Mechanical hand for clean room

Abstract

The utility model relates to the field of manipulator, and disclose a manipulator for dust -free room, including manipulator support board, packing, the side wall of one side of manipulator support board is fixedly connected with packing, the inside fixed setting of manipulator support board has up and down movement mechanism, the lateral surface of the other side of manipulator support board is provided with horizontal shift mechanism, the front of horizontal shift mechanism is fixedly provided with cleaning frame, the utility model discloses through full -enclosed structure and organ case design, effectively isolate the moving parts and cleaning space, reduce the production of metal particulate matter, and adopt acid -resistant PP material and stainless steel structure, strengthened the corrosion resistance of equipment, up and down movement mechanism and horizontal shift mechanism pass through motor drive screw and mute gear, realized the automatic handling and cleaning operation, significantly improved the cleanliness in dust -free room environment and equipment durability.

Description

Technical Field

[0001] This utility model relates to the field of robotic arms, specifically a robotic arm for cleanrooms. Background Technology

[0002] Cleanroom robots are automated devices specifically designed for high-cleanliness environments (such as Class 100 cleanrooms). They are primarily used for material handling, cleaning, and positioning within cleanrooms. Cleanrooms are widely used in industries such as semiconductor manufacturing, biomedicine, and precision electronics. These industries have extremely high requirements for the cleanliness of their production environments; even the smallest particles or contaminants can seriously affect product quality. Therefore, cleanroom robots need to possess characteristics such as high cleanliness, corrosion resistance, and high precision to ensure stable operation in the cleanroom environment while avoiding pollution of the production environment. With the rapid development of industrial automation, cleanroom robots are playing an increasingly important role in improving production efficiency and reducing the risks of manual operation.

[0003] Traditional cleanroom robotic arms suffer from design and material selection deficiencies that limit their application in cleanroom environments. First, the moving parts of traditional robotic arms typically employ an open design, which easily generates metal particles during operation. These particles can enter the cleaning space, causing secondary contamination of the workpieces and severely impacting product cleanliness. Second, the transmission mechanisms of traditional robotic arms are mostly made of metal, which can corrode the metal components when corroded by acidic or alkaline cleaning solutions, leading to equipment failure, increased maintenance costs, and downtime. Furthermore, the handling grippers and main arms of traditional robotic arms are usually made of ordinary metal materials, lacking corrosion resistance and easily damaged in acidic or alkaline environments, further reducing the reliability and lifespan of the equipment. To address these issues, we propose a cleanroom robotic arm. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a robotic arm for cleanrooms, solving the aforementioned problems.

[0005] To achieve the above-mentioned objectives, the present invention provides the following technical solution: a robot for cleanrooms, comprising a robot support plate and packaging, the packaging being fixedly connected to one side wall of the robot support plate, a vertical movement mechanism being fixedly installed inside the robot support plate, a horizontal movement mechanism being installed on the other side of the robot support plate, and a cleaning frame being fixedly installed in front of the horizontal movement mechanism.

[0006] Preferably, the up-and-down movement mechanism includes a second motor, a cantilever, an up-and-down trolley, and a pulley. Linear slide rails are symmetrically fixedly installed on the plane of the robotic arm support plate, corresponding to the interior of the packaging. A lead screw is rotatably connected between the two linear slide rails on the robotic arm support plate. A support plate is fixedly installed on the side wall of the robotic arm support plate. A second motor is fixedly installed on the support plate. A pulley is rotatably connected to the bottom surface of the support plate. The output shaft of the second motor is fixedly connected to the pulley. Another pulley is fixedly installed below the lead screw on the bottom surface of the robot support plate, and the pulley and the lead screw on the robot support plate are coaxially fixedly connected. A synchronous belt is connected between the two pulleys. Slider blocks are symmetrically fixedly installed on the bottom surface of the upper and lower carriages, and a threaded hole is opened in the middle of the two sliders. The sliders on the upper and lower carriages are engaged and slidably connected with the linear slide rail on the robot support plate. The threaded hole on the upper and lower carriages is threadedly connected to the lead screw on the robot support plate. A cantilever is fixedly installed on the upper and lower carriages, and the cantilever protrudes from the top surface of the robot support plate.

[0007] Preferably, a hook is fixedly installed on one end of the cantilever that protrudes from the robotic arm support plate.

[0008] Preferably, the traversing mechanism includes a motor, a support plate, rollers, a linear guide rail, a silent gear, and a tank chain connecting angle. A linear guide rail is fixedly installed on the side of the robotic arm support plate near the bottom. A tank chain connecting angle is fixedly installed on the side of the robotic arm support plate above the linear guide rail. A support plate is fixedly installed on the side of the robotic arm support plate above the tank chain connecting angle. Rollers are rotatably connected to the four corners of the bottom surface of the support plate. A motor is fixedly installed on the side wall of the robotic arm support plate above the second motor. A silent gear is fixedly installed on the side wall of the robotic arm support plate in front of the first motor. The output shaft of the first motor is fixedly connected to the silent gear.

[0009] Preferably, the cleaning frame includes a PP plate, a spindle slide rail, a rack, a fixing strip, and a tank chain groove. A support strip is fixedly installed on the plane of the PP plate near the bottom. The spindle slide rail is fixedly installed on the support strip on the PP plate. The spindle slide rail and the linear slide rail are engaged and slidably connected. A tank chain groove is fixedly installed on the plane of the PP plate above the spindle slide rail. The tank chain groove and the tank chain are engaged at an angle. A fixing strip is fixedly installed on the plane of the PP plate above the tank chain groove. A rack is rotatably connected to the fixing strip. The rack meshes with the silent gear. The fixing strip is tangential to and slidably connected to the roller.

[0010] Preferably, a transverse accordion mounting plate is fixedly installed on the top side of the robotic arm support plate, and an accordion groove is opened on the plane of the PP plate near the top. One end of the transverse accordion is fixedly connected to the transverse accordion mounting plate, and the other end of the transverse accordion is engaged with the accordion groove on the PP plate.

[0011] Compared with the prior art, this utility model provides a robotic arm for cleanrooms, which has the following advantages:

[0012] 1. The robotic arm used in this cleanroom employs a fully enclosed structure for its lifting motion. The maintenance area of ​​the lifting rod is protected by a bellows cover, effectively isolating the lifting motion from the cleaning space and preventing impurities generated by the moving parts from entering the cleaning space. The lateral movement is partitioned using PP boards, and the movement positions are isolated using bellows covers, further isolating the lateral movement from the cleaning space. This design not only reduces the generation of metal particles but also avoids the corrosion of the robotic arm's transmission mechanism by acid and alkaline cleaning solutions, significantly improving the cleanliness of the cleaning process and the durability of the equipment.

[0013] 2. The robotic arm used in this cleanroom contains a large amount of acidic and alkaline cleaning solutions during the cleaning process. Conventional robotic arm transmission mechanisms are prone to corrosion and failure in such acidic and alkaline environments. The handling hooks of this robotic arm are made of acid and alkali resistant PP material, with strength checked and embedded stainless steel profiles, which not only ensures mechanical strength but also has good corrosion resistance. The main handling arm is made of stainless steel flat tube and wrapped with PP material to further protect against corrosion failure.

[0014] 3. The cleanroom uses a robotic arm equipped with a vertical movement mechanism and a horizontal movement mechanism, which can realize automated handling and cleaning operations. The vertical movement mechanism is driven by a lead screw driven by motor 2, which drives the upper and lower carriages and cantilever to move the items vertically. The horizontal movement mechanism is driven by a silent gear driven by motor 1, which drives the cleaning frame and related components to move horizontally. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model;

[0016] Figure 2 This is a cross-sectional view of the present invention;

[0017] Figure 3 This is a schematic diagram of the main body of the robotic arm of this utility model;

[0018] Figure 4 This is a cross-sectional schematic diagram of the main body of the robotic arm of this utility model.

[0019] In the diagram: 1. PP board; 2. Robotic arm support plate; 3. Motor 1; 4. Motor 2; 5. Hook; 6. Cantilever; 7. Packaging; 8. Horizontal accordion cover mounting plate; 9. Support plate; 10. Roller; 11. Linear slide rail; 12. Axial slide rail; 13. Horizontal accordion cover; 14. Silent gear; 15. Rack; 16. Fixing strip; 17. Tank chain connecting angle; 18. Tank chain groove; 19. Upper and lower trolleys; 20. Pulley. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figure 1-4 A cleanroom robot includes a robot support plate 2 and a package 7. The package 7 is fixedly connected to one side wall of the robot support plate 2. A vertical movement mechanism is fixedly installed inside the robot support plate 2. A horizontal movement mechanism is installed on the other side of the robot support plate 2. A cleaning frame is fixedly installed in front of the horizontal movement mechanism.

[0022] Furthermore, the vertical movement mechanism includes a second motor 4, a cantilever 6, a vertical trolley 19, and pulleys 20. Linear guide rails are symmetrically fixedly installed on the plane of the robotic arm support plate 2, corresponding to the interior of the packaging 7. A lead screw is rotatably connected between the two linear guide rails on the plane of the robotic arm support plate 2. A support plate is fixedly installed on the side wall of the robotic arm support plate 2. A second motor 4 is fixedly installed on the support plate 1. A pulley 20 is rotatably connected to the bottom surface of the support plate 1. The output shaft of the second motor 4 is fixedly connected to the pulley 20. Another pulley 20 is fixedly installed below the lead screw on the bottom surface of the robotic arm support plate 2, and this pulley 20 is coaxially fixedly connected to the lead screw on the robotic arm support plate 2. A synchronous belt connects the two pulleys 20. The vertical trolley 19... The bottom surface of the upper and lower trolleys 19 is symmetrically fixed with sliders, and a threaded hole is opened between the two sliders. The sliders on the upper and lower trolleys 19 and the linear slide rails on the robotic arm support plate 2 are engaged and slidably connected. The threaded hole on the upper and lower trolleys 19 is threadedly connected to the lead screw on the robotic arm support plate 2. A cantilever 6 is fixedly installed on the upper and lower trolleys 19. The cantilever 6 protrudes from the top surface of the robotic arm support plate 2. The packaging 7 not only protects the internal circuits and some small components of the robotic arm support plate 2 from interference from the external environment, but also plays a certain role in dustproofing and moisture-proofing, which helps to maintain the stability of the upper and lower movement mechanism. At the same time, the linear slide rail provides precise guidance for the movement of the upper and lower trolleys 19, ensuring the straightness and stability of the upper and lower movement, reducing deviations during the movement, and ensuring that the cantilever 6 and hook 5 can accurately reach the target position for item handling.

[0023] Furthermore, a hook 5 is fixedly installed on one end of the cantilever 6 that protrudes from the robotic arm support plate 2.

[0024] Furthermore, the lateral movement mechanism includes motor 3, support plate 9, rollers 10, linear guide rail 11, silent gear 14, and tank chain connecting angle 17. A linear guide rail 11 is fixedly installed on the side of the robotic arm support plate 2 near its bottom. A tank chain connecting angle 17 is fixedly installed on the side of the robotic arm support plate 2 above the linear guide rail 11. A support plate 9 is fixedly installed on the side of the robotic arm support plate 2 above the tank chain connecting angle 17. Rollers 10 are rotatably connected to the four corners of the bottom surface of the support plate 9. Motor 3 is fixedly installed on the side wall of the robotic arm support plate 2 above motor 4. A roller 10 is fixedly installed on the side wall of the robotic arm support plate 2 in front of motor 3. A silent gear 14 is fixedly installed, and the output shaft of motor 3 is fixedly connected to the silent gear 14. The tank chain connection angle 17 provides a stable mounting support point for the tank chain groove 18, ensuring that the tank chain groove 18 always maintains the correct position during the movement of the robot arm. At the same time, it can also enhance the structural strength of the entire transverse mechanism, making the transverse mechanism more stable and reliable when driving the movement of components such as the cleaning frame. The roller 10 is tangentially and slidably connected to the fixed bar 16, which reduces the frictional resistance between the support plate 9 and the fixed bar 16, and can also play a role in fine-tuning the transverse direction, further improving the accuracy of the transverse movement and ensuring the smooth operation of the transverse mechanism.

[0025] Furthermore, the cleaning frame includes a PP plate 1, a axial slide rail 12, a rack 15, a fixing strip 16, and a tank chain groove 18. A support strip is fixedly installed on the plane of the PP plate 1 near the bottom. The axial slide rail 12 is fixedly installed on the support strip on the PP plate 1. The axial slide rail 12 and the linear slide rail 11 are engaged and slidably connected. A tank chain groove 18 is fixedly installed on the plane of the PP plate 1 above the axial slide rail 12. The tank chain groove 18 and the tank chain connecting angle 17 are engaged. A fixing strip 16 is fixedly installed on the plane of the PP plate 1 above the tank chain groove 18. A rack 15 is rotatably connected to the fixing strip 16. The rack 15 meshes with a silent gear 14, and the fixing strip... 16 and roller 10 are tangentially and slidably connected. Due to its excellent acid and alkali resistance, PP plate 1 can effectively resist the corrosion of acid and alkali cleaning solutions during the cleaning process. At the same time, the support strips and various installation structures on PP plate 1 are reasonably designed, providing a stable installation base for components such as axial slide rail 12, tank chain groove 18, and fixing strip 16, ensuring the relative positional accuracy between components, so that the cleaning frame remains stable when moving laterally and cooperating with the robot to perform cleaning operations. The tank chain groove 18 is used to orderly store and protect power lines and signal lines, preventing these lines from getting tangled or worn during the movement of the robot, ensuring the stability of power supply and signal transmission, and ensuring the normal operation of all parts of the robot.

[0026] Furthermore, a transverse accordion cover mounting plate 8 is fixedly installed on the top side of the robot support plate 2. An accordion cover groove is opened on the plane of the PP plate 1 near the top. One end of the transverse accordion cover 13 is fixedly connected to the transverse accordion cover mounting plate 8, and the other end of the transverse accordion cover 13 is engaged with the accordion cover groove on the PP plate 1. The design of the transverse accordion cover mounting plate 8 and the accordion cover groove on the PP plate 1 ensures the installation accuracy and stability of the transverse accordion cover 13. The transverse accordion cover 13 plays a key role in isolating the transverse moving parts from the cleaning space. It can effectively block metal particles generated by the moving parts from entering the cleaning space, while preventing acid and alkali cleaning liquids from splashing onto the parts of the transverse mechanism, avoiding component corrosion, extending the service life of the transverse mechanism, maintaining the cleanliness of the robot's operating environment, and ensuring the stable operation of the entire robot in a cleanroom environment.

[0027] Structural Description:

[0028] PP Plate 1: PP Plate 1 is a major component of the cleaning frame. It is located on the plane of the cleaning frame and has a support bar near the bottom for mounting the axial slide rail 12. PP Plate 1 not only provides a mounting base for other components, but also has good acid and alkali resistance due to its material properties, which can effectively prevent corrosion in the cleaning environment. At the same time, the structure opened on its plane is used to cooperate with other components, such as mounting the tank chain groove 18 above the axial slide rail 12. It plays a key supporting and protective role in the entire cleaning operation of the robot.

[0029] Robot support plate 2: Robot support plate 2 is the core support structure of the entire robot. It is fixedly connected to packaging 7 on one side and has an internal up-and-down movement mechanism. The other side is equipped with a horizontal movement mechanism. Through its own structural design, it provides installation positions for many components such as motor 1 3 and motor 2 4, ensuring the relative positional relationship between the components and ensuring the stability of the overall structure of the robot, thereby enabling the robot to complete precise handling and cleaning operations.

[0030] Motor 1 3: Motor 1 3 is installed on the side wall of the robot support plate 2 and is located above Motor 2 4. It serves as the power source for the lateral movement mechanism. Its output shaft is fixedly connected to the silent gear 14. When Motor 1 3 is working, it drives the silent gear 14 to rotate. Through meshing with the rack 15, it drives the cleaning frame and related components to move laterally, thereby realizing the horizontal displacement of the robot. It is the key power component for realizing the lateral movement function of the robot.

[0031] Motor 2 4: Motor 2 4 is fixedly installed on support plate 1 on support plate 2 of robot arm support plate 2. Its output shaft is connected to pulley 20. By driving pulley 20 to rotate, it drives another pulley 20 coaxial with lead screw through synchronous belt, thereby driving lead screw to rotate. In this process, motor 2 4 provides power to the up and down movement mechanism, so that the up and down trolley 19 can move up and down along lead screw, driving cantilever 6 and hook 5 to realize the up and down movement operation of items.

[0032] Hook 5: Hook 5 is fixedly installed on one end of the cantilever 6 that protrudes from the robotic arm support plate 2. It is mainly used to hook and move items. It is the part that directly contacts the items being moved. Its design shape and size are suitable for gripping specific items. Under the coordinated action of the up-down movement mechanism and the lateral movement mechanism, hook 5 can accurately reach the target position to move items. It plays a key role in gripping and bearing during the entire moving process.

[0033] Cantilever 6: The cantilever 6 is mounted on the upper and lower trolleys 19 and protrudes from the top surface of the robot support plate 2. It serves as a connection and extension. One end is fixed to the upper and lower trolleys 19, and the other end is equipped with a hook 5. Driven by the upper and lower trolleys 19, the cantilever 6 moves up and down. At the same time, it moves as a whole under the action of the lateral movement mechanism, so that the hook 5 can flexibly move items within a certain space, thus expanding the working range of the robot.

[0034] Packaging 7: Packaging 7 is fixedly connected to one side wall of the robot support plate 2. It is mainly used to protect some internal components of the robot, and plays a protective role for internal circuits and some small components, preventing them from being interfered with and damaged by the external environment. At the same time, it plays a certain role in dustproofing and moisture-proofing, which helps to maintain the stability and normal operation of the internal structure of the robot.

[0035] Horizontal accordion cover mounting plate 8: The horizontal accordion cover mounting plate 8 is fixed to the top side of the robot support plate 2. It is the mounting base for the horizontal accordion cover 13. One end is fixedly connected to the horizontal accordion cover 13. Its function is to cooperate with the accordion cover groove on the PP plate 1 to install the horizontal accordion cover 13 in a suitable position, effectively isolate the horizontal movement parts from the cleaning space, prevent impurities from entering and acid and alkali cleaning liquid from corroding, and protect the horizontal movement mechanism components.

[0036] Support plate 9: The support plate 9 is installed on the side of the robot support plate 2, above the tank chain connecting corner 17. Rollers 10 are rotatably connected at the four corners of its bottom surface. It mainly plays the role of supporting and assisting movement. During the lateral movement, the rollers 10 are tangential to and slidably connected with the fixed bar 16, providing stable support for the entire lateral movement structure, reducing friction, and making the lateral movement smoother.

[0037] Roller 10: Roller 10 is rotatably connected to the four corners of the bottom surface of support plate 9. During the lateral movement, roller 10 is tangential to and slides with fixed bar 16. On the one hand, it reduces the frictional resistance between support plate 9 and fixed bar 16, making the lateral movement more stable. On the other hand, through rolling contact, it enhances the stability of the lateral movement mechanism, ensures the relative position accuracy of each component of the robot during the lateral movement, and helps to improve the overall operating performance of the robot.

[0038] Linear slide rail 11: The linear slide rail 11 is installed on the side of the robot support plate 2 near the bottom. It provides a sliding track for the relevant components of the lateral movement mechanism and cooperates with the axial slide rail 12 to enable the cleaning frame to move smoothly laterally.

[0039] Axial slide rail 12: The axial slide rail 12 is mounted on the support bar of PP plate 1 and is snapped and slidably connected with linear slide rail 11. It plays a key guiding role in the lateral movement of the cleaning frame, ensuring that the cleaning frame can stably perform lateral movement along the predetermined track. It works in conjunction with linear slide rail 11 to improve the accuracy and reliability of lateral movement and is an important component of the robot's lateral movement structure.

[0040] Transverse accordion cover 13: One end of the transverse accordion cover 13 is fixedly connected to the transverse accordion cover mounting plate 8, and the other end is snapped into the accordion cover groove on the PP plate 1. It can effectively isolate the transverse moving parts from the cleaning space, prevent metal particles generated by the moving parts from entering the cleaning space, and at the same time avoid the corrosion of the transverse mechanism parts by acid and alkaline cleaning solutions, protect the internal structure, ensure the stable operation of the robot in the cleanroom environment, and maintain the cleanliness of the cleaning process.

[0041] Silent Gear 14: Silent gear 14 is installed on the side wall of the robot support plate 2, located in front of motor 3, and fixedly connected to the output shaft of motor 3. It meshes with rack 15 and rotates under the drive of motor 3, driving the cleaning frame to move laterally. The design of silent gear 14 can reduce noise during the movement, while ensuring the accuracy and stability of the transmission, making the lateral movement of the robot more stable and reliable.

[0042] Rack 15: Rack 15 is rotatably connected to fixed bar 16 and meshes with silent gear 14. When silent gear 14 rotates under the drive of motor 3, rack 15 moves accordingly, thereby driving the cleaning frame and related components to move laterally. Rack 15 plays the role of transmitting power and motion in the lateral movement mechanism. The matching accuracy between rack 15 and silent gear 14 affects the accuracy and stability of the robot's lateral movement.

[0043] Fixed bar 16: Fixed bar 16 is installed on the plane of PP plate 1, above the tank chain groove 18. On the one hand, it provides a rotating mounting position for rack 15, and on the other hand, it is tangentially and slidably connected to roller 10. During the lateral movement, fixed bar 16 plays a supporting and guiding role, ensuring the movement stability of rack 15, and assisting roller 10 to achieve smooth lateral movement. It is an important supporting component of the lateral movement mechanism.

[0044] Tank chain connecting angle 17: The tank chain connecting angle 17 is fixedly installed on the side of the robot support plate 2, located above the linear slide rail 11. It is used to connect the tank chain groove 18, provide a mounting support point for the tank chain groove 18, and ensure the positional stability of the tank chain groove 18. During the movement of the robot, the tank chain connecting angle 17 ensures that the tank chain groove 18 can move with the movement of the robot, so that the power line and signal line are stably connected to the robot through the tank chain.

[0045] Tank chain cable groove 18: The tank chain cable groove 18 is installed on the plane of PP plate 1 and is engaged with the tank chain connecting angle 17. It is used to accommodate and protect the power line and signal line, so that these lines can be arranged in an orderly manner during the movement of the robot arm, avoiding the tangling and wear of the lines. The tank chain cable groove 18 moves with the lateral movement of the robot arm, providing reliable line protection for the stable operation of the robot arm and ensuring normal power supply and signal transmission between various components.

[0046] The bottom of the trolley 19 is symmetrically equipped with a slider, which is engaged and slidably connected with the linear slide rail on the support plate 2 of the robot arm. Its threaded hole is connected to the lead screw. Driven by the motor 4, the trolley 19 moves up and down along the lead screw and the linear slide rail 11 to support the cantilever 6 and the hook 5, so as to realize the up and down transportation of items. It is the key execution component of the up and down movement mechanism.

[0047] Pulley 20: There are two pulleys 20. One is installed on the bottom surface of the support plate 1 on the robot arm support plate 2 and is fixedly connected to the output shaft of motor 2 4. The other is installed on the bottom surface of the robot arm support plate 2 and is fixedly connected to the lead screw on the same axis. The two pulleys 20 are connected by synchronous belt transmission. Under the drive of motor 2 4, the pulley 20 transmits power to the lead screw, drives the lead screw to rotate, and thus realizes the up and down movement of the trolley 19. It is a key component for power transmission of the up and down movement mechanism.

[0048] Working principle: After the motor 4 starts, the output shaft drives the pulley 20 connected to it to rotate. This rotation is transmitted to another pulley 20 coaxial with the lead screw through the synchronous belt, which in turn drives the lead screw to rotate. Since the bottom slider of the upper and lower trolley 19 is engaged with the linear slide rail on the robot support plate 2, and its threaded hole is threadedly connected to the lead screw, the rotation of the lead screw causes the upper and lower trolley 19 to move up and down under the guidance of the linear slide rail. The cantilever 6 and hook 5 installed on the upper and lower trolley 19 move up and down accordingly, thereby realizing the up and down transportation of items.

[0049] When motor 3 is turned on, its output shaft drives the silent gear 14 to rotate. The silent gear 14 meshes with the rack 15, which is rotatably connected to the fixed strip 16. The fixed strip 16 is mounted on the PP plate 1. At the same time, the rollers 10 at the four corners of the bottom surface of the support plate 9 are tangentially connected to the fixed strip 16 and slide. With this structure, the rotation of the silent gear 14 drives the cleaning frame and related components to move laterally along the axial slide rail 12 and the linear slide rail 11. During the lateral movement, the tank chain connecting angle 17 and the tank chain groove 18 ensure that the power line and signal line can follow the movement of the robot arm, avoiding tangling and damage. The lateral movement bellows cover 13 effectively isolates the lateral movement components from the cleaning space, preventing impurities from entering and acid and alkaline cleaning solutions from corroding them. When the cleaned components are moved to the next process position, motor 3 drives the silent gear 14 to precisely control the lateral movement distance and speed of the cleaning frame, ensuring that the components accurately reach the designated location.

[0050] In practical operation, the vertical movement mechanism and the horizontal movement mechanism work closely together. First, the horizontal movement mechanism moves the robotic arm above the position where the item is to be retrieved. Then, the vertical movement mechanism lowers the hook 5 to grab the item, then rises and moves it to the cleaning frame position via the horizontal movement mechanism. It then descends to perform the cleaning operation. After cleaning, it rises again and moves it to the designated placement position via the horizontal movement mechanism to put the item down. Through this linkage, the automated handling and cleaning of materials in the cleanroom is achieved. At the same time, the lifting movement adopts a fully enclosed structure, the maintenance parts of the lifting rod are protected by a bellows cover, the horizontal movement adopts PP board 1 for partitioning and the movement position is isolated by a bellows cover, and the handling hook 5 and the handling main arm 6 are made of acid and alkali resistant materials. These features reduce the generation of metal particles, avoid corrosion of the robotic arm transmission mechanism by acid and alkali cleaning solutions, significantly improve the cleanliness of the cleaning process and the durability of the equipment, meet the strict requirements of the cleanroom for the production environment, effectively improve production efficiency, and reduce the risks of manual operation.

[0051] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A robotic arm for cleanrooms, comprising a robotic arm support plate (2) and packaging (7), wherein the packaging (7) is fixedly connected to one side wall of the robotic arm support plate (2), characterized in that: The robotic arm support plate (2) is fixedly equipped with an up-and-down movement mechanism, and a transverse movement mechanism is provided on the other side of the robotic arm support plate (2). A cleaning frame is fixedly provided in front of the transverse movement mechanism.

2. The robotic arm for cleanrooms according to claim 1, characterized in that: The up-and-down motion mechanism includes a second motor (4), a cantilever (6), an up-and-down trolley (19), and a pulley (20). A linear guide rail is symmetrically fixedly installed on the plane of the robotic arm support plate (2) corresponding to the interior of the packaging (7). A lead screw is rotatably connected between the two linear guide rails on the plane of the robotic arm support plate (2). A support plate is fixedly installed on the side wall of the robotic arm support plate (2). A second motor (4) is fixedly installed on the support plate of the robotic arm support plate (2). A pulley (20) is rotatably connected to the bottom surface of the support plate of the robotic arm support plate (2). The output shaft of the second motor (4) is fixedly connected to the pulley (20). The bottom of the robotic arm support plate (2)... Another pulley (20) is fixedly installed below the lead screw on the corresponding robotic arm support plate (2), and the pulley (20) and the lead screw on the robotic arm support plate (2) are coaxially fixedly connected. A synchronous belt is connected between the two pulleys (20). A slider is fixedly installed symmetrically on the bottom surface of the upper and lower carriages (19), and a threaded hole is opened in the middle of the two sliders. The slider on the upper and lower carriages (19) and the linear slide rail on the robotic arm support plate (2) are engaged and slidably connected. The threaded hole on the upper and lower carriages (19) is threadedly connected to the lead screw on the robotic arm support plate (2). A cantilever (6) is fixedly installed on the upper and lower carriages (19), and the cantilever (6) protrudes from the top surface of the robotic arm support plate (2).

3. The robotic arm for cleanrooms according to claim 2, characterized in that: A hook (5) is fixedly installed on one end of the cantilever (6) that protrudes from the robotic arm support plate (2).

4. A robotic arm for cleanrooms according to claim 2, characterized in that: The transverse mechanism includes a motor (3), a support plate (9), rollers (10), a linear slide rail (11), a silent gear (14), and a tank chain connecting angle (17). A linear slide rail (11) is fixedly installed on the side of the manipulator support plate (2) near the bottom. A tank chain connecting angle (17) is fixedly installed on the side of the manipulator support plate (2) above the linear slide rail (11). A support plate (9) is fixedly installed on the side of the manipulator support plate (2) above the tank chain connecting angle (17). Rollers (10) are rotatably connected at the four corners of the bottom surface of the support plate (9). A motor (3) is fixedly installed on the side wall of the manipulator support plate (2) above the motor (4). A silent gear (14) is fixedly installed on the side wall of the manipulator support plate (2) in front of the motor (3). The output shaft of the motor (3) is fixedly connected to the silent gear (14).

5. A robotic arm for cleanrooms according to claim 4, characterized in that: The cleaning frame includes a PP plate (1), a axial slide rail (12), a rack (15), a fixing strip (16), and a tank chain groove (18). A support strip is fixedly installed on the plane of the PP plate (1) near the bottom. An axial slide rail (12) is fixedly installed on the support strip on the PP plate (1). The axial slide rail (12) and the linear slide rail (11) are engaged and slidably connected. A tank chain groove (18) is fixedly installed on the plane of the PP plate (1) above the axial slide rail (12). The tank chain groove (18) and the tank chain connecting angle (17) are engaged. A fixing strip (16) is fixedly installed on the plane of the PP plate (1) above the tank chain groove (18). A rack (15) is rotatably connected to the fixing strip (16). The rack (15) and the silent gear (14) are meshed and connected. The fixing strip (16) and the roller (10) are tangential and slidably connected.

6. A robotic arm for cleanrooms according to claim 5, characterized in that: A transverse accordion mounting plate (8) is fixedly installed on the top side of the robotic arm support plate (2). An accordion groove is provided on the plane of the PP plate (1) near the top. One end of the transverse accordion (13) is fixedly connected to the transverse accordion mounting plate (8), and the other end of the transverse accordion (13) is engaged with the accordion groove on the PP plate (1).

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