Wafer etching assist device

Abstract

The utility model relates to wafer processing technical field, and disclose a kind of wafer etching auxiliary device, including box, box one end is communicated with air inlet pipe, air inlet pipe is used to communicate the exhaust outlet end of wafer etching;Fan is fixed in box interior, and the filter assembly for adsorbing exhaust gas is equipped in box side;Box side is equipped with the limiting component for the position restriction of filter assembly, and mobile assembly is equipped in box lower side;Filter assembly includes limiting frame, by pulling pull rod, it can easily make slide plate slide in first sliding slot, further drive lock block to draw from current lock groove, so that the maintenance process of activated carbon filter screen becomes simple and fast, without complex operation or tool, when maintaining an activated carbon filter screen, limiting frame can be slid along second sliding slot, so that another activated carbon filter screen enters inside box and continues to work, ensure the uninterrupted operation of equipment in maintenance process, improve work efficiency.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing technology, specifically to a wafer etching auxiliary device. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits; its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single-crystal silicon ingot. After grinding, polishing, and slicing, the silicon crystal ingot is formed into a silicon wafer, or crystal.

[0003] In the wafer etching process, various harmful gases and fine particulate matter are generated. If these harmful substances are directly released into the working environment, they will not only seriously endanger the health of operators but also pollute the surrounding environment. Existing filtration and purification devices usually require the entire device to be shut down for maintenance of activated carbon filters in order to replace or clean the filters. This means that the wafer etching equipment cannot perform etching operations normally during maintenance, resulting in production interruption and reduced overall work efficiency. Therefore, a wafer etching auxiliary device is proposed. Utility Model Content

[0004] The purpose of this invention is to provide a wafer etching auxiliary device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a wafer etching auxiliary device, comprising a housing, one end of which is connected to an air inlet pipe, the air inlet pipe being used to connect to the exhaust gas outlet of the wafer etching process;

[0006] A fan is fixed inside the box, and a filter assembly for adsorbing exhaust gas is provided on one side of the box.

[0007] The housing is provided with a limiting component on one side for restricting the position of the filter components, and a moving component is provided on the lower side of the housing;

[0008] The filter assembly includes a limiting frame, on one side of which two activated carbon filter screens are fixed by bolts;

[0009] The limiting component includes a fixing frame, a first sliding groove is provided inside the fixing frame, a sliding plate is slidably connected to the inner side of the first sliding groove, a locking block is fixed on one side of the sliding plate, and two locking grooves are provided on one side of the limiting frame.

[0010] Preferably, the locking slots are located on one side of the activated carbon filter, and when the locking block is inserted into one of the locking slots, the corresponding activated carbon filter is located inside the box.

[0011] Preferably, the inner side of the box is provided with a second sliding groove, the inner wall of the second sliding groove is slidably connected to the outer side of the limiting frame via a slide rail, and a sealing ring located on one side of the limiting frame is fixed to the inner wall of the second sliding groove.

[0012] Preferably, as described above, a pull rod is fixed to the side of the slide away from the locking block, and the outer side of the pull rod extends through one side of the fixing frame.

[0013] Preferably, as described above, a spring is connected between the sliding plate and the inner side of the first sliding groove, one side of the fixing frame is fixed to one side of the box body, and the outer side of the locking block moves through one side of the box body.

[0014] Preferably, the moving component includes a support frame, an electric cylinder is fixed to the top of the inner wall of the support frame, a horizontal plate is fixed to the push rod end of the electric cylinder, and a number of casters are installed at the bottom of the horizontal plate.

[0015] Preferably, the support frame has two sliding rods fixed to the top of its inner wall, which movably pass through one side of the horizontal plate. The bottom of each sliding rod is fixed with a limit block.

[0016] Preferably, the support frame is fixed to the bottom of the box, and the air outlet end of the box is connected to an air outlet pipe.

[0017] Compared with the prior art, the present invention, by adopting the above technical solution, has the following technical effects:

[0018] First, by pulling the lever, the slide plate can be easily slid in the first slide groove, thereby pulling the locking block out of the current locking groove. This makes the maintenance process of the activated carbon filter simple and quick, without the need for complicated operations or tools. When maintaining one activated carbon filter, the limit frame can be slid along the second slide groove to allow another activated carbon filter to enter the inside of the box to continue working, ensuring uninterrupted operation of the equipment during maintenance and improving work efficiency.

[0019] Second, the electric cylinder can be easily raised and lowered by controlling the switch assembly. When the device needs to be moved, the electric cylinder pushes the horizontal plate downward, so that the casters contact the ground and support the entire device, thus facilitating small-scale movement within the factory without the need for laborious manual handling. After moving into position, the push rod end of the electric cylinder is retracted by controlling the switch assembly, so that the casters leave the ground, and the device is supported and fixed by the support frame, ensuring the stability of the device after it stops moving. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a first-view structural diagram of the present invention;

[0022] Figure 2 This is a schematic diagram of the second-view structure of the present invention;

[0023] Figure 3 This is a schematic diagram of the third-view structure of this utility model;

[0024] Figure 4 This is a schematic diagram of the activated carbon filter screen structure of this utility model;

[0025] Figure 5 This is a schematic diagram of the left-side cross-sectional structure of the fixing frame of this utility model;

[0026] Figure 6 This is a schematic diagram of the electric cylinder structure of this utility model;

[0027] Figure 7 This is a schematic diagram of the fan section of this utility model.

[0028] Explanation of reference numerals in the attached drawings: 1. Housing; 2. Moving component; 21. Horizontal plate; 22. Casters; 23. Limiting block; 24. Slide rod; 25. Support frame; 26. Electric cylinder; 3. Limiting component; 31. Fixing frame; 32. Pull rod; 33. Slide plate; 34. Spring; 35. Locking block; 36. First slide groove; 37. Locking groove; 4. Air inlet pipe; 5. Air outlet pipe; 6. Filter assembly; 61. Limiting frame; 62. Activated carbon filter; 63. Second slide groove; 7. Fan. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0031] Example

[0032] Please see Figure 1-7 This utility model provides a technical solution: a wafer etching auxiliary device, including a housing 1, one end of which is connected to an air inlet pipe 4. The air inlet pipe 4 is used to connect to the exhaust gas outlet of the wafer etching process. The air inlet pipe 4 is connected to the final end of the exhaust gas treatment after wafer etching. After exhaust gas pretreatment, condensation and recovery, and filtration of fluorocarbons and particulate matter, it serves as the final barrier to remove residual VOCs or odors. A support frame 25 is fixed to the bottom of the housing 1. The exhaust end of the housing 1 is connected to an exhaust pipe 5. A fan 7 inside the housing 1 operates continuously, forcing the exhaust gas to pass through an activated carbon filter 62 at a set flow rate. The microporous structure of the activated carbon captures VOC molecules and odor substances in the exhaust gas through physical and chemical adsorption.

[0033] A fan 7 is fixed inside the housing 1. When replacing the activated carbon filter 62, the valve on the air inlet pipe 4 can be temporarily closed to prevent exhaust gas leakage. A filter assembly 6 for adsorbing exhaust gas is provided on one side of the housing 1. A limiting assembly 3 for limiting the position of the filter assembly 6 is provided on one side of the housing 1. A moving assembly 2 is provided on the lower side of the housing 1.

[0034] The filter assembly 6 includes a limiting frame 61, on one side of which two activated carbon filter screens 62 are fixed by bolts. In the initial state, one activated carbon filter screen 62 is located inside the housing 1 to perform adsorption, while the other is located outside as a spare. The activated carbon filter screen 62 can be replaced periodically.

[0035] Locking slots 37 are located on one side of activated carbon filter screen 62. When locking block 35 is inserted into one of the locking slots 37, the corresponding activated carbon filter screen 62 is located inside the housing 1. When one activated carbon filter screen 62 is inside the housing 1 and the other activated carbon filter screen 62 is outside the housing 1, the activated carbon filter screen 62 located on the outside can be removed for maintenance, avoiding the need to stop the machine to replace the activated carbon filter screen 62 during exhaust gas treatment. A second sliding groove 63 is provided inside the housing 1. The inner wall of the second sliding groove 63 is slidably connected to the outside of the limiting frame 61 through a sliding rail. A sealing ring (not shown in the figure) located on one side of the limiting frame 61 is fixed to the inner wall of the second sliding groove 63. The sealing ring is made of fluororubber and is used to fit the limiting frame 61 to prevent exhaust gas leakage.

[0036] The limiting component 3 includes a fixing frame 31, with a first sliding groove 36 inside the fixing frame 31. A sliding plate 33 is slidably connected to the inside of the first sliding groove 36. A locking block 35 is fixed on one side of the sliding plate 33. Two locking grooves 37 are opened on one side of the limiting frame 61. The limiting component 3 achieves the positioning of the activated carbon filter 62 through the cooperation of the locking block 35 and the locking grooves 37. When the locking block 35 is inserted into the locking groove 37 inside the box 1, the corresponding activated carbon filter 62 is in the working position.

[0037] A pull rod 32 is fixed to the side of the slide plate 33 away from the locking block 35. The outer side of the pull rod 32 moves through one side of the fixing frame 31. When the activated carbon filter 62 needs to be replaced, the slide plate 33 is pulled by the pull rod 32 to compress the spring 34. A cover plate is bolted to one side of the fixing frame 31. After removing the bolt and taking off the cover plate, the spring 34 can be taken out for maintenance. The locking block 35 is disengaged from the working position locking groove 37. The slide plate 33 is connected to the inner side of the first sliding groove 36 by the spring 34. One side of the fixing frame 31 is fixed to one side of the box 1. The outer side of the locking block 35 moves through one side of the box 1. The limiting frame 61 is pulled out until the outer activated carbon filter 62 is fully exposed. At this time, the inner activated carbon filter 62 is still sealed to the box 1 by the sealing ring. After the outer activated carbon filter 62 is replaced, the outer activated carbon filter 62 is used as a spare. The whole process does not require stopping the machine.

[0038] The moving component 2 includes a support frame 25. A counterweight is fixed to the top of the inner wall of the support frame 25 to lower the center of gravity of the device and facilitate movement. An electric cylinder 26 is fixed to the top of the inner wall of the support frame 25. A horizontal plate 21 is fixed to the push rod end of the electric cylinder 26. Several casters 22 are installed at the bottom of the horizontal plate 21. A sliding rod 24 is fixed to the top of the inner wall of the support frame 25 and extends through one side of the horizontal plate 21. When movement is required, the push rod of the electric cylinder 26 extends to make the casters 22 contact the ground, enabling the device to move flexibly within a small range. When positioning, the electric cylinder 26 retracts to make the bottom of the support frame 25 touch the ground, and the limiting block 23 prevents the horizontal plate 21 from falling off. There are two sliding rods 24, and the bottom of the sliding rods 24 is fixed with the limiting block 23. A switch group is installed on one side of the housing 1. The output end of the switch group is electrically connected to the input end of the fan 7 and the electric cylinder 26, respectively. The fan 7 is powered by a municipal AC motor, and the electric cylinder 26 is powered by an external DC power supply. Under the action of the moving component 2, the device can move within a small range in the factory.

[0039] Working principle: The exhaust gas generated by wafer etching is introduced into the housing 1 through the inlet pipe 4. This inlet pipe 4 is connected to the last end of the exhaust gas treatment after wafer etching. After the exhaust gas is pretreated, condensed and recovered, and fluorinated compounds and particulate matter are filtered, it serves as the last barrier to remove residual VOCs or odors. The fan 7 inside the housing 1 is started, blowing the exhaust gas toward the filter assembly 6. When the exhaust gas passes through the activated carbon filter 62, the VOCs or odors in it are adsorbed. The exhaust gas after adsorption treatment is discharged from the housing 1 through the outlet pipe 5, completing the exhaust gas treatment process.

[0040] When maintenance of the activated carbon filter 62 is required, the sliding plate 33 is slid in the first sliding groove 36 by pulling the lever 32, which drives the locking block 35 to be pulled out from the current locking groove 37. At this time, the limiting frame 61 can be slid along the second sliding groove 63, so that another activated carbon filter 62 can enter the inside of the box 1 for operation, while the activated carbon filter 62 originally located inside the box 1 slides out to the outside of the box 1 for easy removal and maintenance. Then the locking block 35 is inserted into the corresponding locking groove 37 to fix the position of the limiting frame 61, and the sealing ring fits the limiting frame 61 to prevent exhaust gas leakage.

[0041] When the device needs to be moved, the electric cylinder 26 is started by controlling the switch group. The push rod end of the electric cylinder 26 pushes the horizontal plate 21 to move downward, causing the caster wheel 22 to contact the ground and support the entire device. At this time, the device can be moved within a small range in the factory by pushing it. After it is moved into place, the push rod end of the electric cylinder 26 is retracted by controlling the switch group, so that the caster wheel 22 leaves the ground and the device is supported and fixed by the support frame 25.

[0042] In summary, by pulling the lever 32, the slide plate 33 can be easily slid within the first slide groove 36, thereby pulling the locking block 35 out of the current locking groove 37. This makes the maintenance process of the activated carbon filter 62 simple and quick, without the need for complicated operations or tools. When maintaining one activated carbon filter 62, the limiting frame 61 can be slid along the second slide groove 63 to allow another activated carbon filter 62 to enter the inner side of the housing 1 to continue working, ensuring uninterrupted operation of the equipment during maintenance and improving work efficiency.

[0043] The electric cylinder 26 is activated by a switch assembly, allowing the casters 22 to be easily raised and lowered. When the device needs to be moved, the electric cylinder 26 pushes the horizontal plate 21 downwards, causing the casters 22 to contact the ground and support the entire device. This facilitates small-scale movement within the factory without the need for laborious manual handling. Once in position, the push rod end of the electric cylinder 26 is retracted by the switch assembly, causing the casters 22 to leave the ground. The device is then supported and fixed by the support frame 25, ensuring its stability after movement stops.

[0044] Those skilled in the art will understand that the features described in the various embodiments and / or claims of this utility model can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in this utility model. In particular, the features described in the various embodiments and / or claims of this utility model can be combined or combined in various ways without departing from the spirit and teachings of this utility model. All such combinations and / or combinations fall within the scope of this utility model.

Claims

1. A wafer etching auxiliary device, comprising a housing (1), characterized in that, One end of the housing (1) is connected to an air inlet pipe (4), which is used to connect to the exhaust gas outlet of the wafer etching process. A fan (7) is fixed inside the box (1), and a filter assembly (6) for adsorbing exhaust gas is provided on one side of the box (1). The box (1) has a limiting component (3) on one side for limiting the position of the filter assembly (6), and a moving component (2) is provided on the lower side of the box (1); The filter assembly (6) includes a limiting frame (61), on one side of which two activated carbon filter screens (62) are fixed by bolts; The limiting component (3) includes a fixing frame (31), the fixing frame (31) has a first sliding groove (36) inside, a sliding plate (33) is slidably connected inside the first sliding groove (36), a locking block (35) is fixed on one side of the sliding plate (33), and two locking grooves (37) are opened on one side of the limiting frame (61).

2. The wafer etching auxiliary device according to claim 1, characterized in that, The locking slots (37) are located on one side of the activated carbon filter (62). When the locking block (35) is inserted into one of the locking slots (37), the corresponding activated carbon filter (62) is located inside the box (1).

3. The wafer etching auxiliary device according to claim 1, characterized in that, The inner side of the box (1) is provided with a second slide groove (63). The inner wall of the second slide groove (63) is slidably connected to the outer side of the limit frame (61) via a slide rail. A sealing ring located on one side of the limit frame (61) is fixed to the inner wall of the second slide groove (63).

4. The wafer etching auxiliary device according to claim 2, characterized in that, A pull rod (32) is fixed on the side of the slide plate (33) away from the locking block (35), and the outer side of the pull rod (32) moves through one side of the fixing frame (31).

5. The wafer etching auxiliary device according to claim 4, characterized in that, A spring (34) is connected between the inner side of the slide plate (33) and the first slide groove (36). One side of the fixing frame (31) is fixed to one side of the box body (1), and the outer side of the locking block (35) moves through one side of the box body (1).

6. The wafer etching auxiliary device according to claim 1, characterized in that, The moving component (2) includes a support frame (25), an electric cylinder (26) is fixed to the top of the inner wall of the support frame (25), a horizontal plate (21) is fixed to the push rod end of the electric cylinder (26), and a number of universal wheels (22) are installed at the bottom of the horizontal plate (21).

7. The wafer etching auxiliary device according to claim 6, characterized in that, The top of the inner wall of the support frame (25) is fixed with a sliding rod (24) that moves through one side of the horizontal plate (21). There are two sliding rods (24), and a limit block (23) is fixed at the bottom of the sliding rod (24).

8. The wafer etching auxiliary device according to claim 7, characterized in that, The support frame (25) is fixed to the bottom of the box (1), and the air outlet end of the box (1) is connected to the air outlet pipe (5).

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