Laser assembly and fragmentation device
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SANY SILICON ENERGY (ZHUZHOU) CO LTD
- Filing Date
- 2025-07-25
- Publication Date
- 2026-06-26
Smart Images
Figure CN224406701U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor manufacturing, specifically to a laser component and a dicing device. Background Technology
[0002] In the production process of crystalline silicon solar modules, in order to reduce costs, increase efficiency, and improve the output power of crystalline silicon solar modules, the cells are usually divided into slabs by laser non-destructive dicing and then connected in series.
[0003] The laser non-destructive scribing method typically involves using a grooving laser to create grooves at both ends of the solar cell for orientation, followed by using a heating laser to heat the surface of the solar cell while simultaneously spraying water to cool the surface and create a temperature difference. This causes thermal stress to form inside the solar cell, thereby splitting it into two parts along the grooving direction.
[0004] In the above-mentioned non-destructive dicing and splitting method, since laser grooving requires the use of high peak power pulsed lasers and laser heating requires the use of continuous wave or quasi-continuous high power lasers, laser grooving and laser heating usually use a separate laser system, using two lasers and two sets of external optical path systems respectively, and working alternately to complete the grooving and heating of the solar cell respectively.
[0005] However, the above-mentioned dicing and splitting method requires two laser systems to work alternately, resulting in low laser utilization and affecting the production efficiency of the splitting device. At the same time, the equipment cost is high and the cost-effectiveness is low. Utility Model Content
[0006] In view of this, the present invention aims to provide a laser component and a dicing device to solve the problems of existing dicing devices that require two sets of laser systems to work alternately, resulting in low laser utilization, affecting the production efficiency of the dicing device, and high equipment cost and low cost-effectiveness.
[0007] To solve the above-mentioned technical problems, this utility model provides a laser component, comprising:
[0008] Battery;
[0009] A laser having at least two operating modes, wherein the laser operates selectively in one of the different operating modes; and
[0010] An optical path system is disposed between the laser and the battery;
[0011] The optical path system includes a switching component, which has an on position and an off position. When the laser switches between different operating modes, the switching component switches between the on position and the off position to form different laser optical paths.
[0012] In one embodiment, the converter has a movable reflective element;
[0013] When the switching element is in the open position, the reflective element avoids the laser beam path emitted by the laser, and the laser beam emitted by the laser passes through the switching element;
[0014] When the switching element is in the off position, the reflective element blocks the laser beam path emitted by the laser and reflects the laser beam emitted by the laser.
[0015] In one embodiment, the optical path system further includes a focusing lens disposed between the converter and the battery;
[0016] The focusing lens is used to receive the laser light passing through the conversion element, and then focus the laser light onto the battery.
[0017] In one embodiment, the optical path system further includes a reflector disposed on one side of the conversion element;
[0018] The reflector is used to receive the laser light reflected by the conversion element, and after reflecting the laser light, it acts on the battery.
[0019] In one embodiment, the laser has a slotted mode and a heated mode;
[0020] The battery is provided with a first slotted section, a heating section and a second slotted section along the processing direction;
[0021] When the laser processes the first slotted section and the second slotted section, it uses the slotting mode; when the laser processes the heating section, it uses the heating mode.
[0022] In one embodiment, the first slotted section and the second slotted section are disposed at both ends of the heating section along the processing direction.
[0023] In one embodiment, the laser assembly further includes a cooling module disposed between the optical path system and the battery;
[0024] The cooling module is used to simultaneously spray coolant onto the heating section while the laser is processing the heating section.
[0025] In one embodiment, the laser assembly further includes a mounting component;
[0026] The laser and the optical path system are both mounted on the mounting component, and the laser beam emitted by the laser is arranged parallel to the mounting component.
[0027] In one embodiment, the mounting is positioned perpendicular to the battery.
[0028] To solve the above-mentioned technical problems, this utility model also provides a dicing device, including: a stage and the laser component as described above;
[0029] The battery is placed on the platform and moves along the processing direction with the platform.
[0030] Compared with existing laser systems, the laser assembly provided in this embodiment of the invention has the following advantages:
[0031] This invention provides a laser assembly, including a battery, a laser, and an optical path system. The laser has at least two operating modes and can select one of them for operation. The optical path system is disposed between the laser and the battery. The optical path system includes a switching component with an on position and an off position. When the laser switches between different operating modes, the switching component switches between the on and off positions to form different laser optical paths. Compared to the prior art, which requires two laser systems to perform dicing and dicing of the battery separately, this invention, by setting an integrated laser and a switching component capable of switching laser optical paths, allows the laser to use different types of lasers and different laser optical paths when facing the dicing and dicing processes, thereby meeting the requirements of the dicing and dicing processes respectively. This simplifies the structure, reduces production costs, and also reduces the time spent switching between different laser systems, thus improving the working efficiency of the dicing device and further enhancing its cost-effectiveness. Attached Figure Description
[0032] Figure 1 The diagram shown is a structural schematic of the laser assembly provided in an embodiment of this utility model.
[0033] Figure 2 The diagram shown is a schematic diagram of the laser assembly provided in the embodiment of this utility model performing the grooving process in the first grooving section.
[0034] Figure 3 The diagram shown is a schematic diagram of the laser component provided in this embodiment of the present invention performing a heating process in the heating section.
[0035] Figure 4 The diagram shown is a schematic diagram of the laser assembly provided in the embodiment of this utility model performing the grooving process in the second grooving section.
[0036] The explanations of the reference numerals in the accompanying drawings are as follows:
[0037] 1-Battery; 10-First slotted section; 11-Heating section; 12-Second slotted section;
[0038] 2-Laser;
[0039] 3-Optical path system; 30-Converter; 31-Focusing lens; 32-Reflecting mirror;
[0040] 4-Cooling module; 5-Mounting component. Detailed Implementation
[0041] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0042] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "circumferential", "radial", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0043] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.
[0044] As those skilled in the art will understand, the dicing and splitting process plays a crucial role in the manufacturing process of photovoltaic cells. It enables customized dimensions and maximizes the utilization of module power, thus helping to improve module reliability and yield. In the dicing and splitting process, grooves are typically cut into the surface of the cell, and the grooves are heated to create a temperature difference, generating thermal stress within the cell and causing it to split into multiple parts along the direction of the grooves.
[0045] In the process of laser grooving, because it is necessary to precisely cut the material and form grooves or scribing on the surface of the material, a high peak power pulsed laser is required. Commonly used lasers include nanosecond pulsed green lasers with a wavelength of 532nm, picosecond pulsed lasers with a wavelength of 532nm or 1064nm, or femtosecond pulsed lasers.
[0046] In the process of laser heating, since it is not necessary to ablate the material, it is only necessary to control the temperature to make the material undergo physical or chemical changes. Therefore, a continuous laser with a low power density or a low instantaneous temperature gradient is required. A continuous / high repetition frequency quasi-continuous fiber laser with a wavelength of 1070nm is commonly used.
[0047] Existing cell cleaving devices require the use of two different lasers and different optical path components to achieve cell grooving and heating respectively. This requires the two lasers to work alternately, which reduces the utilization efficiency of the lasers and increases the processing and operating costs of the equipment.
[0048] Based on this, please refer to Figure 1 This utility model provides a laser component, including: a battery 1, a laser 2, and an optical path system 3; the laser 2 has at least two operating modes, and the laser 2 can operate in one of the different operating modes; the optical path system 3 is disposed between the laser 2 and the battery 1, and the optical path system 3 includes a switching element 30, which has an on position and an off position. When the laser 2 switches between different operating modes, the switching element 30 switches between the on position and the off position to form different laser optical paths.
[0049] In this way, by setting up an integrated laser 2 and cooperating with a conversion component 30 that can switch laser optical paths, the laser 2 can use different types of lasers and different laser optical paths when facing the scribing and dicing processes, so as to meet the process requirements of scribing and dicing respectively. On the one hand, it reduces the number of lasers 2, simplifies the optical path structure, and reduces production and operating costs. On the other hand, it reduces the waiting time when switching between different laser systems, thereby improving the working efficiency of the dicing device and further improving the cost performance of the dicing device.
[0050] As an optional embodiment, the laser 2 described above can be a Q-switched laser, which can control the laser output mode by adjusting the loss mechanism in the resonant cavity; the laser 2 described above can also be a mode-locked laser, which can realize the switching between pulsed laser and continuous laser modes by synchronously locking the phases of multiple laser longitudinal modes, such as a titanium-doped sapphire laser; the laser 2 described above can also be a fiber laser, such as a MOPA structure.
[0051] For example, the aforementioned switching element 30 may be an optical shutter. As will be understood by those skilled in the art, an optical shutter is also called an optical switch, which can control the switching of an optical signal from one physical channel to another without changing the shape of the optical signal.
[0052] For example, the aforementioned conversion element 30 can be a mechanical shutter, which changes the direction of the light path by physically moving optical elements (such as mirrors, prisms, etc.); the aforementioned conversion element 30 can also be a microelectromechanical system (MEMS) optical switch, which microfabricates a movable micro-mirror array on a semiconductor silicon wafer, and can drive the micromirrors by electrostatic force, electromagnetic force or other micro-forces to change the reflection angle; the aforementioned conversion element 30 can also be a thermo-optic switch, acousto-optic switch or electro-optic switch, which can change the refractive index of the material through thermal effect, acousto-optic effect or electro-optic effect to change the light path.
[0053] Specifically, in this embodiment, the switching element 30 can be a mechanical shutter with a movable reflective element. When the switching element 30 is in the open position, the reflective element avoids the laser beam path emitted by the laser 2, and the laser beam emitted by the laser 2 passes through the switching element 30. When the switching element 30 is in the closed position, the reflective element blocks the laser beam path emitted by the laser 2 and reflects the laser beam emitted by the laser 2. With this configuration, the operator can change the laser beam path emitted by the laser 2 by setting the switching element 30, so as to use different optical elements in different working modes, thereby meeting the laser requirements of different working modes.
[0054] In one embodiment, the reflective element has a reflective surface, and the angle between the reflective surface and the horizontal plane can be any angle between 30° and 60°, such as 30°, 45°, and 60°.
[0055] Optionally, the aforementioned conversion component 30 may include a housing, a drive unit, a transmission system, and a reflective element. The drive unit is disposed on the housing and protrudes from it. The drive unit is connected to the reflective element via the transmission system. The drive unit may be a knob, and the transmission system may be a screw. The drive unit rotates around an axis to drive the transmission system to rotate, thereby causing the reflective element to move towards or away from the laser beam path. The aforementioned reflective element may be a mirror or a prism.
[0056] For example, when the drive unit is in the open position, the reflective element moves away from the laser path under the drive of the transmission system. At this time, the reflective element avoids the laser path, and the laser path passes through the conversion member 30. When the drive unit is in the closed position, the reflective element moves closer to the laser path under the drive of the transmission system. At this time, the reflective element blocks the laser path, and the laser leaves the conversion member 30 after being reflected by the reflective element.
[0057] In some other embodiments, the conversion element 30 may also be provided with a refractive element, and the conversion of different optical paths can be achieved through the refractive element. Those skilled in the art can select different optical path elements according to the actual situation to achieve different optical path directions. This embodiment does not limit this.
[0058] by Figure 2 and Figure 4 For example, the optical path system 3 also includes a focusing mirror 31, which is disposed between the converter 30 and the battery 1. The focusing mirror 31 is used to receive the laser light passing through the converter 30 and focus the laser light onto the battery 1. In this way, the laser light passing through the converter 30 can be focused by the focusing mirror 31 to increase the laser energy density, thereby enabling rapid grooving of the battery 1.
[0059] As those skilled in the art will understand, laser grooving requires a laser with a high energy density and a small heat-affected zone. The setting of the focusing lens 31 can converge parallel or nearly parallel laser beams to a focal point, thereby significantly increasing the energy density of the laser and enabling rapid material removal. At the same time, the high-energy-density laser has an extremely short action time and strong spatial limitation, which reduces the heat-affected zone of the laser.
[0060] Of course, in some other embodiments, the focusing lens 31 may also be disposed on one side of the conversion element 30, so as to be disposed on the laser light path after being reflected by the reflecting element. This embodiment does not limit this.
[0061] by Figure 3 For example, the optical path system 3 also includes a reflector 32, which is disposed on one side of the converter 30. The reflector 32 is used to receive the laser light reflected by the converter 30 and reflect the laser light back onto the battery 1. With this configuration, the laser light reflected by the reflective element in the converter 30 is reflected by the reflector 32 and then acts on the battery 1 to form a certain incident angle. Compared with a vertically incident laser beam, this can form a larger heat-affected zone on the surface of the battery 1, thereby rapidly increasing the surface temperature of the battery 1 and generating thermal stress inside the battery 1, further improving the splitting efficiency of the battery 1.
[0062] Unlike laser grooving, laser heating requires the laser energy to be uniformly converted into heat to heat the local area of battery 1. Therefore, it requires a lower power density to avoid further removal of the battery 1 material, and also requires a stable and controllable heat input to ensure a continuous temperature difference on battery 1.
[0063] In one embodiment, the angle between the reflecting surface of the reflector 32 and the horizontal plane can be any angle between 30° and 60°, such as 30°, 45°, and 60°.
[0064] In other embodiments, the reflector 32 can also cooperate with the converter 30 to form other laser optical paths. Meanwhile, in Figure 1In the illustrated example, the laser beam path emitted by the laser 2 is perpendicular to the battery 1. In some other embodiments, the laser beam path emitted by the laser 2 can also be parallel to the battery 1, and vertical incidence on the battery 1 can be achieved by adding a reflector 32. The laser beam path emitted by the laser 2 can also be set at other angles to the battery 1, and combined with other optical elements to form the incident angle on the battery 1. Those skilled in the art can flexibly configure the angle of the laser 2 according to the setting position and placement space of the laser 2.
[0065] As an optional embodiment, the laser 2 has a grooving mode and a heating mode; the battery 1 is provided with a first grooving section 10, a heating section 11, and a second grooving section 12 along the processing direction; when the laser 2 processes the first grooving section 10 and the second grooving section 12, it uses the grooving mode; when the laser 2 processes the heating section 11, it uses the heating mode. With this configuration, different operating modes correspond to different types of lasers. Unlike existing systems that use two separate laser systems for grooving and heating, this embodiment only requires one laser 2, and switches between different types of lasers when operating on different positions of the battery 1. This effectively improves the utilization efficiency of the laser 2, reduces production costs, and enhances cost-effectiveness.
[0066] As those skilled in the art will understand, the laser non-destructive scribing method typically requires grooving and orientation at both ends of the battery 1, followed by heating of the surface of the battery 1. As mentioned above, different types of lasers are required for laser grooving and laser heating; therefore, switching between operating modes is necessary when processing different sections of the battery 1.
[0067] Optionally, during processing, the battery 1 is placed on a platform and moves with the platform. Therefore, the processing direction of the battery 1 is parallel to the moving direction of the platform. In this embodiment, the first grooving section 10 and the second grooving section 12 are disposed at both ends of the heating section 11 along the processing direction. Corresponding to the above-described laser non-destructive scribing method, the first grooving section 10 and the second grooving section 12 are typically disposed in the end region of the battery 1 along the processing direction, and the heating section 11 is typically disposed in the middle region of the battery 1 along the processing direction. In other embodiments, if different laser scribing methods are used, the relative positional relationship of the first grooving section 10, the heating section 11, and the second grooving section 12 may also be different; this embodiment does not impose any limitations on this.
[0068] Please continue to refer to this. Figures 1 to 4 The laser assembly also includes a cooling module 4, which is located between the optical path system 3 and the battery 1. The cooling module 4 is used to simultaneously spray coolant onto the heating section 11 when the laser 2 processes the heating section 11, so as to form a temperature on the surface of the battery 1, induce thermal stress inside the battery 1, and eventually break at the tank under the action of thermal stress.
[0069] Optionally, the cooling module 4 can be located between the optical path system 3 and the battery 1, or on one side of the optical path system 3, or on the platform on which the battery 1 is placed. Those skilled in the art can make reasonable adjustments to the position of the cooling module 4 according to the spatial layout of the laser components.
[0070] For example, the cooling module 4 can be a spraying module with a nozzle, which sprays coolant onto the surface of the battery 1 simultaneously when the laser 2 is in heating mode; the cooling module 4 can also be a water-cooled plate, which can exchange heat with the surface of the battery 1 through the coolant flowing inside; the cooling module 4 can also be a semiconductor refrigeration plate, which can perform thermoelectric conversion based on the Peltier effect to form a temperature difference on the surface of the battery 1.
[0071] In some embodiments, the laser assembly further includes a mounting component 5; the laser 2 and the optical path system 3 are both disposed on the mounting component 5, and the laser beam emitted by the laser 2 is arranged parallel to the mounting component 5. Mounting the laser 2 and the optical path system 3 on the same mounting component 5 facilitates integrated setup and also makes it easier for operators to collect and adjust parameters and information in a timely manner, thereby improving optical path conversion efficiency.
[0072] Specifically, in this embodiment, the mounting component 5 can be a rigid plate, and the laser beam path emitted by the laser 2 can be set at an angle to the mounting component 5, preferably parallel to the mounting component 5. In this way, the laser beam path will not be affected by the mounting component 5 during propagation, and the operator no longer needs to set up optical elements to change the laser angle. On the one hand, this reduces the complexity of the optical system, reduces the number of optical elements, and lowers the cost of use; on the other hand, reducing the number of optical elements also improves the integration of the laser assembly, reduces space occupation, and optimizes space utilization.
[0073] Similarly, in a preferred embodiment, the mounting member 5 is positioned perpendicular to the battery 1. Those skilled in the art will understand that, since the laser beam needs to hit the front of the battery 1, the laser beam path cannot be parallel to the front of the battery 1; it needs to be angled to the front of the battery 1. When the mounting member 5 is positioned perpendicular to the battery 1 and the laser beam path of the laser 2 is parallel to the mounting member 5, the number of optical components can be minimized, achieving a simplified optical system.
[0074] In another embodiment, this utility model also provides a dicing apparatus, including: a stage and the laser assembly as described above; a battery 1 is disposed on the stage and moves with the stage along the processing direction. Thus, by using the aforementioned laser assembly and incorporating an integrated laser 2, along with a conversion element 30 capable of switching laser beam paths, the laser 2 can utilize different types of lasers and different laser beam paths when facing the dicing and dicing processes, thereby meeting the requirements of the dicing and dicing processes respectively. This simplifies the structure, reduces production costs, and also reduces the time spent switching between different laser systems, thereby improving the working efficiency of the dicing apparatus and further enhancing its cost-effectiveness.
[0075] For details regarding the specific structure and movement method of the platform, please refer to the existing technology; this embodiment will not elaborate further.
[0076] In an optional embodiment, please refer to Figures 1 to 4 The method of using the dicing device with the above-mentioned laser components will be further explained.
[0077] First, the laser 2, optical path system 3, and cooling module 4 are installed on the mounting component 5, forming a structure as shown below. Figure 1 The laser component shown.
[0078] The laser 2 is switched to the slotting mode, and the reflective element in the conversion component 30 is moved to the open position. At this time, the pulsed laser, focused by the focusing lens 31, acts on a fixed point. When the front end of the battery 1 (the first slotted section 10 in this embodiment) moves to this fixed point, the pulsed laser acts on the first slotted section 10 of the battery 1, forming a slot of a certain depth (e.g., ...). Figure 2 (As shown).
[0079] Battery 1 continues to move. When the slotted length reaches a set value (i.e., the length of the first slotted segment 10 in this embodiment), the laser 2 is switched from the slotting mode to the heating mode, and the reflective element in the converter 30 is moved from the on position to the off position. After being reflected by the reflective element in the converter 30 and the reflector 32, the continuous laser light acts on the heating segment 11 of battery 1 (e.g., Figure 3 (As shown).
[0080] As battery 1 continues to move, when the tail end of battery 1 (the second slotted section 12 in this embodiment) approaches the aforementioned fixed point, laser 2 is switched from heating mode to slotting mode, and the reflective element in the switching element 30 is moved from the off position to the on position. The pulsed laser, after being focused by the focusing lens 31, acts on the second slotted section 12 of battery 1 to slot the tail end of battery 1 (e.g., ...). Figure 4 (As shown).
[0081] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications or equivalent substitutions made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A laser assembly, characterized in that, include: Battery; A laser having at least two operating modes, wherein the laser operates selectively in one of the different operating modes; as well as An optical path system is disposed between the laser and the battery; The optical path system includes a switching component, which has an on position and an off position. When the laser switches between different operating modes, the switching component switches between the on position and the off position to form different laser optical paths.
2. The laser assembly according to claim 1, characterized in that, The conversion element has a movable reflective element; When the switching element is in the open position, the reflective element avoids the laser beam path emitted by the laser, and the laser beam emitted by the laser passes through the switching element; When the switching element is in the off position, the reflective element blocks the laser beam path emitted by the laser and reflects the laser beam emitted by the laser.
3. The laser assembly according to claim 2, characterized in that, The optical path system further includes a focusing lens, which is disposed between the conversion element and the battery; The focusing lens is used to receive the laser light passing through the conversion element, and then focus the laser light onto the battery.
4. The laser assembly according to claim 2, characterized in that, The optical path system also includes a reflector, which is disposed on one side of the conversion element; The reflector is used to receive the laser light reflected by the conversion element, and after reflecting the laser light, it acts on the battery.
5. The laser assembly according to claim 1, characterized in that, The laser has a slotted mode and a heating mode; The battery is provided with a first slotted section, a heating section and a second slotted section along the processing direction; When the laser processes the first slotted section and the second slotted section, it uses the slotting mode; when the laser processes the heating section, it uses the heating mode.
6. The laser assembly according to claim 5, characterized in that, The first slotted section and the second slotted section are disposed at both ends of the heating section along the processing direction.
7. The laser assembly according to claim 5, characterized in that, The laser assembly also includes a cooling module, which is disposed between the optical path system and the battery; The cooling module is used to simultaneously spray coolant onto the heating section while the laser is processing the heating section.
8. The laser assembly according to any one of claims 1 to 7, characterized in that, The laser assembly also includes mounting components; The laser and the optical path system are both mounted on the mounting component, and the laser beam emitted by the laser is arranged parallel to the mounting component.
9. The laser assembly according to claim 8, characterized in that, The mounting component is positioned perpendicular to the battery.
10. A dicing device, characterized in that, include: The stage and the laser assembly as described in any one of claims 1 to 9; The battery is placed on the platform and moves along the processing direction with the platform.