A single crystal furnace lid polishing device

Abstract

This application discloses a single-crystal furnace lid grinding device, belonging to the technical field of grinding equipment. It includes: a support part; a clamping assembly; a grinding assembly, which includes: multiple sets of adjustment mechanisms; a grinding section for grinding the furnace lid, and the grinding section is connected to each adjustment mechanism; the grinding section includes: a second motor, the output end of which is connected to a rotating shaft via a belt; a connecting assembly, which includes: a sleeve, one end of which is fixedly connected to the rotating shaft, and the sleeve has a sliding groove; a connecting rod, which is slidably disposed within the sleeve, and has a protrusion on its side; a spring, which is disposed within the sleeve; and a grinding head, which is fixedly connected to the connecting rod. In the implementation of this application's technical solution, by providing the connecting assembly, the grinding head can be adapted to different curvature positions on the furnace lid surface, preventing local over-grinding or under-grinding, and improving the grinding quality of the furnace lid.

Description

Technical Field

[0001] This application relates to the field of polishing equipment technology, specifically a polishing device for a single crystal furnace lid. Background Technology

[0002] A single crystal furnace is a device for producing single crystal silicon materials. It typically consists of a furnace body and a furnace cover, with the furnace cover being one of the key components. The surface quality of the furnace cover directly affects the quality of the single crystal silicon.

[0003] During the use of the furnace cover, due to the long-term high-temperature environment inside the furnace, scratches and oxide layers are easily formed on the surface. It needs to be polished after a period of time to restore its surface smoothness and ensure the production efficiency and quality of monocrystalline silicon. In the existing technology, special polishing tools are usually used to polish different parts of the furnace cover, so as to make the surface of the furnace cover smooth and remove some burrs, prevent it from oxidizing again in the high-temperature environment, extend the service life of the furnace cover, and improve the stability of monocrystalline silicon production.

[0004] However, since the surface of the furnace cover is not flat but has a certain curvature and protrusion, traditional grinding tools are difficult to fully fit its complex surface, which can easily lead to uneven grinding. When moving the grinding head, the contact pressure between the tool and the surface is difficult to control, which can result in local over-grinding or under-grinding. This leads to unstable surface quality of the furnace cover and affects the purity of monocrystalline silicon.

[0005] Therefore, it is necessary to provide a single crystal furnace lid polishing device to solve the above problems.

[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore may include information that does not constitute prior art. Summary of the Invention

[0007] Based on the aforementioned problems in the existing technology, the problem to be solved by this application is to provide a single crystal furnace cover grinding device, which can achieve grinding of different curvature positions on the surface of the furnace cover by setting a connecting component.

[0008] The technical solution adopted by this application to solve its technical problem is: a single crystal furnace lid polishing device, comprising:

[0009] Support section;

[0010] A clamping assembly is disposed on a support portion and is used to clamp and fix the furnace cover to be polished.

[0011] A polishing assembly, wherein the polishing assembly is disposed above the clamping assembly;

[0012] The polishing components include:

[0013] An adjustment mechanism for achieving multi-directional adjustment;

[0014] A grinding section is used to grind the furnace cover, and the grinding section is connected to each adjustment mechanism;

[0015] The polishing section includes:

[0016] The second motor has a shaft connected to its output end by a belt.

[0017] Connection component, the connection component comprising:

[0018] A sleeve, one end of which is fixedly connected to a rotating shaft, and the sleeve has a sliding groove.

[0019] A connecting rod, which is slidably disposed within a sleeve, has a protrusion on its side;

[0020] A spring, wherein the spring is disposed within a sleeve;

[0021] A grinding head, which is fixedly connected to a connecting rod.

[0022] In the implementation of the technical solution of this application, a connecting component is provided, which enables the grinding head to be adapted to different curvature positions on the surface of the furnace cover, preventing local over-grinding or under-grinding, and improving the grinding quality of the furnace cover.

[0023] Furthermore, the clamping assembly includes a placement plate on which a pair of mounting blocks are provided. A first slide rail is provided between the pair of mounting blocks. Two symmetrically arranged sliders are slidably arranged on the first slide rail. Flexible clamping blocks are also fixedly installed on the sliders.

[0024] Furthermore, the clamping assembly also includes an adjustment part, which includes a first lead screw. A threaded hole is provided on the mounting block. The first lead screw passes through the threaded hole and is rotatably connected to the slider. A knob is provided at the end of the first lead screw.

[0025] Furthermore, the support includes a base plate, on both sides of which upright plates are fixedly installed, and a support plate is installed on the upright plates.

[0026] Furthermore, the adjustment mechanism includes a first motor, which is fixed to the support plate, and the output pulley of the first motor is connected to a second lead screw. The support plate is provided with a shaft bolt and a second slide rail, and the second lead screw passes through the shaft bolt.

[0027] Furthermore, a movable block is threaded onto the second lead screw, and a horizontal plate is fixed on the movable block, which is slidably connected to the second slide rail.

[0028] Furthermore, a shield is provided around the grinding head, which is fixed to the support plate. The shield is provided with a threaded head that communicates with the interior of the shield. The threaded head is connected to a dust collection mechanism.

[0029] The beneficial effects of this application are: the single crystal furnace cover grinding device provided by this application, by providing a connecting component, enables the grinding head to adapt to different curvature positions on the furnace cover surface, preventing local over-grinding or under-grinding, and improving the grinding quality of the furnace cover.

[0030] In addition to the purposes, features, and advantages described above, this application has other purposes, features, and advantages. A further detailed description of this application will be provided below with reference to the figures. Attached Figure Description

[0031] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0032] In the attached diagram:

[0033] Figure 1 This is an overall schematic diagram of a single crystal furnace lid polishing device according to this application;

[0034] Figure 2 for Figure 1 A schematic diagram from another perspective;

[0035] Figure 3 for Figure 1 Internal schematic diagram of the grinding device;

[0036] Figure 4 for Figure 3 Enlarged view of the central area;

[0037] The following are the labeling elements in the figure:

[0038] 1. Base plate; 2. Vertical plate; 3. Clamping assembly; 4. Grinding assembly; 5. Support plate; 31. Placement plate; 32. Mounting block; 33. First slide rail; 34. Slider; 35. Flexible clamping block; 36. First lead screw; 37. Knob; 41. Adjustment mechanism; 411. First motor; 412. Second lead screw; 413. Shaft bolt; 414. Moving block; 415. Horizontal plate; 416. Second slide rail; 42. Second motor; 43. Rotating shaft; 44. Grinding head; 45. Mask; 46. Threaded head; 47. Connecting assembly; 471. Sleeve; 472. Slide groove; 473. Connecting rod; 474. Protrusion; 475. Spring. Detailed Implementation

[0039] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0040] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0041] Example 1: As Figure 1 As shown, this application provides a single crystal furnace cover grinding device for grinding the surface of the single crystal furnace cover to remove the oxide layer and some burrs generated under high temperature environment, so as to prevent it from affecting the production process of single crystal silicon. The grinding device includes a base plate 1, and upright plates 2 are fixedly arranged on both sides of the base plate 1. A support plate 5 is arranged on the upright plate 2. The two upright plates 2, the base plate 1 and the support plate 5 constitute the support part of the device.

[0042] like Figure 1 As shown, a clamping assembly 3 is provided on the base plate 1. The clamping assembly 3 is used to fix the furnace cover to be polished, so as to facilitate polishing. The clamping assembly 3 includes a placement plate 31, on which a pair of mounting blocks 32 are provided. A first slide rail 33 is provided through the pair of mounting blocks 32. Two symmetrically arranged sliders 34 are slidably arranged on the first slide rail 33. The sliders 34 are adapted to slide along the first slide rail 33, and the area between the two sliders 34 is the clamping area. When the sliders 34 move in the same or opposite directions, the range of the clamping area is changed, so as to clamp furnace covers of different sizes. In order to facilitate clamping, a flexible clamping block 35 is also fixedly installed on the slider 34. The flexible clamping block 35 is in direct contact with the furnace cover during the clamping process. The flexible clamping block 35 is made of rubber, which can flexibly clamp the furnace cover and prevent damage to it during the clamping process.

[0043] For ease of operation, the clamping assembly 3 also includes an adjustment part, which includes a first lead screw 36. The mounting block 32 has a threaded hole, through which the first lead screw 36 passes and is rotatably connected to the slider 34. Therefore, when the first lead screw 36 is rotated, the slider 34 can be driven to move, thereby changing the size of the clamping area. The end of the first lead screw 36 is provided with a knob 37 for easy manual adjustment by the operator.

[0044] like Figures 1-2As shown, a grinding component 4 is provided above the clamping component 3. The grinding component 4 is mounted on the support plate 5 and has at least four adjustable directions to achieve grinding of different areas of the furnace cover surface. Therefore, the grinding component 4 includes an adjustment mechanism 41, which includes a first motor 411. The first motor 411 is fixed on the support plate 5, and the output pulley of the first motor 411 is connected to a second lead screw 412. The support plate 5 is provided with a shaft bolt 413 and a second slide rail 416. The second lead screw 412 passes through the shaft bolt 413, so the second lead screw 412 can rotate under the drive of the first motor 411.

[0045] like Figure 2 As shown, a movable block 414 is threadedly connected to the second lead screw 412. A horizontal plate 415 is fixed on the movable block 414. The horizontal plate 415 is slidably connected to the second slide rail 416. When the first motor 411 drives the second lead screw 412 to rotate, the movable block 414 threadedly connected to the second lead screw 412 can drive the horizontal plate 415 to move along the second slide rail 416, thereby realizing the adjustment of the grinding assembly 4.

[0046] It should also be noted that the above-mentioned adjustment mechanism 41 constitutes a multi-axis adjustment system, ensuring that the grinding component 4 can be flexibly adjusted in multiple dimensions, thereby achieving multi-directional adjustment. Therefore, the adjustment mechanisms 41 in other directions are not described one by one in this embodiment. The adjustment mechanism 41 is equipped with an automated control mechanism (not shown in the figure), such as a PLC controller, industrial computer, etc., to realize the directional adjustment of the grinding component 4. In addition to the above solution, existing robotic arms or servo motor drive systems can also be used to achieve precise positioning and adjustment through programming control. For details, please refer to the prior art, which will not be described in detail in this application.

[0047] like Figure 3 As shown, the grinding assembly 4 also includes a grinding section for grinding the furnace cover. The grinding section includes a second motor 42, and the output pulley of the second motor 42 is connected to a rotating shaft 43. The rotating shaft 43 is adapted to rotate under the drive of the second motor 42. A grinding head 44 is fixedly connected to the bottom of the rotating shaft 43. The grinding head 44 is adapted to rotate synchronously with the rotating shaft 43, thereby achieving grinding of the surface of the furnace cover.

[0048] Because the polishing process generates debris and sparks, in order to achieve a protective effect, such as Figure 3 As shown, a shield 45 is provided around the grinding head 44. The shield 45 is fixed to the support plate 5 and is made of a high-temperature resistant material, such as stainless steel or ceramic, which can effectively block debris and sparks from flying.

[0049] The shield 45 is also provided with a threaded head 46, which is connected to the interior of the shield 45. The threaded head 46 is connected to a dust collection mechanism (not shown in the figure). During the grinding process, the dust collection mechanism can collect the generated debris to prevent it from falling onto the surface of the furnace cover and causing secondary pollution to the furnace cover.

[0050] Example 2: Since the surface of the furnace cover has a certain curvature, the grinding effect of complete fit cannot be achieved by adjusting the mechanism 41 alone. Therefore, the grinding head 44 is no longer directly fixed to the rotating shaft 43, but is provided with a connecting component 47. The grinding head 44 and the rotating shaft 43 are flexibly connected through the connecting component 47, so that it can adapt to the curvature of the furnace cover surface.

[0051] like Figures 3-4 As shown, the connecting assembly 47 includes a sleeve 471, one end of which is fixedly connected to the rotating shaft 43. The sleeve 471 is provided with a sliding groove 472, and a connecting rod 473 is slidably disposed inside the sleeve 471. The grinding head 44 is fixedly connected to the connecting rod 473. Meanwhile, a protrusion 474 is provided on the side of the connecting rod 473. The protrusion 474 cooperates with the sliding groove 472, so that the connecting rod 473 can slide inside the sleeve 471 while maintaining synchronous rotation with the rotating shaft 43. The grinding head 44 is fixed to the connecting rod 473, and grinding is achieved under the rotation of the rotating shaft 43.

[0052] To accommodate different curvatures on the furnace cover surface, such as Figure 4 As shown, a spring 475 is provided inside the sleeve 471. One end of the spring 475 is sleeved on the connecting rod 473, and the other end abuts against the inner wall of the sleeve 471. Through the extension and retraction of the spring 475, the grinding head 44 can adapt to the undulations of the furnace cover surface to ensure uniform grinding.

[0053] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A single crystal furnace lid polishing device, characterized in that: include: Support section; Clamping assembly (3), the clamping assembly (3) is disposed on the support part, the clamping assembly (3) is used to clamp and fix the furnace cover to be polished; A polishing assembly (4) is disposed above the clamping assembly (3); The polishing component (4) includes: An adjustment mechanism (41) is provided for multi-directional adjustment. A grinding section is used to grind the furnace cover, and the grinding section is connected to each adjustment mechanism (41). The polishing section includes: The output end of the second motor (42) is connected to the shaft (43) by a belt; Connection component (47), the connection component (47) comprising: A sleeve (471), one end of which is fixedly connected to a rotating shaft (43), and the sleeve (471) has a groove (472); A connecting rod (473) is slidably disposed within a sleeve (471), and the side of the connecting rod (473) has a protrusion (474); A spring (475) is disposed inside a sleeve (471); Grinding head (44), which is fixedly connected to connecting rod (473).

2. The single crystal furnace lid polishing device according to claim 1, characterized in that: The clamping assembly (3) includes a placement plate (31) on which a pair of mounting blocks (32) are provided. A first slide rail (33) is provided between the pair of mounting blocks (32). Two symmetrically arranged sliders (34) are slidably arranged on the first slide rail (33). Flexible clamping blocks (35) are also fixedly installed on the sliders (34).

3. The single crystal furnace lid polishing device according to claim 2, characterized in that: The clamping assembly (3) also includes an adjustment part, which includes a first lead screw (36). A threaded hole is provided on the mounting block (32). The first lead screw (36) passes through the threaded hole and is rotatably connected to the slider (34). A knob (37) is provided at the end of the first lead screw (36).

4. The single crystal furnace lid polishing device according to claim 1, characterized in that: The support includes a base plate (1), on which upright plates (2) are fixedly installed on both sides, and a support plate (5) is installed on the upright plates (2).

5. The single crystal furnace lid polishing device according to claim 4, characterized in that: The adjustment mechanism (41) includes a first motor (411), which is fixed on the support plate (5), and the output pulley of the first motor (411) is connected to a second lead screw (412). The support plate (5) is provided with a shaft bolt (413) and a second slide rail (416), and the second lead screw (412) passes through the shaft bolt (413).

6. The single crystal furnace lid polishing device according to claim 5, characterized in that: A movable block (414) is threaded onto the second lead screw (412), and a horizontal plate (415) is fixed on the movable block (414). The horizontal plate (415) is slidably connected to the second slide rail (416).

7. The single crystal furnace lid polishing device according to claim 4, characterized in that: A shield (45) is provided around the grinding head (44). The shield (45) is fixed to the support plate (5). A threaded head (46) is provided on the shield (45). The threaded head (46) communicates with the interior of the shield (45). The threaded head (46) is connected to a dust collection mechanism.

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