranged on the front side. Each front positioning mechanism 1 includes a front positioning column 11 and a front positioning rod 12 located on the side of the front positioning column 11 and capable of position adjustment in the front-rear direction. Two side positioning mechanisms I2 are symmetrically arranged on both sides. Each side positioning mechanism I2 includes a side positioning column I21. And a side positioning rod 22 is provided on the side of the side positioning column I21 and can be adjusted in the left and right directions; two side positioning mechanisms II3 are provided and are arranged symmetrically on both sides, with the side positioning mechanism II3 on ​​the same side arranged in parallel with the side positioning mechanism I2; two rear positioning mechanisms I4 are provided and are arranged side by side on the rear side; at least one rear positioning mechanism II5 is provided and is located between the two rear positioning mechanisms I4 and is arranged in parallel with the rear positioning mechanism I4; the middle positioning mechanism 6 is provided between the two side positioning mechanisms II3; the upper positioning pressure plate 7 is provided on the top of the rear positioning mechanism I4 and the middle positioning mechanism 6.

[0048] like Figure 12 As shown, the positions of each of the above positioning mechanisms are all relative to the product to be positioned, namely frame X. That is, during positioning, the front positioning mechanism 1 is located on the front side of frame X and is used for positioning its front side; the side positioning mechanisms are located on both sides of frame X and are used for positioning its sides; the rear positioning mechanism is located on the rear side of frame X and is used for positioning its rear side; the middle positioning mechanism 6 is located inside frame X and is used for positioning its middle column; and the upper positioning plate 7 is located on the top of frame X and is used for positioning its upper end.

[0049] The frame X of this embodiment includes a bottom frame X1, two horizontally bent beams X2 arranged opposite each other, a vertical beam X3 located between the horizontally bent beams X2 and the bottom frame X1, two rear columns X4 arranged side by side on the rear side, a crossbeam X5 located between the two rear columns X4, and a central column X6 located in the middle of the bottom frame X1.

[0050] To facilitate the installation of each positioning mechanism, the assembly positioning device also includes a base plate 8. The front positioning mechanism 1, side positioning mechanism I 2, side positioning mechanism II 3, rear positioning mechanism I 4, rear positioning mechanism II 5 and middle positioning mechanism 6 are all installed on the base plate 8.

[0051] Preferably, each positioning mechanism is provided with a connecting plate at its bottom, and the connecting plate is fixed to the base plate 8 by bolts to fix the positioning mechanism.

[0052] The front positioning mechanism 1 is used to position the vertical beam X3 located at the front end of the two horizontal bent beams X2. To achieve this effect, front slide blocks 13 are provided on opposite sides of the two front positioning columns 11, and front positioning rods 12 are movably mounted in the slide grooves of the front slide blocks 13. Front stops 14 are provided on opposite sides of the two front positioning rods 12.

[0053] After placing each component of frame X into position, the front positioning rod 12 is moved backward within the front slide block 13 so that the L-shaped opening formed by the front positioning rod 12 and the front stop block 14 engages with the corresponding vertical beam X3 (the two vertical beams X3 are located on opposite sides of the two front positioning rods 12 respectively), thereby achieving precise positioning of the vertical beam X3 in the front, back, left, and right directions.

[0054] A front limiting plate 15 for limiting the front end of the front positioning rod 12 is installed on the front end face of the front slide block 13.

[0055] Specifically, the front limiting plate 15 is installed on the front end face of the front slide block 13 and partially blocks the front end of the slide groove of the front slide block 13, thereby preventing the front positioning rod 12 from moving out of the front end of the front slide block 13.

[0056] When the front positioning rod 12 is moved into place to position the corresponding vertical beam X3, its position needs to be fixed to ensure the stability of the positioning. Therefore, a front locking plate 16 for locking the position of the front positioning rod 12 is provided on the side where the slide groove of the front slide block 13 is located.

[0057] The front locking plate 16 is located on the upper and lower sides of the slide groove and partially covers the slide groove to fit with the front positioning rod 12. The front locking plate 16 and the front slide block 13 are provided with corresponding front locking holes. Locking bolts are installed in the front locking holes. When locking the front positioning rod 12, the locking bolts are tightened inward to press the front locking plate 16 onto the front positioning rod 12, thereby fixing the position of the front positioning rod 12.

[0058] The rear end of the bottom frame X1 is positioned using the rear positioning mechanism I4. In order to position the front end of the bottom frame X1, a central positioning block 9 is provided between the two front positioning mechanisms 1. The central positioning block 9 is provided with a central positioning through hole 91 located in the front-rear direction.

[0059] After placing the base frame X1, install a positioning pin in the central positioning through hole 91. The rear end of the positioning pin abuts against the base frame X1 and moves it backward until its rear end abuts against the front side of the rear positioning mechanism I4. Only then can the front and rear directions of the base frame X1 be accurately positioned.

[0060] A vertical beam X3 is also provided between the horizontal bending beam X2 and the side of the bottom frame X1. The side positioning mechanism I2 is used to position the vertical beam X3 and the side of the bottom frame X1. To achieve this effect, a side slide 23 is provided on the rear side of the side positioning column I21. The side positioning rod 22 is movably mounted in the slide groove of the side slide 23. A side stop 24 is provided on the rear side of the side positioning rod 22.

[0061] After placing the various components of frame X into place, the side positioning rod 22 is moved inward within the side slide 23 so that the L-shaped opening formed by the side positioning rod 22 and the side stop 24 engages with the corresponding vertical beam X3 (the two vertical beams X3 are located behind the two side positioning rods 22 respectively), thereby achieving precise positioning of the vertical beam X3 in the front, back, left, and right directions.

[0062] A side limiting plate 25 for limiting the outer end of the opposite positioning rod 22 is installed on the outer end face of the side sliding seat 23.

[0063] Specifically, the side limiting plate 25 is installed on the outer end face of the side slide block 23 and partially blocks the outer end of the slide groove of the side slide block 23, thereby preventing the side positioning rod 22 from moving out of the outer end of the side slide block 23.

[0064] When the side positioning rod 22 is moved into place to position the corresponding vertical beam X3, its position needs to be fixed to ensure the stability of the positioning. Therefore, the rear side of the side slide 23 is provided with a side locking plate 26 for locking the position of the side positioning rod 22.

[0065] The side locking plate 26 is located on the upper and lower sides of the slide groove and partially covers the slide groove to fit with the side positioning rod 22. The side locking plate 26 and the side slide 23 are provided with corresponding side locking holes. Locking bolts are installed in the side locking holes. When locking the side positioning rod 22, the locking bolts are tightened inward to press the side locking plate 26 onto the side positioning rod 22, thereby fixing the position of the side positioning rod 22.

[0066] In order to achieve positioning of the bottom frame X1 and the left and right sides of the horizontal bending beam X2, side positioning blocks I27 are provided on the opposite sides of the two side positioning columns I21.

[0067] Among them, the side positioning block I27 located at the upper end of the inner side of the side positioning column I21 is used to position the left and right sides of the horizontal bending beam X2, while the side positioning block I27 located at the lower end of the inner side of the side positioning column I21 is used to position the left and right sides of the bottom frame X1.

[0068] In order to further position the left and right sides of the bottom frame X1 and the horizontal bending beam X2, the side positioning mechanism II3 includes a side positioning column II31 and a side positioning block II32 set on the opposite side of the two side positioning columns II31.

[0069] Similarly, the side positioning block II32 located at the upper end of the inner side of the side positioning column II31 is used to position the left and right sides of the horizontal bending beam X2, while the side positioning block II32 located at the lower end of the inner side of the side positioning column II31 is used to position the left and right sides of the bottom frame X1.

[0070] In order to position the rear side of the bottom frame X1 and the two rear columns X4, the rear positioning mechanism I4 includes a positioning frame 41, a T-shaped positioning seat I42 and a rear positioning block I43 disposed on the front side of the positioning frame 41.

[0071] Among them, the T-shaped positioning seats I42 on the two rear positioning mechanisms I4 are arranged in the same direction and are located on the left side of the corresponding rear column X4, so as to realize the positioning of the rear column X4 in the front, back and left and right directions.

[0072] The rear positioning block I43 located at the bottom front side of the positioning frame 41 is used to position the rear side of the bottom frame X1, while the rear positioning block I43 located in the middle front side of the positioning frame 41 is also used to position the rear column X4.

[0073] In order to position the crossbeam X5, two rear positioning mechanisms Ⅱ5 are provided.

[0074] Specifically, the rear positioning mechanism II5 includes a rear positioning column 51, a rear positioning block II 52 and a support base 53 disposed on the front side of the rear positioning column 51.

[0075] Among them, the rear positioning block II 52 is used to position the rear side of the crossbeam X5, and the support seat 53 is set at the bottom of the crossbeam X5 to support the crossbeam X5.

[0076] In order to position the intermediate column, the intermediate positioning mechanism 6 includes an intermediate positioning column 61 and a T-shaped positioning seat II 62 disposed on the front side of the intermediate positioning column 61.

[0077] The T-shaped positioning seat II62 is located on the left side of the middle column to achieve positioning in the front, back, left, and right directions.

[0078] The top of each of the two rear columns X4 and the central column X6 is provided with a top block X7. In order to position each positioning block, an upper positioning pressure plate 7 is provided. In order to fix the upper positioning pressure plate 7, the top of the rear positioning mechanism I4 is provided with a top plate I44, and the top of the middle positioning mechanism 6 is provided with a top plate II63. The upper positioning pressure plate 7 is installed above the top plate I44 and the top plate II63.

[0079] Top plate I 44 is located on top of positioning frame 41, and top plate II 63 is located on top of middle positioning column 61. The three form a triangular structure. The upper positioning pressure plate 7 is fixed to top plate I 44 and top plate II 63 by bolts and other mechanisms, thereby ensuring the positioning of top block X7.

[0080] When assembling and welding frame X, first, the bottom frame X1 is placed in position between the corresponding side positioning mechanisms I2 and II3, and pushed backward using positioning pins until its rear side is in contact with the rear positioning mechanism I4. Next, the vertical beam X3, horizontal bending beam X2, rear column X4, middle column, and crossbeam X5 are placed in position and precisely positioned using their respective positioning mechanisms. Then, the top block X7 is placed on top of the corresponding column, and the upper positioning plate 7 is fixed for positioning. Welding can then be performed at the joints of each part. This not only ensures the accuracy of positioning of each component of frame X but also effectively improves assembly and welding efficiency, guaranteeing the processing quality of frame X.

[0081] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. An assembly positioning device for a semiconductor manufacturing equipment frame, characterized in that, include The front positioning mechanism (1) has two parts arranged symmetrically on the front side. The front positioning mechanism (1) includes a front positioning column (11) and a front positioning rod (12) arranged on the side of the front positioning column (11) and capable of being adjusted in the front-back direction. Side positioning mechanism I (2) is provided in two and arranged symmetrically on both sides. The side positioning mechanism I (2) includes a side positioning column I (21) and a side positioning rod (22) provided on the side of the side positioning column I (21) and capable of adjusting its position in the left and right directions. Side positioning mechanism II (3) is provided in two and is arranged symmetrically on both sides. The side positioning mechanism II (3) located on the same side is arranged side by side with the side positioning mechanism I (2). The rear positioning mechanism I (4) has two parts arranged side by side on the rear side; A rear positioning mechanism II (5) is provided, which is located between two rear positioning mechanisms I (4) and is arranged side by side with the rear positioning mechanisms I (4); The intermediate positioning mechanism (6) is located between the two side positioning mechanisms II (3); The upper positioning plate (7) is located on top of the rear positioning mechanism I (4) and the intermediate positioning mechanism (6).

2. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, It also includes a base plate (8), and the front positioning mechanism (1), side positioning mechanism I (2), side positioning mechanism II (3), rear positioning mechanism I (4), rear positioning mechanism II (5) and middle positioning mechanism (6) are all mounted on the base plate (8).

3. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, Two front positioning columns (11) are provided with front slide blocks (13) on opposite sides. The front positioning rod (12) is movably mounted in the slide groove of the front slide block (13). Front stops (14) are provided on opposite sides of the two front positioning rods (12). A front limiting plate (15) for limiting the front end of the front positioning rod (12) is installed on the front end surface of the front slide (13); The front sliding block (13) has a front locking plate (16) on the side where the sliding groove is located for locking the position of the front positioning rod (12).

4. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, A central positioning block (9) is provided between the two front positioning mechanisms (1), and the central positioning block (9) is provided with a central positioning through hole (91) located in the front-rear direction.

5. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, The rear side of the side positioning column I (21) is provided with a side slide (23), the side positioning rod (22) is movably mounted in the slide groove of the side slide (23), and the rear side of the side positioning rod (22) is provided with a side stop (24). A side limiting plate (25) for limiting the outer end of the opposite positioning rod (22) is installed on the outer end face of the side slide (23); The rear side of the side slide (23) is provided with a side locking plate (26) for locking the position of the side positioning rod (22); Side positioning blocks I (27) are provided on opposite sides of the two side positioning columns I (21).

6. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, The side positioning mechanism II (3) includes a side positioning column II (31) and a side positioning block II (32) disposed on opposite sides of the two side positioning columns II (31).

7. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, The rear positioning mechanism I (4) includes a positioning frame (41), a T-shaped positioning seat I (42) and a rear positioning block I (43) disposed on the front side of the positioning frame (41).

8. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, The rear positioning mechanism II (5) is provided in two parts; The rear positioning mechanism II (5) includes a rear positioning column (51), a rear positioning block II (52) and a support base (53) disposed on the front side of the rear positioning column (51).

9. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, The intermediate positioning mechanism (6) includes an intermediate positioning column (61) and a T-shaped positioning seat II (62) disposed on the front side of the intermediate positioning column (61).

10. The assembly positioning device for a semiconductor manufacturing equipment frame according to claim 1, characterized in that, The rear positioning mechanism I (4) is provided with a top plate I (44) on top, the intermediate positioning mechanism (6) is provided with a top plate II (63) on top, and the upper positioning pressure plate (7) is installed above the top plate I (44) and the top plate II (63).

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