Quick-release semiconductor tank cleaning box assembly

Abstract

The utility model discloses a quick detachable semiconductor tank type cleaning box assembly relates to semiconductor production technical field, a quick detachable semiconductor tank type cleaning box assembly includes cleaning device, and the both sides of cleaning device are all seted up and are docked with the slot, the docked with the slot is provided with four groups, and two two symmetrical settings are in the both sides of cleaning device, be provided with cleaning box in the cleaning device, the outside of cleaning box is provided with quick installation device, quick installation device is provided with four groups, and with four groups docked with the slot butt joint, be provided with guide groove in the cleaning box, be provided with detachable filter baffle subassembly in the guide groove, and the water inlet is provided with the cleaning device front end, and the water outlet is seted up to the cleaning device lower extreme, and the support frame is seted up to the cleaning device lower extreme, and the scheme provides solves the inconvenient disassembly of cleaning box, and the problem that cleaning efficiency is low.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a quick-release semiconductor tank cleaning box assembly. Background Technology

[0002] Semiconductors are materials that fall between conductors and insulators, and their electrical conductivity varies with external conditions such as temperature and doping. Common semiconductor materials include silicon (Si), germanium (Ge), and gallium arsenide (GaAs), with silicon being the most widely used semiconductor material due to its excellent performance and cost-effectiveness.

[0003] A semiconductor cleaning device, as disclosed in publication number CN220456361U, includes a cleaning tank and a storage tank. A support frame is provided between the top of the storage tank and the cleaning tank. A liquid outlet pipe with a valve is provided at the bottom of the storage tank. A cleaning trough is provided at the top of the cleaning tank, and a cleaning frame with a drain hole is provided on the cleaning frame. An adjustment trough is provided inside the cleaning tank, and two connecting pipes are provided at the bottom of the adjustment trough. A drain pipe is provided at the bottom of the cleaning tank. This structure can efficiently rinse away residual chemical agents, particles, metals, and other impurities on the surface of semiconductor workpieces, and can filter the cleaning solution to facilitate the removal of impurities in the cleaning solution, thereby facilitating the recycling and treatment of the cleaning solution.

[0004] The aforementioned device has a difficult-to-disassemble cleaning tank during use and low cleaning efficiency; therefore, we propose a quick-release semiconductor tank cleaning tank assembly to solve the problems mentioned above. Utility Model Content

[0005] The purpose of this invention is to provide a quick-release semiconductor tank cleaning box assembly to solve the problems mentioned in the background art, such as the inconvenience of disassembling existing cleaning boxes and the low cleaning efficiency.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a quick-release semiconductor tank cleaning box assembly, including a cleaning device, with docking grooves on both the left and right sides of the cleaning device, four sets of docking grooves arranged symmetrically in pairs on the left and right sides of the cleaning device, a cleaning box inside the cleaning device, a quick-installation device outside the cleaning box, four sets of quick-installation devices connected to the four sets of docking grooves, a guide groove inside the cleaning box, and a detachable filter baffle assembly inside the guide groove.

[0007] Preferably, the cleaning device has a water inlet at the front end, a water outlet at the lower end, and a support frame at the lower end.

[0008] Preferably, the detachable filter baffle assembly includes a filter baffle and guide blocks. Guide blocks are provided on both sides of the filter baffle, and the filter baffle is guided and connected to the guide groove through the guide blocks on both sides.

[0009] Preferably, the quick installation device includes a fixing component, a first limiting groove, a second limiting groove, a limiting device, and a docking block. The lower end of the docking groove is provided with a second limiting groove, the upper end of the docking groove is provided with a docking block, the docking block is provided with a first limiting groove, the docking block is provided with a fixing component, and the upper end of the first limiting groove is provided with a limiting device.

[0010] Preferably, the limiting device includes a supporting top plate and a supporting spring assembly. The supporting spring assembly is disposed at the upper end of the first limiting groove, and the supporting top plate is disposed at the upper end of the supporting spring assembly. The supporting spring assembly includes six sets of supporting springs and six sets of damping rods, and all six sets of damping rods are disposed within the six sets of supporting springs.

[0011] Preferably, the fixing component includes a rotating handle, a first limiting plate, a connecting rod, and a second limiting plate. The rotating handle is provided at the upper end of the first limiting plate, the connecting rod is provided at the lower end of the first limiting plate, and the second limiting plate is provided at the lower end of the connecting rod.

[0012] Preferably, the cleaning box is provided with a second handle on both the left and right sides, and the filter baffle is provided with a first handle on the upper part.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] (1) This utility model provides quick installation devices on the left and right sides of the cleaning box. By inserting the fixing piece into the docking block through the first limiting groove, and then rotating the rotating handle, the two sets of limiting plates at the lower end of the rotating handle are rotated. With the limiting device set in the first limiting groove, the fixing piece is pushed upward into the slot, thereby quickly achieving the effect of fixed installation and solving the problem of the cleaning box being inconvenient to disassemble.

[0015] ( ) By installing a detachable filter baffle assembly inside the cleaning tank, and by setting multiple sets of guide grooves inside the cleaning tank, in conjunction with the guide blocks set on both sides of the filter baffle, different amounts of cleaning can be achieved, and different sizes of semiconductors can be cleaned, thus solving the problem of low cleaning efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a front view of the present invention;

[0018] Figure 3This is an unfolded view of the cleaning box of this utility model;

[0019] Figure 4 This is an enlarged cross-sectional view of section A of this utility model;

[0020] In the diagram: 1. Cleaning device; 2. Quick installation device; 21. Rotating handle; 22. First limiting plate; 23. Connecting rod; 24. Second limiting plate; 25. First limiting groove; 26. Second limiting groove; 27. Limiting device; 271. Supporting top plate; 272. Supporting spring assembly; 2721. Supporting spring; 2722. Damping rod; 28. Connecting block; 3. Connecting groove; 4. Cleaning tank; 5. Water inlet; 6. Water outlet; 7. Support frame; 8. First handle; 9. Second handle; 10. Guide groove; 11. Detachable filter baffle assembly; 111. Filter baffle; 112. Guide block. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figure 1-4 This utility model provides an embodiment of a quick-release semiconductor tank cleaning box assembly, including a cleaning device 1. The cleaning device 1 has four sets of docking grooves 3 on its left and right sides, symmetrically arranged in pairs on both sides. A cleaning box 4 is installed inside the cleaning device 1. Four quick-installation devices 2 are installed on the outside of the cleaning box 4, and these devices connect to the four sets of docking grooves 3. A guide groove 10 is installed inside the cleaning box 4, and a detachable filter baffle assembly 11 is installed within the guide groove 10. By using the quick-installation devices 2 on the left and right sides of the cleaning box 4, and by using a fixing member through a first... The limiting groove 25 is inserted into the docking block 28. Then, by rotating the rotating handle 21, the two sets of limiting plates at the lower end of the rotating handle 21 are rotated. With the help of the limiting device 27 set in the first limiting groove 25, the fixing part is pushed upward into the slot, thereby quickly achieving the effect of fixed installation. This solves the problem that the cleaning box 4 is inconvenient to disassemble. By setting a detachable filter baffle assembly 11 in the cleaning box 4 and setting multiple sets of guide grooves 10 in the cleaning box 4, and with the help of the guide blocks 112 set on both sides of the filter baffle 111, different amounts of cleaning can be achieved, and different sizes of semiconductors can be cleaned, thereby solving the problem of low cleaning efficiency.

[0023] Please see Figure 2 The cleaning device 1 has an inlet 5 at the front end and an outlet 6 at the lower end. The cleaning device 1 also has a support frame 7 at the lower end, which facilitates the replacement of the cleaning fluid and supports the left and right sides of the cleaning device 1.

[0024] Please see Figure 3 The detachable filter baffle assembly 11 includes a filter baffle 111 and guide blocks 112. Guide blocks 112 are provided on both sides of the filter baffle 111. The filter baffle 111 is guided and connected to the guide groove 10 through the guide blocks 112 on both sides. By providing the detachable filter baffle assembly 11 in the cleaning tank 4 and by providing multiple sets of guide grooves 10 in the cleaning tank 4, and in conjunction with the guide blocks 112 provided on both sides of the filter baffle 111, different amounts of cleaning can be achieved, and the cleaning of semiconductors of different sizes can be achieved, thereby solving the problem of low cleaning efficiency.

[0025] Please see Figure 4 The quick installation device 2 includes a fixing component, a first limiting groove 25, a second limiting groove 26, a limiting device 27, and a docking block 28. The lower end of the docking groove 3 is provided with the second limiting groove 26, and the upper end of the docking groove 3 is provided with the docking block 28. The docking block 28 is provided with the first limiting groove 25, and the fixing component is provided inside the docking block 28. The upper end of the first limiting groove 25 is provided with the limiting device 27.

[0026] Please see Figure 4 The limiting device 27 includes a supporting top plate 271 and a supporting spring group 272. The supporting spring group 272 is disposed at the upper end of the first limiting groove 25, and the supporting top plate 271 is disposed at the upper end of the supporting spring group 272. The supporting spring group 272 includes six sets of supporting springs 2721 and six sets of damping rods 2722. All six sets of damping rods 2722 are disposed within the six sets of supporting springs 2721.

[0027] Please see Figure 4 The fixing components include a rotating handle 21, a first limiting plate 22, a connecting rod 23, and a second limiting plate 24. The rotating handle 21 is located at the upper end of the first limiting plate 22, the connecting rod 23 is located at the lower end of the first limiting plate 22, and the second limiting plate 24 is located at the lower end of the connecting rod 23. By setting quick installation devices 2 on the left and right sides of the cleaning tank 4, the fixing components are inserted into the docking block 28 through the first limiting groove 25. Then, by rotating the rotating handle 21, the two sets of limiting plates at the lower end of the rotating handle 21 are rotated. In conjunction with the limiting device 27 set in the first limiting groove 25, the fixing components are pushed upward into the slot, thereby quickly achieving the effect of fixed installation and solving the problem that the cleaning tank 4 is inconvenient to disassemble.

[0028] Please see Figure 1 The cleaning box 4 has a second handle 9 on both the left and right sides, and the filter baffle 111 has a first handle 8 on the top, which facilitates the disassembly of the cleaning box 4 and the filter baffle 111.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A quick release semiconductor slot cleaning tank assembly comprising a cleaning device (1), characterized in that: The cleaning device (1) has docking slots (3) on both the left and right sides. There are four sets of docking slots (3), which are symmetrically arranged on both the left and right sides of the cleaning device (1). The cleaning device (1) has a cleaning box (4) inside. There are quick installation devices (2) on the outside of the cleaning box (4). There are four sets of quick installation devices (2), which are connected to the four sets of docking slots (3). There are guide grooves (10) inside the cleaning box (4). There are detachable filter baffle assemblies (11) inside the guide grooves (10).

2. A quick release semiconductor tank cleaning assembly according to claim 1, wherein: The cleaning device (1) has an inlet (5) at the front end, an outlet (6) at the lower end, and a support frame (7) at the lower end.

3. A quick release semiconductor tank cleaning box assembly according to claim 2, wherein: The detachable filter baffle assembly (11) includes a filter baffle (111) and guide blocks (112). Guide blocks (112) are provided on both sides of the filter baffle (111). The filter baffle (111) is guided and connected to the guide groove (10) through the guide blocks (112) on both sides.

4. A quick release semiconductor tank cleaning assembly according to claim 3, wherein: The quick installation device (2) includes a fixing component, a first limiting groove (25), a second limiting groove (26), a limiting device (27), and a docking block (28). The lower end of the docking groove (3) is provided with a second limiting groove (26), and the upper end of the docking groove (3) is provided with a docking block (28). The docking block (28) is provided with a first limiting groove (25), and the docking block (28) is provided with a fixing component. The upper end of the first limiting groove (25) is provided with a limiting device (27).

5. A quick release semiconductor tank cleaning box assembly according to claim 4, wherein: The limiting device (27) includes a supporting top plate (271) and a supporting spring group (272). The supporting spring group (272) is located at the upper end of the first limiting groove (25). The supporting top plate (271) is located at the upper end of the supporting spring group (272). The supporting spring group (272) includes six sets of supporting springs (2721) and six sets of damping rods (2722). All six sets of damping rods (2722) are located inside the six sets of supporting springs (2721).

6. A quick release semiconductor tank cleaning box assembly according to claim 5, wherein: The fixing component includes a rotating handle (21), a first limiting plate (22), a connecting rod (23), and a second limiting plate (24). The rotating handle (21) is provided at the upper end of the first limiting plate (22), the connecting rod (23) is provided at the lower end of the first limiting plate (22), and the second limiting plate (24) is provided at the lower end of the connecting rod (23).

7. A quick release semiconductor tank cleaning box assembly according to claim 6, wherein: The cleaning box (4) has a second handle (9) on both the left and right sides, and the filter baffle (111) has a first handle (8) on the upper end.

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