A heating structure

Abstract

The utility model discloses a heating structure, including heat source body and the heated piece, heat source body is placed in the heated piece, and the contact surface of heat source body and the heated piece is inclined, and through the implementation heating structure of the utility model can realize both can keep higher thermal efficiency, and can conveniently dismount.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a heating structure. Background Technology

[0002] In the heating systems of semiconductor devices, the cavity and some key structures need to reach certain temperatures to facilitate chemical reactions or other precision operations. To achieve this, cylindrical resistance heat sources are typically used as a centralized heating solution. This type of heat source has advantages such as simple structure, ease of control, and high stability.

[0003] Cylindrical resistance heat sources are typically connected to the heated component, such as a heating element, via a hole-and-shaft mating mechanism. This mating method effectively transfers heat to the heated component, but it presents two conflicting challenges in its design. To achieve higher heating efficiency, a tighter contact is needed between the cylindrical resistance heat source and the heated component. A tighter contact reduces heat loss between the contact surfaces, thus improving overall heat transfer efficiency. However, this tight contact also leads to difficulties in assembly and disassembly, especially when regular maintenance, replacement, or adjustment is required. To ensure easy disassembly and replacement of the heating element when needed, a certain gap must be left between the cylindrical heat source and the mating hole. This small gap ensures smooth installation and removal of the heating element, preventing it from being unable to be removed or installed due to an overly tight fit. However, leaving a gap results in insufficient thermal contact between the heat source and the heated component, thus reducing heating efficiency and causing heat loss.

[0004] In summary, if the cylindrical heat source and the heated component fit too tightly, excessive friction or thermal expansion during disassembly and assembly may cause the heating element and mating hole to jam, hindering the disassembly process and potentially damaging components. Conversely, maintaining a gap between the heat source and the heated component for ease of disassembly and assembly will reduce heat transfer efficiency. This gap will result in heat loss, decreasing the overall heating effect and impacting equipment performance.

[0005] Therefore, it is necessary to design a new structure that can maintain high thermal efficiency while being easy to disassemble and assemble. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the prior art and provide a heating structure.

[0007] To solve the above-mentioned technical problems, the purpose of this utility model is achieved through the following technical solution: providing a heating structure, including: a heat source body and a heated component, wherein the heat source body is placed inside the heated component, and the contact surface between the heat source body and the heated component is inclined.

[0008] A further technical solution is that the contact surface between the heat source and the heated component is inclined along the direction close to the bottom of the heated component.

[0009] A further technical solution is as follows: the heated component is provided with a mounting hole, and the heat source is placed in the mounting hole.

[0010] A further technical solution is that the inner wall of the mounting hole is inclined.

[0011] A further technical solution is that the heat source body contacts the inner wall of the mounting hole to form the contact surface.

[0012] A further technical solution is as follows: the outer wall of the heat source is inclined, and the outer wall of the heat source is in contact with the inner wall of the mounting hole.

[0013] The further technical solution is that the heat source body is in the shape of an inverted cone.

[0014] A further technical solution is that the mounting hole is in the shape of an inverted cone.

[0015] A further technical solution is that the cone angle of the mounting hole is equal to the cone angle of the heat source body.

[0016] A further technical solution is that the cone angle of the mounting hole is smaller than the cone angle of the heat source body.

[0017] The advantages of this invention compared to the prior art are as follows: By placing the heat source inside the heated component and designing the contact surface to be inclined, this invention can enhance the contact area between the heat source and the heated component, thereby improving thermal efficiency. The inclined surface design not only optimizes heat conduction but also ensures stable contact during heating, preventing heat loss. At the same time, the inclined contact surface makes it easier to separate the heat source from the heated component, facilitating disassembly and maintenance. Overall, this design achieves a balance between efficient heating and convenient disassembly and assembly.

[0018] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 A schematic diagram of a heating structure provided in an embodiment of this utility model. Figure 1 ;

[0021] Figure 2 A schematic diagram of a heating structure provided in an embodiment of this utility model. Figure 2 ;

[0022] Explanation of the markings in the image:

[0023] 10. Heat source; 20. Heated part; 21. Mounting hole; 30. Contact surface. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0025] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0026] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0027] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0028] In the heating systems of semiconductor equipment, cylindrical resistance heat sources are often used to provide centralized heating, and their close contact with the heated components can improve heat transfer efficiency. However, this tight fit can lead to difficulties in disassembly and assembly, especially during regular maintenance or replacement, as excessive friction or thermal expansion can hinder disassembly and even damage components. To ensure easy disassembly, gaps must be left, but this results in insufficient thermal contact between the heat source and the components, reducing heating efficiency. Therefore, a balance must be struck between heating efficiency and ease of disassembly and assembly during the design phase.

[0029] Therefore, this utility model provides a heating structure that can maintain high thermal efficiency while being easy to disassemble and assemble.

[0030] This heating structure features an inverted conical design for both the heat source 10 and the mounting hole 21, resulting in an inclined contact surface 30 between the heat source 10 and the heated component 20. This ensures close contact between the heat source 10 and the heated component 20, improving heat transfer efficiency. Furthermore, the inverted conical design allows the heat source 10 to be stably placed within the mounting hole 21, effectively transferring heat through the contact surface 30. Simultaneously, the conical structure facilitates assembly and disassembly, and the contact surface 30 between the mounting hole 21 and the heat source 10 ensures stable installation, simplifying maintenance and replacement, extending the service life of the heat source 10, and reducing energy loss.

[0031] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0032] Please see Figure 1 and Figure 2 A heating structure includes a heat source 10 and a heated element 20, wherein the heat source 10 is placed inside the heated element 20, and the contact surface 30 between the heat source 10 and the heated element 20 is inclined.

[0033] In this embodiment, the heat source 10 is completely placed inside the hole of the heated component 20. The contact surface 30 between the two is inclined, meaning that both contact surfaces 30 are small-angle slopes. Due to the slope design, a seamless contact can be formed between the heat source 10 and the heated component 20, maximizing the actual contact area 30 and improving heat conduction efficiency. Through this close fit, heat can be transferred more effectively from the heat source 10 to the heated component 20, reducing energy loss and improving the overall heating efficiency.

[0034] In one embodiment, please refer to Figure 1 and Figure 2 The contact surface 30 between the heat source 10 and the heated component 20 is inclined along the direction close to the bottom of the heated component 20.

[0035] In this embodiment, when viewed from the top to the bottom of the heated element 20, the contact line between the heat source 10 and the heated element 20 gradually slopes downward.

[0036] This design not only increases the actual contact area between the two, but also allows heat to be distributed more evenly across the entire heated component 20, thereby improving the overall heating efficiency.

[0037] From an installation perspective, the contact surface 30 of the heat source 10 gradually slopes towards the bottom of the heated component 20. Viewed from above, the contact edge of the heat source 10 is not parallel to the opening end of the heated component 20, but rather forms a gradual ramp effect. This arrangement increases the effective contact area 30 between the heat source 10 and the heated component 20, thereby improving heat transfer efficiency.

[0038] Due to the special inclined design of the contact surface 30, heat energy can be transferred more directly and efficiently from the heat source 10 to the heated component 20, reducing energy loss. The inclined contact surface 30 helps to distribute heat evenly, avoids local overheating, extends the service life of the equipment, and improves working efficiency.

[0039] By subjecting the contact surface 30 between the heat source 10 and the heated component 20 to a special tilting treatment, not only is the heat conduction efficiency enhanced, but the stability and heating uniformity of the system are also improved.

[0040] In one embodiment, please refer to Figure 1 and Figure 2 The aforementioned heated component 20 is provided with a mounting hole 21, and the heat source 10 is placed inside the mounting hole 21.

[0041] In one embodiment, please refer to Figure 1 and Figure 2 The inner wall of the aforementioned mounting hole 21 is inclined.

[0042] The inner wall of the mounting hole 21 is inclined. This inclined design not only helps to guide the heat source 10 smoothly into the mounting hole 21, but also increases the effective contact area 30 between the heat source 10 and the heated component 20, thereby improving the heat transfer efficiency.

[0043] In one embodiment, please refer to Figure 1 and Figure 2 The aforementioned heat source 10 contacts the inner wall of the mounting hole 21, forming a contact surface 30.

[0044] In one embodiment, please refer to Figure 1 and Figure 2 The outer wall of the heat source 10 is inclined and contacts the inner wall of the mounting hole 21.

[0045] Figure 1 The gap between the heat source 10 and the mounting hole 21 is greater than zero. Figure 2 The gap between the heat source 10 and the mounting hole 21 is zero. During installation, the heat source 10 is installed from the direction closest to the bottom of the heated component 20.

[0046] The outer wall of the aforementioned heat source 10 is also inclined accordingly to ensure a tight fit with the inner wall of the mounting hole 21. This design allows the heat source 10 to naturally adapt to the shape of the mounting hole 21 during installation, reducing assembly difficulty while ensuring close contact between the two.

[0047] The heat source 10 is placed inside the mounting hole 21, and its outer wall contacts the inner wall of the mounting hole 21 to form a contact surface 30. This contact surface 30 is the key part for the entire system to achieve efficient heat conduction.

[0048] With the precisely designed inclined contact surface 30, the heat source 10 can evenly diffuse heat in multiple directions, avoiding local overheating and improving the stability and reliability of the system.

[0049] In one embodiment, please refer to Figure 1 and Figure 2 The aforementioned heat source 10 is in the shape of an inverted cone.

[0050] In one embodiment, please refer to Figure 1 and Figure 2 The aforementioned mounting hole 21 is in the shape of an inverted cone.

[0051] In this embodiment, the inverted conical heat source 10 design facilitates close contact with the heated component 20, while also enabling precise alignment and installation. Its gradually tapering shape allows for self-guidance when inserted into the mounting hole 21, ensuring accurate positioning.

[0052] Correspondingly, the mounting hole 21 also adopts an inverted conical design, which ensures that the heat source 10 can be firmly fixed inside after installation, and maximizes the contact area 30 by matching the shapes of the two, thereby improving the heat conduction efficiency.

[0053] In one embodiment, please refer to Figure 1 and Figure 2 The cone angle of the mounting hole 21 is equal to the cone angle of the heat source body 10.

[0054] In this embodiment, when the cone angles of the mounting hole 21 and the heat source 10 are the same, the complete fit between the heat source 10 and the mounting hole 21 can be guaranteed to the greatest extent, forming a uniformly distributed contact surface 30. This not only facilitates effective heat transfer but also reduces local overheating caused by poor contact.

[0055] Using the same cone angle simplifies the precision control requirements in the production and assembly process, reduces manufacturing costs, and improves production efficiency.

[0056] In one embodiment, please refer to Figure 1and Figure 2 The cone angle of the mounting hole 21 is smaller than the cone angle of the heat source body 10.

[0057] In some cases, to achieve a specific mechanical locking effect or adjust the contact pressure, a slight difference in the cone angle between the heat source 10 and the mounting hole 21 can be considered. For example, the cone angle of the heat source 10 can be slightly smaller than the cone angle of the mounting hole 21, thereby increasing the friction between the two and improving the reliability of the fixation.

[0058] In the heating structure described above, the hole in the heated component 20 is designed as a small-angle tapered hole. This design ensures that the contact area 30 with the heat source 10 gradually increases during heating, thus forming a structure that becomes increasingly compacted. During heating, the tight contact between the heat source 10 and the hole wall effectively reduces gaps, enhances contact stability, and improves heat transfer efficiency.

[0059] The heat source 10 is designed in a conical shape to ensure that its shape matches the conical hole in the heated component 20. This shape design ensures a tighter contact between the conical heat source and the conical hole, reducing the gap between the heat source 10 and the hole wall, thereby forming a zero-gap contact during operation and ensuring effective heat conduction.

[0060] It is crucial that the cone angle of the conical hole and the conical heat source are equal. By ensuring the matching of these two angles, the contact surface between the heat source 10 and the heated component 20 can distribute heat more smoothly and evenly, thereby avoiding local overheating or heat waste and ensuring efficient heat conduction.

[0061] The conical heat source and the conical bore are in stable contact with zero gap, achieving heating and heat transfer through thermal conduction. Due to the tight contact, heat can be efficiently transferred from the heat source 10 to the heated component 20, improving heating efficiency and reducing energy loss.

[0062] Because the contact area 30 between the heat source 10 and the heated component 20 is increased, the effective area for heat conduction is increased, enabling the heat source to operate with lower power consumption under the same temperature control requirements. This not only improves the utilization efficiency of the heat source but also reduces energy consumption and extends the service life of the heat source.

[0063] The conical hole has a larger mating area than the cylindrical heat source, further increasing the effective heat conduction area and improving heat transfer efficiency. The increased contact surface 30 allows the heat source 10 to make more thorough contact with the heated component 20, further enhancing the heat conduction effect.

[0064] In summary, this heating structure employs a small-angle conical hole design, combined with a conical heat source 10, ensuring a perfect angle match between the conical mounting hole 21 and the conical heat source 10. When the conical heat source 10 is mounted on the heated component 20, it forms a increasingly tight structure, ensuring a more stable contact between the conical heat source 10 and the heated component 20, thereby achieving efficient heating. Through this structure, zero-gap contact can be achieved between the conical heat source 10 and the conical mounting hole 21, allowing for efficient heat transfer via thermal conduction.

[0065] This design not only improves the utilization efficiency of the heat source, but also reduces the output power consumption of the heat source while meeting the same temperature control requirements, thereby extending the service life of the heat source and reducing energy loss. Simultaneously, because the contact area of ​​the conical mounting hole 21 is larger than that of the cylindrical heat source, this design increases the effective area for heat conduction, further improving heat transfer efficiency.

[0066] This heating structure reduces energy loss by optimizing the shape design of the heat source 10 and the heated component 20, and ensures the stability and long-term use of the heat source 10 while improving thermal efficiency.

[0067] In other embodiments, a special coating, such as a ceramic coating or a thermally conductive coating, is applied to the contact surface 30 between the heat source 10 and the mounting hole 21. These coatings enhance the thermal conductivity of the contact surface 30 and provide a degree of slippage, making assembly and disassembly smoother. The coatings also effectively reduce wear and improve the durability of the component.

[0068] In other embodiments, a segmented inclined design can be considered for certain applications. That is, the interior of the mounting hole 21 and the outer wall of the heat source 10 are not inclined at a single angle, but are divided into several regions with different angles. This allows for adjustment of the contact pressure in different regions according to actual needs, achieving better heat conduction efficiency.

[0069] In other embodiments, the heat source 10 is designed as a detachable, segmented structure. For example, it can be designed as multiple modular heat sources 10, each module connected to the mounting hole 21 via a simple mating method. Each module can be disassembled individually, and only the corresponding module can be removed when needed, without disassembling the entire heat source 10. This design maintains high thermal efficiency while facilitating maintenance and replacement of components.

[0070] In other embodiments, the heat source and the heated component 20 can be connected by an adjustable, snap-fit, or magnetic structure, so that the heating structure can be firmly connected and easily disassembled. In other words, the connection between the heat source 10 and the heated component 20 is both secure and convenient.

[0071] The heating structure described above places the heat source 10 inside the heated component 20 and designs the contact surface 30 to be inclined. This not only increases the contact area 30 between the heat source 10 and the heated component 20, thereby improving thermal efficiency, but also optimizes heat conduction and ensures stable contact during heating, preventing heat loss. In addition, the inclined contact surface 30 makes it easier for the heat source 10 to separate from the heated component 20, facilitating disassembly and maintenance. Overall, this design achieves a balance between efficient heating and convenient disassembly and assembly.

[0072] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A heating structure, characterized in that, include: A heat source and a heated component are provided. The heat source is placed inside the heated component, and the contact surface between the heat source and the heated component is inclined. The heated component has a mounting hole, and the heat source is placed inside the mounting hole. The contact surface between the heat source and the heated component is inclined along the direction close to the bottom of the heated component.

2. The heating structure according to claim 1, characterized in that, The inner wall of the mounting hole is inclined.

3. The heating structure according to claim 2, characterized in that, The heat source body contacts the inner wall of the mounting hole to form the contact surface.

4. A heating structure according to claim 3, characterized in that, The outer wall of the heat source is inclined and contacts the inner wall of the mounting hole.

5. A heating structure according to claim 1, characterized in that, The heat source is in the shape of an inverted cone.

6. A heating structure according to claim 5, characterized in that, The mounting hole is in the shape of an inverted cone.

7. A heating structure according to claim 6, characterized in that, The cone angle of the mounting hole is equal to the cone angle of the heat source.

8. A heating structure according to claim 6, characterized in that, The cone angle of the mounting hole is smaller than the cone angle of the heat source.

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