An MPCVD sealing structure

Abstract

The utility model relates to a kind of MPCVD sealing structure, belong to MPCVD equipment technical field, including the protection structure for the protection of MPCVD body, the MPCVD body includes reaction cavity, waveguide cavity, connecting rod being set in reaction cavity inside and penetrating waveguide cavity inside, the upper portion of waveguide cavity is provided with the number of two connecting discs, two The adjusting spring is fixed between two connecting discs;The protection structure includes the base being set between two connecting discs, the base number is two, two The connecting block is detachably installed in the inside of two bases, two The telescopic protective sleeve that is fixed with the adjusting spring protection between two connecting blocks is protected. The MPCVD sealing structure, by two bases and detachable connecting block fixed, then by telescopic protective sleeve completely wrapping adjusting spring, prevent corrosive gas, particulate matter directly contact spring surface, realize the physical isolation of adjusting spring.

Description

Technical Field

[0001] This utility model relates to the field of MPCVD equipment technology, specifically to an MPCVD sealing structure. Background Technology

[0002] In the diamond production process, MPCVD is considered one of the best methods for producing high-quality diamonds. Microwaves propagate through a waveguide and, with the help of a coaxial antenna, generate plasma within a sealed cavity composed of a quartz ring, antenna, and chamber. The plasma causes the injected process gas to undergo chemical vapor deposition, thereby producing diamond products.

[0003] A search revealed a patent document with publication number CN222770957U, which discloses an MPCVD sealing structure, including a reaction chamber and a waveguide chamber. The reaction chamber is connected to the waveguide chamber via a connecting ring. An antenna is installed inside the reaction chamber, and a connecting rod is connected to the upper end of the antenna. This application utilizes the action of a spring to pull the antenna upward, resulting in a tight fit between the quartz sealing ring and the upper and lower rubber rings, thereby significantly improving the sealing performance of the reaction chamber. It also allows for simultaneous synchronous adjustment of all adjusting screws, improving adjustment efficiency.

[0004] However, the above patent still has the following defects: such as the lack of shielding and protection for the spring. Since the spring is directly exposed to the outside, the spring surface is in direct contact with corrosive gas, which causes the spring elasticity to decay, resulting in the antenna position to shift and affecting the microwave transmission efficiency. Therefore, it cannot meet the production requirements. Hence, an MPCVD sealing structure is proposed to solve the problems mentioned above. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides an MPCVD sealing structure that offers advantages such as high-efficiency sealing and improved spring lifespan. It also solves the problem of springs being directly exposed to corrosive gases, which causes spring elasticity to decrease.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an MPCVD sealing structure, including a protective structure for protecting the MPCVD machine body, the MPCVD machine body including a reaction chamber, a waveguide chamber, a connecting rod disposed inside the reaction chamber and penetrating the inside of the waveguide chamber, two connecting disks are disposed above the waveguide chamber, and an adjusting spring is fixed between the two connecting disks;

[0007] The protective structure includes a base disposed between two connecting plates. There are two bases, and a connecting block can be detachably installed inside each of the two bases. A telescopic protective sleeve for protecting the adjusting spring is fixed between the two connecting blocks. A locking element is provided between the connecting block and the base. An infusion component is provided on the upper surface of the top base. A through hole is provided inside each of the two bases and the two connecting blocks.

[0008] Furthermore, a support tube is fixed between the reaction cavity and the waveguide cavity, and the support tube is hollow inside.

[0009] Furthermore, the top of the connecting rod extends through two connecting discs, and the adjusting spring surrounds the outside of the connecting rod.

[0010] Furthermore, the two bases are distributed vertically, and a connecting shaft is fixed between the top base and the top connecting plate. Both bases are equipped with elastic push rods that cooperate with the locking components.

[0011] Furthermore, the locking component includes a sleeve fixed inside the connecting block, a locking rod extending outward from the sleeve, one end of the locking rod being inserted into the base, and the other end of the locking rod being fixed with a first return spring fixed to the inner wall of the sleeve.

[0012] Furthermore, a nozzle is fixed inside the through hole in the top base, and the nozzle has several annular and equidistantly distributed nozzle holes on the side away from the top base.

[0013] Furthermore, the infusion device includes a check valve and a housing disposed on the upper surface of the top base. A diaphragm is fixed inside the housing, and a T-shaped rod extending to the outside of the housing is fixed on one side of the diaphragm. Infusion tubes are fixed at both ends of the check valve, and the two infusion tubes are respectively fixedly connected to the nozzle and the reservoir.

[0014] Furthermore, a second return spring is fixed between the cross-section of the T-shaped rod and the housing, and a pressing rod is fixed on the side of the T-shaped rod away from the second return spring.

[0015] Compared with the prior art, the present invention provides an MPCVD sealing structure with the following advantages:

[0016] 1. The MPCVD sealing structure is fixed by two bases and a detachable connecting block, and then completely wraps the adjusting spring with a telescopic protective sleeve to prevent corrosive gases and particles from directly contacting the spring surface, thus achieving physical isolation of the adjusting spring.

[0017] 2. This MPCVD sealing structure uses a pressing rod to drive a T-shaped rod, which compresses the diaphragm and pumps the protective agent in the reservoir into the nozzle through a check valve. The protective agent is then atomized through annular equidistant nozzles on the nozzle, uniformly covering the surface of the adjusting spring to form a dynamic lubricating film that inhibits corrosion and wear. Attached Figure Description

[0018] Figure 1 This is a three-dimensional view of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the adjusting spring in this utility model;

[0020] Figure 3 This is a cross-sectional view of the protective structure in this utility model;

[0021] Figure 4 This is a schematic diagram of the locking component in this utility model;

[0022] Figure 5 This is a schematic diagram of the infusion device in this utility model.

[0023] In the diagram: 1. MPCVD machine body; 101. Reaction chamber; 102. Support tube; 103. Waveguide cavity; 104. Connecting rod; 105. Connecting plate; 106. Adjusting spring; 2. Protective structure; 201. Base; 202. Connecting block; 203. Telescopic protective sleeve; 204. Locking element; 2041. Sleeve; 2042. Locking rod; 2043. First return spring; 205. Through hole; 206. Elastic push rod; 207. Connecting shaft; 208. Nozzle; 209. Infusion component; 2091. Check valve; 2092. Housing; 2093. Diaphragm; 2094. T-shaped rod; 2095. Second return spring; 2096. Pressing rod; 2097. Infusion tube. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figures 1 to 5This embodiment of an MPCVD sealing structure includes a protective structure 2 for protecting the MPCVD machine body 1. The MPCVD machine body 1 includes a reaction chamber 101, a waveguide cavity 103, and a connecting rod 104 disposed inside the reaction chamber 101 and penetrating inside the waveguide cavity 103. Two connecting disks 105 are disposed above the waveguide cavity 103, and an adjusting spring 106 is fixed between the two connecting disks 105. The top end of the connecting rod 104 penetrates through the two connecting disks 105, and the adjusting spring 106 surrounds the outside of the connecting rod 104. Specifically, a support tube 102 is fixed between the reaction chamber 101 and the waveguide cavity 103, and the interior of the support tube 102 is hollow.

[0026] In this embodiment, the protective structure 2 includes two bases 201 disposed between two connecting plates 105. Each base 201 has a detachable connecting block 202 installed inside. A telescopic protective sleeve 203 protecting the adjusting spring 106 is fixed between the two connecting blocks 202. A locking element 204 is provided between the connecting block 202 and the base 201. An infusion component 209 is provided on the upper surface of the top base 201. Both bases 201 and both connecting blocks 202 have coaxially arranged through holes 205. It should be noted that the two bases 201 are vertically distributed, and a connecting shaft 207 is fixed between the top base 201 and the top connecting plate 105. Both bases 201 have elastic push rods 206 that cooperate with the locking element 204. A liquid storage tank is fixed on the lower surface of the top connecting plate 105.

[0027] In this embodiment, the locking member 204 includes a sleeve 2041 fixed inside the connecting block 202. A locking rod 2042 extending outwards is slidably disposed inside the sleeve 2041. One end of the locking rod 2042 is inserted into the base 201, and the other end of the locking rod 2042 is fixed with a first return spring 2043 fixed to the inner wall of the sleeve 2041. When the connecting block 202 is inserted and pressed down, the locking rod 2042 is inserted into the base 201 under the action of the first return spring 2043, completing the mechanical seal of the telescopic protective sleeve 203. A locking hole is provided inside the base 201, and an elastic push rod 206 is disposed in the locking hole. The locking rod 2042 is inserted into the locking hole under the action of the first return spring 2043. By pressing the elastic push rod 206, the locking rod 2042 is pushed, causing it to disengage from the locking hole, thus allowing for quick disassembly of the connecting block 202.

[0028] To enhance the protection of the adjusting spring 106, a nozzle 208 is fixed inside the through hole 205 in the top base 201. Several annular and equidistantly distributed nozzle holes are formed on the side of the nozzle 208 away from the top base 201. The advantage of this design is that it allows liquids such as lubricants and coolants to be sprayed more evenly and comprehensively around the adjusting spring 106. The equidistantly distributed annular nozzles ensure a wide liquid coverage area, effectively protecting all parts of the adjusting spring 106, providing lubrication, reducing friction and wear, or cooling the adjusting spring 106 to prevent overheating from affecting its performance and service life. Specifically, the infusion unit 209 includes a check valve 2091 and a housing 2092 disposed on the upper surface of the top base 201. A diaphragm 2093 is fixed inside the housing 2092. A T-shaped rod 2094 extending to the outside of the housing 2092 is fixed to one side of the diaphragm 2093. Infusion tubes 2097 are fixed to both ends of the check valve 2091, and the two infusion tubes 2097 are fixedly connected to the nozzle 208 and the reservoir, respectively. A second return spring 2095 is fixed between the cross-section of the T-shaped rod 2094 and the housing 2092. A pressing rod 2096 is fixed to the side of the T-shaped rod 2094 away from the second return spring 2095. The design of fixing the second return spring 2095 between the cross-section of the T-shaped rod 2094 and the housing 2092 allows the T-shaped rod 2094 to move when subjected to external force and automatically return to its original position by the elastic force of the second return spring 2095 after the external force is removed. The pressing rod 2096 is fixed to the side of the T-shaped rod 2094 away from the second return spring 2095, providing a point of force for external operation.

[0029] When liquid needs to be delivered, pressing the pressing rod 2096 moves the T-shaped rod 2094, which in turn drives the diaphragm 2093 to move, thus delivering the liquid. After releasing the pressing rod 2096, the T-shaped rod 2094 returns to its original position under the action of the second return spring 2095, and the diaphragm 2093 returns to its original state, stopping the liquid delivery. This allows for flexible control of the liquid delivery according to actual needs, avoiding unnecessary liquid waste, and also ensuring timely protection for the adjusting spring 106 when needed.

[0030] The working principle of the above embodiments is as follows:

[0031] The upper and lower bases 201 and the detachable connecting block 202 are fixed to completely cover the adjusting spring 106, preventing corrosive gases and particles from directly contacting the surface of the adjusting spring 106.

[0032] By using the sleeve 2041, the locking rod 2042 and the first return spring 2043 in the locking part 204, the locking rod 2042 is inserted into the base 201 under the action of the first return spring 2043, so as to achieve quick locking.

[0033] Then, by pressing the lever 2096 to drive the T-shaped lever 2094, the diaphragm 2093 is compressed to pump the protective agent, such as fluorocarbon grease, from the reservoir into the nozzle 208 through the check valve 2091. The protective agent is then atomized through the nozzle 208 and its annular equidistant nozzles, thereby covering the surface of the adjusting spring 106 to form a dynamic lubricating film that inhibits corrosion and wear.

[0034] The installation, connection, or setting methods disclosed in this embodiment are all common mechanical connection methods. Any method that can achieve its beneficial effect can be implemented. In addition, the electrical components in this embodiment are all electrically connected to the main controller and the power supply. The main controller can be a conventional known device such as a computer that plays a control role. Those skilled in the art can control the electrical components through simple programming. Moreover, the existing disclosed power connection technology is also common knowledge in the field. Therefore, the specific structural composition and working principle will not be described in detail in this embodiment.

[0035] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An MPCVD sealing structure, comprising a protective structure (2) for protecting the MPCVD housing (1), characterized in that: The MPCVD machine body (1) includes a reaction chamber (101), a waveguide cavity (103), and a connecting rod (104) disposed inside the reaction chamber (101) and penetrating inside the waveguide cavity (103). Two connecting disks (105) are disposed above the waveguide cavity (103), and an adjusting spring (106) is fixed between the two connecting disks (105). The protective structure (2) includes a base (201) disposed between two connecting plates (105). There are two bases (201). A connecting block (202) can be detachably installed inside each of the two bases (201). A telescopic protective sleeve (203) for protecting the adjusting spring (106) is fixed between the two connecting blocks (202). A locking element (204) is provided between the connecting block (202) and the base (201). An infusion element (209) is provided on the upper surface of the top base (201). A through hole (205) is coaxially disposed inside both bases (201) and the two connecting blocks (202).

2. The MPCVD seal structure of claim 1, wherein: A support tube (102) is fixed between the reaction cavity (101) and the waveguide cavity (103), and the support tube (102) is hollow inside.

3. The MPCVD seal of claim 1, wherein: The top of the connecting rod (104) passes through two connecting discs (105), and the adjusting spring (106) surrounds the outside of the connecting rod (104).

4. The MPCVD seal of claim 1, wherein: The two bases (201) are distributed vertically, and a connecting shaft (207) is fixed between the top base (201) and the top connecting plate (105). Both bases (201) are provided with elastic push rods (206) that cooperate with the locking member (204).

5. The MPCVD seal of claim 1, wherein: The locking member (204) includes a sleeve (2041) fixed inside the connecting block (202). A locking rod (2042) extending outward is slidably disposed inside the sleeve (2041). One end of the locking rod (2042) is inserted into the base (201), and the other end of the locking rod (2042) is fixed with a first return spring (2043) fixed to the inner wall of the sleeve (2041).

6. The MPCVD seal of claim 1, wherein: A nozzle (208) is fixed inside the through hole (205) in the top base (201). The nozzle (208) has several annular and equidistant nozzle holes on the side away from the top base (201).

7. The MPCVD seal of claim 6, wherein: The infusion unit (209) includes a check valve (2091) and a housing (2092) disposed on the upper surface of the top base (201). A diaphragm (2093) is fixed inside the housing (2092). A T-shaped rod (2094) extending to the outside of the housing (2092) is fixed on one side of the diaphragm (2093). Infusion tubes (2097) are fixed at both ends of the check valve (2091). The two infusion tubes (2097) are respectively fixedly connected to the nozzle (208) and the reservoir.

8. The MPCVD sealing structure according to claim 7, characterized in that: A second return spring (2095) is fixed between the cross section of the T-shaped rod (2094) and the housing (2092), and a pressing rod (2096) is fixed on the side of the T-shaped rod (2094) away from the second return spring (2095).

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