Polishing disc correction device and correction apparatus

Abstract

The utility model relates to the technical field of semiconductor, provide a kind of grinding disc correction device and correction equipment, grinding disc correction device includes: base, first correction member and second correction member;The first correction member is detachably arranged in the base along the one end of first direction, and the first correction member has first correction surface along the one end of first direction away from the base;The second correction member is detachably arranged in the base along the other end of first direction, and the second correction member has second correction surface along the one end of first direction away from the base, and the first correction surface and the second correction surface are parallel.Grinding disc correction device adopts the way of splicing, to reduce the material cost when replacing.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a grinding disc correction device and correction equipment. Background Technology

[0002] Substrates (such as silicon wafers) are the raw materials for manufacturing semiconductor devices, used to make high-power rectifiers, diodes, switching devices, high-power transistors, etc. Their subsequent products, such as integrated circuits and discrete semiconductor devices, are widely used in various fields.

[0003] The processing of the substrate requires a series of treatments on the grown crystal rod, including cutting, outer diameter grinding, edge flattening or V-groove treatment, slicing, grinding, polishing and cleaning.

[0004] Grinding is the process of grinding the upper and lower planes of a substrate to remove surface damage caused by processes such as cutting, and to improve the surface smoothness, such as removing tool marks or lines on the substrate surface.

[0005] Existing grinding methods typically consist of two opposing rotating grinding discs, with the substrate placed between them. After prolonged use, the surface flatness of the grinding discs deteriorates, and the shape of the disc surface changes to some extent. In this case, a correction device is needed to grind and correct the surface of the grinding discs to meet the processing requirements of the substrate.

[0006] Existing correction devices are typically a single, integral wheel that grinds and corrects the surface of the grinding disc to ensure its flatness meets grinding requirements. However, after prolonged use, the surface shape of the correction wheel itself changes due to wear, usually necessitating replacement of the entire correction wheel, resulting in high material costs.

[0007] Therefore, a grinding disc correction device and correction equipment are needed to reduce correction losses and thus reduce material costs. Utility Model Content

[0008] This utility model provides a grinding disc correction device and correction equipment. The grinding disc correction device adopts a splicing method to reduce the material cost when replacing it.

[0009] This utility model provides a grinding disc correction device, comprising: a base, a first correction component, and a second correction component;

[0010] The first corrector is detachably disposed at one end of the substrate along a first direction, and the end of the first corrector away from the substrate along the first direction has a first corrective surface;

[0011] The second corrector is detachably disposed at the other end of the substrate along the first direction, and the end of the second corrector away from the substrate along the first direction has a second correcting surface, and the first correcting surface and the second correcting surface are parallel.

[0012] Optionally, the first corrector and the base, and the second corrector and the base, are detachably connected by connecting members.

[0013] The connecting component includes a snap-fit ​​element and a snap-fit ​​groove, wherein the snap-fit ​​element is snapped into the snap-fit ​​groove.

[0014] The snap-fit ​​component is disposed on the base, and the snap-fit ​​groove is disposed on the first correction component and the second correction component, or the snap-fit ​​component is disposed on the first correction component and the second correction component, and the snap-fit ​​groove is disposed on the base.

[0015] Optionally, the snap-fit ​​component includes a connecting rod and a snap-fit ​​connector, the snap-fit ​​connector being connected to one end of the connecting rod, the other end of the connecting rod being connected to the base, and the radial dimension of the snap-fit ​​connector being larger than the radial dimension of the connecting rod;

[0016] The snap-fit ​​groove includes a first groove and a second groove;

[0017] The radial dimension of the first groove is greater than or equal to the radial dimension of the snap-fit ​​connector;

[0018] The second groove communicates with the first groove. The second groove is a T-shaped groove that is larger on the inside and smaller on the outside. The groove width on the inner side of the second groove is greater than or equal to the radial dimension of the snap-fit ​​connector, and is used to accommodate the snap-fit ​​connector. The groove width on the outer side of the second groove is less than the radial dimension of the snap-fit ​​connector, and is greater than or equal to the radial dimension of the connecting rod, so as to accommodate the connecting rod and prevent the snap-fit ​​connector from coming out.

[0019] Optionally, the middle portion of the substrate has a through region along the first direction, and / or the middle portion of the first corrector has a first through region along the first direction, and / or the middle portion of the second corrector has a second through region along the first direction.

[0020] Optionally, the grinding disc correction device further includes a functional component connected to the inner wall of the through area.

[0021] Optionally, the functional component includes a first straight rod and a second straight rod, the first straight rod and the second straight rod being connected to the inner wall of the through area and perpendicular to the first direction.

[0022] Optionally, the outer contours of the substrate, the first corrector, and the second corrector are cylindrical, and the central axes of the substrate, the first corrector, and the second corrector are collinear and parallel to the first direction.

[0023] Optionally, the outer peripheral surface of the substrate is provided with gear teeth arranged in its circumferential direction, and / or the outer peripheral surface of the first corrector is provided with gear teeth arranged in its circumferential direction, and / or the outer peripheral surface of the second corrector is provided with gear teeth arranged in its circumferential direction.

[0024] Optionally, when the snap-fit ​​groove includes a first groove and a second groove, the first groove and the second groove are arranged along the circumferential direction of the first correction member or the second correction member.

[0025] This utility model also provides a correction device, including the grinding disc correction device described above.

[0026] The aforementioned grinding disc correction device is assembled from a base, a first correction component, and a second correction component. This device can be placed between two grinding discs. The first correction surface of the first correction component adheres to the lower surface of the upper grinding disc, and the second correction surface of the second correction component adheres to the upper surface of the lower grinding disc. When the grinding disc correction device and the grinding disc move relative to each other in a direction parallel to the first (or second) correction surface, the first correction surface corrects the lower surface of the upper grinding disc, and the second correction surface corrects the upper surface of the lower grinding disc. When the first or second correction surface no longer meets the correction requirements due to prolonged use, maintenance can be performed by replacing the first or second correction component. During replacement, the first and second correction components are consumable parts, while the base is not damaged. By reasonably setting the thickness of the first and second correction components, the replacement material cost can be reduced, thus helping to lower the grinding correction cost.

[0027] Furthermore, in this invention, the substrate, the first correction component, and the second correction component are assembled and stacked along the first direction, with the first and second correction surfaces located at opposite ends of the entire grinding disc correction device along the first direction. This assembly method only requires ensuring that the first and second correction surfaces are parallel, and there is no requirement for the first and second correction surfaces to be coplanar, which helps to reduce the assembly accuracy requirements of the substrate, the first correction component, and the second correction component. Attached Figure Description

[0028] Figure 1 This is an exploded structural diagram of a grinding disc correction device according to an embodiment of the present invention;

[0029] Figure 2 This is a schematic diagram of the unfolded structure of a grinding disc correction device according to an embodiment of the present invention;

[0030] Figure 3 This is a schematic diagram of the structure of a snap-fit ​​component according to an embodiment of the present invention;

[0031] Figure 4 This is a top view of the snap-fit ​​groove according to an embodiment of the present invention;

[0032] Figure 5 for Figure 4 A schematic diagram of the AA cross-sectional structure;

[0033] Figure 6 for Figure 5 Schematic diagram of the BB cross-section structure;

[0034] Figure 7 This is a schematic diagram of the assembly structure of the snap-fit ​​component and snap-fit ​​groove according to an embodiment of the present invention. Figure 1 ;

[0035] Figure 8 This is a schematic diagram of the assembly structure of the snap-fit ​​component and snap-fit ​​groove according to an embodiment of the present invention. Figure 2 .

[0036] In the attached diagram:

[0037] 10-Matrix; 11-Through zone;

[0038] 20 - First corrective component; 21 - First corrective surface; 22 - First through area;

[0039] 30 - Second correction part; 31 - Second correction surface; 32 - Second through area;

[0040] 40 - Connecting component; 41 - Snap-fit ​​component; 411 - Connecting rod; 412 - Snap-fit ​​connector; 42 - Snap-fit ​​groove; 421 - First groove; 422 - Second groove;

[0041] 50 - Functional component; 51 - First straight rod; 52 - Second straight rod;

[0042] a - First direction. Detailed Implementation

[0043] The grinding disc correction device proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0044] In this invention, "outer diameter" and "inner diameter" refer to the diameter of a circular structure, while for a non-circular structure, the inner diameter refers to the diameter of its inscribed circle and the outer diameter refers to the diameter of its circumscribed circle. "Axial direction" refers to the direction of the central axis of a cylindrical rod, while for a non-cylindrical rod, the axial direction refers to the length direction of the rod.

[0045] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Additionally, as used in this invention, “installed,” “connected,” “joined,” and “set” on one element from another should be interpreted broadly, generally indicating only a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located inside, outside, above, below, or to one side of another element, unless otherwise explicitly stated. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to the specific circumstances. Furthermore, directional terms such as above, below, up, down, upward, downward, left, right, etc., are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0046] This embodiment provides a grinding disc correction device, including: a base 10, a first correction element 20, and a second correction element 30.

[0047] Combination Figure 1 As shown, the first direction a corresponds to Figure 1 In the vertical direction, the first corrector 20 is detachably disposed at one end of the base 10 along the first direction a. Figure 1 The upper end of the substrate 10), the end of the first corrector 20 away from the substrate 10 along the first direction a ( Figure 1 The upper end of the first corrector 20 has a first corrector surface 21.

[0048] The second corrector 30 is detachably disposed at the other end of the base 10 along the first direction a. Figure 1 The lower end of the substrate 10), the end of the second corrector 30 away from the substrate 10 along the first direction a ( Figure 1 The lower end of the second correction element 30 has a second correction surface 31, and the first correction surface 21 and the second correction surface 31 are parallel.

[0049] Figure 1 The diagram shows an exploded view of the grinding disc correction device. After actual assembly, the first correction component 20 is connected to the base 10, and the lower end of the first correction component 20 is attached to the upper end of the base 10. The second correction component 30 is connected to the base 10, and the upper end of the second correction component 30 is attached to the lower end of the base 10.

[0050] The aforementioned grinding disc correction device is assembled from a base 10, a first correction component 20, and a second correction component 30. This device can be placed between two grinding discs. The first correction surface 21 of the first correction component 20 is attached to the lower surface of the upper grinding disc, and the second correction surface 31 of the second correction component 30 is attached to the upper surface of the lower grinding disc. When the grinding disc correction device moves relative to the grinding disc in a direction parallel to the first correction surface 21 (or the second correction surface 31), the first correction surface 21 corrects the lower surface of the upper grinding disc, and the second correction surface 31 corrects the upper surface of the lower grinding disc. When the first correction surface 21 or the second correction surface 31 no longer meets the correction requirements due to prolonged use, maintenance can be performed by replacing the first correction component 20 or the second correction component 30. During replacement, the first correction component 20 and the second correction component 30 are consumable parts, while the base 10 is not damaged. By reasonably setting the thickness of the first correction component 20 and the second correction component 30, the replacement material cost can be reduced, thus helping to lower the grinding correction cost.

[0051] Furthermore, in this embodiment, the base 10, the first correction component 20, and the second correction component 30 are assembled and stacked along the first direction a, with the first correction surface 21 and the second correction surface 31 located at both ends of the entire grinding disc correction device along the first direction a. This assembly method only requires ensuring that the first correction surface 21 and the second correction surface 31 are parallel, and there is no requirement for the first correction surface 21 and the second correction surface 31 to be coplanar, which helps to reduce the assembly accuracy requirements of the base 10, the first correction component 20, and the second correction component 30.

[0052] Furthermore, the base 10 has a through-region 11 along the first direction a in its middle portion, the first corrector 20 has a first through-region 22 along the first direction a in its middle portion, and the second corrector 30 has a second through-region 32 along the first direction a in its middle portion. The arrangement of these through-regions helps to achieve lightweight design of each component and reduce the material cost of each component.

[0053] Please refer to Figure 1 and Figure 2 As shown, in this embodiment, the through area 11, the first through area 22 and the second through area 32 are all cylindrical chambers, and the three through areas are coaxially arranged, and the three chambers are arranged facing each other along their axial direction.

[0054] In this embodiment, the inner diameters of the through area 11, the first through area 22 and the second through area 32 are the same. Therefore, after the base 10, the first correction member 20 and the second correction member 30 are connected to each other along the axial direction, the inner walls of the through area 11, the first through area 22 and the second through area 32 are coplanar and connected to each other along the axial direction.

[0055] In other alternative embodiments, the through area 11, the first through area 22, and the second through area 32 can be configured as cuboids, cubes, elliptical cylinders, or other shapes. The shape of each through area can be adaptively adjusted based on actual needs.

[0056] Furthermore, the grinding disc correction device also includes a functional component 50, which is connected to the inner wall of the through area 11.

[0057] Since the through area 11, the first through area 22 and the second through area 32 are arranged opposite each other along the first direction a, the functional component 50 can be exposed through the first through area 22 or the second through area 32 for suspension, mechanical clamping and rotation, etc.

[0058] Combination Figure 2 As shown, the functional component 50 includes a first straight rod 51 and a second straight rod 52. The two ends of the first straight rod 51 are connected to the inner wall of the through area 11 and are perpendicular to the first direction a. Similarly, the two ends of the second straight rod 52 are connected to the inner wall of the through area 11 and are perpendicular to the first direction a. Furthermore, the first straight rod 51 and the second straight rod 52 are of equal length and arranged in parallel. In this case, the first straight rod 51 and the second straight rod 52 can serve as suspension components for cooperation with the lifting structure, or they can serve as clamping components for clamping cooperation with an external clamping arm to drive the base 10 to rotate. When driving the base 10 to rotate, the base 10 can be detachably connected or separated from the first corrector 20 and the second corrector 30. The specific principle will be further detailed in the following description of the detachable connection structure.

[0059] In other alternative embodiments, the functional component 50 may be a U-shaped handle or other structure disposed on the inner wall of the through area 11, and the specific structure of the functional component 50 may be adjusted based on actual usage requirements.

[0060] Furthermore, such as Figure 1 and Figure 2 As shown, in this embodiment, the outer contours of the base 10, the first corrector 20, and the second corrector 30 are cylindrical.

[0061] The outer contour of the base 10 is coaxially arranged with its internal through-area 11, so the base 10 has an overall annular structure. Similarly, the outer contour of the first corrector 20 is coaxially arranged with its internal first through-area 22, so the first corrector 20 has an overall annular structure, and the corresponding first corrective surface 21 is annular; the outer contour of the second corrector 30 is coaxially arranged with its internal second through-area 32, so the second corrector 30 has an overall annular structure, and the corresponding second corrective surface 31 is annular.

[0062] The area of ​​the first correction surface 21 and the second correction surface 31 can be set based on the grinding requirements. Since the area of ​​the first correction surface 21 and the second correction surface 31 is determined by their inner and outer diameters, the inner and outer diameters of the first correction element 20 and the second correction element 30 can also be set based on the grinding requirements. For example, during the grinding process, the first correction surface 21 will exert a certain pressure on the lower surface of the upper grinding disk, and similarly, the second correction surface 31 will exert a certain pressure on the upper surface of the lower grinding disk. These pressures are usually within a certain range. The pressure between the first correction surface 21 and the upper grinding disk, and the pressure between the second correction surface 31 and the lower grinding disk, directly affect the grinding rate. Therefore, a corresponding pressure range can be set based on the grinding rate requirements, and the area of ​​the first correction surface 21 and the second correction surface 31 can be deduced based on the pressure and force. Then, the inner and outer diameters of the first correction element 20 and the second correction element 30 can be set based on their area sizes.

[0063] In other alternative embodiments, the area size of the first correction surface 21 and the second correction surface 31 may also take into account other technical parameters of the grinding process, and the area size of the first correction surface 21 and the second correction surface 31 may be set by considering the comprehensive requirements of multiple technical parameters.

[0064] In this embodiment, the outer diameters and inner diameters of the base 10, the first corrector 20, and the second corrector 30 are equal. The central axis of the base 10, the central axis of the first corrector 20, and the central axis of the second corrector 30 are collinear and parallel to the first direction a. Therefore, after the base 10, the first corrector 20, and the second corrector 30 are connected to each other axially, their inner walls are coplanar and connected axially to each other, and their outer walls are coplanar and connected axially to each other. After the base 10, the first corrector 20, and the second corrector 30 are assembled along their axial directions, the overall ring structure formed makes the overall consistency of the entire grinding disc correction device better.

[0065] Furthermore, in this embodiment, the outer peripheral surface of the base 10 is provided with gear teeth arranged circumferentially, the outer peripheral surface of the first corrector 20 is provided with gear teeth arranged circumferentially, and the outer peripheral surface of the second corrector 30 is provided with gear teeth arranged circumferentially. The gear teeth on the base 10, the first corrector 20, and the second corrector 30 have the same specifications. The gear teeth can be involute teeth, circular arc teeth, etc. After the base 10, the first corrector 20, and the second corrector 30 are connected, their gear teeth completely overlap in the axial direction projection, that is, there is no misalignment relationship between the gear teeth in the circumferential direction. At this time, the outer contour of the grinding and correcting device forms a gear structure.

[0066] The aforementioned gear teeth are designed to facilitate meshing with external gears, thereby driving the grinding and correction device to rotate as a whole, and thus realizing the rotational movement of the first correction surface 21 and the second correction surface 31 relative to the grinding disc.

[0067] In other alternative embodiments, gear teeth may be arranged circumferentially on the outer peripheral surface of one or both of the base 10, the first corrector 20 and the second corrector 30, and the position of the gear teeth may be adjusted adaptively based on actual usage requirements.

[0068] For further details, please refer to... Figure 1 and Figure 2 As shown, the first corrector 20 and the base 10, as well as the second corrector 30 and the base 10, are detachably connected by connecting members 40.

[0069] The connecting member 40 includes a snap-fit ​​member 41 and a snap-fit ​​groove 42, wherein the snap-fit ​​member 41 is snapped into the snap-fit ​​groove 42.

[0070] like Figure 1 As shown, the snap-fit ​​member 41 is disposed at both axial ends of the base 10, the snap-fit ​​groove 42 is disposed at one end of the first corrector 20 near the base 10, and the snap-fit ​​groove 42 is also disposed at one end of the second corrector 30 near the base 10.

[0071] Combination Figure 1 As shown, in this embodiment, the first corrector 20 is detachably connected to the base 10 via four connecting members 40. The four connecting members 40 are evenly distributed circumferentially; that is, four snap-fit ​​pieces 41 are evenly arranged circumferentially on the upper end of the base 10, and four snap-fit ​​grooves 42, which mate with the snap-fit ​​pieces 41, are provided circumferentially on the lower end surface of the first corrector 20. Similarly, the second corrector 30 is detachably connected to the base 10 via four connecting members 40. The four connecting members 40 are evenly distributed circumferentially; that is, four snap-fit ​​pieces 41 are provided circumferentially on the lower end of the base 10, and four snap-fit ​​grooves 42, which mate with the snap-fit ​​pieces 41, are provided circumferentially on the upper end surface of the second corrector 30. Furthermore, the four snap-fit ​​pieces 41 connected to the upper end surface and the four snap-fit ​​pieces 41 connected to the lower end surface of the base 10 are axially aligned.

[0072] In this embodiment, the snap-fit ​​member 41 is connected to the base 10 by welding. In other alternative embodiments, the snap-fit ​​member 41 and the base 10 may be connected by threaded fastening or other known methods.

[0073] In other alternative embodiments, the first corrector 20 and the base 10 can be detachably connected by two, three, or more connecting members. Similarly, the second corrector 30 and the base 10 can be detachably connected by two, three, or more connecting members.

[0074] In other alternative embodiments, the snap-fit ​​member 41 may be disposed on the first correction member 20 and the second correction member 30, and the snap-fit ​​groove 42 may be disposed on the base 10.

[0075] Please continue to refer to this. Figures 1 to 3 As shown, the snap-fit ​​component 41 includes a connecting rod 411 and a snap-fit ​​connector 412. The snap-fit ​​connector 412 is connected to one end of the connecting rod 411 along its length direction, and the other end of the connecting rod 411 along its length direction is connected to the base 10. The radial dimension of the snap-fit ​​connector 412 is larger than the radial dimension of the connecting rod 411.

[0076] In this embodiment, the connecting rod 411 is a cylindrical rod, and its radial dimension is its diameter. The snap-fit ​​connector 412 is also a cylindrical structure, and its radial dimension is its diameter. Therefore, the snap-fit ​​connector 41 has an overall stepped shaft structure. The axial direction of the snap-fit ​​connector 41 is parallel to the axial direction of the first corrector 20 (or the second corrector 30).

[0077] One end of the connecting rod 411 can be provided with an external thread, and a threaded hole can be adapted to be opened on the corresponding base 10. The connecting rod 411 is connected to the base 10 by means of thread fastening.

[0078] In other alternative embodiments, the connecting rod 411 and the snap-fit ​​connector 412 may also be non-cylindrical structures. In this case, the radial dimension of the connecting rod 411 is the circumcircle diameter of the cross-section formed by cutting along the length direction perpendicular to the connecting rod 411. Similarly, the radial dimension of the snap-fit ​​connector 412 is the circumcircle diameter of the cross-section formed by cutting along the length direction perpendicular to the connecting rod 411.

[0079] Please continue to refer to this. Figures 4 to 5 As shown, the snap-fit ​​groove 42 on the first corrector 20 is an example (the snap-fit ​​groove 42 on the second corrector 30 is similar).

[0080] The snap-fit ​​groove 42 includes a first groove 421 and a second groove 422.

[0081] In this embodiment, the first groove 421 is a cylindrical groove, and the radial dimension of the first groove 421 (i.e., the inner diameter of the first groove 421) is greater than (or equal to) the radial dimension of the snap-fit ​​connector 412 (i.e., the outer diameter of the snap-fit ​​connector 412), for insertion of the snap-fit ​​connector 412. The axial direction of the first groove 421 is parallel to the axial direction of the first corrector 20 (or the second corrector 30).

[0082] Combination Figure 4 As shown, the second groove 422 is an arc-shaped groove and extends along the circumferential direction of the first corrector 20. The first groove 421 and the second groove 422 are arranged along the circumferential direction of the first corrector 20, and the second groove 422 communicates with the first groove 421.

[0083] Combination Figure 5 and Figure 6 As shown, along the axial direction of the first corrector 20, the second groove 422 is a T-shaped groove with a larger inner diameter and a smaller outer diameter. The groove width on the inner side of the second groove 422 is equal to (or slightly larger than) the radial dimension of the snap-fit ​​connector 412, used to accommodate the snap-fit ​​connector 412; the groove width on the outer side of the second groove 422 is smaller than the radial dimension of the snap-fit ​​connector 412, and equal to (or slightly larger than) the radial dimension of the connecting rod 411, used to accommodate the connecting rod 411 and prevent the snap-fit ​​connector 412 from axially disengaging. The aforementioned groove width refers to... Figure 6 The dimensions of the middle tank in the left and right directions.

[0084] Combination Figure 7 and Figure 8As shown, when the first corrector 20 is connected to the base 10, the first corrector 20 is first stacked axially with the base 10, and the snap-fit ​​connector 412 is inserted axially into the first groove 421, with the snap-fit ​​connector 412 circumferentially facing the second groove 422. Then, the first corrector 20 and the base 10 are rotated relative to each other, causing the snap-fit ​​connector 412 to rotate into the inner groove of the second groove 422, while a portion of the connecting rod 411 rotates into the outer groove of the second groove 422. At this time, because the width of the outer groove of the second groove 422 is smaller than the outer diameter of the snap-fit ​​connector 412, the snap-fit ​​connector 412 cannot axially disengage from the inner groove of the second groove 422, thus achieving axial positioning of the first corrector 20 and the base 10. When the first corrector 20 and the base 10 rotate relative to each other, the snap-fit ​​connector 412 abuts against the circumferential end of the second groove 422. Figure 7 When the first correction member 20 is positioned at the right end of the second groove 422, the first correction member 20 is circumferentially positioned with the base 10, and at this time the gear teeth of the first correction member 20 are axially aligned with the gear teeth of the base 10.

[0085] When the first corrector 20 is removed, rotate the first corrector 20 in the opposite direction to rotate the snap connector 412 into the first groove 421, and then pull out the snap connector 412 axially.

[0086] Furthermore, the connection and disassembly of the second correction element 30 to the base 10 are similar to those of the first correction element 20 described above, and will not be repeated here.

[0087] like Figure 2 As shown, in this embodiment, in Figure 2 From the corresponding perspective, the locking groove 42 on the first corrector 20 and the locking groove 42 on the second corrector 30 have the same rotation direction (the second groove 422 is located on the clockwise side of the first groove 421). Since the base 10, the first corrector 20, and the second corrector 30 are all provided with gear teeth, when the external gear meshes synchronously with the gear teeth of the three, it substantially positions the base 10, the first corrector 20, and the second corrector 30 circumferentially, preventing the base 10, the first corrector 20, and the second corrector 30 from circumferentially rotating and misaligning. In other alternative embodiments, Figure 2 From the corresponding perspective, the rotation directions of the locking groove 42 on the first corrector 20 and the locking groove 42 on the second corrector 30 can be opposite. At this time, after the first corrector 20 and the second corrector 30 are assembled with the base 10, the rotation directions of the locking groove 42 on the first corrector 20 and the locking groove 42 on the second corrector 30 are the same. At this time, the grinding disc correction device can be driven to rotate from the first groove 421 to the second groove 422 to prevent circumferential misalignment of the three.

[0088] In other alternative embodiments, the snap-fit ​​member 41 can be configured as an elastic structure, and the snap-fit ​​groove 42 can be an axially opened groove that is larger in the inner part and smaller in the outer part. When the snap-fit ​​member 41 is snapped into the snap-fit ​​groove 42, it is first constrained by the outer groove of the snap-fit ​​groove 42 to elastically deform. When the snap-fit ​​member 41 enters the inner groove of the snap-fit ​​groove 42, the snap-fit ​​member 41 elastically resets, so that the snap-fit ​​member 41 is snapped into the snap-fit ​​groove 42. In addition, the snap-fit ​​member 41 can also adopt existing elastic buckles or other known snap-fit ​​structures, which will not be described in detail here.

[0089] This embodiment also provides a correction device, including the grinding disc correction device described above.

[0090] In addition, the correction device may also include a sun gear and a gear ring. Multiple grinding disc correction devices are arranged around the sun gear and mesh with the sun gear and the gear ring. The grinding disc correction devices can be rotated by driving the sun gear or the gear ring to make them revolve and rotate, thereby moving relative to the grinding disc to achieve correction of the grinding disc.

[0091] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0092] The above description is merely a description of a preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A grinding disc correction device, characterized in that, include: The base material, the first correction component, and the second correction component; The first corrector is detachably disposed at one end of the substrate along a first direction, and the end of the first corrector away from the substrate along the first direction has a first corrective surface; The second corrector is detachably disposed at the other end of the substrate along the first direction, and the end of the second corrector away from the substrate along the first direction has a second correcting surface, and the first correcting surface and the second correcting surface are parallel.

2. The grinding disc correction device as described in claim 1, characterized in that, The first corrective component and the base, as well as the second corrective component and the base, are detachably connected by connecting members. The connecting component includes a snap-fit ​​element and a snap-fit ​​groove, wherein the snap-fit ​​element is snapped into the snap-fit ​​groove. The snap-fit ​​component is disposed on the base, and the snap-fit ​​groove is disposed on the first correction component and the second correction component, or the snap-fit ​​component is disposed on the first correction component and the second correction component, and the snap-fit ​​groove is disposed on the base.

3. The grinding disc correction device as described in claim 2, characterized in that, The snap-fit ​​component includes a connecting rod and a snap-fit ​​connector. The snap-fit ​​connector is connected to one end of the connecting rod, and the other end of the connecting rod is connected to the base. The radial dimension of the snap-fit ​​connector is larger than the radial dimension of the connecting rod. The snap-fit ​​groove includes a first groove and a second groove; The radial dimension of the first groove is greater than or equal to the radial dimension of the snap-fit ​​connector; The second groove communicates with the first groove. The second groove is a T-shaped groove that is larger on the inside and smaller on the outside. The groove width on the inner side of the second groove is greater than or equal to the radial dimension of the snap-fit ​​connector, and is used to accommodate the snap-fit ​​connector. The groove width on the outer side of the second groove is less than the radial dimension of the snap-fit ​​connector, and is greater than or equal to the radial dimension of the connecting rod, so as to accommodate the connecting rod and prevent the snap-fit ​​connector from coming out.

4. The grinding disc correction device as described in claim 1, characterized in that, The base has a through area in the middle along the first direction, and / or the first correction member has a first through area in the middle along the first direction, and / or the second correction member has a second through area in the middle along the first direction.

5. The grinding disc correction device as described in claim 4, characterized in that, The grinding disc correction device also includes a functional component, which is connected to the inner wall of the through area.

6. The grinding disc correction device as described in claim 5, characterized in that, The functional component includes a first straight rod and a second straight rod, which are connected to the inner wall of the through area and perpendicular to the first direction.

7. The grinding disc correction apparatus according to any one of claims 1 to 6, characterized in that, The outer contours of the substrate, the first corrector, and the second corrector are cylindrical. The central axis of the substrate, the central axis of the first corrector, and the central axis of the second corrector are collinear and parallel to the first direction.

8. The grinding disc correction device as described in claim 7, characterized in that, The outer peripheral surface of the substrate is provided with gear teeth arranged in a circumferential direction, and / or the outer peripheral surface of the first corrector is provided with gear teeth arranged in a circumferential direction, and / or the outer peripheral surface of the second corrector is provided with gear teeth arranged in a circumferential direction.

9. The grinding disc correction device as described in claim 7, characterized in that, When the snap-fit ​​groove includes a first groove and a second groove, the first groove and the second groove are arranged along the circumferential direction of the first correction member or the second correction member.

10. A correction device, characterized in that, Includes the grinding disc correction device as described in any one of claims 1 to 9.

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