Feeding and unloading equipment and processing line

Abstract

The present disclosure relates to the field of photovoltaic or semiconductor technology, in particular to a feeding and discharging equipment and a processing production line, which solves the problem that the feeding and discharging equipment can only feed and discharge and convey one kind of boat. The feeding and discharging equipment has a first wafer taking and placing station and a second wafer taking and placing station, a first boat can be taken and placed in the first wafer taking and placing station, and a second boat can be taken and placed in the second wafer taking and placing station, and the structure of the second boat is different from that of the first boat. The feeding and discharging equipment comprises a first wafer taking and placing device, a second wafer taking and placing device and a boat conveying device, the first wafer taking and placing device can take and place a wafer in the first wafer taking and placing station, the second wafer taking and placing device can take and place a wafer in the second wafer taking and placing station, and the boat conveying device can convey the first boat and the second boat, so that the feeding and discharging equipment can feed and discharge two kinds of boats by using two wafer taking and placing devices respectively, and convey the two kinds of boats by using the boat conveying device.

Description

Technical Field

[0001] This disclosure relates to the fields of photovoltaic or semiconductor technology, specifically to a loading and unloading device and a processing production line. Background Technology

[0002] In the photovoltaic or semiconductor fields, when processing products, boats are typically used to load the products, and loading and unloading equipment is used to automatically transport the boats and automatically load and unload them.

[0003] Currently, some processing equipment can perform multiple processing techniques on products, and different types of boats are typically selected to load products for different processing steps. However, the loading and unloading equipment in related technologies can usually only transport and load one type of boat, resulting in a processing device needing to be matched with multiple loading and unloading devices to automatically transport and load and unload various types of boats. Utility Model Content

[0004] In view of this, the present disclosure provides a loading and unloading device and a processing line, which solves the problem that the loading and unloading device can only load, unload, and transport one type of boat.

[0005] In a first aspect, embodiments of this disclosure provide a loading and unloading device having a first sheet picking and placing station and a second sheet picking and placing station. A first boat can be picked up and placed at the first sheet picking and placing station, where sheets are picked up and placed onto the first boat. A second boat can be picked up and placed at the second sheet picking and placing station, where sheets are picked up and placed onto the second boat. The second boat has a different structure from the first boat. The loading and unloading device includes a first sheet picking and placing device, disposed adjacent to the first sheet picking and placing station, and configured to... The first boat is positioned to pick up and place the sheet at the first pick-up and place station; the second pick-up and place device is disposed adjacent to the second pick-up and place station and is configured to pick up and place the sheet at the second pick-up and place station of the second boat; the boat conveying device is disposed adjacent to the first pick-up and place station and the second pick-up and place station of the second boat respectively and is configured to receive and convey the first boat so that the first boat can be picked up and placed at the first pick-up and place station, or to receive and convey the second boat so that the second boat can be picked up and placed at the second pick-up and place station.

[0006] In some embodiments, the first and second pick-and-place stations are spaced apart along a first horizontal direction; in the vertical direction, the second pick-and-place station is located above the first pick-and-place station; and both the first and second pick-and-place devices are disposed between the first and second pick-and-place stations.

[0007] In some embodiments, both the first and second piece pick-and-place stations extend along a second horizontal direction. The second piece pick-and-place station has a second boat receiving position and a second boat pick-and-place position. The second boat receiving position is located on a first side of the second piece pick-and-place station, and the second boat pick-and-place position is located between the first and second sides of the second piece pick-and-place station. The second horizontal direction is perpendicular to the first horizontal direction. The loading and unloading equipment further includes a first boat receiving device, disposed at the first piece pick-and-place station, configured to receive the piece loaded with material conveyed by the boat conveyor. The first boat carrying the processed sheet, or the first boat carrying the unprocessed sheet, is conveyed to the boat conveying device; the second boat receiving device is disposed at the second loading and unloading station and configured to receive the second boat carrying the processed sheet from the boat conveying device at the second boat receiving station, and to convey the second boat carrying the processed sheet along the second horizontal direction, or to convey the second boat carrying the unprocessed sheet along the second horizontal direction to the second boat receiving station, so that the boat conveying device can receive the second boat carrying the unprocessed sheet.

[0008] In some embodiments, the first boat has a plurality of first receiving spaces arranged sequentially along the second horizontal direction, the first receiving spaces being configured to receive a plurality of sheets; the second boat has a plurality of second receiving spaces arranged sequentially along the second horizontal direction, the second receiving spaces being configured to receive a plurality of sheets; wherein the first sheet pick-and-place device is movable along the second horizontal direction so that the first sheet pick-and-place device can move sequentially above each of the first receiving spaces, and remove the processed sheets from the first receiving spaces, and place the unprocessed sheets into the first receiving spaces; wherein the second boat receiving device is capable of conveying the second boat along the second horizontal direction so that each of the second receiving spaces can be sequentially conveyed to the second boat sheet pick-and-place position, so that the second sheet pick-and-place device can remove the processed sheets from the second receiving spaces located at the second boat sheet pick-and-place positions, and place the unprocessed sheets into the second receiving spaces located at the second boat sheet pick-and-place positions.

[0009] In some embodiments, the second side of the second sheet pick-and-place station is adjacent to the first sheet pick-and-place station in the first horizontal direction; wherein, the boat conveying device is disposed below the first side of the second sheet pick-and-place station and adjacent to the first sheet pick-and-place station, and is capable of moving along the first horizontal direction; the boat conveying device has a first boat conveying station, a boat receiving station, and a second boat moving station spaced apart in the first horizontal direction, the first boat conveying station being adjacent to the first sheet pick-and-place station in the second horizontal direction, and the second boat moving station being adjacent to the second boat receiving station in the first horizontal direction; wherein, when the boat conveying device receives the first boat loaded with the processed sheet at the boat receiving station, the boat conveying device moves along the first horizontal direction to the first boat conveying station and conveys the first boat loaded with the processed sheet to the first boat receiving station. Alternatively, the boat conveying device is configured to receive the first boat loaded with the unprocessed sheet material from the first boat receiving device at the first boat conveying station, and move it along the first horizontal direction to the boat receiving station; wherein, when the boat conveying device receives the second boat loaded with the processed sheet material at the boat receiving station, the boat conveying device moves along the first horizontal direction to the second boat transfer station so that the second boat loaded with the processed sheet material can be transported from the second boat transfer station to the second boat receiving station; or, the second boat receiving device conveys the second boat loaded with the unprocessed sheet material from the second side of the second sheet handling station to the second boat receiving station along the second horizontal direction so that the second boat loaded with the unprocessed sheet material can be transported from the second boat receiving station to the boat conveying device located at the second boat transfer station.

[0010] In some embodiments, the loading and unloading equipment further includes: a boat-moving device, disposed above the first side of the second sheet loading and unloading station, configured to transport the second boat loaded with the processed sheet material from the boat conveying device to the second boat receiving device, or to transport the second boat loaded with the unprocessed sheet material from the second boat receiving device to the boat conveying device.

[0011] In some embodiments, the loading and unloading equipment further includes: a sheet support device disposed at the sheet pick-and-place position of the second boat and capable of vertically lifting and lowering; the sheet support device is configured to, during vertically rising, support multiple processed sheets in the second boat and drive the multiple processed sheets to rise vertically; or, support multiple unprocessed sheets conveyed by the second sheet pick-and-place device and descend vertically to place the multiple unprocessed sheets into the second boat so that the second boat is loaded with the multiple unprocessed sheets; and a straightening device disposed opposite to the sheet support device and configured to straighten the multiple sheets supported by the sheet support device.

[0012] In some embodiments, the first sheet picking and placing device includes: a first driving component capable of moving along a second horizontal direction; and a first sheet picking component connected to the first driving component, such that the first driving component can drive the first sheet picking component to move along the second horizontal direction to above or away from the first boat, wherein the first sheet picking component is configured to pick up multiple processed sheets from the first boat or place multiple unprocessed sheets in the first boat; wherein the second sheet picking and placing device includes: a second driving component; a first linear driving component connected to the second driving component, such that the second driving component can drive the first linear driving component to move to or away from the sheet picking and placing position of the second boat; and a second sheet picking component and a third sheet picking component connected to the first linear driving component, such that the first linear driving component can drive the second sheet picking component to move to or away from the sheet picking and placing position of the second boat. The sheet-picking assembly and the third sheet-picking assembly move to or away from the sheet-picking / dispensing position of the second boat. The first linear drive assembly can drive the second and third sheet-picking assemblies to be spaced apart or moved away from each other along a third horizontal direction. The second and third sheet-picking assemblies are configured to remove the processed portion of the sheet material from the second boat or place the unprocessed portion of the sheet material in the second boat. A second linear drive assembly is installed to the first linear drive assembly and connected to the third sheet-picking assembly. The second linear drive assembly can drive the third sheet-picking assembly to move along a fourth horizontal direction, such that when the second and third sheet-picking assemblies are spaced apart and staggered, the third sheet-picking assembly moves closer to or away from the second sheet-picking assembly along the fourth horizontal direction, wherein the fourth horizontal direction is perpendicular to the third horizontal direction.

[0013] In some embodiments, the loading and unloading equipment further includes: two or more loading devices, wherein at least one loading device is disposed adjacent to the first sheet pick-and-place station and configured to feed unprocessed sheets to the first sheet pick-and-place station; at least one loading device is disposed adjacent to the second sheet pick-and-place station and configured to feed unprocessed sheets to the second sheet pick-and-place station; wherein the first sheet pick-and-place station is further configured to receive unprocessed sheets fed by the corresponding loading device, and the second sheet pick-and-place station is further configured to receive unprocessed sheets fed by the corresponding loading device; and / or, two or more unloading devices, wherein at least one unloading device is disposed adjacent to the first sheet pick-and-place station and configured to receive and transport processed sheets fed by the first sheet pick-and-place station; at least one unloading device is disposed adjacent to the second sheet pick-and-place station and configured to receive and transport processed sheets fed by the second sheet pick-and-place station; the unloading devices and the loading devices are disposed adjacent to each other in a first horizontal direction.

[0014] In some embodiments, the feeding device includes: a basket feeding mechanism configured to convey a basket loaded with the unprocessed sheet material; a basket feeding lifting mechanism disposed adjacent to the basket feeding mechanism in a second horizontal direction, configured to receive the basket loaded with the unprocessed sheet material conveyed by the basket feeding mechanism and drive the basket loaded with the unprocessed sheet material to lift; wherein the second horizontal direction is perpendicular to the first horizontal direction; and a sheet material feeding conveying mechanism disposed adjacent to the side of the basket feeding lifting mechanism away from the basket feeding mechanism, one end of the sheet material feeding conveying mechanism being located below the basket feeding lifting mechanism to facilitate the lifting of the basket loaded with the unprocessed sheet material by the basket feeding lifting mechanism. During the descent of the flower basket, the unprocessed sheet material carried by the flower basket loading lifting mechanism is received and conveyed along the second horizontal direction; the loading and receiving lifting mechanism is arranged adjacent to the side of the sheet material loading conveying mechanism away from the flower basket loading lifting mechanism, and the other end of the sheet material loading conveying mechanism is located below the loading and receiving lifting mechanism, so that during the ascent of the loading and receiving lifting mechanism, the loading and receiving lifting mechanism receives the unprocessed sheet material conveyed by the sheet material loading conveying mechanism; wherein, the first sheet picking and placing device is further configured to remove the unprocessed sheet material by the loading and receiving lifting mechanism arranged adjacent to the first sheet picking and placing station, and the second sheet picking and placing device... The device is further configured to remove the unprocessed sheet material by the loading and receiving lifting mechanism adjacent to the second sheet loading and unloading station; a loading buffer mechanism, adjacent to the sheet material loading and conveying mechanism, configured to receive and buffer the unprocessed sheet material conveyed by the sheet material loading and conveying mechanism; and / or, the unloading device includes: an unloading and receiving lifting mechanism, adjacent to the loading and receiving lifting mechanism in the first horizontal direction, configured to receive the processed sheet material conveyed by the first sheet loading and unloading device, or the processed sheet material conveyed by the second sheet loading and unloading device; a sheet material unloading conveying mechanism, adjacent to the unloading and receiving lifting mechanism in the second horizontal direction, and adjacent to the sheet material loading and conveying mechanism in the first horizontal direction. A sheet feeding conveyor is arranged adjacent to the sheet feeding and receiving lifting mechanism in a horizontal direction. One end of the sheet feeding conveyor is located below the sheet feeding and receiving lifting mechanism, so as to receive the processed sheet fed by the sheet feeding and receiving lifting mechanism during the descent of the sheet feeding and receiving lifting mechanism, and to convey the processed sheet along the second horizontal direction. A basket feeding lifting mechanism is arranged adjacent to the sheet feeding conveyor on the side away from the sheet feeding and receiving lifting mechanism, and is configured to carry an empty basket and drive the empty basket to rise and fall. The other end of the sheet feeding conveyor is located below the basket feeding lifting mechanism, so as to receive the processed sheet fed by the sheet feeding conveyor during the upward movement of the basket feeding lifting mechanism.A basket feeding mechanism, disposed adjacent to the side of the basket feeding lifting mechanism away from the sheet feeding conveying mechanism, is configured to receive and convey the basket loaded with the processed sheet material conveyed by the basket feeding lifting mechanism; a feeding buffer mechanism, disposed adjacent to the sheet feeding conveying mechanism, is configured to receive and buffer the processed sheet material conveyed by the sheet feeding conveying mechanism.

[0015] Secondly, embodiments of this disclosure provide a processing production line, comprising: the loading and unloading equipment described in the first aspect, the loading and unloading equipment being configured to pick up and place sheets onto a first boat and a second boat, and to transport the first boat and the second boat to a processing equipment, or to transport the first boat and the second boat out of the processing equipment; the processing equipment being disposed adjacent to the loading and unloading equipment, and being configured to receive the first boat transported by the loading and unloading equipment, and to perform processing on the unprocessed sheets loaded on the first boat, or to receive the second boat transported by the loading and unloading equipment, and to perform processing on the unprocessed sheets loaded on the second boat.

[0016] The loading and unloading equipment provided in this embodiment has a first sheet picking and placing station and a second sheet picking and placing station. A first boat can be picked up and placed at the first sheet picking and placing station. At the first sheet picking and placing station, the first sheet picking and placing device of the loading and unloading equipment picks up and places the sheet into the first boat. A second boat can be picked up and placed at the second sheet picking and placing station. At the second sheet picking and placing station, the second sheet picking and placing device of the loading and unloading equipment picks up and places the sheet into the second boat. The second boat has a different structure from the first boat, thereby realizing that the loading and unloading equipment uses two sheet picking and placing devices to load and unload the two types of boats respectively.

[0017] In addition, the loading and unloading equipment uses a first pick-and-place device to load and unload the first boat, and a second pick-and-place device to load and unload the second boat. This avoids the need to switch pick-and-place devices back and forth when loading and unloading the two types of boats separately, thus improving the loading and unloading efficiency of the equipment.

[0018] In addition, the loading and unloading equipment uses a boat conveyor to receive and transport the first and second boats, realizing the switching of the first and second boats using a single boat conveyor. This simplifies the structure and reduces the size of the loading and unloading equipment as much as possible, thereby minimizing the space occupied by the equipment. Attached Figure Description

[0019] Figure 1 The diagram shown is a structural schematic of a loading and unloading device, a first boat, and a second boat provided in an embodiment of this disclosure.

[0020] Figure 2 The diagram shown is a structural schematic of a loading and unloading device, a first boat, and a second boat provided in another embodiment of this disclosure.

[0021] Figure 3 As shown Figure 2 The enlarged view of the loading and unloading equipment, the first boat, and the second boat in area A.

[0022] Figure 4 The image shown is a top view of a loading and unloading device, a first boat, and a second boat provided in an embodiment of this disclosure.

[0023] Figure 5 The diagram shown is a structural schematic of a boat-moving device and a second boat provided in an embodiment of this disclosure.

[0024] Figure 6 The diagram shown is a structural schematic of the tray support device, the straightening device, and the second boat provided in an embodiment of this disclosure.

[0025] Figure 7 The diagram shown is a structural schematic of a second plate-taking and placing device provided in an embodiment of this disclosure.

[0026] Figure 8 The diagram shown is a structural schematic of a loading and unloading device, a first boat, and a second boat provided in another embodiment of this disclosure.

[0027] Figure 9 The diagram shown is a structural schematic of a feeding device and a discharging device provided in an embodiment of this disclosure.

[0028] Figure 10 The diagram shown is a schematic representation of an application scenario of a processing production line provided in an embodiment of this disclosure.

[0029] Figure label:

[0030] 1. Processing production line; 10. Loading and unloading equipment; 101. First loading / unloading station; 102. Second loading / unloading station; 1011. First side of the second loading / unloading station; 1012. Second side of the second loading / unloading station; 1021. Second boat receiving station; 1022. Second boat loading / unloading station; 2. First boat; 2001. First receiving space; 3. Second boat; 3001. Second receiving space; 100. First loading / unloading device; 11 0. First drive assembly; 120. First sheet picking assembly; 200. Second sheet picking and placing device; 210. Second drive assembly; 220. First linear drive assembly; 230. Second sheet picking assembly; 240. Second linear drive assembly; 250. Third sheet picking assembly; 300. Boat conveying device; 301. Boat receiving station; 302. First boat conveying station; 303. Second boat moving station; 310. First conveying mechanism; 320. Second conveying mechanism; 400. First boat receiving device; 500. Second boat receiving device; 600. Boat moving device; 610. Linear drive mechanism; 620. Lifting mechanism; 630. Boat grabbing mechanism; 700. Sheet support device; 710. Vertical drive mechanism; 720. Tooth support mechanism; 800. Leveling device; 900. Feeding device; 910. Basket feeding mechanism; 920. Basket feeding lifting mechanism; 930. Sheet feeding conveyor Structure; 940, feeding and sheet lifting mechanism; 950, feeding buffer mechanism; 1000, unloading device; 1100, unloading and sheet lifting mechanism; 1200, sheet unloading conveying mechanism; 1300, basket unloading lifting mechanism; 1400, basket unloading mechanism; 1500, unloading buffer mechanism; X1, first horizontal direction; X2, second horizontal direction; X3, third horizontal direction; X4, fourth horizontal direction; 20, processing equipment. Detailed Implementation

[0031] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0032] Figure 1 The diagram shown is a structural schematic of a loading and unloading device, a first boat, and a second boat provided in an embodiment of this disclosure. Figure 1As shown, the loading and unloading equipment 10 has a first sheet loading / unloading station 101 and a second sheet loading / unloading station 102. A first boat 2 can be loaded / unloaded at the first sheet loading / unloading station 101, where sheets are loaded / unloaded. A second boat 3 can be loaded / unloaded at the second sheet loading / unloading station 102, where sheets are loaded / unloaded. The second boat 3 has a different structure from the first boat 2. For example, the second boat 3 and the first boat 2 may be of different types or different specifications.

[0033] The loading and unloading equipment 10 includes a first sheet picking and placing device 100, a second sheet picking and placing device 200, and a boat conveying device 300. The first sheet picking and placing device 100 is arranged adjacent to the first sheet picking and placing station 101 and is configured to pick up and place sheets onto the first boat 2 at the first sheet picking and placing station 101. The second sheet picking and placing device 200 is arranged adjacent to the second sheet picking and placing station 102 and is configured to pick up and place sheets onto the second boat 3 at the second sheet picking and placing station 102. The second sheet picking and placing device 200 has a different structure from the first sheet picking and placing device 100. For example, the second sheet picking and placing device 200 and the first sheet picking and placing device 100 may be of different types or different specifications. The boat conveying device 300 is arranged adjacent to the first piece pick-and-place station 101 and the second piece pick-and-place station 102 respectively, and is configured to receive and convey the first boat 2 so that the first boat 2 can be picked up and placed at the first piece pick-and-place station 101, or to receive and convey the second boat 3 so that the second boat 3 can be picked up and placed at the second piece pick-and-place station 102.

[0034] The loading and unloading equipment 10 provided in this embodiment has a first sheet picking and placing station 101 and a second sheet picking and placing station 102. A first boat 2 can be picked up and placed at the first sheet picking and placing station 101. At the first sheet picking and placing station 101, the first sheet picking and placing device 100 of the loading and unloading equipment 10 picks up and places the sheet into the first boat 2. A second boat 3 can be picked up and placed at the second sheet picking and placing station 102. At the second sheet picking and placing station 102, the second sheet picking and placing device 200 of the loading and unloading equipment 10 picks up and places the sheet into the second boat 3. The second boat 3 has a different structure from the first boat 2, thereby realizing that the loading and unloading equipment 10 uses two sheet picking and placing devices to load and unload the two boats respectively.

[0035] In addition, the loading and unloading equipment 10 uses the first pick-and-place device 100 to load and unload the first boat 2, and uses the second pick-and-place device 200 to load and unload the second boat 3, which avoids the situation where the loading and unloading equipment 10 switches back and forth between the pick-and-place devices when loading and unloading the two types of boats separately, thus improving the loading and unloading efficiency of the loading and unloading equipment 10.

[0036] In addition, the loading and unloading equipment 10 uses the boat conveying device 300 to receive and transport the first boat 2 and the second boat 3, realizing the switching of transporting the first boat 2 and the second boat 3 using a single boat conveying device 300. This simplifies the structure of the loading and unloading equipment 10 as much as possible and reduces its size, thereby minimizing the space occupied by the loading and unloading equipment 10.

[0037] For example, the first film pick-up and drop station 101 and the second film pick-up and drop station 102 are located on the same horizontal plane, or the first film pick-up and drop station 101 and the second film pick-up and drop station 102 are not located on the same horizontal plane, that is, the first film pick-up and drop station 101 and the second film pick-up and drop station 102 have a height difference in the vertical direction.

[0038] For example, the first film pick-up and drop station 101 and the second film pick-up and drop station 102 are arranged at intervals along the first horizontal direction X1. The first film pick-and-place device 100 is disposed on the side of the first film pick-and-place station 101 away from the second film pick-and-place station 102, and the second film pick-and-place device 200 is disposed on the side of the second film pick-and-place station 102 away from the first film pick-and-place station 101; or, the first film pick-and-place device 100 is disposed on the side of the first film pick-and-place station 101 away from the second film pick-and-place station 102, and the second film pick-and-place device 200 is disposed on the side of the second film pick-and-place station 102 close to the first film pick-and-place station 101; or, the first film pick-and-place device 100 is disposed on the side of the first film pick-and-place station 101 close to the second film pick-and-place station 102, and the second film pick-and-place device 200 is disposed on the side of the second film pick-and-place station 102 away from the first film pick-and-place station 101; or, both the first film pick-and-place device 100 and the second film pick-and-place device 200 are disposed between the first film pick-and-place station 101 and the second film pick-and-place station 102.

[0039] For example, the first film pick-and-place station 101 and the second film pick-and-place station 102 are arranged sequentially along the second horizontal direction X2. The first film pick-and-place device 100 and the second film pick-and-place device 200 are arranged on the same side of the two film pick-and-place stations, or the first film pick-and-place device 100 and the second film pick-and-place device 200 are respectively arranged on different sides of the two film pick-and-place stations.

[0040] The positions of the first film pick-up and drop station 101, the second film pick-up and drop station 102, the first film pick-up and drop device 100, and the second film pick-up and drop device 200 can be set according to actual needs.

[0041] Exemplarily, the boat conveying device 300 includes a driving structure and a gripping structure. The gripping structure is connected to the driving structure so that the driving structure can drive the gripping structure to move, allowing the gripping structure to approach the first boat 2, grip the first boat 2, and place the first boat 2 at the first pick-and-place station 101; or, allowing the gripping structure to approach the second boat 3, grip the second boat 3, and place the second boat 3 at the second pick-and-place station 102. Exemplarily, the driving structure can be a robotic arm, a linear module, or other structure with a driving function, and the gripping structure can be a gripper, a suction cup, or other structure with a gripping function. Exemplarily, the boat conveying device 300 can also use other conveying structures and conveying methods to convey the first boat 2 and the second boat 3.

[0042] In some embodiments, such as Figure 2 and Figure 4 As shown, the first film pick-and-place station 101 and the second film pick-and-place station 102 are spaced apart along the first horizontal direction X1, and in the vertical direction, the second film pick-and-place station 102 is located above the first film pick-and-place station 101. The first film pick-and-place device 100 and the second film pick-and-place device 200 are both disposed between the first film pick-and-place station 101 and the second film pick-and-place station 102.

[0043] The above configuration can make reasonable use of the space between the first pick-and-place station 101 and the second pick-and-place station 102, avoiding the first pick-and-place device 100 and the second pick-and-place device 200 from occupying additional space, further reducing the size of the loading and unloading equipment 10 in the first horizontal direction X1, thereby further reducing the space occupied by the loading and unloading equipment 10.

[0044] In some embodiments, such as Figures 2 to 5As shown, both the first and second sheet handling stations 101 and 102 extend along a second horizontal direction X2. The second sheet handling station 102 has a second boat receiving position 1021 and a second boat sheet handling position 1022. The second boat receiving position 1021 is located on the first side 1011 of the second sheet handling station, and the second boat sheet handling position 1022 is located between the first side 1011 and the second side 1012 of the second sheet handling station. The second horizontal direction X2 is perpendicular to the first horizontal direction X1. The loading / unloading equipment 10 also includes a first boat receiving device 400 and a second boat receiving device 500. The first boat receiving device 400 is disposed at the first sheet handling station 101 and is configured to receive a first boat 2 loaded with processed sheets conveyed by the boat conveyor 300, or to convey a first boat 2 loaded with unprocessed sheets to the boat conveyor 300. The second boat receiving device 500 is disposed at the second sheet handling station 102 and is configured to receive the second boat 3 loaded with processed sheets conveyed by the boat conveying device 300 at the second boat receiving station 1021, and convey the second boat 3 loaded with processed sheets along the second horizontal direction X2, or convey the second boat 3 loaded with unprocessed sheets along the second horizontal direction X2 to the second boat receiving station 1021, so that the boat conveying device 300 can receive the second boat 3 loaded with unprocessed sheets.

[0045] The first boat receiving device 400 is used to automatically receive the first boat 2, and the second boat receiving device 500 is used to automatically receive and transport the second boat 3, which further improves the automation level of the loading and unloading equipment 10.

[0046] In some embodiments, such as Figures 2 to 5 As shown, the first boat 2 has a plurality of first accommodating spaces 2001 arranged sequentially along the second horizontal direction X2, and the first accommodating spaces 2001 are configured to accommodate multiple sheets. The second boat 3 has a plurality of second accommodating spaces 3001 arranged sequentially along the second horizontal direction X2, and the second accommodating spaces 3001 are configured to accommodate multiple sheets.

[0047] The first sheet pick-and-place device 100 can move along the second horizontal direction X2, so that the first sheet pick-and-place device 100 can move sequentially above each of the first receiving spaces 2001, and take out multiple processed sheets from the first receiving spaces 2001, and place multiple unprocessed sheets into the first receiving spaces 2001. The second boat receiving device 500 can transport the second boat 3 along the second horizontal direction X2, so that each of the second receiving spaces 3001 can be sequentially transported to the second boat sheet pick-and-place position 1022, so that the second sheet pick-and-place device 200 can take out multiple processed sheets from the second receiving spaces 3001 located at the second boat sheet pick-and-place position 1022, and place multiple unprocessed sheets into the second receiving spaces 3001 located at the second boat sheet pick-and-place position 1022. The above sheet pick-and-place method is simple and reliable.

[0048] Exemplarily, the first boat receiving device 400 includes a first supporting mechanism and a first driving mechanism. The first supporting mechanism is configured to support the first boat 2, and the first driving mechanism is configured to apply a driving force along a second horizontal direction X2 to the first boat 2 to drive the first boat 2 to slide along the second horizontal direction X2 on the first supporting mechanism. Exemplarily, the first driving mechanism may include a motor, a synchronous belt, and rollers, utilizing the friction between the rollers and the first boat 2 when the rollers rotate to drive the first boat 2 to move along the second horizontal direction X2. Exemplarily, the first driving mechanism may also include a linear module and a boat-pushing assembly, the boat-pushing assembly being connected to the linear module so that the linear module can drive the boat-pushing assembly to move along the second horizontal direction X2, and the boat-pushing assembly can abut against and push the first boat 2 to move along the second horizontal direction X2. Exemplarily, the first driving mechanism may also include other structures capable of providing a driving force along the second horizontal direction X2.

[0049] Exemplarily, the second boat receiving device 500 includes a second carrying mechanism and a second driving mechanism. The second carrying mechanism is configured to carry the second boat 3. The second carrying mechanism is connected to the second driving mechanism, enabling the second driving mechanism to drive the second carrying mechanism to move along a second horizontal direction X2, thereby enabling the second carrying mechanism to drive the second boat 3 to move along the second horizontal direction X2. Exemplarily, the second driving mechanism may include structures such as a motor, a conveyor belt, etc., or structures such as a motor, gears, racks, etc., and may also include other structures capable of providing driving force along the second horizontal direction X2.

[0050] For example, the first boat 2 includes a plurality of boat blades, which are arranged sequentially at intervals along a first horizontal direction X1 and are connected in sequence. Each boat blade extends along a second horizontal direction X2 and has a plurality of sheet placement areas arranged at intervals along the second horizontal direction X2, which are configured to accommodate sheets. The plurality of sheet placement areas arranged sequentially in the first horizontal direction X1 constitute a first receiving space 2001.

[0051] For example, the second boat 3 has a plurality of grooved bars, which are arranged in two rows and multiple columns at intervals along a second horizontal direction X2 and a vertical direction. A second receiving space 3001 is formed between each two adjacent rows and two columns of grooved bars. The grooved bars have receiving grooves configured to receive the edges of the sheet.

[0052] In some embodiments, such as Figure 2 and Figure 4As shown, the second side 1012 of the second piece pick-and-place station is adjacent to the first piece pick-and-place station 101 in the first horizontal direction X1. The boat conveying device 300 is disposed below the first side 1011 of the second piece pick-and-place station and adjacent to the first piece pick-and-place station 101, and is capable of moving along the first horizontal direction X1. The boat conveying device 300 has a boat receiving station 301, a first boat conveying station 302, and a second boat moving station 303, which are spaced apart in the first horizontal direction X1. The first boat conveying station 302 is adjacent to the first piece pick-and-place station 101 in the second horizontal direction X2, and the second boat moving station 303 is adjacent to the second boat receiving station 1021 in the first horizontal direction X1.

[0053] When the boat conveyor 300 receives the first boat 2 loaded with processed sheets at the boat receiving station 301, the boat conveyor 300 moves along the first horizontal direction X1 to the first boat conveying station 302 and conveys the first boat 2 loaded with processed sheets to the first boat receiving device 400. The boat conveyor 300 is also configured to receive the first boat 2 loaded with unprocessed sheets conveyed by the first boat receiving device 400 at the first boat conveying station 302 and move along the first horizontal direction X1 to the boat receiving station 301.

[0054] When the boat conveying device 300 receives the second boat 3 loaded with processed sheets at the boat receiving station 301, the boat conveying device 300 moves along the first horizontal direction X1 to the second boat transfer station 303, so that the second boat 3 loaded with processed sheets can be transferred from the second boat transfer station 303 to the second boat receiving station 1021. The second boat receiving device 500 conveys the second boat 3 loaded with unprocessed sheets from the second side 1012 of the second sheet pick-and-place station to the second boat receiving station 1021 along the second horizontal direction X2, so that the second boat 3 loaded with unprocessed sheets can be transferred from the second boat receiving station 1021 to the boat conveying device 300 located at the second boat transfer station 303.

[0055] The aforementioned boat conveying device 300 can alternately receive and transport the first boat 2 and the second boat 3. Furthermore, the boat conveying device 300 has a simple structure and a simple and reliable conveying method. In addition, the boat conveying device 300 is located below the first side 1011 of the second loading / unloading station, making full use of the space below the first side 1011 of the second loading / unloading station and avoiding the need to increase the size and space occupied by the additional loading / unloading equipment 10.

[0056] Exemplarily, the boat conveying device 300 includes a first conveying mechanism 310 and a second conveying mechanism 320. The first conveying mechanism 310 extends along a second horizontal direction X2 and is configured to carry a first boat 2 and convey the first boat 2 along the second horizontal direction X2, or carry a second boat 3. The second conveying mechanism 320 extends along a first horizontal direction X1, and the first conveying mechanism 310 is connected to the second conveying mechanism 320 so that the second conveying mechanism 320 can convey the first conveying mechanism 310 along the first horizontal direction X1, so that the first conveying mechanism 310 can move to the boat receiving station 301, the first boat conveying station 302, or the second boat loading station 303.

[0057] In some embodiments, such as Figure 2 and Figure 5 As shown, the loading and unloading equipment 10 also includes a boat-moving device 600, which is located above the first side 1011 of the second sheet loading and unloading station. It is configured to transport the second boat 3 loaded with processed sheets from the boat conveying device 300 to the second boat receiving device 500, or to transport the second boat 3 loaded with unprocessed sheets from the second boat receiving device 500 to the boat conveying device 300.

[0058] By setting a boat-moving device 600 above the first side 1011 of the second loading and unloading station, the space above the first side 1011 of the second loading and unloading station is fully utilized, and the level of automation of the loading and unloading equipment 10 is further improved without increasing the size of the loading and unloading equipment 10.

[0059] Exemplarily, the boat-moving device 600 includes a linear drive mechanism 610, a lifting mechanism 620, and a boat-grabbing mechanism 630. The lifting mechanism 620 is connected to the linear drive mechanism 610, enabling the linear drive mechanism 610 to drive the lifting mechanism 620 to move along a first horizontal direction X1 to above the second boat-moving station 303 or above the second boat-receiving station 1021. The boat-grabbing mechanism 630 is connected to the lifting mechanism 620, enabling the lifting mechanism 620 to move the boat-grabbing mechanism 630 along the first horizontal direction X1 to above the second boat-moving station 303 or above the second boat-receiving station 1021. The lifting mechanism 620 can drive the boat-grabbing mechanism 630 to move up and down, so that the boat-grabbing mechanism 630 can approach and grab the second boat 3 located at the second boat-moving station 303, or approach and grab the second boat 3 located at the second boat-receiving station 1021.

[0060] For example, the process by which the boat-transferring device 600 transports the second boat 3 loaded with the processed sheet material from the boat conveying device 300 to the second boat receiving device 500 is as follows:

[0061] The first conveying mechanism 310 carries the second boat 3 loaded with the processed sheet material and moves it along the first horizontal direction X1 from the receiving station 301 to the second boat moving station 303. The linear drive mechanism 610 drives the lifting mechanism 620 and the boat grabbing mechanism 630 to move along the first horizontal direction X1 to above the second boat moving station 303. The lifting mechanism 620 drives the boat grabbing mechanism 630 to descend to be close to the second boat moving station 303. The boat grabbing mechanism 630 grabs the second boat 3 loaded with the processed sheet material. The lifting mechanism 620 drives the boat grabbing mechanism 630 to rise so that the boat grabbing mechanism 630 moves the second boat 3 loaded with the processed sheet material away from the second boat moving station 303. Subsequently, the linear drive mechanism 610 drives the lifting mechanism 620 and the boat grabbing mechanism 630 to move along the first horizontal direction X1 to above the second boat receiving position 1021. The lifting mechanism 620 drives the boat grabbing mechanism 630 to descend, so that the boat grabbing mechanism 630 can place the second boat 3 loaded with the processed sheet into the second boat receiving device 500 of the second boat receiving position 1021.

[0062] The process by which the boat-transferring device 600 moves the second boat 3, loaded with unprocessed sheets, from the second boat receiving device 500 to the boat conveying device 300 is as follows:

[0063] The second boat receiving device 500 transports the second boat 3 loaded with unprocessed sheet material from the second side 1012 of the second sheet handling station to the second boat receiving position 1021 along the second horizontal direction X2. The linear drive mechanism 610 drives the lifting mechanism 620 and the boat grabbing mechanism 630 to move along the first horizontal direction X1 to above the second boat receiving position 1021. The lifting mechanism 620 drives the boat grabbing mechanism 630 to descend close to the second boat receiving position 1021. The boat grabbing mechanism 630 grabs the second boat 3 loaded with unprocessed sheet material. The lifting mechanism 620 drives the boat grabbing mechanism 630 to rise so that the boat grabbing mechanism 630 moves the second boat 3 loaded with unprocessed sheet material away from the second boat receiving device 500 of the second boat receiving position 1021. Subsequently, the linear drive mechanism 610 drives the lifting mechanism 620 and the boat grabbing mechanism 630 to move along the first horizontal direction X1 to above the second boat transfer station 303. The lifting mechanism 620 drives the boat grabbing mechanism 630 to descend so that the boat grabbing mechanism 630 can place the second boat 3 loaded with unprocessed sheet material onto the first conveying mechanism 310 of the second boat transfer station 303.

[0064] In some embodiments, the loading / unloading device 10 further includes a sheet support device 700 and a straightening device 800. The sheet support device 700 is disposed at the sheet pick-and-place position 1022 of the second boat and is capable of vertical movement. The sheet support device 700 is configured to support multiple processed sheets in the second receiving space 3001 of the second boat 3 during vertical movement and drive the processed sheets to rise vertically so that the second sheet pick-and-place device 200 can remove the processed sheets; or, the sheet support device 700 is configured to support multiple unprocessed sheets conveyed by the second sheet pick-and-place device 200 and descend vertically to place the unprocessed sheets in the second receiving space 3001 of the second boat 3 so that the second boat 3 can load the unprocessed sheets. The straightening device 800 is arranged opposite to the sheet support device 700 and is configured to straighten the multiple sheets supported by the sheet support device 700 so that the second sheet pick-and-place device 200 can pick up the processed multiple sheets, or the sheet support device 700 can place the unprocessed multiple sheets in the second receiving space 3001 of the second boat 3.

[0065] For example, such as Figure 6 As shown, the sheet support device 700 includes a vertical drive mechanism 710 and a tooth support mechanism 720. The tooth support mechanism 720 is connected to the vertical drive mechanism 710 so that the vertical drive mechanism 710 can drive the tooth support mechanism 720 to move up and down in the vertical direction so that the tooth support mechanism 720 can support the sheet material.

[0066] In some embodiments, such as Figure 2 and Figure 3 As shown, the first sheet handling device 100 includes a first driving assembly 110 and a first sheet handling assembly 120. The first driving assembly 110 is movable along a second horizontal direction X2, and the first sheet handling assembly 120 is connected to the first driving assembly 110 so that the first driving assembly 110 can drive the first sheet handling assembly 120 to move along the second horizontal direction X2 to above or away from the first receiving space 2001 of the first boat 2. The first sheet handling assembly 120 is configured to remove processed sheets from the first receiving space 2001 of the first boat 2 or place unprocessed sheets into the first receiving space 2001 of the first boat 2.

[0067] The first film picking and placing device 100 described above has a simple structure and a simple and reliable film picking method.

[0068] For example, the first drive component 110 may be a robotic arm, a linear module, etc. For example, the first pick-up component 120 may be a suction cup component, a gripper component, etc.

[0069] In some embodiments, such as Figure 2 , Figures 4 to 7As shown, the second film pick-and-place device 200 includes a second drive assembly 210, a first linear drive assembly 220, a second film pick-and-place assembly 230, a second linear drive assembly 240, and a third film pick-and-place assembly 250. The first linear drive assembly 220 is connected to the second drive assembly 210, enabling the second drive assembly 210 to drive the first linear drive assembly 220 to move to or away from the second film pick-and-place position 1022. The second film pick-and-place assembly 230 and the third film pick-and-place assembly 250 are both connected to the first linear drive assembly 220, enabling the first linear drive assembly 220 to drive the second film pick-and-place assembly 230 and the third film pick-and-place assembly 250 to or away from the second film pick-and-place position 1022. The first linear drive assembly 220 can drive the second wafer-picking assembly 230 and the third wafer-picking assembly 250 to be staggered or moved away from each other along the third horizontal direction X3. The second wafer-picking assembly 230 and the third wafer-picking assembly 250 are configured to pick up the processed portion of the wafer in the second receiving space 3001, or to place the unprocessed portion of the wafer in the second receiving space 3001. The second linear drive assembly 240 is mounted to the first linear drive assembly 220 and connected to the third wafer-picking assembly 250. The second linear drive assembly 240 can drive the third wafer-picking assembly 250 to move along the fourth horizontal direction X4, so that when the second wafer-picking assembly 230 and the third wafer-picking assembly 250 are staggered, the third wafer-picking assembly 250 moves closer to or away from the second wafer-picking assembly 230 along the fourth horizontal direction X4, which is perpendicular to the third horizontal direction X3.

[0070] The aforementioned second film pick-up and drop-off device 200 has a simple structure and a simple and reliable film pick-up method.

[0071] For example, the sheet support device 700 rises vertically to support the processed portion of the sheet in the second receiving space 3001, and drives the processed portion of the sheet to rise vertically. The straightening device 800 straightens the processed portion of the sheet supported by the sheet support device 700. The second sheet picking component 230 and the third sheet picking component 250 are staggered and spaced apart along the third horizontal direction X3 and close to each other along the fourth horizontal direction X4. They pick up the processed portion of the sheet in the second receiving space 3001. Finally, the second drive component 210 drives the first linear drive component 220 and other structures connected to the first linear drive component 220 to move away from the second boat sheet picking position 1022.

[0072] For example, the second drive component 210 may be a robotic arm, a linear module, etc. For example, the second piece-grabbing component 230 may be a suction cup component, a gripper component, etc., and the third piece-grabbing component 250 may be a suction cup component, a gripper component, etc.

[0073] In some embodiments, such as Figure 8As shown, the loading and unloading equipment 10 also includes two or more loading devices 900. At least one loading device 900 is arranged adjacent to the first sheet handling station 101 and is configured to feed unprocessed sheets to the first sheet handling device 100. At least one loading device 900 is arranged adjacent to the second sheet handling station 102 and is configured to feed unprocessed sheets to the second sheet handling device 200. The first sheet handling device 100 is further configured to receive unprocessed sheets fed by the corresponding loading device 900, and the second sheet handling device 200 is further configured to receive unprocessed sheets fed by the corresponding loading device 900.

[0074] By using two or more feeding devices 900 to feed unprocessed sheets to the first sheet handling device 100 and the second sheet handling device 200 respectively, the automation level of the feeding equipment 10 is further improved.

[0075] In some embodiments, such as Figure 8 As shown, the loading and unloading equipment 10 also includes two or more unloading devices 1000. At least one unloading device 1000 is arranged adjacent to the first sheet pick-and-place station 101 and is configured to receive and transport the processed sheet material transported by the first sheet pick-and-place device 100. At least one unloading device 1000 is arranged adjacent to the second sheet pick-and-place station 102 and is configured to receive and transport the processed sheet material transported by the second sheet pick-and-place device 200. The unloading devices 1000 and the loading device 900 are arranged adjacent to each other in the first horizontal direction X1.

[0076] By utilizing two or more feeding devices 1000 to receive and transport the processed sheets from the first sheet pick-and-place device 100 and the second sheet pick-and-place device 200 respectively, the automation level of the feeding and unloading equipment 10 is further improved.

[0077] In some embodiments, such as Figure 8 and Figure 9As shown, the feeding device 900 includes a basket feeding mechanism 910, a basket feeding lifting mechanism 920, a sheet feeding conveying mechanism 930, a sheet feeding and receiving lifting mechanism 940, and a feeding buffer mechanism 950. The basket feeding mechanism 910 is configured to convey a basket loaded with unprocessed sheets. The basket feeding lifting mechanism 920 is arranged adjacent to the basket feeding mechanism 910 in the second horizontal direction X2, and is configured to receive the basket loaded with unprocessed sheets conveyed by the basket feeding mechanism 910, and drive the basket loaded with unprocessed sheets to lift. The sheet feeding conveyor 930 and the basket feeding lifting mechanism 920 are arranged adjacent to each other on the side away from the basket feeding mechanism 910. One end of the sheet feeding conveyor 930 is located below the basket feeding lifting mechanism 920, so that when the basket feeding lifting mechanism 920 drives the basket loaded with unprocessed sheet material to descend, it receives the unprocessed sheet material in the basket carried by the basket feeding lifting mechanism 920 and conveys the unprocessed sheet material along the second horizontal direction X2. The sheet receiving lifting mechanism 940 is arranged adjacent to the side of the sheet feeding conveyor 930 away from the basket feeding lifting mechanism 920. The other end of the sheet feeding conveyor 920 is located below the sheet receiving lifting mechanism 940, so that when the sheet receiving lifting mechanism 940 rises, it receives the unprocessed sheet material conveyed by the sheet feeding conveyor 930. The first sheet handling device 100 is further configured to remove unprocessed sheets by a feeding and receiving lifting mechanism 940 adjacent to the first sheet handling station 101, and the second sheet handling device 200 is further configured to remove unprocessed sheets by a feeding and receiving lifting mechanism 940 adjacent to the second sheet handling station 102. A feeding buffer mechanism 950 is arranged adjacent to the sheet feeding and conveying mechanism 930 and is configured to receive and buffer the unprocessed sheets conveyed by the sheet feeding and conveying mechanism 930.

[0078] The above-mentioned feeding device 900 has a simple structure and a simple and reliable conveying method.

[0079] In some embodiments, such as Figure 8 and Figure 9As shown, the unloading device 1000 includes an unloading and receiving lifting mechanism 1100, a sheet unloading conveying mechanism 1200, a basket unloading lifting mechanism 1300, a basket unloading mechanism 1400, and an unloading buffer mechanism 1500. The unloading and receiving lifting mechanism 1100 and the loading and receiving lifting mechanism 940 are arranged adjacent to each other in the first horizontal direction X1, and are configured to receive processed sheets conveyed by the first sheet pick-and-place device 100 or the second sheet pick-and-place device 200. The sheet feeding conveyor 1200 and the sheet feeding and receiving lifting mechanism 1100 are arranged adjacent to each other in the second horizontal direction X2, and adjacent to the sheet feeding conveyor 930 in the first horizontal direction X1. One end of the sheet feeding conveyor 1200 is located below the sheet feeding and receiving lifting mechanism 1100, so as to receive the processed sheet material conveyed by the sheet feeding and receiving lifting mechanism 1100 during the descent of the sheet feeding and receiving lifting mechanism 1100, and convey the processed sheet material along the second horizontal direction X2. The basket feeding lifting mechanism 1300 is arranged adjacent to the side of the sheet feeding conveyor 1200 away from the sheet feeding and receiving lifting mechanism 1100, and is configured to carry the empty basket and drive the empty basket to rise and fall. The other end of the sheet feeding conveyor 1200 is located below the basket feeding lifting mechanism 1300, so as to receive the processed sheet material conveyed by the sheet feeding conveyor 1200 during the upward movement of the basket feeding lifting mechanism 1300. The basket unloading mechanism 1400 is arranged adjacent to the basket unloading lifting mechanism 1300 on the side away from the sheet unloading conveying mechanism 1200, and is configured to receive and convey the basket loaded with processed sheets conveyed by the basket unloading lifting mechanism 1300. The unloading buffer mechanism 1500 is arranged adjacent to the sheet unloading conveying mechanism 1200, and is configured to receive and buffer the processed sheets conveyed by the sheet unloading conveying mechanism 1200.

[0080] The above-mentioned feeding device 1000 has a simple structure and a simple and reliable conveying method.

[0081] Figure 10 The diagram shown is an application scenario illustration of a processing production line provided in an embodiment of this disclosure. Figure 10 As shown, the processing line 1 includes the loading / unloading equipment 10 and the processing equipment 20 mentioned in the above embodiments. The loading / unloading equipment 10 is configured to pick up and place sheets onto the first boat 2 and the second boat 3, and transport the first boat 2 and the second boat 3 to the processing equipment 20, or to transport the first boat 2 and the second boat 3 out of the processing equipment 20. The processing equipment 20 is arranged adjacent to the loading / unloading equipment 10 and is configured to receive the first boat 2 transported by the loading / unloading equipment 10 and perform processing on the unprocessed sheets loaded on the first boat 2, or to receive the second boat 3 transported by the loading / unloading equipment 10 and perform processing on the unprocessed sheets loaded on the second boat 3.

[0082] Since the processing production line 1 includes the loading and unloading equipment 10, all the technical features and effects of the loading and unloading equipment 10 in the processing production line 1 will not be described in detail here.

[0083] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0084] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0085] It should be understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0086] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0087] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0088] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A loading and unloading device, characterized in that, It has a first sheet picking and placing station and a second sheet picking and placing station. A first boat can be picked up and placed at the first sheet picking and placing station. At the first sheet picking and placing station, the sheet is picked up and placed into the first boat. A second boat can be picked up and placed at the second sheet picking and placing station. At the second sheet picking and placing station, the sheet is picked up and placed into the second boat. The second boat has a different structure from the first boat. The loading and unloading equipment includes: A first sheet picking and placing device is disposed adjacent to the first sheet picking and placing station and is configured to pick up and place the sheet material onto the first boat at the first sheet picking and placing station. The second sheet picking and placing device is disposed adjacent to the second sheet picking and placing station and is configured to pick up and place the sheet into the second boat at the second sheet picking and placing station. The boat conveying device is arranged adjacent to the first piece pick-and-place station and the second piece pick-and-place station, respectively, and is configured to receive and convey the first boat so that the first boat can be picked up and placed at the first piece pick-and-place station, or to receive and convey the second boat so that the second boat can be picked up and placed at the second piece pick-and-place station.

2. The loading and unloading equipment according to claim 1, characterized in that, The first wafer pick-and-place station and the second wafer pick-and-place station are spaced apart along the first horizontal direction; In the vertical direction, the second pick-and-place station is located above the first pick-and-place station; Both the first and second wafer pick-and-place devices are located between the first and second wafer pick-and-place stations.

3. The loading and unloading equipment according to claim 2, characterized in that, Both the first and second pick-and-place stations extend along a second horizontal direction. The second pick-and-place station has a second boat-to-boat position and a second boat pick-and-place position. The second boat-to-boat position is located on the first side of the second pick-and-place station, and the second boat pick-and-place position is located between the first side and the second side of the second pick-and-place station. The second horizontal direction is perpendicular to the first horizontal direction. The loading and unloading equipment also includes: A first boat receiving device is disposed at the first sheet pick-and-place station and is configured to receive the first boat loaded with the processed sheet material conveyed by the boat conveying device, or to convey the first boat loaded with the unprocessed sheet material to the boat conveying device. A second boat receiving device, disposed at the second sheet handling station, is configured to receive a second boat loaded with the processed sheet material from the boat conveying device at the second boat receiving station, and to convey the second boat loaded with the processed sheet material along the second horizontal direction, or to convey the second boat loaded with the unprocessed sheet material along the second horizontal direction to the second boat receiving station, so that the boat conveying device can receive the second boat loaded with the unprocessed sheet material.

4. The loading and unloading equipment according to claim 3, characterized in that, The first boat has a plurality of first receiving spaces arranged sequentially along the second horizontal direction, the first receiving spaces being configured to receive a plurality of the sheets; the second boat has a plurality of second receiving spaces arranged sequentially along the second horizontal direction, the second receiving spaces being configured to receive a plurality of the sheets. The first sheet picking and placing device is capable of moving along the second horizontal direction, so that the first sheet picking and placing device can move sequentially above each of the first receiving spaces, and take out the processed sheets from the first receiving space, and place the unprocessed sheets in the first receiving space; The second boat receiving device can transport the second boat along the second horizontal direction, so that each of the second accommodating spaces can be transported sequentially to the second boat's pick-and-place position, so that the second pick-and-place device can take out the processed multiple sheets from the second accommodating space located at the second boat's pick-and-place position, and place the unprocessed multiple sheets into the second accommodating space located at the second boat's pick-and-place position.

5. The loading and unloading equipment according to claim 4, characterized in that, The second side of the second pick-and-place station is adjacent to the first pick-and-place station in the first horizontal direction; The boat conveying device is located below the first side of the second piece picking and placing station and is adjacent to the first piece picking and placing station, and is capable of moving along the first horizontal direction; the boat conveying device has a first boat conveying station, a boat receiving station and a second boat moving station that are spaced apart in the first horizontal direction, the first boat conveying station and the first piece picking and placing station are adjacent in the second horizontal direction, and the second boat moving station and the second boat receiving station are adjacent in the first horizontal direction; Wherein, when the boat conveying device receives the first boat loaded with the processed sheet at the boat receiving station, the boat conveying device moves along the first horizontal direction to the first boat conveying station and conveys the first boat loaded with the processed sheet to the first boat receiving device; or, the boat conveying device is configured to receive the first boat loaded with the unprocessed sheet conveyed by the first boat receiving device at the first boat conveying station and move along the first horizontal direction to the boat receiving station. Wherein, when the boat conveying device receives the second boat loaded with the processed sheet at the boat receiving station, the boat conveying device moves along the first horizontal direction to the second boat transfer station, so that the second boat loaded with the processed sheet can be transported from the second boat transfer station to the second boat receiving station; or, the second boat receiving device conveys the second boat loaded with the unprocessed sheet from the second side of the second sheet pick-and-place station to the second boat receiving station along the second horizontal direction, so that the second boat loaded with the unprocessed sheet can be transported from the second boat receiving station to the boat conveying device located at the second boat transfer station.

6. The loading and unloading equipment according to claim 5, characterized in that, Also includes: A boat-moving device is disposed above the first side of the second sheet handling station and is configured to transport the second boat loaded with the processed sheet material from the boat conveying device to the second boat receiving device, or to transport the second boat loaded with the unprocessed sheet material from the second boat receiving device to the boat conveying device.

7. The loading and unloading equipment according to any one of claims 3 to 6, characterized in that, Also includes: A sheet support device is disposed at the sheet pick-and-place position of the second boat and is capable of vertically lifting and lowering. The sheet support device is configured to, during the vertically upward movement, support multiple processed sheets in the second boat and drive the processed sheets to rise vertically; or, support multiple unprocessed sheets conveyed by the second sheet pick-and-place device and descend vertically to place the unprocessed sheets into the second boat so that the second boat is loaded with the unprocessed sheets. A straightening device, disposed opposite to the sheet support device, is configured to straighten the multiple sheets supported by the sheet support device.

8. The loading and unloading equipment according to claim 1, characterized in that, The first wafer pick-and-place device includes: The first drive component is capable of moving along the second horizontal direction; A first sheet-retrieving component is connected to the first driving component so that the first driving component can drive the first sheet-retrieving component to move along the second horizontal direction to above or away from the first boat. The first sheet-retrieving component is configured to take away multiple processed sheets from the first boat or place multiple unprocessed sheets in the first boat. The second wafer pick-and-place device includes: Second drive component; A first linear drive component is connected to a second drive component, such that the second drive component can drive the first linear drive component to move to or away from the second boat pick-up / placement position. The second and third sheet-retrieving components are connected to the first linear drive component so that the first linear drive component can drive the second and third sheet-retrieving components to move to or away from the sheet-retrieving position of the second boat. The first linear drive component can drive the second and third sheet-retrieving components to be staggered or moved away from each other along a third horizontal direction. The second and third sheet-retrieving components are configured to take away the processed portion of the sheet material in the second boat or place the unprocessed portion of the sheet material in the second boat. A second linear drive assembly is installed on the first linear drive assembly and connected to the third wafer-taking assembly. The second linear drive assembly can drive the third wafer-taking assembly to move along a fourth horizontal direction, so that when the second wafer-taking assembly and the third wafer-taking assembly are staggered, the third wafer-taking assembly moves closer to or further away from the second wafer-taking assembly along the fourth horizontal direction, wherein the fourth horizontal direction is perpendicular to the third horizontal direction.

9. The loading and unloading equipment according to any one of claims 1 to 5, characterized in that, Also includes: Two or more feeding devices are provided, wherein at least one feeding device is arranged adjacent to the first sheet pick-and-place station and is configured to feed the unprocessed sheet to the first sheet pick-and-place station; at least one feeding device is arranged adjacent to the second sheet pick-and-place station and is configured to feed the unprocessed sheet to the second sheet pick-and-place station; wherein the first sheet pick-and-place station is further configured to receive the unprocessed sheet fed by the corresponding feeding device, and the second sheet pick-and-place station is further configured to receive the unprocessed sheet fed by the corresponding feeding device. And / or, Two or more feeding devices, wherein at least one feeding device is arranged adjacent to the first sheet pick-and-place station and is configured to receive and transport the processed sheet material transported by the first sheet pick-and-place device, and at least one feeding device is arranged adjacent to the second sheet pick-and-place station and is configured to receive and transport the processed sheet material transported by the second sheet pick-and-place device. The unloading device and the loading device are arranged adjacent to each other in the first horizontal direction.

10. The loading and unloading equipment according to claim 9, characterized in that, The feeding device includes: The flower basket feeding mechanism is configured to convey a flower basket loaded with the unprocessed sheet material. A flower basket loading and lifting mechanism is arranged adjacent to the flower basket loading mechanism in a second horizontal direction and is configured to receive the flower basket loaded with the unprocessed sheet material conveyed by the flower basket loading mechanism, and drive the flower basket loaded with the unprocessed sheet material to lift; wherein, the second horizontal direction is perpendicular to the first horizontal direction; A sheet feeding conveyor is arranged adjacent to the side of the basket feeding lifting mechanism away from the basket feeding mechanism. One end of the sheet feeding conveyor is located below the basket feeding lifting mechanism. During the process of the basket feeding lifting mechanism driving the basket loaded with the unprocessed sheet to descend, the unprocessed sheet carried by the basket feeding lifting mechanism is received and conveyed along the second horizontal direction. A feeding and receiving lifting mechanism is arranged adjacent to the side of the sheet feeding conveyor that is away from the basket feeding lifting mechanism. The other end of the sheet feeding conveyor is located below the feeding and receiving lifting mechanism, so that during the upward movement of the feeding and receiving lifting mechanism, the feeding and receiving lifting mechanism receives the unprocessed sheet conveyed by the sheet feeding conveyor. The first sheet picking and placing device is further configured to pick up the unprocessed sheet from the feeding and receiving lifting mechanism arranged adjacent to the first sheet picking and placing station, and the second sheet picking and placing device is further configured to pick up the unprocessed sheet from the feeding and receiving lifting mechanism arranged adjacent to the second sheet picking and placing station. A feeding buffer mechanism is disposed adjacent to the sheet feeding conveyor mechanism and is configured to receive and buffer the unprocessed sheet conveyed by the sheet feeding conveyor mechanism; And / or, The feeding device includes: The unloading and receiving lifting mechanism is arranged adjacent to the loading and receiving lifting mechanism in the first horizontal direction and is configured to receive the processed sheet material conveyed by the first sheet picking and placing device or the processed sheet material conveyed by the second sheet picking and placing device. A sheet feeding conveyor is arranged adjacent to the sheet feeding and receiving lifting mechanism in the second horizontal direction and adjacent to the sheet feeding conveyor in the first horizontal direction. One end of the sheet feeding conveyor is located below the sheet feeding and receiving lifting mechanism, so as to receive the processed sheet conveyed by the sheet feeding and receiving lifting mechanism during the descent of the sheet feeding and receiving lifting mechanism, and convey the processed sheet along the second horizontal direction. The flower basket unloading lifting mechanism is arranged adjacent to the side of the sheet unloading conveying mechanism away from the unloading and receiving lifting mechanism. It is configured to carry the empty flower basket and drive the empty flower basket to lift. The other end of the sheet unloading conveying mechanism is located below the flower basket unloading lifting mechanism, so that during the process of the flower basket unloading lifting mechanism driving the empty flower basket to rise, the empty flower basket receives the processed sheet conveyed by the sheet unloading conveying mechanism. The flower basket unloading mechanism is arranged adjacent to the side of the flower basket unloading lifting mechanism away from the sheet unloading conveying mechanism, and is configured to receive and convey the flower basket loaded with the processed sheet material conveyed by the flower basket unloading lifting mechanism. A feeding buffer mechanism is disposed adjacent to the sheet feeding conveyor mechanism and is configured to receive and buffer the processed sheet conveyed by the sheet feeding conveyor mechanism.

11. A processing production line, characterized in that, include: The loading and unloading equipment according to any one of claims 1 to 10, wherein the loading and unloading equipment is configured to pick up and place sheets into a first boat and a second boat, and to transport the first boat and the second boat to a processing equipment, or to transport the first boat and the second boat out of the processing equipment; The processing equipment is arranged adjacent to the loading and unloading equipment and is configured to receive the first boat conveyed by the loading and unloading equipment and perform processing on the unprocessed sheet loaded on the first boat, or to receive the second boat conveyed by the loading and unloading equipment and perform processing on the unprocessed sheet loaded on the second boat.

Images