Static load testing apparatus for pbn crucibles
By designing support structures and load-bearing columns adapted to different crucible models, and combining this with a gradual loading method using a weighted groove, the problems of excessive local stress and low testing efficiency in crucible load-bearing tests were solved, achieving efficient and low-cost crucible load-bearing tests.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 博宇(天津)半导体材料有限公司
- Filing Date
- 2025-06-10
- Publication Date
- 2026-06-23
AI Technical Summary
Existing technologies for crucible load-bearing tests suffer from problems such as excessive local stress, low testing efficiency, high cost, and high requirements for operational experience, especially the poor compatibility between different crucible models.
A static load-bearing test device for PBN crucibles was designed, which consists of a support body, a force-bearing column, and a weighting groove. The support body has a through cavity to accommodate different crucible models. The force-bearing column fits tightly against the inner side of the crucible. The counterweight is gradually increased through the weighting groove to avoid sudden overload. Graphite material is used to avoid damage.
It improves the applicability and efficiency of the testing device, reduces testing costs, ensures the accuracy and safety of load-bearing data, avoids excessive local stress on the crucible, and simplifies the operation process.
Smart Images
Figure CN224399155U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of crucible load-bearing testing technology, and in particular to a static load-bearing testing device for a PBN crucible. Background Technology
[0002] In fields such as materials science, metallurgy, and semiconductor manufacturing, the safety of crucibles, the reliability of the production process, and their service life are all closely related to their load-bearing capacity.
[0003] Currently, the load-bearing capacity test of crucibles generally uses ordinary presses. Although this does not require additional tooling or complex equipment, it can easily cause excessive and concentrated stress on the crucible in certain areas, resulting in unnecessary damage. In addition, it is necessary to control the loading speed of the press to avoid sudden breakage of the crucible due to excessive loading, which requires a high level of operator experience. Furthermore, under the condition that the support body is in close contact with the crucible, each type of crucible requires a corresponding support body, resulting in low testing efficiency and high testing costs. Utility Model Content
[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a static load-bearing test device for PBN crucibles.
[0005] This utility model provides a static load-bearing testing device for a PBN crucible, comprising a support body, a force-bearing column, and a weighting groove; wherein,
[0006] The support body is configured as a column, and the interior of the column is provided with a through cavity for placing crucibles of different sizes; the through cavity includes a first annular groove, a second annular groove, a first groove, and a second groove; the first annular groove and the second annular groove are respectively disposed on two end faces of the column; the first groove is disposed on one end face of the column corresponding to the inner ring surface of the first annular groove, and the second groove is disposed on the other end face of the column corresponding to the inner ring surface of the second annular groove; the first groove and the second groove are connected; the junction of the first groove and the second groove is configured as a diameter change point;
[0007] The force-bearing column is configured as a cylinder and is closely attached to the inner wall of the crucible inside the through cavity;
[0008] The weighting groove is located at the top of the force-bearing column and is used to increase the counterweight of the crucible.
[0009] Furthermore, the inner diameter of the first groove is set to be smaller or larger than the inner diameter of the second groove.
[0010] Furthermore, the weighting groove includes a groove body, and a stud is fixedly provided on the bottom surface of the groove body.
[0011] Furthermore, a threaded groove is provided on one end face of the force-bearing column corresponding to the stud, and the stud is threaded into the interior of the threaded groove.
[0012] Furthermore, the weighted groove, the load-bearing column, and the support body are all made of graphite material.
[0013] Furthermore, the column, through cavity, force-bearing column, groove, stud, threaded groove, and assembled crucible are all coaxially arranged.
[0014] Compared with the prior art, the beneficial effects of this utility model are:
[0015] The static load-bearing test device for PBN crucibles of this utility model has a first annular groove and a second annular groove at both ends of the support body. A first groove is provided corresponding to the first annular groove and a second groove is provided corresponding to the second annular groove. A diameter change point is provided between the first groove and the second groove, which means that two different sizes of crucibles can be placed. This solves the problem of multiple crucibles of different sizes fitting together with the same support body, improves the practicality of the device, increases the testing efficiency, and reduces the testing cost.
[0016] A threaded structure and a weighted groove are connected at the top of the load-bearing column, allowing individual parts to be replaced compared to the overall structure.
[0017] By gradually adding counterweights to the weight-adding groove, sudden overload is avoided.
[0018] When the crucible of the corresponding model is installed on the first or second annular groove on the support, a certain gap is left between the first or second annular groove and the upper edge R corner of the crucible of the corresponding model, so as to obtain pressure data more accurately.
[0019] The load-bearing column is made of cylindrical material and fits tightly against the crucible to avoid excessive local stress.
[0020] It should be understood that the content described in the utility model description section is not intended to limit the key or important features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model.
[0021] Other features of this invention will become readily apparent from the following description. Attached Figure Description
[0022] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:
[0023] Figure 1 A schematic diagram of the structure of a static load-bearing testing device for a PBN crucible provided in an embodiment of this utility model;
[0024] Figure 2 An exploded view of the static load-bearing test apparatus for the PBN crucible;
[0025] Figure 3 This is a cross-sectional view of the static load-bearing test device for the PBN crucible;
[0026] Figure 4 This is a cross-sectional view of the support structure;
[0027] The following are the labels in the diagram: 1. Support body; 11. Through cavity; 111. First annular groove; 112. Second annular groove; 113. First groove; 114. Second groove; 2. Force-bearing column; 21. Threaded groove; 3. Weighting groove; 31. Groove body; 32. Stud; 4. Crucible. Detailed Implementation
[0028] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.
[0029] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.
[0030] Please refer to Figures 1-4 This utility model provides a static load-bearing capacity testing device for a PBN crucible, including a support body 1, a force-bearing column 2, and a weight-reinforcing groove 3. The crucible 4 is placed between the support body 1 and the force-bearing column 2, and the weight-reinforcing groove 3 is connected and installed on the force-bearing column 2. The load-bearing capacity of the crucible 4 is tested by gradually adding counterweights inside the weight-reinforcing groove 3.
[0031] The support body 1 is configured as a column, with a through cavity 11 inside the column for holding crucibles of different sizes. To ensure that the support body 1 can fit different sizes of crucibles, the shape of the support body 1 is designed from a traditional vertical shape to a double-diameter support structure with a diameter variation in the middle; the details are as follows.
[0032] The through cavity 11 includes a first annular groove 111, a second annular groove 112, a first groove 113, and a second groove 114; the first annular groove 111 and the second annular groove 112 are respectively disposed on the two end faces of the column; the first groove 113 is disposed on the inner ring surface of the first annular groove 111 on one end face of the column, and the second groove 114 is disposed on the inner ring surface of the second annular groove 112 on the other end face of the column, and the first groove 113 and the second groove 114 are connected.
[0033] In a preferred embodiment, the inner diameter of the first groove 113 is set to be smaller or larger than the inner diameter of the second groove 114, and the corresponding first annular groove 111 cooperates with the first groove 113 to adapt to one type of crucible 4, and the second annular groove 112 cooperates with the second groove 114 to adapt to another type of crucible 4.
[0034] The connection between the first groove 113 and the second groove 114 is set as a diameter change point, that is, the inner diameter of the first groove 113 and the second groove 114 are different. The cooperation with the corresponding first annular groove 111 and the second annular groove 112 enables the adaptation of two different models of crucible 4.
[0035] When the corresponding model crucible is installed on the first annular groove 111 or the second annular groove 112 on the support, a certain gap is left between the first annular groove 111 or the second annular groove 112 and the upper edge R-angle of the corresponding model crucible (reference). Figure 3 (where A is the gap left) to obtain more accurate pressure data;
[0036] The first annular groove 111 or the second annular groove 112 can engage the upper edge of the crucible 4, and the first groove 113 and the second groove 114 can fit tightly against the outer wall of the crucible 4.
[0037] The force-bearing column 2 is set as a cylinder and is closely attached to the inner wall of the crucible 4 inside the penetrating cavity 11 to avoid excessive local stress and damage to the crucible 4.
[0038] In cases where the inner diameters of two different types of crucibles 4 that can be placed in the support 1 are the same, the force-bearing column 2 can be used interchangeably for these two different types of crucibles 4.
[0039] When two different types of crucibles 4 with different inner diameters can be placed in the support body 1, two different specifications of force-bearing columns 2 need to be configured because the force-bearing column 2 needs to be close to the inner wall of the crucible 4.
[0040] The weighting groove 3 is located on top of the force-bearing column 2 and is used to increase the counterweight of the crucible 4.
[0041] In a preferred embodiment, the weighting tank 3 includes a tank body 31, and a stud 32 is fixedly provided on the bottom surface of the tank body 31. By gradually adding counterweights into the tank body 31, sudden overload of the load is avoided, which could affect the crucible 4.
[0042] In a preferred embodiment, a threaded groove 21 is provided on one end face of the force-bearing column 2 corresponding to the stud 32, and the stud 32 is screwed into the threaded groove 21.
[0043] The problem of uncontrollable loading speed under traditional load-bearing test methods is improved by designing a threaded disassembly structure between the weighted groove 3 and the load-bearing column 2, and by adding counterweights in the weighted groove 3.
[0044] In a preferred embodiment, the weighted groove 3, the force-bearing column 2, and the support body 1 are all made of graphite material, which will not damage the PBN crucible.
[0045] In a preferred embodiment, the column, the through cavity 11, the force-bearing column 2, the groove 31, the stud 32, the threaded groove 21, and the assembled crucible 4 are all coaxially arranged.
[0046] In use, the crucible 4 is placed in the support body 1 of the corresponding diameter, that is, the upper edge of the crucible 4 is placed inside the first annular groove 111, and the lower main body of the crucible 4 is placed in the first groove 113 in a fitting manner. The force-bearing column 2 is slowly placed into the crucible 4, and the weight-reinforcing groove 3 is threadedly assembled with the force-bearing column 2. The load-bearing capacity of the crucible 4 is verified by adding counterweight to the weight-reinforcing groove 3.
[0047] Similarly, crucibles 4 of different models can be placed inside the second annular groove 112 and the second groove 114.
[0048] In the description of this specification, the terms "connection," "installation," and "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0049] In the description of this specification, the terms "one embodiment," "some embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0050] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A static load bearing test apparatus for a PBN crucible, characterized by, Including support body, force column and heavy groove, wherein, The support body is arranged as a column body, and a through cavity for placing different types of crucibles is arranged in the inside of the column body; the through cavity comprises a first annular groove, a second annular groove, a first groove and a second groove; the first annular groove and the second annular groove are respectively arranged on two end faces of the column body; a first groove is arranged on the inner ring face of the first annular groove on one end face of the column body, and a second groove is arranged on the inner ring face of the second annular groove on the other end face of the column body; the first groove and the second groove are in communication; and the junction of the first groove and the second groove is arranged as a diameter change; The force column is arranged as a cylindrical body and is tightly arranged on the inner side wall of the crucible in the through cavity; The heavy groove is arranged on the top of the force column and is used for increasing the counterweight of the crucible.
2. The static load bearing test apparatus for PBN crucibles of claim 1, wherein, The inner diameter of the first groove is smaller than or larger than the inner diameter of the second groove.
3. The static load bearing test apparatus for PBN crucibles of claim 1, wherein, The heavy groove comprises a groove body, and a stud is fixedly arranged on the bottom face of the groove body.
4. The static load bearing test apparatus for PBN crucibles of claim 3, wherein, A threaded groove is arranged on one end face of the force column corresponding to the stud, and the stud is screwed into the inside of the threaded groove.
5. The static load bearing test apparatus for PBN crucibles of claim 1, wherein, The heavy groove, the force column and the support body are all made of graphite material.
6. The static load bearing test apparatus for PBN crucibles of claim 4, wherein, The column body, the through cavity, the force column, the groove body, the stud, the threaded groove and the assembled crucible are all coaxially arranged.